JP2016196182A - 積層構造 - Google Patents
積層構造 Download PDFInfo
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- JP2016196182A JP2016196182A JP2016072006A JP2016072006A JP2016196182A JP 2016196182 A JP2016196182 A JP 2016196182A JP 2016072006 A JP2016072006 A JP 2016072006A JP 2016072006 A JP2016072006 A JP 2016072006A JP 2016196182 A JP2016196182 A JP 2016196182A
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- protective layer
- laminated structure
- photosensitive resin
- layer
- resin layer
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/092—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by backside coating or layers, by lubricating-slip layers or means, by oxygen barrier layers or by stripping-release layers or means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/18—Layered products comprising a layer of synthetic resin characterised by the use of special additives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133305—Flexible substrates, e.g. plastics, organic film
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/093—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antistatic means, e.g. for charge depletion
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
- B32B2307/202—Conductive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
- B32B2307/21—Anti-static
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
- B32B2307/538—Roughness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/732—Dimensional properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/08—PCBs, i.e. printed circuit boards
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/12—Photovoltaic modules
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- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials For Photolithography (AREA)
- Laminated Bodies (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
【解決手段】支持層1、感光性樹脂層3及び保護層2を含む、ドライフィルムフォトレジストとして使用するための積層構造10であり、保護層は、最大表面粗さが1,500〜2,500nm、好ましくは約1,700〜約2,300nm、特に好ましくは約2,000〜約2,300nmの間、シート抵抗が1×108〜1×1012Ω/□、好ましくは1×109〜1×1011Ω/□の間の表面特徴を有するポリエステルフィルムである、積層構造。保護層は厚さが約1〜約100μmで、帯電防止性を有する、積層構造。
【選択図】図1
Description
1,500nm≦最大表面粗さ≦2,500nm;及び
1×108Ω/□≦シート抵抗≦1×1012Ω/□(Ω/□は、オーム/単位面積を表す)
を満たす表面特徴を有するポリエステルフィルムである、積層構造を提供することである。
[0022]感光性樹脂組成物の溶液の調製
[0023]以下の表1に示すとおり、(a)以下の配合:メタクリル酸224g、メタクリル酸メチル288g、アクリル酸ブチル104g、スチレン120g、メタクリル酸ブチル64g及び2,2’−アゾビスイソブチロニトリル(azobisobutyronitrile)8gを有する60重量部のアクリル樹脂(100%固体)などの高分子結合剤;(b)20重量部のエトキシル変性トリメチロールプロパントリアクリレート(フォトマー(PHOTOMER)(登録商標)4155、Cognis)及び15.6重量部の脂肪族ウレタンオリゴマ−などの、二重結合を有する光重合性化合物;(c)0.1重量部のn−フェニルグリシン(NPG、Hampford)及び3.6重量部のイミダゾール二量体(BCIM、Black Gold)などの光重合開始剤;並びに(d)20重量部のブタノンなどの溶媒を混合することによって、感光性樹脂組成物1を調製した。感光性樹脂組成物は、染料(e)としてマラカイトグリーンを追加的に含むことができる。
[0026]T100H16:三菱化学のPETフィルム(表面前処理によって処理されている)
[0027]R310:三菱化学のPETフィルム
[0028]GF−102:タマポリ PEフィルム
[0031]幅30cm及び長さ20cmに、上記の試料を切り取った。50℃及び相対湿度(RH)92%の環境に、24時間、試料を放置した。保護層が、積層構造を曲げた際に積層構造からスリップするかどうかを、肉眼で観測した。保護層を、積層構造から手作業で剥がし、保護層を剥がした後の感光性樹脂層の表面特性を、観測した。試料の品質を、例えば、保護層上の残存する感光性樹脂組成物の量、並びに感光性樹脂層上の表面汚染、及び樹脂層中の空気孔の数の観点から、評価した。
〇:感光性樹脂層の表面にスリップもしわも現れなかった。
△:感光性樹脂層の表面にスリップは現れなかったが、わずかなしわが現れた。
X:感光性樹脂層の表面にスリップ及びしわが現れた。
〇:保護層上に残存する感光性樹脂組成物はなかった。
△:肉眼での観測によると、保護層上の残存する感光性樹脂組成物が、保護層の表面積の5%以下を占めていた。
X:肉眼での観測によると、保護層上の残存する感光性樹脂組成物が、保護層の表面積の5%超を占めていた。
〇:汚染は観測されなかった。
X:汚染が観測された。
〇:空気孔の数が20個/m2未満。
△:空気孔の数が20個/m2〜300個/m2の間。
X:空気孔の数が300個/m2を超える。
Claims (8)
- 支持層、感光性樹脂層、及び保護層を含む積層構造であって、前記保護層が、以下の条件:
1,500nm≦最大表面粗さ≦2,500nm、及び
1×108Ω/□≦シート抵抗≦1×1012Ω/□
を満たす表面特徴を有するポリエステルフィルムである、積層構造。 - 前記保護層の厚さが約1μm〜約100μmの間である、請求項1に記載の積層構造。
- 前記感光性樹脂層が、
(a)高分子結合剤、
(b)二重結合を有する光重合性化合物、及び
(c)光重合開始剤
を含む、請求項1に記載の積層構造。 - 前記保護層の最大表面粗さが約1,700nm〜約2,300nmの間である、請求項1に記載の積層構造。
- 前記保護層の最大表面粗さが約2,000nm〜約2,300nmの間である、請求項1に記載の積層構造。
- 前記保護層のシート抵抗が1×109Ω/□〜1×1011Ω/□の間である、請求項1に記載の積層構造。
- 前記保護層が帯電防止性である、請求項1に記載の積層構造。
- 感光性デバイス、プリント回路基板の回路、又はリードフレームを調製するためのプロセスで使用するための、請求項1に記載の積層構造。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104110527A TWI535563B (zh) | 2015-03-31 | 2015-03-31 | 疊層結構 |
TW104110527 | 2015-03-31 |
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Publication Number | Publication Date |
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JP2016196182A true JP2016196182A (ja) | 2016-11-24 |
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JP2016072006A Pending JP2016196182A (ja) | 2015-03-31 | 2016-03-31 | 積層構造 |
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US (1) | US9817313B2 (ja) |
JP (1) | JP2016196182A (ja) |
CN (1) | CN105034522B (ja) |
TW (1) | TWI535563B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020202959A1 (ja) * | 2019-03-29 | 2020-10-08 | 太陽インキ製造株式会社 | 積層構造体、硬化物、プリント配線板及び電子部品 |
Families Citing this family (1)
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JP7246615B2 (ja) * | 2017-12-20 | 2023-03-28 | 住友電気工業株式会社 | プリント配線板の製造方法及び積層体 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003098348A (ja) * | 2001-09-21 | 2003-04-03 | Konica Corp | 偏光板およびこれを用いた液晶表示装置 |
JP2005003704A (ja) * | 2003-06-09 | 2005-01-06 | Konica Minolta Opto Inc | 積層体とそれを用いた楕円偏光板及び表示装置 |
JP2006331536A (ja) * | 2005-05-26 | 2006-12-07 | Toppan Printing Co Ltd | 光ディスク用基板、光ディスク、およびその光ディスクの製造方法 |
WO2013187349A1 (ja) * | 2012-06-13 | 2013-12-19 | 旭化成イーマテリアルズ株式会社 | 機能転写体、機能層の転写方法、梱包物及び機能転写フィルムロール |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0382536A (ja) * | 1989-08-28 | 1991-04-08 | Toray Ind Inc | 複合ポリエステルフィルム |
EP0789051B1 (en) * | 1996-02-08 | 2002-10-02 | Teijin Limited | Adherent polyester film laminate |
MY120763A (en) * | 1997-09-19 | 2005-11-30 | Hitachi Chemical Co Ltd | Photosensitive film, process for laminating photosensitive resin layer, photosensitive resin layer-laminated substrate and process for curing photosensitive resin layer |
KR100247706B1 (ko) | 1997-11-07 | 2000-06-01 | 구광시 | 드라이 필름 포토레지스트 |
US6465075B2 (en) * | 1999-03-04 | 2002-10-15 | Teijin Limited | Biaxially oriented laminate polyester film |
JP2000255015A (ja) * | 1999-03-10 | 2000-09-19 | Mitsubishi Polyester Film Copp | ドライフィルムレジスト用カバーフィルム |
JP2001323228A (ja) * | 2000-05-15 | 2001-11-22 | Nitto Denko Corp | 加熱剥離型粘着シート |
JP3668439B2 (ja) * | 2001-06-14 | 2005-07-06 | ソニーケミカル株式会社 | 接着フィルム |
EP1602683A4 (en) * | 2003-03-11 | 2006-04-19 | Mitsubishi Polyester Film Corp | BIAXIALLY ORIENTATED POLYESTER FILM AND DEMOLITION FILM |
KR100768364B1 (ko) * | 2003-08-28 | 2007-10-17 | 히다치 가세고교 가부시끼가이샤 | 감광성 수지 조성물, 이것을 이용한 감광성 엘리먼트,레지스트 패턴의 형성방법 및 프린트 배선판의 제조방법 및광경화물의 제거방법 |
JP4471611B2 (ja) * | 2003-09-11 | 2010-06-02 | 三菱樹脂株式会社 | 高解像度用ドライフィルムレジスト用ポリエステルフィルム |
JP4159094B2 (ja) * | 2003-10-15 | 2008-10-01 | 東京応化工業株式会社 | 感光性樹脂組成物およびこれを用いた感光性ドライフィルム |
JPWO2006011548A1 (ja) * | 2004-07-30 | 2008-05-01 | 日立化成工業株式会社 | 感光性フィルム、感光性フィルム積層体及び感光性フィルムロール |
JP4322757B2 (ja) * | 2004-09-06 | 2009-09-02 | 富士フイルム株式会社 | パターン形成材料及びパターン形成方法 |
JP4866027B2 (ja) * | 2005-07-04 | 2012-02-01 | 大日精化工業株式会社 | 光学用保護フィルム |
JP4876007B2 (ja) * | 2007-03-27 | 2012-02-15 | 富士フイルム株式会社 | ポリエステル樹脂フィルムの製造方法、およびこの製造方法により製造されたポリエステル樹脂フィルム、反射防止フィルム、拡散フィルム |
KR101569552B1 (ko) * | 2008-10-30 | 2015-11-16 | 데이진 듀폰 필름 가부시키가이샤 | 광학용 적층 필름 |
JP5553627B2 (ja) * | 2010-02-07 | 2014-07-16 | 三菱樹脂株式会社 | 積層ポリエステルフィルム |
JP5271293B2 (ja) * | 2010-02-07 | 2013-08-21 | 三菱樹脂株式会社 | 積層ポリエステルフィルム |
JP5697461B2 (ja) * | 2011-01-17 | 2015-04-08 | ユニチカ株式会社 | ポリエステルフィルム、および感光性樹脂構造体 |
WO2012133515A1 (ja) | 2011-03-28 | 2012-10-04 | 富士フイルム株式会社 | ポリエステルフィルムおよびこれを用いた太陽電池用バックシートならびにポリエステルフィルムの製造方法 |
-
2015
- 2015-03-31 TW TW104110527A patent/TWI535563B/zh active
- 2015-06-23 CN CN201510345295.0A patent/CN105034522B/zh active Active
-
2016
- 2016-03-31 JP JP2016072006A patent/JP2016196182A/ja active Pending
- 2016-03-31 US US15/086,412 patent/US9817313B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003098348A (ja) * | 2001-09-21 | 2003-04-03 | Konica Corp | 偏光板およびこれを用いた液晶表示装置 |
JP2005003704A (ja) * | 2003-06-09 | 2005-01-06 | Konica Minolta Opto Inc | 積層体とそれを用いた楕円偏光板及び表示装置 |
JP2006331536A (ja) * | 2005-05-26 | 2006-12-07 | Toppan Printing Co Ltd | 光ディスク用基板、光ディスク、およびその光ディスクの製造方法 |
WO2013187349A1 (ja) * | 2012-06-13 | 2013-12-19 | 旭化成イーマテリアルズ株式会社 | 機能転写体、機能層の転写方法、梱包物及び機能転写フィルムロール |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020202959A1 (ja) * | 2019-03-29 | 2020-10-08 | 太陽インキ製造株式会社 | 積層構造体、硬化物、プリント配線板及び電子部品 |
JP2020166136A (ja) * | 2019-03-29 | 2020-10-08 | 太陽インキ製造株式会社 | 積層構造体、硬化物、プリント配線板及び電子部品 |
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CN105034522B (zh) | 2017-03-22 |
TW201634284A (zh) | 2016-10-01 |
CN105034522A (zh) | 2015-11-11 |
US20160291471A1 (en) | 2016-10-06 |
TWI535563B (zh) | 2016-06-01 |
US9817313B2 (en) | 2017-11-14 |
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