JP2018046216A - プラズマ処理方法 - Google Patents
プラズマ処理方法 Download PDFInfo
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- JP2018046216A JP2018046216A JP2016181133A JP2016181133A JP2018046216A JP 2018046216 A JP2018046216 A JP 2018046216A JP 2016181133 A JP2016181133 A JP 2016181133A JP 2016181133 A JP2016181133 A JP 2016181133A JP 2018046216 A JP2018046216 A JP 2018046216A
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- 238000003672 processing method Methods 0.000 title claims abstract description 18
- 238000004140 cleaning Methods 0.000 claims abstract description 56
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- 229910052796 boron Inorganic materials 0.000 claims abstract description 37
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 34
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 14
- 239000011737 fluorine Substances 0.000 claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 11
- 239000010703 silicon Substances 0.000 claims abstract description 11
- 238000001020 plasma etching Methods 0.000 claims abstract description 10
- 230000008021 deposition Effects 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 110
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical group ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims description 7
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims description 6
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical group C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 claims description 3
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical group C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims 1
- 239000005049 silicon tetrachloride Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 abstract description 38
- 238000000034 method Methods 0.000 abstract description 30
- 230000008569 process Effects 0.000 abstract description 28
- 238000000151 deposition Methods 0.000 abstract description 8
- 239000000463 material Substances 0.000 description 64
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 21
- 150000001875 compounds Chemical class 0.000 description 15
- 238000000576 coating method Methods 0.000 description 12
- 239000000460 chlorine Substances 0.000 description 10
- 230000007704 transition Effects 0.000 description 10
- 239000007769 metal material Substances 0.000 description 6
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 5
- 229910003902 SiCl 4 Inorganic materials 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910052582 BN Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 239000003507 refrigerant Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- 150000001638 boron Chemical class 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910003077 Ti−O Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
Description
冷媒用流路117は、試料台111の外部に配置された管路を介して温調器118と接続されている。また、前記電極のブロック内の上部には、ヒーター119が配置され、これがヒーター制御器120と接続されている。さらに試料台111には、温度センサー121が配置され、温度センサー121から出力された信号に基づいて試料台111及び被処理材112の温度を所望の温度とするようにヒーター制御器120および冷媒の温度を制御する温調器118が制御される。
この被処理材112のエッチング処理後、被処理材112が処理室101から搬出される。
102 シャワープレート
103 誘電体窓
105 ガス供給装置
106 真空排気口
107 導波管
109 電磁波発生用電源
110 磁場発生コイル
111 試料台
112 被処理材
113 マッチング回路
114 高周波電源
115 フィルター
116 直流電源
117 冷媒用流路
118 温調器
119 ヒーター
120 ヒーター制御器
121 温度センサー
123 分光器
124 発光データ処理装置
125 真空排気装置
Claims (3)
- 処理室内にて金属元素を含有する膜が配置された試料をプラズマエッチングするプラズマ処理方法において、
ホウ素元素を含有するガスを用いて前記処理室内をプラズマクリーニングし、
前記プラズマクリーニング後、プラズマを用いて前記ホウ素元素を除去し、
前記ホウ素元素を除去後、フッ素元素を含有するガスを用いて前記処理室内をプラズマクリーニングし、
前記フッ素元素を含有するガスによるプラズマクリーニング後、シリコン元素を含有するガスを用いたプラズマにより堆積膜を前記処理室内に堆積させ、
前記堆積膜の堆積後、前記試料をプラズマエッチングすることを特徴とするプラズマ処理方法。 - 請求項1に記載のプラズマ処理方法において、
前記ホウ素元素を除去するためのプラズマは、塩素ガスを用いて生成されることを特徴とするプラズマ処理方法。 - 請求項2に記載のプラズマ処理方法において、
前記ホウ素元素を含有するガスは、三塩化ホウ素ガスであり、
前記フッ素元素を含有するガスは、三フッ化窒素ガスであって、
前記シリコン元素を含有するガスは、四塩化シリコンガスであることを特徴とするプラズマ処理方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016181133A JP6630649B2 (ja) | 2016-09-16 | 2016-09-16 | プラズマ処理方法 |
KR1020170004059A KR101941064B1 (ko) | 2016-09-16 | 2017-01-11 | 플라스마 처리 방법 |
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US11742214B2 (en) | 2023-08-29 |
TWI713683B (zh) | 2020-12-21 |
TWI771674B (zh) | 2022-07-21 |
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