JP2016072458A - 基板処理装置および基板処理方法 - Google Patents
基板処理装置および基板処理方法 Download PDFInfo
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Abstract
【解決手段】取り出し順番変更部は、傾き不良判定部で基板Wの傾きが予め設定された閾値よりも大きいと判定された傾き不良基板Wfが存在する場合、キャリアC内に収納された複数の基板Wを上側から取り出す順番に関して、傾き不良基板Wfとその少なくとも1段上の基板Wとの間で基板Wを取り出す順番を逆に変更する。すなわち、ハンドにより表面が引っかかれるおそれのある傾き不良基板Wfをその1段上の基板Wよりも先に取り出すように順番を変更する。これにより、基板表面を基板搬送機構のハンドにより引っかくことで、基板を破損してしまうことを防止できる。
【選択図】図5
Description
すなわち、本発明に係る基板処理装置は、複数の基板を収納するキャリアを載置する載置部と、基板の有無とその高さを検出する基板高さ検出機構と、検出した前記基板の有無とその高さに基づいて、前後方向の水平に対する基板の傾きを取得する基板状態取得部と、前記基板の傾きが予め設定された閾値よりも大きいか否かを判定する傾き不良判定部と、前記傾き不良判定部で大きいと判定された傾き不良基板が存在する場合、前記キャリア内に収納された複数の基板を上側から取り出す順番に関して、前記傾き不良基板とその少なくとも1段上の基板との間で前記順番を逆に変更する取り出し順番変更部と、を備えていることを特徴とするものである。
ここで、本実施例のキャリアCについて説明する。キャリアCは、上述のMACと呼ばれるものが用いられる。図13を参照する。図13(a)および図13(c)は、キャリアCの側面図であり、図13(b)は、図13(a)中の符号Aから見たキャリアCの一部を示す正面図である。
次に、載置台4について説明する。図1(a)に戻る。載置台4は、複数個(例えば4個)設けられている。載置台4には、ステージ19が設けられており、載置台4と基板搬送機構5との間には、隔壁21が設けられている。ステージ19は、図示しないキャリア移動機構により、キャリアCを隔壁21に近づけたり遠ざけたりする。なお、載置台4またはステージ19が本発明の載置部に相当する。
次に、基板処理装置1の動作について説明する。図1(a)を参照する。キャリアCは、基板処理装置1に搬送され、ステージ19に載置される。ステージ19は隔壁21から離れており、キャリアCは、ステージ19により、保持されて隔壁21側に移動される。これにより、キャリアCの蓋部102側の外面が隔壁21に密接する。
H=450×h/30 …(2)
H:x=3.5:3 …(3)
x=3×H/3.5
=3×450×h/30/3.5 …(4)
450:基板の直径(mm)
30 :センシングピッチ(mm)
h :基板の高さ差(mm)
H :リア保持部側の高さ方向(上側)の基板位置ずれ量(mm)
x :奥側への基板位置ずれ量(mm)
4 … 載置台
5 … 基板搬送機構
7 … ハンド
23 … 蓋着脱部
33 … マッピング部
35,37,63… マッピングセンサ
41 … センサ進退移動部
43 … センサ昇降部
45 … 高さセンサ
47 … 制御部
53 … 基板状態取得部
55 … 傾き不良判定部
57 … 取り出し順番変更部
101 … 容器本体
101a … 開口部
102 … 蓋部
103 … サイド保持部
105 … リア保持部
107 … フロント保持部
105a,107a… V字状の溝
Wf … 傾き不良基板
W1〜W6… 基板
T1〜T6… 取り出す順番
Claims (7)
- 複数の基板を収納するキャリアを載置する載置部と、
基板の有無とその高さを検出する基板高さ検出機構と、
検出した前記基板の有無とその高さに基づいて、前後方向の水平に対する基板の傾きを取得する基板状態取得部と、
前記基板の傾きが予め設定された閾値よりも大きいか否かを判定する傾き不良判定部と、
前記傾き不良判定部で閾値よりも大きいと判定された傾き不良基板が存在する場合、前記キャリア内に収納された複数の基板を上側から取り出す順番に関して、前記傾き不良基板とその少なくとも1段上の基板との間で前記順番を逆に変更する取り出し順番変更部と、
を備えていることを特徴とする基板処理装置。 - 請求項1に記載の基板処理装置において、
前記取り出し順番変更部は、前記傾き不良基板が連続して存在する場合、連続する最も低い段に収納された前記傾き不良基板と、連続する最も高い段に収納された前記傾き不良基板の少なくとも1段上の基板との間で前記順番を逆に変更することを特徴とする基板処理装置。 - 請求項1または2に記載の基板処理装置において、
前記取り出し順番変更部は、前記傾き不良基板の少なくとも1段下の基板と、前記傾き不良基板の少なくとも1段上の基板との間で前記順番を逆に変更することを特徴とする基板処理装置。 - 請求項1から3のいずれかに記載の基板処理装置において、
前記キャリアは、容器本体と、
前記容器本体の開口部を塞ぎ、前記容器本体に着脱可能な蓋部と、
前記容器本体内の両方の側面に設けられ、基板を載置するサイド保持部と、
前記容器本体内の奥面に設けられ、溝が形成されたリア保持部と、
前記蓋部の内側面に設けられ、溝が形成されたフロント保持部と、を備え、
前記容器本体の開口部に前記蓋部を取り付けた際に、前記リア保持部および前記フロント保持部は、前記サイド保持部から基板を離しつつ、基板を挟持することを特徴とする基板処理装置。 - 請求項1から4のいずれかに記載の基板処理装置において、
前記基板高さ検出機構は、前記キャリアに基板を出し入れする前記前後方向と交わる水平方向に向いて基板の有無を検出する有無センサと、
前記有無センサの高さを検出する高さセンサと、
前記有無センサを上下方向に移動させる上下機構と、
前記キャリアの開口部を通じて前記キャリア内に前記有無センサを進入させる進退機構と、
前記進退機構により前記キャリア内に前記有無センサを進入させた状態で、前記上下機構により前記有無センサを上下方向に移動させると共に、前記有無センサにより基板の有無を検出し、前記高さセンサにより前記有無センサの高さを検出することで、前記前後方向の互いに異なる2箇所以上で基板高さを検出させる制御部と、
を備えていることを特徴とする基板処理装置。 - 基板高さ検出機構により、載置部に載置された、複数の基板を収納するキャリアの基板の有無とその高さを検出する工程と、
基板状態取得部により、検出した前記基板の有無とその高さに基づいて、前後方向の水平に対する基板の傾きを取得する工程と、
傾き不良判定部により、前記基板の傾きが予め設定された閾値よりも大きいか否かを判定する工程と、
取り出し順番変更部により、前記傾き不良判定部で大きいと判定された傾き不良基板が存在する場合、前記キャリア内に収納された複数の基板を上側から取り出す順番に関して、前記傾き不良基板とその少なくとも1段上の基板との間で前記順番を逆に変更する工程と、
を備えていることを特徴とする基板処理方法。 - 複数の基板を収納するキャリアを載置する載置部と、
基板の有無とその高さを検出する基板高さ検出機構と、
検出した前記基板の有無とその高さに基づいて、前後方向の水平に対する基板の傾きを取得する基板状態取得部と、
前記基板の傾きが予め設定された閾値よりも大きいか否かを判定する傾き不良判定部と、
前記傾き不良判定部で閾値よりも大きいと判定された傾き不良基板が存在する場合、前記傾き不良基板とその1段上の基板との間で、前記傾き不良基板が前記1段上の基板よりも先に前記キャリアから取り出されるように基板の取り出し順を設定すると共に、前記傾き不良基板と前記1段上の基板の基板以外の基板についての取り出し順番を設定する、取り出し順番設定部と、
を備えていることを特徴とする基板処理装置。
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