JP2017518441A5 - - Google Patents
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- Publication number
- JP2017518441A5 JP2017518441A5 JP2016570853A JP2016570853A JP2017518441A5 JP 2017518441 A5 JP2017518441 A5 JP 2017518441A5 JP 2016570853 A JP2016570853 A JP 2016570853A JP 2016570853 A JP2016570853 A JP 2016570853A JP 2017518441 A5 JP2017518441 A5 JP 2017518441A5
- Authority
- JP
- Japan
- Prior art keywords
- path
- substrate
- target
- tin oxide
- indium tin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 28
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims 21
- 238000000034 method Methods 0.000 claims 15
- 238000004544 sputter deposition Methods 0.000 claims 13
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 9
- 229910052738 indium Inorganic materials 0.000 claims 9
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 9
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 2
- 229910001882 dioxygen Inorganic materials 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/292,200 | 2014-05-30 | ||
| US14/292,200 US9988707B2 (en) | 2014-05-30 | 2014-05-30 | Transparent conducting indium doped tin oxide |
| PCT/US2015/020151 WO2015183374A1 (en) | 2014-05-30 | 2015-03-12 | Transparent conducting indium doped tin oxide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017518441A JP2017518441A (ja) | 2017-07-06 |
| JP2017518441A5 true JP2017518441A5 (cg-RX-API-DMAC7.html) | 2018-04-19 |
Family
ID=52811205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016570853A Pending JP2017518441A (ja) | 2014-05-30 | 2015-03-12 | 透明導電性のインジウムドープ酸化スズ |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US9988707B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP3149220B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2017518441A (cg-RX-API-DMAC7.html) |
| CN (1) | CN106460154A (cg-RX-API-DMAC7.html) |
| CA (1) | CA2948259C (cg-RX-API-DMAC7.html) |
| ES (1) | ES2739885T3 (cg-RX-API-DMAC7.html) |
| RU (1) | RU2693982C2 (cg-RX-API-DMAC7.html) |
| WO (1) | WO2015183374A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2645902C2 (ru) * | 2016-07-12 | 2018-02-28 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Вятская государственная сельскохозяйственная академия" (ФГБОУ ВО Вятская ГСХА) | Способ и устройство электролитического легирования полупроводниковых соединений индием и галлием |
| US10457148B2 (en) | 2017-02-24 | 2019-10-29 | Epic Battery Inc. | Solar car |
| WO2018187384A1 (en) | 2017-04-03 | 2018-10-11 | Epic Battery Inc. | Modular solar battery |
| US11337311B2 (en) | 2018-07-06 | 2022-05-17 | Ppg Industries Ohio, Inc. | Aircraft window with variable power density heater film |
| CN109811308A (zh) * | 2019-01-29 | 2019-05-28 | 晟光科技股份有限公司 | 一种ito导电膜制作工艺 |
| US11489082B2 (en) | 2019-07-30 | 2022-11-01 | Epic Battery Inc. | Durable solar panels |
| IT202300016008A1 (it) * | 2023-07-28 | 2025-01-28 | 3Sun S R L | Celle fotovoltaiche multigiunzione |
Family Cites Families (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4132624A (en) | 1971-02-05 | 1979-01-02 | Triplex Safety Glass Company Limited | Apparatus for producing metal oxide films |
| JPS5788028A (en) * | 1980-11-14 | 1982-06-01 | Asahi Glass Co Ltd | Formation of electrically conductive transparent film of indium oxide |
| JPS5971205A (ja) * | 1982-10-15 | 1984-04-21 | 株式会社半導体エネルギー研究所 | 透光性導電膜およびその作製方法 |
| JPS63176472A (ja) * | 1987-01-13 | 1988-07-20 | Mitsubishi Electric Corp | インライン型反応性スパツタ装置 |
| EP0299687B1 (en) | 1987-07-17 | 1993-06-23 | LUCAS INDUSTRIES public limited company | Transparencies |
| SU1499573A1 (ru) | 1987-09-08 | 1992-03-07 | Предприятие П/Я А-7873 | Способ получени прозрачных провод щих пленок на основе оксидов инди и олова |
| JPH02309511A (ja) * | 1989-05-24 | 1990-12-25 | Showa Denko Kk | 透明導電膜 |
| JPH05263228A (ja) * | 1992-03-19 | 1993-10-12 | Toshiba Corp | スパッタリング装置 |
| RU2075537C1 (ru) * | 1992-12-05 | 1997-03-20 | Хайэр Вакуум инд Ко., Лтд. | Экзотермическое стекло и способы его изготовления |
| US5668663A (en) | 1994-05-05 | 1997-09-16 | Donnelly Corporation | Electrochromic mirrors and devices |
| US5873989A (en) * | 1997-02-06 | 1999-02-23 | Intevac, Inc. | Methods and apparatus for linear scan magnetron sputtering |
| RU2112076C1 (ru) | 1997-05-22 | 1998-05-27 | Товарищество с ограниченной ответственностью "ТИКО" | Способ нанесения проводящего прозрачного покрытия |
| JP2000238178A (ja) | 1999-02-24 | 2000-09-05 | Teijin Ltd | 透明導電積層体 |
| JP3056200B1 (ja) * | 1999-02-26 | 2000-06-26 | 鐘淵化学工業株式会社 | 薄膜光電変換装置の製造方法 |
| FR2793106B1 (fr) | 1999-04-28 | 2001-06-22 | Saint Gobain Vitrage | Vitrage multiple isolant, en particulier hublot d'avion, a blindage electromagnetique |
| RU2181389C2 (ru) * | 1999-06-29 | 2002-04-20 | Омский научно-исследовательский институт приборостроения | Способ получения прозрачной электропроводящей пленки на основе оксидов индия и олова |
| GB2361245A (en) | 2000-04-14 | 2001-10-17 | Jk Microtechnology Ltd | High conductivity indium-tin-oxide films |
| DE10023459A1 (de) | 2000-05-12 | 2001-11-15 | Balzers Process Systems Gmbh | Indium-Zinn-Oxid (ITO)-Schicht und Verfahren zur Herstellung derselben |
| JP5007777B2 (ja) | 2000-05-21 | 2012-08-22 | Tdk株式会社 | 透明導電積層体 |
| JP3889221B2 (ja) | 2000-12-05 | 2007-03-07 | 独立行政法人科学技術振興機構 | Ito透明導電膜形成用塗布液および透明導電膜の形成方法 |
| JP2002350834A (ja) * | 2001-03-07 | 2002-12-04 | Ueyama Denki:Kk | カラーフィルターの製造方法 |
| US6743488B2 (en) | 2001-05-09 | 2004-06-01 | Cpfilms Inc. | Transparent conductive stratiform coating of indium tin oxide |
| US6864555B2 (en) * | 2001-09-04 | 2005-03-08 | Eugene Robert Worley | Photo detector methods to reduce the disabling effects of displacement current in opto-couplers |
| JP2003086025A (ja) | 2001-09-07 | 2003-03-20 | Sanyo Electric Co Ltd | 透明導電膜成膜基板及びその製造方法 |
| JP4320564B2 (ja) | 2002-06-28 | 2009-08-26 | 日亜化学工業株式会社 | 透明導電膜形成用組成物、透明導電膜形成用溶液および透明導電膜の形成方法 |
| RU2241065C2 (ru) * | 2003-01-27 | 2004-11-27 | Институт солнечно-земной физики СО РАН | Способ нанесения проводящего прозрачного покрытия |
| JP4246547B2 (ja) | 2003-05-23 | 2009-04-02 | 株式会社アルバック | スパッタリング装置、及びスパッタリング方法 |
| JP2007530311A (ja) * | 2004-02-23 | 2007-11-01 | シン アン エスエヌピー タイワン カンパニー リミテッド | 電気光学ディスプレイにおける透明電極用の改善されたエッチング特性を有する2層型透明導体スキーム |
| JP2005263228A (ja) | 2004-03-16 | 2005-09-29 | Toppan Printing Co Ltd | 蓋付き容器用紙製カバー |
| RU2274675C1 (ru) * | 2005-02-16 | 2006-04-20 | Валерий Андреевич Попов | Способ получения оптически прозрачного электропроводного покрытия и изделие с покрытием, полученное указанным способом (варианты) |
| US20100221489A1 (en) | 2006-02-23 | 2010-09-02 | Picodeon Ltd Oy | Coating on a glass substrate and a coated glass product |
| US8460522B2 (en) * | 2006-10-24 | 2013-06-11 | Ulvac, Inc. | Method of forming thin film and apparatus for forming thin film |
| FR2908229B1 (fr) | 2006-11-03 | 2023-04-28 | Saint Gobain | Couche transparente a haute conductivite electrique avec grille metallique a tenue electrochimique optimisee adaptee pour subir un traitement thermique de type bombage, ou trempe |
| WO2008063455A1 (en) | 2006-11-13 | 2008-05-29 | Hines Richard A | Over-the wire exclusion device and system for delivery |
| WO2008108185A1 (ja) * | 2007-03-01 | 2008-09-12 | Ulvac, Inc. | 薄膜形成方法及び薄膜形成装置 |
| KR20100012040A (ko) | 2007-06-26 | 2010-02-04 | 닛코 킨조쿠 가부시키가이샤 | 아모르퍼스 복합 산화막, 결정질 복합 산화막, 아모르퍼스 복합 산화막의 제조 방법, 결정질 복합 산화막의 제조 방법 및 복합 산화물 소결체 |
| WO2009011232A1 (ja) | 2007-07-13 | 2009-01-22 | Nippon Mining & Metals Co., Ltd. | 複合酸化物焼結体、アモルファス複合酸化膜の製造方法、アモルファス複合酸化膜、結晶質複合酸化膜の製造方法及び結晶質複合酸化膜 |
| KR20090063946A (ko) | 2007-12-14 | 2009-06-18 | 삼성코닝정밀유리 주식회사 | 산화인듐주석 타겟 및 이를 이용한 투명 도전막의 제조방법 |
| US20100028684A1 (en) | 2008-07-31 | 2010-02-04 | Jose Mariscal | Conductive multilayer stack |
| US8257830B2 (en) | 2008-07-31 | 2012-09-04 | Ppg Industries Ohio, Inc. | Electrically conductive protective liner and method of manufacture |
| US8080141B2 (en) * | 2008-11-18 | 2011-12-20 | Guardian Industries Corp. | ITO-coated article and/or method of making the same via heat treating |
| WO2010090197A1 (ja) | 2009-02-04 | 2010-08-12 | シャープ株式会社 | 透明導電膜形成体及びその製造方法 |
| US8445373B2 (en) | 2009-05-28 | 2013-05-21 | Guardian Industries Corp. | Method of enhancing the conductive and optical properties of deposited indium tin oxide (ITO) thin films |
| WO2011061922A1 (ja) * | 2009-11-19 | 2011-05-26 | 株式会社アルバック | 透明導電膜の製造方法、透明導電膜の製造装置、スパッタリングターゲット及び透明導電膜 |
| KR101155906B1 (ko) * | 2009-12-11 | 2012-06-20 | 삼성모바일디스플레이주식회사 | 스퍼터링 장치 |
| US8524337B2 (en) | 2010-02-26 | 2013-09-03 | Guardian Industries Corp. | Heat treated coated article having glass substrate(s) and indium-tin-oxide (ITO) inclusive coating |
| JP5630747B2 (ja) | 2010-05-14 | 2014-11-26 | リンテック株式会社 | 酸化亜鉛系導電性積層体及びその製造方法並びに電子デバイス |
| EP2437280A1 (en) | 2010-09-30 | 2012-04-04 | Applied Materials, Inc. | Systems and methods for forming a layer of sputtered material |
| RU2448197C1 (ru) | 2011-04-05 | 2012-04-20 | Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) | Способ нанесения прозрачного электропроводящего покрытия |
| CN109097746A (zh) * | 2011-06-30 | 2018-12-28 | 唯景公司 | 溅射靶和溅射方法 |
| CN103489505B (zh) * | 2013-10-12 | 2016-02-24 | 东莞市平波电子有限公司 | 一种触摸屏用ito导电膜及其制备方法 |
| JP2024176472A (ja) | 2023-06-08 | 2024-12-19 | ソフトバンクグループ株式会社 | 制御システム、制御方法及び制御プログラム |
-
2014
- 2014-05-30 US US14/292,200 patent/US9988707B2/en active Active
-
2015
- 2015-03-12 RU RU2016151659A patent/RU2693982C2/ru active
- 2015-03-12 WO PCT/US2015/020151 patent/WO2015183374A1/en not_active Ceased
- 2015-03-12 JP JP2016570853A patent/JP2017518441A/ja active Pending
- 2015-03-12 ES ES15712491T patent/ES2739885T3/es active Active
- 2015-03-12 CA CA2948259A patent/CA2948259C/en active Active
- 2015-03-12 EP EP15712491.8A patent/EP3149220B1/en active Active
- 2015-03-12 CN CN201580028918.XA patent/CN106460154A/zh active Pending
-
2018
- 2018-06-05 US US16/000,821 patent/US12338525B2/en active Active
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