JP2012169678A5 - - Google Patents
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- Publication number
- JP2012169678A5 JP2012169678A5 JP2012131557A JP2012131557A JP2012169678A5 JP 2012169678 A5 JP2012169678 A5 JP 2012169678A5 JP 2012131557 A JP2012131557 A JP 2012131557A JP 2012131557 A JP2012131557 A JP 2012131557A JP 2012169678 A5 JP2012169678 A5 JP 2012169678A5
- Authority
- JP
- Japan
- Prior art keywords
- circuit board
- ceramic substrate
- insulating ceramic
- metal
- fracture toughness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 24
- 238000005219 brazing Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 230000017525 heat dissipation Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012131557A JP2012169678A (ja) | 2005-08-29 | 2012-06-11 | 回路基板及びこれを用いた半導体モジュール、回路基板の製造方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005247301 | 2005-08-29 | ||
| JP2005247301 | 2005-08-29 | ||
| JP2006091408 | 2006-03-29 | ||
| JP2006091408 | 2006-03-29 | ||
| JP2012131557A JP2012169678A (ja) | 2005-08-29 | 2012-06-11 | 回路基板及びこれを用いた半導体モジュール、回路基板の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007533174A Division JP5326278B2 (ja) | 2005-08-29 | 2006-08-17 | 回路基板及びこれを用いた半導体モジュール、回路基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012169678A JP2012169678A (ja) | 2012-09-06 |
| JP2012169678A5 true JP2012169678A5 (enExample) | 2012-12-06 |
Family
ID=37808647
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007533174A Active JP5326278B2 (ja) | 2005-08-29 | 2006-08-17 | 回路基板及びこれを用いた半導体モジュール、回路基板の製造方法 |
| JP2012131557A Pending JP2012169678A (ja) | 2005-08-29 | 2012-06-11 | 回路基板及びこれを用いた半導体モジュール、回路基板の製造方法 |
| JP2012231919A Active JP5598522B2 (ja) | 2005-08-29 | 2012-10-19 | 回路基板及びこれを用いた半導体モジュール、回路基板の製造方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007533174A Active JP5326278B2 (ja) | 2005-08-29 | 2006-08-17 | 回路基板及びこれを用いた半導体モジュール、回路基板の製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012231919A Active JP5598522B2 (ja) | 2005-08-29 | 2012-10-19 | 回路基板及びこれを用いた半導体モジュール、回路基板の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8563869B2 (enExample) |
| EP (1) | EP1921675B1 (enExample) |
| JP (3) | JP5326278B2 (enExample) |
| WO (1) | WO2007026547A1 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1921675B1 (en) * | 2005-08-29 | 2018-10-31 | Hitachi Metals, Ltd. | Circuit board and semiconductor module using this, production method for circuit board |
| JP2009094264A (ja) * | 2007-10-09 | 2009-04-30 | Hitachi Metals Ltd | 回路基板、半導体モジュール、半導体モジュールの設計方法 |
| JP5070014B2 (ja) * | 2007-11-21 | 2012-11-07 | 株式会社豊田自動織機 | 放熱装置 |
| JP2009130060A (ja) * | 2007-11-21 | 2009-06-11 | Toyota Industries Corp | 放熱装置 |
| CN102027592B (zh) * | 2008-05-16 | 2013-08-07 | 三菱综合材料株式会社 | 功率模块用基板、功率模块及功率模块用基板的制造方法 |
| EP2315508B1 (en) * | 2008-06-20 | 2014-11-12 | Hitachi Metals, Ltd. | Collective ceramic substrate, manufacturing method for the substrate, ceramic substrate, and ceramic circuit substrate |
| DE102010039728A1 (de) * | 2010-08-25 | 2012-03-01 | Robert Bosch Gmbh | Verfahren zur Herstellung einer elektrischen Schaltung und elektrischen Schaltung |
| US9504144B2 (en) * | 2012-02-01 | 2016-11-22 | Mitsubishi Materials Corporation | Power module substrate, power module substrate with heat sink, power module, method of manufacturing power module substrate, and copper member-bonding paste |
| CN102856266A (zh) * | 2012-09-19 | 2013-01-02 | 张剑锋 | 一体化绝缘陶瓷基板 |
| JP6487901B2 (ja) * | 2014-02-21 | 2019-03-20 | デンカ株式会社 | セラミックス回路基板 |
| JP6341822B2 (ja) * | 2014-09-26 | 2018-06-13 | 三菱電機株式会社 | 半導体装置 |
| CN105742268B (zh) * | 2014-12-26 | 2019-01-22 | 株式会社东芝 | 布线基板以及包含布线基板的半导体封装 |
| US10037928B2 (en) * | 2015-01-29 | 2018-07-31 | Kyocera Corporation | Circuit board and electronic device |
| JP6370257B2 (ja) | 2015-04-27 | 2018-08-08 | 三菱電機株式会社 | 半導体装置 |
| KR101708317B1 (ko) * | 2015-06-17 | 2017-02-20 | 엘지전자 주식회사 | 스트레인 검사 소자 및 그 부착 방법 |
| US10160690B2 (en) | 2015-09-28 | 2018-12-25 | Kabushiki Kaisha Toshiba | Silicon nitride circuit board and semiconductor module using the same |
| CN110690187B (zh) | 2015-09-28 | 2023-12-12 | 株式会社东芝 | 电路基板及半导体装置 |
| JP6137267B2 (ja) * | 2015-10-08 | 2017-05-31 | 三菱マテリアル株式会社 | ヒートシンク付きパワーモジュール用基板及びパワーモジュール |
| JP6970738B2 (ja) * | 2017-03-30 | 2021-11-24 | 株式会社東芝 | セラミックス銅回路基板およびそれを用いた半導体装置 |
| WO2018207396A1 (ja) * | 2017-05-11 | 2018-11-15 | 住友電気工業株式会社 | 半導体装置 |
| KR102436225B1 (ko) * | 2017-07-28 | 2022-08-25 | 삼성전기주식회사 | 인쇄회로기판 |
| US20200413534A1 (en) * | 2018-02-27 | 2020-12-31 | Mitsubishi Materials Corporation | Insulated circuit board |
| DE102018104521B4 (de) | 2018-02-28 | 2022-11-17 | Rogers Germany Gmbh | Metall-Keramik-Substrate |
| JP7192100B2 (ja) * | 2019-03-29 | 2022-12-19 | デンカ株式会社 | 窒化珪素回路基板、及び、電子部品モジュール |
| CN110012597B (zh) * | 2019-04-12 | 2020-11-27 | 中国科学院电工研究所 | 一种陶瓷覆铜电路板及其制备方法 |
| CN114303237A (zh) * | 2019-08-29 | 2022-04-08 | 京瓷株式会社 | 电路基板及功率模块 |
| CN114846912B (zh) * | 2020-03-18 | 2025-11-21 | 株式会社东芝 | 接合体、陶瓷铜电路基板、接合体的制造方法及陶瓷铜电路基板的制造方法 |
| EP4513547A1 (en) * | 2022-04-18 | 2025-02-26 | Kabushiki Kaisha Toshiba | Ceramic circuit substrate, semiconductor device, method for manufacturing ceramic circuit substrate, and method for manufacturing semiconductor device |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5780164A (en) | 1994-12-12 | 1998-07-14 | The Dow Chemical Company | Computer disk substrate, the process for making same, and the material made therefrom |
| US5672435A (en) * | 1994-12-12 | 1997-09-30 | The Dow Chemical Company | Hard disk drive components and methods of making same |
| JP3100871B2 (ja) * | 1995-07-11 | 2000-10-23 | 株式会社東芝 | 窒化アルミニウム焼結体 |
| JP3932343B2 (ja) * | 1996-08-27 | 2007-06-20 | Dowaメタルテック株式会社 | 半導体用基板およびその製造方法 |
| JP3512977B2 (ja) | 1996-08-27 | 2004-03-31 | 同和鉱業株式会社 | 高信頼性半導体用基板 |
| JPH10107440A (ja) * | 1996-09-30 | 1998-04-24 | Sumitomo Kinzoku Electro Device:Kk | セラミック基板及びその製造方法 |
| JP2001010865A (ja) | 1999-06-23 | 2001-01-16 | Ngk Insulators Ltd | 窒化珪素焼結体及びその製造方法 |
| US6417563B1 (en) * | 2000-07-14 | 2002-07-09 | Advanced Micro Devices, Inc. | Spring frame for protecting packaged electronic devices |
| DE10165080B4 (de) * | 2000-09-20 | 2015-05-13 | Hitachi Metals, Ltd. | Siliciumnitrid-Pulver und -Sinterkörper sowie Verfahren zu deren Herstellung und Leiterplatte damit |
| JP3797905B2 (ja) | 2000-10-27 | 2006-07-19 | 株式会社東芝 | 窒化けい素セラミックス基板およびそれを用いた窒化けい素セラミックス回路基板並びにその製造方法 |
| EP1201623B1 (en) * | 2000-10-27 | 2016-08-31 | Kabushiki Kaisha Toshiba | Silicon nitride ceramic substrate and silicon nitride ceramic circuit board using the substrate |
| JP2003101184A (ja) * | 2001-09-27 | 2003-04-04 | Kyocera Corp | セラミック回路基板およびその製造方法 |
| JP2004119568A (ja) * | 2002-09-25 | 2004-04-15 | Kyocera Corp | セラミック回路基板 |
| JP4360847B2 (ja) * | 2003-06-30 | 2009-11-11 | 日本特殊陶業株式会社 | セラミック回路基板、放熱モジュール、および半導体装置 |
| EP1921675B1 (en) * | 2005-08-29 | 2018-10-31 | Hitachi Metals, Ltd. | Circuit board and semiconductor module using this, production method for circuit board |
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2006
- 2006-08-17 EP EP06782767.5A patent/EP1921675B1/en active Active
- 2006-08-17 JP JP2007533174A patent/JP5326278B2/ja active Active
- 2006-08-17 US US12/065,009 patent/US8563869B2/en active Active
- 2006-08-17 WO PCT/JP2006/316154 patent/WO2007026547A1/ja not_active Ceased
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2012
- 2012-06-11 JP JP2012131557A patent/JP2012169678A/ja active Pending
- 2012-10-19 JP JP2012231919A patent/JP5598522B2/ja active Active