JP2017505998A5 - - Google Patents
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- Publication number
- JP2017505998A5 JP2017505998A5 JP2016549259A JP2016549259A JP2017505998A5 JP 2017505998 A5 JP2017505998 A5 JP 2017505998A5 JP 2016549259 A JP2016549259 A JP 2016549259A JP 2016549259 A JP2016549259 A JP 2016549259A JP 2017505998 A5 JP2017505998 A5 JP 2017505998A5
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- ppm
- cte2
- cte1
- main surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 65
- 239000011521 glass Substances 0.000 claims 56
- 239000004065 semiconductor Substances 0.000 claims 14
- 238000000034 method Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000002844 melting Methods 0.000 claims 2
- 230000008018 melting Effects 0.000 claims 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461934366P | 2014-01-31 | 2014-01-31 | |
| US61/934,366 | 2014-01-31 | ||
| PCT/US2015/013405 WO2015116749A1 (en) | 2014-01-31 | 2015-01-29 | Methods and apparatus for providing an interposer for interconnecting semiconductor chips |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017505998A JP2017505998A (ja) | 2017-02-23 |
| JP2017505998A5 true JP2017505998A5 (enExample) | 2018-03-22 |
| JP6505726B2 JP6505726B2 (ja) | 2019-04-24 |
Family
ID=52463211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016549259A Expired - Fee Related JP6505726B2 (ja) | 2014-01-31 | 2015-01-29 | 半導体チップを相互接続するためのインタポーザを提供するための方法及び装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US9472479B2 (enExample) |
| EP (1) | EP3100300A1 (enExample) |
| JP (1) | JP6505726B2 (enExample) |
| KR (1) | KR20160114710A (enExample) |
| CN (1) | CN106165088B (enExample) |
| TW (1) | TWI653713B (enExample) |
| WO (1) | WO2015116749A1 (enExample) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6505726B2 (ja) * | 2014-01-31 | 2019-04-24 | コーニング インコーポレイテッド | 半導体チップを相互接続するためのインタポーザを提供するための方法及び装置 |
| KR101681410B1 (ko) * | 2015-04-20 | 2016-11-30 | 삼성전기주식회사 | 커패시터 부품 |
| US9780044B2 (en) * | 2015-04-23 | 2017-10-03 | Palo Alto Research Center Incorporated | Transient electronic device with ion-exchanged glass treated interposer |
| CN107851646A (zh) * | 2015-07-10 | 2018-03-27 | 凸版印刷株式会社 | 配线基板及其制造方法 |
| US9852988B2 (en) | 2015-12-18 | 2017-12-26 | Invensas Bonding Technologies, Inc. | Increased contact alignment tolerance for direct bonding |
| US20170179066A1 (en) * | 2015-12-18 | 2017-06-22 | Russell S. Aoki | Bulk solder removal on processor packaging |
| EP3479398B1 (en) | 2016-07-01 | 2025-02-19 | Intel Corporation | Molded embedded bridge for enhanced emib applications |
| US10446487B2 (en) | 2016-09-30 | 2019-10-15 | Invensas Bonding Technologies, Inc. | Interface structures and methods for forming same |
| US10580735B2 (en) | 2016-10-07 | 2020-03-03 | Xcelsis Corporation | Stacked IC structure with system level wiring on multiple sides of the IC die |
| WO2018126052A1 (en) | 2016-12-29 | 2018-07-05 | Invensas Bonding Technologies, Inc. | Bonded structures with integrated passive component |
| US20180190583A1 (en) * | 2016-12-29 | 2018-07-05 | Invensas Bonding Technologies, Inc. | Bonded structures with integrated passive component |
| WO2018169968A1 (en) | 2017-03-16 | 2018-09-20 | Invensas Corporation | Direct-bonded led arrays and applications |
| WO2018183739A1 (en) | 2017-03-31 | 2018-10-04 | Invensas Bonding Technologies, Inc. | Interface structures and methods for forming same |
| DE202018006776U1 (de) | 2017-06-15 | 2022-12-14 | Chiaro Technology Limited | Brustpumpensystem |
| US11584673B2 (en) * | 2017-07-31 | 2023-02-21 | Corning Incorporated | Laminate article having a non-glass core and glass envelope and methods thereof |
| TWI653919B (zh) * | 2017-08-10 | 2019-03-11 | 晶巧股份有限公司 | 高散熱等線距堆疊晶片封裝結構和方法 |
| US10622311B2 (en) | 2017-08-10 | 2020-04-14 | International Business Machines Corporation | High-density interconnecting adhesive tape |
| TW201936376A (zh) * | 2017-12-21 | 2019-09-16 | 美商康寧公司 | 包含低cte玻璃層的多層隔熱玻璃單元 |
| US11169326B2 (en) | 2018-02-26 | 2021-11-09 | Invensas Bonding Technologies, Inc. | Integrated optical waveguides, direct-bonded waveguide interface joints, optical routing and interconnects |
| US11256004B2 (en) | 2018-03-20 | 2022-02-22 | Invensas Bonding Technologies, Inc. | Direct-bonded lamination for improved image clarity in optical devices |
| US11515291B2 (en) | 2018-08-28 | 2022-11-29 | Adeia Semiconductor Inc. | Integrated voltage regulator and passive components |
| US11114308B2 (en) | 2018-09-25 | 2021-09-07 | International Business Machines Corporation | Controlling of height of high-density interconnection structure on substrate |
| US11195789B2 (en) | 2018-11-30 | 2021-12-07 | International Business Machines Corporation | Integrated circuit module with a structurally balanced package using a bottom side interposer |
| US10707169B1 (en) * | 2018-12-28 | 2020-07-07 | Intel Corporation | Ceramic interposers for on-die interconnects |
| US11148935B2 (en) | 2019-02-22 | 2021-10-19 | Menlo Microsystems, Inc. | Full symmetric multi-throw switch using conformal pinched through via |
| JP7293360B2 (ja) | 2019-03-07 | 2023-06-19 | アブソリックス インコーポレイテッド | パッケージング基板及びこれを含む半導体装置 |
| EP3916770A4 (en) | 2019-03-07 | 2022-11-02 | Absolics Inc. | Packaging substrate and semiconductor apparatus comprising same |
| US11901281B2 (en) | 2019-03-11 | 2024-02-13 | Adeia Semiconductor Bonding Technologies Inc. | Bonded structures with integrated passive component |
| JP7228697B2 (ja) | 2019-03-12 | 2023-02-24 | アブソリックス インコーポレイテッド | パッケージング基板及びこれを含む半導体装置 |
| EP3916772A4 (en) | 2019-03-12 | 2023-04-05 | Absolics Inc. | PACKAGING SUBSTRATE AND SEMICONDUCTOR DEVICE WITH IT |
| CN113424304B (zh) | 2019-03-12 | 2024-04-12 | 爱玻索立克公司 | 装载盒及对象基板的装载方法 |
| WO2020185023A1 (ko) | 2019-03-12 | 2020-09-17 | 에스케이씨 주식회사 | 패키징 기판 및 이의 제조방법 |
| KR102515304B1 (ko) | 2019-03-29 | 2023-03-29 | 앱솔릭스 인코포레이티드 | 반도체용 패키징 유리기판, 반도체용 패키징 기판 및 반도체 장치 |
| KR102600154B1 (ko) | 2019-06-12 | 2023-11-07 | 삼성전자주식회사 | 반도체 패키지 |
| KR20220089715A (ko) | 2019-08-23 | 2022-06-28 | 앱솔릭스 인코포레이티드 | 패키징 기판 및 이를 포함하는 반도체 장치 |
| US11762200B2 (en) | 2019-12-17 | 2023-09-19 | Adeia Semiconductor Bonding Technologies Inc. | Bonded optical devices |
| GB202004395D0 (en) | 2020-03-26 | 2020-05-13 | Chiaro Technology Ltd | Lima |
| US20230402337A1 (en) * | 2020-11-16 | 2023-12-14 | Corning Incorporated | 3d interposer with through glass vias - method of increasing adhesion between copper and glass surfaces and articles therefrom |
| KR20220150137A (ko) | 2021-05-03 | 2022-11-10 | 삼성전자주식회사 | 반도체 패키지 |
| US12476176B2 (en) * | 2022-03-29 | 2025-11-18 | Intel Corporation | Glass core substrate printed circuit board for warpage reduction |
| GB2622196A (en) | 2022-08-31 | 2024-03-13 | Chiaro Technology Ltd | Measurement system |
| TWI834336B (zh) * | 2022-10-12 | 2024-03-01 | 欣興電子股份有限公司 | 封裝結構及其製作方法 |
| CN115677213B (zh) * | 2022-11-16 | 2024-07-26 | 湖南兆湘光电高端装备研究院有限公司 | 化学强化层压玻璃制品及其制备方法 |
| KR102738263B1 (ko) | 2023-03-14 | 2024-12-05 | 주식회사 아크 | 수동 소자가 내장된 mems구조의 기판 및 반도체 패키지 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4221047A (en) * | 1979-03-23 | 1980-09-09 | International Business Machines Corporation | Multilayered glass-ceramic substrate for mounting of semiconductor device |
| US5209798A (en) * | 1991-11-22 | 1993-05-11 | Grunman Aerospace Corporation | Method of forming a precisely spaced stack of substrate layers |
| US6399892B1 (en) | 2000-09-19 | 2002-06-04 | International Business Machines Corporation | CTE compensated chip interposer |
| JP2003342064A (ja) * | 2002-05-28 | 2003-12-03 | Kyocera Corp | ガラスセラミック焼結体および多層配線基板 |
| JP2005050882A (ja) * | 2003-07-29 | 2005-02-24 | Kyocera Corp | 積層型配線基板および電気装置並びにその実装構造 |
| US7226654B2 (en) * | 2003-07-29 | 2007-06-05 | Kyocera Corporation | Laminated wiring board and its mounting structure |
| US7221050B2 (en) * | 2004-09-02 | 2007-05-22 | Intel Corporation | Substrate having a functionally gradient coefficient of thermal expansion |
| US8780576B2 (en) * | 2011-09-14 | 2014-07-15 | Invensas Corporation | Low CTE interposer |
| US8865507B2 (en) * | 2011-09-16 | 2014-10-21 | Sionyx, Inc. | Integrated visible and infrared imager devices and associated methods |
| JP6505726B2 (ja) * | 2014-01-31 | 2019-04-24 | コーニング インコーポレイテッド | 半導体チップを相互接続するためのインタポーザを提供するための方法及び装置 |
-
2015
- 2015-01-29 JP JP2016549259A patent/JP6505726B2/ja not_active Expired - Fee Related
- 2015-01-29 EP EP15703412.5A patent/EP3100300A1/en not_active Withdrawn
- 2015-01-29 CN CN201580017695.7A patent/CN106165088B/zh not_active Expired - Fee Related
- 2015-01-29 WO PCT/US2015/013405 patent/WO2015116749A1/en not_active Ceased
- 2015-01-29 KR KR1020167023963A patent/KR20160114710A/ko not_active Withdrawn
- 2015-01-29 US US14/608,537 patent/US9472479B2/en not_active Expired - Fee Related
- 2015-01-30 TW TW104103256A patent/TWI653713B/zh not_active IP Right Cessation
-
2016
- 2016-10-06 US US15/287,163 patent/US9917045B2/en not_active Expired - Fee Related
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