JP2014017292A5 - - Google Patents

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Publication number
JP2014017292A5
JP2014017292A5 JP2012152005A JP2012152005A JP2014017292A5 JP 2014017292 A5 JP2014017292 A5 JP 2014017292A5 JP 2012152005 A JP2012152005 A JP 2012152005A JP 2012152005 A JP2012152005 A JP 2012152005A JP 2014017292 A5 JP2014017292 A5 JP 2014017292A5
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JP
Japan
Prior art keywords
sample
plasma
ring
wafer
shaped member
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Granted
Application number
JP2012152005A
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English (en)
Japanese (ja)
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JP2014017292A (ja
JP5970268B2 (ja
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Priority claimed from JP2012152005A external-priority patent/JP5970268B2/ja
Priority to JP2012152005A priority Critical patent/JP5970268B2/ja
Application filed filed Critical
Priority to KR1020120081226A priority patent/KR101343967B1/ko
Priority to TW101128230A priority patent/TWI553691B/zh
Priority to US13/590,242 priority patent/US20140011365A1/en
Publication of JP2014017292A publication Critical patent/JP2014017292A/ja
Publication of JP2014017292A5 publication Critical patent/JP2014017292A5/ja
Publication of JP5970268B2 publication Critical patent/JP5970268B2/ja
Application granted granted Critical
Priority to US16/218,703 priority patent/US11152192B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012152005A 2012-07-06 2012-07-06 プラズマ処理装置および処理方法 Active JP5970268B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012152005A JP5970268B2 (ja) 2012-07-06 2012-07-06 プラズマ処理装置および処理方法
KR1020120081226A KR101343967B1 (ko) 2012-07-06 2012-07-25 플라즈마 처리 장치 및 처리 방법
TW101128230A TWI553691B (zh) 2012-07-06 2012-08-06 電漿處理裝置及電漿處理方法
US13/590,242 US20140011365A1 (en) 2012-07-06 2012-08-21 Plasma processing apparatus and method
US16/218,703 US11152192B2 (en) 2012-07-06 2018-12-13 Plasma processing apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012152005A JP5970268B2 (ja) 2012-07-06 2012-07-06 プラズマ処理装置および処理方法

Publications (3)

Publication Number Publication Date
JP2014017292A JP2014017292A (ja) 2014-01-30
JP2014017292A5 true JP2014017292A5 (enExample) 2015-09-17
JP5970268B2 JP5970268B2 (ja) 2016-08-17

Family

ID=49878837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012152005A Active JP5970268B2 (ja) 2012-07-06 2012-07-06 プラズマ処理装置および処理方法

Country Status (4)

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US (2) US20140011365A1 (enExample)
JP (1) JP5970268B2 (enExample)
KR (1) KR101343967B1 (enExample)
TW (1) TWI553691B (enExample)

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US10237144B2 (en) * 2012-10-29 2019-03-19 T-Mobile Usa, Inc. Quality of user experience analysis
US10854492B2 (en) * 2015-08-18 2020-12-01 Lam Research Corporation Edge ring assembly for improving feature profile tilting at extreme edge of wafer
CN106558522B (zh) * 2015-09-25 2021-01-29 北京北方华创微电子装备有限公司 卡盘及承载装置
KR102421625B1 (ko) * 2017-06-27 2022-07-19 캐논 아네르바 가부시키가이샤 플라스마 처리 장치
JP7033441B2 (ja) * 2017-12-01 2022-03-10 東京エレクトロン株式会社 プラズマ処理装置
JP7140610B2 (ja) * 2018-09-06 2022-09-21 株式会社日立ハイテク プラズマ処理装置
WO2020100357A1 (ja) * 2019-08-05 2020-05-22 株式会社日立ハイテク プラズマ処理装置
US20210249232A1 (en) * 2020-02-10 2021-08-12 Taiwan Semiconductor Manufacturing Company Ltd. Apparatus and method for etching
CN115668438A (zh) * 2020-03-27 2023-01-31 朗姆研究公司 用于处理具有缺口的晶片的等离子体排除区域环
US11404250B2 (en) * 2020-07-08 2022-08-02 Taiwan Semiconductor Manufacturing Company, Ltd. Plasma etcher edge ring with a chamfer geometry and impedance design
CN114695041B (zh) * 2020-12-25 2025-04-08 中微半导体设备(上海)股份有限公司 一种等离子体反应器
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KR20250126086A (ko) * 2022-12-20 2025-08-22 램 리써치 코포레이션 기판 노치 근방의 플라즈마 증착 또는 에칭을 제어하기 위한 하부 플라즈마 배제 구역 (plasma exclusion zone) 링

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JP5654297B2 (ja) * 2010-09-14 2015-01-14 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法

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