JP2019033163A - 半導体装置および電力変換装置 - Google Patents
半導体装置および電力変換装置 Download PDFInfo
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Abstract
Description
(構成の概要)
図1は、本実施の形態1におけるIGBT91(半導体装置)の構成を概略的に示す部分断面図である。図2は、図1の領域IIの断面斜視図である。図3は、図1の線III−IIIに沿う部分断面図である。なお図2の領域EXにおいては、半導体基板70の基板上面SS1(第1の基板表面)が見やすくなるように、基板上面SS1より上方の構成の図示が省略されている。
IGBTにおいて、オン電圧とスイッチング損失との間には、通常、トレードオフ関係がある。このため、後述される比較は、オン電圧が一定の条件下で行われる。オン電圧はp型コレクタ領域2の濃度で調整される。p型コレクタ領域2の濃度が高くなると、ターンオフ開始時における基板下面SS2近傍でのキャリア濃度も高くなる。
図19は、構造I(図4)および構造IV(図7)の各々における、コレクタ電圧Vcとコレクタ電流Icとの関係のシミュレーション結果を示すグラフ図(A)、およびゲート−エミッタ間電圧Vgeとコレクタ電流Icとの関係のシミュレーション結果を示すグラフ図(B)である。本実施の形態に対応する構造IVは、構造Iと比較して、Ic−Vc特性およびIc−Vge特性の点で同等の特性を有している。
図20は、トレンチTRの深さd(図2.19(1))と耐電圧BVとの関係のシミュレーション結果を示すグラフ図である。なお深さdを表す横軸には、指標として、n型不純物層8の深さXjnの値と、p+型不純物層11の深さXjpの値とが示されている。また耐電圧BVは、深さdが深さXjnに等しいときの値によって規格化されている。
図21および図22のそれぞれは、トレンチTRの深さdが一定の下での、比率r=Xg/Xjnが1よりも大きい場合と小さい場合とでの、構造IVのエミッタ側の構成を概略的に示す部分断面図である。比率rは、前述したように、n型不純物層8の深さXjnに対するゲート電極4の深さXgの比率(図1参照)である。なお、深さdが一定の下で構造IV(図7)を構成するためには、比率rが上限値未満である必要があり、比率rが上限値に達すると、構造IVではなく構造II(図5)が構成される。
図26は、IGBT91のトレンチゲート構造における寸法の定義を説明する部分断面斜視図である。トレンチTRは、図中y軸方向の寸法として、幅wを有している。またトレンチTRは、図中z軸方向の寸法として、長さzを有している。またゲート電極4は、n型不純物層8の深さXjnからさらに寸法pほど深くまで設けられている。その他の寸法の定義は、前述したとおりである。深さ関係の寸法間において、それらの定義上、以下の関係がある。
上述した関係Cbt<Csdが満たされることが好ましい理由について、以下に説明する。
(ステップ1) 上述した本実施の形態における好適な条件を満たすことができるような適当な寸法p1が設定される。
(ステップ2) 式(1.9)より、条件1のCsdであるCsd1が算出される。
(ステップ3) p1およびCsd1と、式(1.8)とから、Cbt1<Csd1の関係を満たす幅w1が設定される。なお、設定され得る幅wの下限は、プロセスの観点でゲート電極4を埋め込むことが可能な幅に、トレンチTRの側壁面上のゲート絶縁膜の厚みtsdの2倍を加えた値である。また設定され得る幅wの上限は、トレンチTRのピッチ寸法から、プロセスの観点で許容され得るトレンチTR間の最小寸法(すなわちトレンチTR間における半導体基板70のメサ部の寸法)を減じた値である。
(ステップ4) 上記のp1およびw1と、式(1.8)とから、条件1におけるCbtであるCbt1が計算される。
(ステップ5) p2<p1の関係を満たす寸法p2が設定される。
(ステップ6) 式(1.9)より、条件2のCsdであるCsd2が計算される。
(ステップ7) 条件1と条件2との間でCbt+Csdが同一とされるよう、条件2のCbtであるCbt2が、Cbt2=Cbt1+Csd1−Csd2の式によって計算される。
(ステップ8) 上記のCbt2およびp2と、式(1.8)とから、w2が計算される。
図36〜図45は、IGBT91が有するトレンチゲート構造の製造方法例の第1〜第10の工程を示す部分断面図である。
本実施の形態によれば、スイッチング特性を、他の重要な電気特性への悪影響を抑えつつ改善することができる。具体的には、ターンオフ/ターンオン時のゲート波形に表れるミラー領域の短縮によって、ターンオフ/ターンオン損失を低減することができる。また、発振現象およびスナップオフ現象を抑制することができる。
なお本実施の形態は、例えば3300V程度の高耐電圧クラスのIGBTへの適用時に有効であり、また他の耐電圧クラスへの適用時にも同様に有効である。またIGBTは、上記において詳述された構成に限定されるわけではなく、例えば逆導通IGBT(RC−IGBT:Reverse−Conducting IGBT)であってもよい。また半導体基板の半導体材料は特に限定されない。また変形例として、第1の導電型としてのn型と、第2の導電型としてのp型とが、互いに入れ替えられてもよい。これらの事項は、後述する実施の形態2においても同様である。
(構成の概要)
図47は、本実施の形態2におけるIGBT92の構成を概略的に示す部分断面図である。図48は、図47の領域XLVIIIの断面斜視図である。図49は、図47の線XLIX−XLIXに沿う部分断面図である。なお図48の領域EXにおいては、半導体基板70の基板上面SS1が見やすくなるように、基板上面SS1より上方の構成の図示が省略されている。
これについては、実施の形態1と同様に式(1.1)の関係が満たされることが好ましい。
これについては、実施の形態1と同様に式(1.2)の関係が満たされることが好ましい。
図50は、IGBT92のトレンチゲート構造における寸法の定義を説明する部分断面斜視図である。トレンチTRは、図中y軸方向の寸法として、幅wを有している。またトレンチTRは、図中z軸方向の寸法として、長さzを有している。またゲート電極4は、n型不純物層8の深さXjnからさらに寸法pほど深くまで設けられている。その他の寸法の定義は、前述したとおりである。深さ関係の寸法間において、それらの定義上、以下の関係がある。
図53〜図61は、IGBT92が有するトレンチゲート構造の製造方法例の第1〜第9の工程を示す部分断面図である。
本実施の形態によれば、トレンチTRの底面上に、第1の組成を有する絶縁膜51を介して、第2の組成を有する第2の絶縁膜52が設けられる。これにより、ゲート絶縁膜50のうち底面上の部分を複数の材料で構成することができる。よって、ゲート絶縁膜50のうち底面上の部分と他の部分との間の相異を、厚みによってだけでなく、材料物性によって設けることができる。特に、絶縁膜51の誘電率εi1よりも低い誘電率εi2を有する絶縁膜52が用いられることによって、トレンチTR底面における寄生容量Cbtを顕著に小さくすることができる。これによってスイッチング特性の改善、特に発振現象の抑制、が可能となる。
本実施の形態3は、上述した実施の形態1、2またはそれら変形例にかかる半導体装置が電力変換装置に適用されたものである。本発明は特定の電力変換装置に限定されるものではないが、本実施の形態3として、三相のインバータに本発明を適用した場合について、以下に説明する。
Claims (7)
- 半導体装置であって、
第1の基板表面と、前記第1の基板表面と反対の第2の基板表面とを有する半導体基板を備え、前記半導体基板は、
第1の面と、前記第1の面と反対の第2の面とを有し、第1の導電型を有するドリフト層と、
前記ドリフト層の前記第1の面上に設けられ、前記第1の導電型を有し、前記ドリフト層の不純物濃度よりも高い不純物濃度を有する第1の不純物層と、
前記ドリフト層の前記第1の面上に設けられ、前記第1の導電型と異なる第2の導電型を有する第2の不純物層と、
前記第1の不純物層上に設けられ、前記第2の導電型を有するベース層と、
前記ベース層上に設けられ、前記第1の基板表面を部分的に成し、前記第1の導電型を有する第1のエミッタ領域と、
前記ベース層上に設けられ、前記第1の基板表面を部分的に成し、前記第2の導電型を有する第2のエミッタ領域と、
前記ドリフト層の前記第2の面上に直接的または間接的に設けられ、前記第2の基板表面を少なくとも部分的に成し、前記第2の導電型を有するコレクタ領域と、
を含み、前記半導体基板の前記第1の基板表面には複数のトレンチが形成されており、前記複数のトレンチの各々は、底面および側壁面が設けられた内面を有しており、前記複数のトレンチの各々は、前記第1の基板表面に沿って延びる主部と、前記第1の基板表面に沿って前記主部につながる端部とを有しており、前記底面は前記主部において前記ドリフト層から成りかつ前記端部において前記第2の不純物層から成り、前記第1の不純物層は前記第1の基板表面の面内方向において前記複数のトレンチの間をつないでおり、前記半導体装置はさらに
前記複数のトレンチの前記内面を覆うゲート絶縁膜を備え、前記ゲート絶縁膜は、前記側壁面と前記ドリフト層との間で第1の厚みを有しておりかつ前記底面と前記ドリフト層との間で第2の厚みを有しており、前記第2の厚みは前記第1の厚みよりも大きく、前記半導体装置はさらに
前記複数のトレンチ内に前記ゲート絶縁膜を介して埋め込まれたゲート電極を備える、
半導体装置。 - 前記ゲート絶縁膜と前記ゲート電極との界面の深さは、前記ドリフト層と前記第1の不純物層との界面の深さよりも大きく、
前記複数のトレンチの前記底面の深さは、前記ドリフト層と前記第1の不純物層との界面の深さよりも大きく、かつ前記ドリフト層と前記第2の不純物層との界面の深さよりも小さい、
請求項1に記載の半導体装置。 - 前記ゲート絶縁膜は一の材料で作られている、請求項1または2に記載の半導体装置。
- 前記ゲート絶縁膜は、前記複数のトレンチの前記内面を均一な厚みで覆い第1の組成を有する第1の絶縁膜と、前記複数のトレンチの前記底面上に前記第1の絶縁膜を介して設けられ第2の組成を有する第2の絶縁膜とを含み、前記第2の組成は前記第1の組成と異なる、請求項1または2に記載の半導体装置。
- 請求項1から6のいずれか1項に記載の半導体装置を有し、入力される電力を変換して出力する主変換回路と、
前記半導体装置を駆動する駆動信号を前記半導体装置に出力する駆動回路と、
前記駆動回路を制御する制御信号を前記駆動回路に出力する制御回路と、
を備える、電力変換装置。
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