JP2017200175A - 樹脂により画定された空洞を含む電子パッケージとその形成方法 - Google Patents
樹脂により画定された空洞を含む電子パッケージとその形成方法 Download PDFInfo
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- H01L23/3135—Double encapsulation or coating and encapsulation
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
- H03H9/0523—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for flip-chip mounting
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- H03H9/02—Details
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- H03H9/059—Holders; Supports for surface acoustic wave devices consisting of mounting pads or bumps
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- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1042—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a housing formed by a cavity in a resin
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
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- H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
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- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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Abstract
【解決手段】電子部品10は、主表面11aに機能部13が形成された基板11を含み、第1樹脂層が当該主表面に形成される。第1樹脂層31は、当該主表面に面する第1面31aと、第1面に対向する第2面31bとを有する。第1樹脂層31は、第1面31aに機能部13を囲む空洞100を画定する。第1樹脂層31は、第2面31bに凹部20を画定する。凹部20には半田層が、第2面を厚さ方向を超えないように形成される。機能部13は、機械的可動部分を有する弾性表面波(SAW)素子又は圧電薄膜共振子(FBAR)を含む。基板11は誘電体材料からなっている。
【選択図】図3
Description
Claims (20)
- 電子部品であって、
主表面を含む基板と、
前記基板の主表面に形成された機能部と、
前記基板の主表面に形成された樹脂層であって、前記基板の主表面に面する第1面と、前記樹脂層の第1面に対向する第2面とを含み、前記第1面には前記機能部を囲む空洞が画定され、前記第2面には凹部が含まれる樹脂層と、
前記凹部に配置された半田層であって、前記第2面を厚さ方向に超えることがない半田層と
を含む電子部品。 - 前記機能部は、機械的可動部分を有する弾性表面波(SAW)素子又は圧電薄膜共振子(FBAR)の一方を含む請求項1の電子部品。
- 前記基板は誘電体材料からなる請求項1の電子部品。
- 前記樹脂層には、前記凹部から前記樹脂層を貫通して前記主表面まで延びる貫通孔が設けられ、
金属層が前記貫通孔に配置されて前記半田層を前記主表面に電気的に接続する請求項1の電子部品。 - 電子装置であって、
主表面に機能部が形成された第1基板と前記主表面に形成された第1樹脂層とを含む電子部品であって、前記第1樹脂層は、前記第1基板の主表面に面する第1面と前記第1面に対向する第2面とを有し、前記第1樹脂層は前記第1面に機能部を囲む空洞を画定し、前記第1樹脂層は前記第2面に凹部を含む電子部品と、
主表面に電極パッドが形成された第2基板であって、前記電極パッドに接触する半田層が前記凹部に配置され、前記半田層及び前記電極パッドが、前記第1基板の主表面と前記第2基板の主表面との間の距離に対応する組み合わせ厚さを有する第2基板と、
前記電子部品及び前記第2基板を封止する第2樹脂層と
を含む電子装置。 - 前記機能部は、機械的可動部分を有する弾性表面波(SAW)素子又は圧電薄膜共振子(FBAR)の一方を含む請求項5の電子装置。
- 前記第1基板は誘電体材料からなる請求項5の電子装置。
- 前記第1面は前記第1基板の主表面と接触する請求項5の電子装置。
- 前記第2面は前記第2基板の主表面に接触する請求項5の電子装置。
- 前記第2樹脂層は、前記第1基板、前記第1樹脂層及び前記第2基板に接触する請求項5の電子装置。
- 電子装置を製造する方法であって、
第1基板を含む電子部品を用意することであって、前記第1基板の主表面には機能部及び第1樹脂層が形成され、前記第1樹脂層は前記第1基板の主表面に面する第1面と前記第1面に対向する第2面とを有し、前記第1樹脂層は前記第1面に前記機能部を囲む空洞を含み、前記第1樹脂層は前記第2面に凹部を画定し、前記凹部には半田層が設けられることと、
第2基板を用意することであって、前記第2基板の主表面に電極パッドが形成されることと、
前記電子部品を前記第2基板に整合させることであって、前記半田層と前記半田層に接触する前記電極パッドとを、前記凹部において前記第1基板の主表面と前記第2基板の主表面との間の距離に対応する組み合わせ厚さを有するように積層することと、
前記電子部品及び前記第2基板を前記電子装置に形成することと
を含む方法。 - 前記電子部品及び前記第2基板を前記電子装置に形成することは、前記電子部品及び前記第2基板を第2樹脂層によって封止することを含む請求項11の方法。
- 前記電子部品及び前記第2基板を第2樹脂層によって封止することはトランスファーモールド又はコンプレッションモールドによって行われる請求項12の方法。
- 前記電子部品及び前記第2基板を前記電子装置に形成することは、前記半田層を前記電極パッドに溶着することを含む請求項12の方法。
- 前記半田層を前記電極パッドに溶着することは、前記半田層を溶融させて前記電極パッドに接合することを含む請求項14の方法。
- 前記半田層を前記電極パッドに溶着することはさらに、前記半田層を冷却することを含む請求項15の方法。
- 前記第1樹脂層の第2面と前記第2基板の主表面との間隙は、前記第2樹脂層の材料内に分散されるフィラーの粒径未満となるように最小化される請求項12の方法。
- 電子部品を製造する方法であって、
基板の主表面に機能部を形成することと、
前記主表面に樹脂層を形成することであって、前記樹脂層は、前記主表面に面する第1面と前記第1面に対向する第2面とを有することと、
前記第1面によって前記機能部を囲む空洞を形成することと、
前記第2面に凹部を形成することと、
前記凹部に半田層を、前記第2面を厚さ方向に超えないように形成することと
を含む方法。 - 前記空洞は前記樹脂層によって画定される請求項18の方法。
- 前記樹脂層を形成することは、前記樹脂層の第2面から延びるダム部を形成することを含む請求項18の方法。
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US201662317234P | 2016-04-01 | 2016-04-01 | |
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WO2023053836A1 (ja) * | 2021-09-30 | 2023-04-06 | 株式会社大真空 | 圧電振動デバイス |
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US20170290160A1 (en) | 2017-10-05 |
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