JP2016209947A5 - - Google Patents

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Publication number
JP2016209947A5
JP2016209947A5 JP2015094358A JP2015094358A JP2016209947A5 JP 2016209947 A5 JP2016209947 A5 JP 2016209947A5 JP 2015094358 A JP2015094358 A JP 2015094358A JP 2015094358 A JP2015094358 A JP 2015094358A JP 2016209947 A5 JP2016209947 A5 JP 2016209947A5
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JP
Japan
Prior art keywords
wire
nozzle
saw device
row
windbreak plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015094358A
Other languages
English (en)
Japanese (ja)
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JP6304118B2 (ja
JP2016209947A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2015094358A external-priority patent/JP6304118B2/ja
Priority to JP2015094358A priority Critical patent/JP6304118B2/ja
Priority to SG11201707726YA priority patent/SG11201707726YA/en
Priority to KR1020177028728A priority patent/KR102568196B1/ko
Priority to SG10201807320WA priority patent/SG10201807320WA/en
Priority to DE112016001209.8T priority patent/DE112016001209T5/de
Priority to US15/558,833 priority patent/US10589446B2/en
Priority to CN201680016080.7A priority patent/CN107427986B/zh
Priority to PCT/JP2016/001146 priority patent/WO2016178297A1/ja
Priority to TW105106853A priority patent/TWI692394B/zh
Publication of JP2016209947A publication Critical patent/JP2016209947A/ja
Publication of JP2016209947A5 publication Critical patent/JP2016209947A5/ja
Publication of JP6304118B2 publication Critical patent/JP6304118B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015094358A 2015-05-01 2015-05-01 ワイヤソー装置 Active JP6304118B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2015094358A JP6304118B2 (ja) 2015-05-01 2015-05-01 ワイヤソー装置
CN201680016080.7A CN107427986B (zh) 2015-05-01 2016-03-03 线锯装置
KR1020177028728A KR102568196B1 (ko) 2015-05-01 2016-03-03 와이어소 장치
SG10201807320WA SG10201807320WA (en) 2015-05-01 2016-03-03 Wire saw apparatus
DE112016001209.8T DE112016001209T5 (de) 2015-05-01 2016-03-03 Drahtsägevorrichtung
US15/558,833 US10589446B2 (en) 2015-05-01 2016-03-03 Wire saw apparatus
SG11201707726YA SG11201707726YA (en) 2015-05-01 2016-03-03 Wire saw apparatus
PCT/JP2016/001146 WO2016178297A1 (ja) 2015-05-01 2016-03-03 ワイヤソー装置
TW105106853A TWI692394B (zh) 2015-05-01 2016-03-07 線鋸裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015094358A JP6304118B2 (ja) 2015-05-01 2015-05-01 ワイヤソー装置

Publications (3)

Publication Number Publication Date
JP2016209947A JP2016209947A (ja) 2016-12-15
JP2016209947A5 true JP2016209947A5 (enExample) 2017-11-02
JP6304118B2 JP6304118B2 (ja) 2018-04-04

Family

ID=57217580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015094358A Active JP6304118B2 (ja) 2015-05-01 2015-05-01 ワイヤソー装置

Country Status (8)

Country Link
US (1) US10589446B2 (enExample)
JP (1) JP6304118B2 (enExample)
KR (1) KR102568196B1 (enExample)
CN (1) CN107427986B (enExample)
DE (1) DE112016001209T5 (enExample)
SG (2) SG11201707726YA (enExample)
TW (1) TWI692394B (enExample)
WO (1) WO2016178297A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110962248A (zh) * 2018-09-28 2020-04-07 胜高股份有限公司 线锯用加工液供给喷嘴及向线锯供给加工液的方法
JP6969579B2 (ja) * 2019-01-15 2021-11-24 信越半導体株式会社 ワークの切断方法及びワイヤソー
CN110039673A (zh) * 2019-04-26 2019-07-23 西安奕斯伟硅片技术有限公司 一种切割装置和方法
JP7372097B2 (ja) * 2019-09-20 2023-10-31 コマツＮｔｃ株式会社 ワイヤソー及びワイヤソーのワークの搬入出方法
CN111361030B (zh) * 2020-04-24 2021-11-23 西安奕斯伟材料科技有限公司 多线切割装置及多线切割方法
CN113601741B (zh) * 2021-08-09 2023-06-23 西安奕斯伟硅片技术有限公司 为切割硅棒的多条切割线供应砂浆的装置及硅棒切割设备
CN115816664B (zh) * 2022-12-28 2024-11-12 泉州市品河精密科技有限公司 石材切割方法

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US3148488A (en) * 1961-12-11 1964-09-15 Sun Tool And Machine Company Coolant splash shield and support
US3325949A (en) * 1964-11-24 1967-06-20 Cincinnati Milling Machine Co Workpiece cooling apparatus for grinding machines
FR1600356A (enExample) * 1968-01-09 1970-07-20
US5709593A (en) * 1995-10-27 1998-01-20 Applied Materials, Inc. Apparatus and method for distribution of slurry in a chemical mechanical polishing system
JPH1148119A (ja) * 1997-06-05 1999-02-23 Nippei Toyama Corp ワイヤソー
TW383249B (en) * 1998-09-01 2000-03-01 Sumitomo Spec Metals Cutting method for rare earth alloy by annular saw and manufacturing for rare earth alloy board
JP2000153460A (ja) * 1998-11-16 2000-06-06 Tokyo Seiko Co Ltd 液体供給装置
JP2000218615A (ja) * 1999-01-29 2000-08-08 Nippei Toyama Corp ワイヤソー及びワークの脱着方法
US6468134B1 (en) * 2000-06-30 2002-10-22 Lam Research Corporation Method and apparatus for slurry distribution
JP3967969B2 (ja) * 2002-06-27 2007-08-29 京セラ株式会社 ワイヤーソー
JP2004195555A (ja) * 2002-12-16 2004-07-15 Komatsu Electronic Metals Co Ltd ワイヤソー用スラリーノズル
JP4083152B2 (ja) 2004-07-29 2008-04-30 日本碍子株式会社 ワイヤーソー装置
JP5072204B2 (ja) * 2005-08-31 2012-11-14 信越半導体株式会社 ウエーハの表面のナノトポグラフィを改善する方法及びワイヤソー装置
JP5080769B2 (ja) * 2006-09-15 2012-11-21 株式会社東京精密 研磨方法及び研磨装置
JP4816511B2 (ja) * 2007-03-06 2011-11-16 信越半導体株式会社 切断方法およびワイヤソー装置
JP5003294B2 (ja) * 2007-06-08 2012-08-15 信越半導体株式会社 切断方法
JP5045378B2 (ja) * 2007-11-08 2012-10-10 信越半導体株式会社 ワイヤソー装置
WO2009104222A1 (ja) 2008-02-19 2009-08-27 信越半導体株式会社 ワイヤソーおよびワークの切断方法
JP5056645B2 (ja) 2008-07-23 2012-10-24 信越半導体株式会社 ワークの切断方法及びワイヤソー
JP5540072B2 (ja) * 2009-04-01 2014-07-02 キャボット マイクロエレクトロニクス コーポレイション 自浄式ワイヤソー装置および方法
JP2011143504A (ja) * 2010-01-14 2011-07-28 Mitsubishi Electric Corp ワイヤソー装置
KR101185683B1 (ko) * 2011-02-23 2012-09-24 주식회사 엘지실트론 단결정 잉곳 절단장치
JP5775381B2 (ja) * 2011-06-28 2015-09-09 コマツＮｔｃ株式会社 ワイヤソーの加工液ノズル
JP2013129046A (ja) * 2011-12-22 2013-07-04 Shin Etsu Handotai Co Ltd ワークの切断方法
CN202685118U (zh) * 2012-07-03 2013-01-23 浙江昱辉阳光能源有限公司 一种金刚线切片机
DE102014208187B4 (de) * 2014-04-30 2023-07-06 Siltronic Ag Verfahren zum gleichzeitigen Trennen einer Vielzahl von Scheiben mit besonders gleichmäßiger Dicke von einem Werkstück

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