JP2016144289A - 圧電素子の駆動方法及び圧電素子並びに圧電素子応用デバイス - Google Patents
圧電素子の駆動方法及び圧電素子並びに圧電素子応用デバイス Download PDFInfo
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04541—Specific driving circuit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04573—Timing; Delays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04581—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on piezoelectric elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04588—Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
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- H—ELECTRICITY
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8561—Bismuth-based oxides
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Compositions Of Oxide Ceramics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
【解決手段】第1電極60と、第1電極60上に形成され、ABO3型ペロブスカイト構造の複合酸化物からなる圧電体層70と、圧電体層70上に形成される第2電極80と、を具備する圧電素子の駆動方法であって、所定の駆動波形で所定回数圧電素子を駆動した後、駆動波形の極性を反転させて該圧電素子を駆動する。
【選択図】図7
Description
かかる態様によれば、駆動波形の極性を所定回数駆動ごとに反転させるため、第1電極及び第2電極の間で、高電圧側及び低電圧側を所定回数駆動ごとに切り替えることができる。すなわち、圧電体層に生じ得る酸素欠損(すなわちプラス電荷)が低電圧側に引き寄せられるとしても、この酸素欠損が圧電体層の低電極側に蓄積する前に、反対側の電極を低電圧側に切り替えることができる。このため、圧電体層の酸素欠損が一方の電極側に偏析することを抑制できる。従って、圧電素子の劣化を抑制でき、圧電素子の寿命を延ばすことができる。
しかも、かかる態様によれば、順極性の駆動波形と逆極性の駆動波形とで一連の駆動波形を形成するので、駆動波形の極性の反転に伴って圧電素子の駆動が中断することもない。従って、圧電素子を好適に駆動できる。
以上より、かかる態様によれば、圧電体層の酸素欠損の偏析によって引き起こされる圧電素子の劣化を抑制でき、長期に亘って圧電素子を好適に駆動できる。
かかる態様によれば、上記の方法で駆動できる圧電素子が提供される。この圧電素子は、第1電極と第2電極との構成材料が同一であるため、駆動波形の極性の反転によって圧電素子の駆動特性にズレが生じることを抑制できる。従って、長期に亘って好適に駆動することができる圧電素子となる。
かかる態様によれば、上記の駆動方法を実現できる圧電素子応用デバイスが提供される。
このような駆動回路120が、本実施形態に係る制御手段として機能する。
Claims (9)
- 第1電極と、前記第1電極上に形成され、ABO3型ペロブスカイト構造の複合酸化物からなる圧電体層と、前記圧電体層上に形成される第2電極と、を具備する圧電素子の駆動方法であって、
所定の駆動波形で所定回数前記圧電素子を駆動した後、前記駆動波形の極性を反転させて前記圧電素子を駆動する
ことを特徴とする圧電素子の駆動方法。 - 前記所定回数は、1,000回以上100,000回以下であることを特徴とする請求項1に記載の圧電素子の駆動方法。
- 上限値(Vmax1)が30.0Vより大きく、下限値(Vmin1)が正側の抗電界(Vc1)より小さい順極性の駆動波形と、
上限値(Vmax2)が負側の抗電界(Vc2)より大きく、下限値(Vmin2)が−30.0Vより小さい逆極性の駆動波形と、
を用いて、前記圧電素子を駆動することを特徴とする請求項1又は2に記載の圧電素子の駆動方法。 - 前記駆動波形は、極性の反転前後で上下対称であることを特徴とする請求項1〜3の何れか一項に記載の圧電素子の駆動方法。
- 請求項1〜4の何れか一項に記載の駆動方法によって圧電素子を駆動する制御手段を備えた圧電素子応用デバイスに用いられる圧電素子であって、
基板上に形成される第1電極と、
前記第1電極上に形成され、ABO3型ペロブスカイト構造の複合酸化物からなる圧電体層と、
前記圧電体層上に形成される第2電極と、を備え、
前記第1電極と前記第2電極との構成材料が同一である
ことを特徴とする圧電素子。 - 前記圧電体層は、Aサイトに鉛(Pb)、ビスマス(Bi)、ナトリウム(Na)、カリウム(K)の少なくとも一つを含む
ことを特徴とする請求項5に記載の圧電素子。 - 基板に形成される第1電極と、前記第1電極上に形成され、ABO3型ペロブスカイト構造の複合酸化物からなる圧電体層と、前記圧電体層上に形成される第2電極と、を備える圧電素子と、
請求項1〜4の何れか一項に記載の駆動方法によって該圧電素子を駆動する制御手段と、を具備する
ことを特徴とする圧電素子応用デバイス。 - 前記第1電極と前記第2電極との構成材料が同一である
ことを特徴とする請求項7に記載の圧電素子応用デバイス。 - 前記圧電体層は、Aサイトに鉛(Pb)、ビスマス(Bi)、ナトリウム(Na)、カリウム(K)の少なくとも一つを含む
ことを特徴とする請求項7又は8に記載の圧電素子応用デバイス。
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