JP2019027944A5 - - Google Patents

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JP2019027944A5
JP2019027944A5 JP2017148031A JP2017148031A JP2019027944A5 JP 2019027944 A5 JP2019027944 A5 JP 2019027944A5 JP 2017148031 A JP2017148031 A JP 2017148031A JP 2017148031 A JP2017148031 A JP 2017148031A JP 2019027944 A5 JP2019027944 A5 JP 2019027944A5
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JP
Japan
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sensor
focus ring
edge
distance
measurement value
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JP2017148031A
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English (en)
Japanese (ja)
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JP6948873B2 (ja
JP2019027944A (ja
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Priority claimed from JP2017148031A external-priority patent/JP6948873B2/ja
Priority to JP2017148031A priority Critical patent/JP6948873B2/ja
Priority to US16/045,910 priority patent/US10837810B2/en
Priority to CN201810842703.7A priority patent/CN109324303B/zh
Priority to TW107125983A priority patent/TWI794259B/zh
Priority to KR1020180088373A priority patent/KR102636225B1/ko
Publication of JP2019027944A publication Critical patent/JP2019027944A/ja
Publication of JP2019027944A5 publication Critical patent/JP2019027944A5/ja
Publication of JP6948873B2 publication Critical patent/JP6948873B2/ja
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JP2017148031A 2017-07-31 2017-07-31 測定器を較正する方法、及び、ケース Active JP6948873B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2017148031A JP6948873B2 (ja) 2017-07-31 2017-07-31 測定器を較正する方法、及び、ケース
US16/045,910 US10837810B2 (en) 2017-07-31 2018-07-26 Method for calibrating measuring device and case used in the calibration method
CN201810842703.7A CN109324303B (zh) 2017-07-31 2018-07-27 对测定器进行校准的方法和箱体
TW107125983A TWI794259B (zh) 2017-07-31 2018-07-27 校正測量器之方法及箱
KR1020180088373A KR102636225B1 (ko) 2017-07-31 2018-07-30 측정기를 교정하는 방법 및 케이스

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017148031A JP6948873B2 (ja) 2017-07-31 2017-07-31 測定器を較正する方法、及び、ケース

Publications (3)

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JP2019027944A JP2019027944A (ja) 2019-02-21
JP2019027944A5 true JP2019027944A5 (enExample) 2020-07-16
JP6948873B2 JP6948873B2 (ja) 2021-10-13

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Family Applications (1)

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JP2017148031A Active JP6948873B2 (ja) 2017-07-31 2017-07-31 測定器を較正する方法、及び、ケース

Country Status (5)

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US (1) US10837810B2 (enExample)
JP (1) JP6948873B2 (enExample)
KR (1) KR102636225B1 (enExample)
CN (1) CN109324303B (enExample)
TW (1) TWI794259B (enExample)

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* Cited by examiner, † Cited by third party
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US11468590B2 (en) * 2018-04-24 2022-10-11 Cyberoptics Corporation Wireless substrate-like teaching sensor for semiconductor processing
US10782157B2 (en) * 2018-06-26 2020-09-22 Faurecia Automotive Seating, Llc Analog signal conditioning with diagnostics for capacitive sensor elements
JP7038621B2 (ja) * 2018-07-20 2022-03-18 東京エレクトロン株式会社 位置測定装置および位置測定方法
CN111421226B (zh) * 2019-07-09 2022-06-07 济南邦德激光股份有限公司 一种基于激光切管设备的管材识别方法及装置
CN111261565B (zh) * 2020-01-21 2023-11-14 北京北方华创微电子装备有限公司 一种半导体设备及其晶圆传输腔室和晶圆传输方法
JP7418241B2 (ja) * 2020-02-27 2024-01-19 東京エレクトロン株式会社 位置決め装置、処理システム及び位置決め方法
JP7445532B2 (ja) * 2020-06-15 2024-03-07 東京エレクトロン株式会社 実行装置及び実行方法
TWI741715B (zh) * 2020-08-03 2021-10-01 矽品精密工業股份有限公司 承載裝置
CN114613657B (zh) 2020-12-09 2025-11-07 细美事有限公司 用于晶片型传感器的充电和自动校准的控制程序、容器及半导体元件制造设备
KR102584512B1 (ko) * 2020-12-31 2023-10-05 세메스 주식회사 버퍼 유닛 및 온도 변화가 수반되는 기판 지지 부재의 수평 측정용 기판형 센서의 보관 방법
JP7630420B2 (ja) * 2021-12-27 2025-02-17 東京エレクトロン株式会社 測定器

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US5432457A (en) * 1994-01-28 1995-07-11 Northrop Grumman Corporation Capacitive disk probe
TW364951B (en) * 1996-11-25 1999-07-21 Nohken Co Ltd Electrostatic capacitor inspection apparatus
JP4249448B2 (ja) * 2001-09-06 2009-04-02 東京エレクトロン株式会社 容量計の校正方法、校正用標準容量ボックス、静電容量の測定方法、容量測定用ボックス及び容量計
CN100474551C (zh) * 2006-08-23 2009-04-01 北京北方微电子基地设备工艺研究中心有限责任公司 定位校准装置及定位校准系统
JP2008241642A (ja) * 2007-03-29 2008-10-09 Dainippon Screen Mfg Co Ltd 表面電位計
JP4956328B2 (ja) * 2007-08-24 2012-06-20 東京エレクトロン株式会社 搬送アームの移動位置の調整方法及び位置検出用治具
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US9245786B2 (en) * 2011-06-02 2016-01-26 Applied Materials, Inc. Apparatus and methods for positioning a substrate using capacitive sensors
DE102011078369B4 (de) 2011-06-29 2013-02-28 Ident Technology Ag Kapazitive Sensoreinrichtung sowie Verfahren zum Kalibrieren einer kapazitiven Sensoreinrichtung
US9146207B2 (en) * 2012-01-10 2015-09-29 Hzo, Inc. Methods, apparatuses and systems for sensing exposure of electronic devices to moisture
KR101356774B1 (ko) * 2012-03-12 2014-01-27 최성훈 보정 지그 장치
US9425112B2 (en) * 2012-06-07 2016-08-23 Taiwan Semiconductor Manufacturing Company, Ltd. Calibration kits for RF passive devices
CN104737282B (zh) * 2012-10-11 2017-06-20 创意科技股份有限公司 工件保持装置以及使用了该装置的工件的横向偏移检测方法
CN106415287A (zh) * 2014-01-08 2017-02-15 Hzo股份有限公司 用于感测电子设备暴露在水分下的方法、装置和系统
CN105097601A (zh) * 2014-04-17 2015-11-25 北京北方微电子基地设备工艺研究中心有限责任公司 晶片校准装置以及半导体加工设备
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JP6537433B2 (ja) * 2015-06-11 2019-07-03 東京エレクトロン株式会社 静電容量測定用のセンサチップ及び同センサチップを備えた測定器
US9903739B2 (en) 2015-06-11 2018-02-27 Tokyo Electron Limited Sensor chip for electrostatic capacitance measurement and measuring device having the same

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