JP2016529718A5 - - Google Patents

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Publication number
JP2016529718A5
JP2016529718A5 JP2016533317A JP2016533317A JP2016529718A5 JP 2016529718 A5 JP2016529718 A5 JP 2016529718A5 JP 2016533317 A JP2016533317 A JP 2016533317A JP 2016533317 A JP2016533317 A JP 2016533317A JP 2016529718 A5 JP2016529718 A5 JP 2016529718A5
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JP
Japan
Prior art keywords
electrostatic chuck
electrode
dielectric layer
top surface
connector
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016533317A
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English (en)
Japanese (ja)
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JP2016529718A (ja
JP6518666B2 (ja
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Priority claimed from PCT/US2014/048065 external-priority patent/WO2015020810A1/en
Publication of JP2016529718A publication Critical patent/JP2016529718A/ja
Publication of JP2016529718A5 publication Critical patent/JP2016529718A5/ja
Priority to JP2019080749A priority Critical patent/JP6968120B2/ja
Application granted granted Critical
Publication of JP6518666B2 publication Critical patent/JP6518666B2/ja
Active legal-status Critical Current
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JP2016533317A 2013-08-05 2014-07-24 薄い基板をハンドリングするための静電キャリア Active JP6518666B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2019080749A JP6968120B2 (ja) 2013-08-05 2019-04-22 薄い基板をハンドリングするための静電キャリア

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361862471P 2013-08-05 2013-08-05
US61/862,471 2013-08-05
PCT/US2014/048065 WO2015020810A1 (en) 2013-08-05 2014-07-24 Electrostatic carrier for thin substrate handling

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2019080749A Division JP6968120B2 (ja) 2013-08-05 2019-04-22 薄い基板をハンドリングするための静電キャリア

Publications (3)

Publication Number Publication Date
JP2016529718A JP2016529718A (ja) 2016-09-23
JP2016529718A5 true JP2016529718A5 (cg-RX-API-DMAC7.html) 2017-08-31
JP6518666B2 JP6518666B2 (ja) 2019-05-22

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ID=52427454

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016533317A Active JP6518666B2 (ja) 2013-08-05 2014-07-24 薄い基板をハンドリングするための静電キャリア
JP2019080749A Active JP6968120B2 (ja) 2013-08-05 2019-04-22 薄い基板をハンドリングするための静電キャリア

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2019080749A Active JP6968120B2 (ja) 2013-08-05 2019-04-22 薄い基板をハンドリングするための静電キャリア

Country Status (6)

Country Link
US (2) US9536768B2 (cg-RX-API-DMAC7.html)
JP (2) JP6518666B2 (cg-RX-API-DMAC7.html)
KR (2) KR102139682B1 (cg-RX-API-DMAC7.html)
CN (2) CN110085546B (cg-RX-API-DMAC7.html)
TW (2) TWI613756B (cg-RX-API-DMAC7.html)
WO (1) WO2015020810A1 (cg-RX-API-DMAC7.html)

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DE102016206193A1 (de) * 2016-04-13 2017-10-19 Trumpf Gmbh + Co. Kg Elektroadhäsionsgreifer mit fraktalen Elektroden
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