JP2015174938A - スラリー組成物および基板研磨方法 - Google Patents
スラリー組成物および基板研磨方法 Download PDFInfo
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- JP2015174938A JP2015174938A JP2014053262A JP2014053262A JP2015174938A JP 2015174938 A JP2015174938 A JP 2015174938A JP 2014053262 A JP2014053262 A JP 2014053262A JP 2014053262 A JP2014053262 A JP 2014053262A JP 2015174938 A JP2015174938 A JP 2015174938A
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- 150000001413 amino acids Chemical class 0.000 description 1
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- ZHIUCPNDVATEDB-TWTPFVCWSA-N ethenyl (2e,4e)-hexa-2,4-dienoate Chemical compound C\C=C\C=C\C(=O)OC=C ZHIUCPNDVATEDB-TWTPFVCWSA-N 0.000 description 1
- WGXGKXTZIQFQFO-CMDGGOBGSA-N ethenyl (e)-3-phenylprop-2-enoate Chemical compound C=COC(=O)\C=C\C1=CC=CC=C1 WGXGKXTZIQFQFO-CMDGGOBGSA-N 0.000 description 1
- IYNRVIKPUTZSOR-HWKANZROSA-N ethenyl (e)-but-2-enoate Chemical compound C\C=C\C(=O)OC=C IYNRVIKPUTZSOR-HWKANZROSA-N 0.000 description 1
- MEGHWIAOTJPCHQ-UHFFFAOYSA-N ethenyl butanoate Chemical compound CCCC(=O)OC=C MEGHWIAOTJPCHQ-UHFFFAOYSA-N 0.000 description 1
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- AFSIMBWBBOJPJG-UHFFFAOYSA-N ethenyl octadecanoate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OC=C AFSIMBWBBOJPJG-UHFFFAOYSA-N 0.000 description 1
- BLCTWBJQROOONQ-UHFFFAOYSA-N ethenyl prop-2-enoate Chemical compound C=COC(=O)C=C BLCTWBJQROOONQ-UHFFFAOYSA-N 0.000 description 1
- UIWXSTHGICQLQT-UHFFFAOYSA-N ethenyl propanoate Chemical compound CCC(=O)OC=C UIWXSTHGICQLQT-UHFFFAOYSA-N 0.000 description 1
- ZQZUENMXBZVXIZ-UHFFFAOYSA-N ethenyl tetradecanoate Chemical compound CCCCCCCCCCCCCC(=O)OC=C ZQZUENMXBZVXIZ-UHFFFAOYSA-N 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 229940074391 gallic acid Drugs 0.000 description 1
- 235000004515 gallic acid Nutrition 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000001863 hydroxypropyl cellulose Substances 0.000 description 1
- 235000010977 hydroxypropyl cellulose Nutrition 0.000 description 1
- 239000001866 hydroxypropyl methyl cellulose Substances 0.000 description 1
- 229920003088 hydroxypropyl methyl cellulose Polymers 0.000 description 1
- 235000010979 hydroxypropyl methyl cellulose Nutrition 0.000 description 1
- UFVKGYZPFZQRLF-UHFFFAOYSA-N hydroxypropyl methyl cellulose Chemical compound OC1C(O)C(OC)OC(CO)C1OC1C(O)C(O)C(OC2C(C(O)C(OC3C(C(O)C(O)C(CO)O3)O)C(CO)O2)O)C(CO)O1 UFVKGYZPFZQRLF-UHFFFAOYSA-N 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 238000002356 laser light scattering Methods 0.000 description 1
- 239000002649 leather substitute Substances 0.000 description 1
- 229940087305 limonene Drugs 0.000 description 1
- 235000001510 limonene Nutrition 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 150000004701 malic acid derivatives Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- XJRBAMWJDBPFIM-UHFFFAOYSA-N methyl vinyl ether Chemical compound COC=C XJRBAMWJDBPFIM-UHFFFAOYSA-N 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- LSHROXHEILXKHM-UHFFFAOYSA-N n'-[2-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]ethyl]ethane-1,2-diamine Chemical compound NCCNCCNCCNCCNCCN LSHROXHEILXKHM-UHFFFAOYSA-N 0.000 description 1
- AQGNVWRYTKPRMR-UHFFFAOYSA-N n'-[2-[2-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]ethylamino]ethyl]ethane-1,2-diamine Chemical compound NCCNCCNCCNCCNCCNCCN AQGNVWRYTKPRMR-UHFFFAOYSA-N 0.000 description 1
- ZYWUVGFIXPNBDL-UHFFFAOYSA-N n,n-diisopropylaminoethanol Chemical compound CC(C)N(C(C)C)CCO ZYWUVGFIXPNBDL-UHFFFAOYSA-N 0.000 description 1
- RQAKESSLMFZVMC-UHFFFAOYSA-N n-ethenylacetamide Chemical compound CC(=O)NC=C RQAKESSLMFZVMC-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 125000006353 oxyethylene group Chemical group 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 1
- 229920001281 polyalkylene Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920005646 polycarboxylate Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 239000005518 polymer electrolyte Substances 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000011970 polystyrene sulfonate Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920002620 polyvinyl fluoride Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 150000003856 quaternary ammonium compounds Chemical class 0.000 description 1
- 238000000518 rheometry Methods 0.000 description 1
- 229910001419 rubidium ion Inorganic materials 0.000 description 1
- 238000007127 saponification reaction Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 125000000467 secondary amino group Chemical group [H]N([*:1])[*:2] 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-L succinate(2-) Chemical compound [O-]C(=O)CCC([O-])=O KDYFGRWQOYBRFD-UHFFFAOYSA-L 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 235000015523 tannic acid Nutrition 0.000 description 1
- LRBQNJMCXXYXIU-NRMVVENXSA-N tannic acid Chemical compound OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-NRMVVENXSA-N 0.000 description 1
- 229940033123 tannic acid Drugs 0.000 description 1
- 229920002258 tannic acid Polymers 0.000 description 1
- 229940095064 tartrate Drugs 0.000 description 1
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- INRGAWUQFOBNKL-UHFFFAOYSA-N {4-[(Vinyloxy)methyl]cyclohexyl}methanol Chemical compound OCC1CCC(COC=C)CC1 INRGAWUQFOBNKL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/02—Polyamines
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
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Abstract
【解決手段】研磨砥粒と、溶解度パラメータが9〜10の範囲である、3級アミンを含む繰り返し単位構造を少なくとも2個含む重合体とを含有する化学的機械研磨用のスラリー組成物。繰返し構造単位は、N−ポリエチレンオキシド重合体、N−ポリプロピレンオキシド重合体又はN原子に結合したエチレンオキシド・プロピレンオキシド共重合体を含むスラリー組成物。
【選択図】なし
Description
水と、
研磨砥粒と、
溶解度パラメータが9〜10の範囲であり、3級アミンを含む繰返し構造単位を少なくとも2個含む重合体と
を含有する、化学的機械研磨用のスラリー組成物が提供できる。
本発明では、さらにセルロース誘導体、ポリ−N−ビニルピロリドン、ポリ−N−ビニルアセトアミド、ポリグリセリン、PEG、PEO、PEG−PPGブロック共重合体、エチレンオキシドエチレンジアミン付加物、ポリ−2−エチルオキサゾリン、ポリビニルアルコール、ポリアクリル酸、ポリアクリル酸塩からなる群から選択される少なくとも1種の水溶性高分子を含有することができる。
研磨基板を、前記スラリー組成物により研磨パッドで研磨する工程と
を含む基板研磨方法が提供できる。
上記一般式(2)中、A、m、nは一般式(1)で定義したものと同一である。
7質量%のコロイダルシリカと、アンモニアによってpH10.5に調整されたの水と、3000ppmのヒドロキシエチルセルロースを含むスラリー組成物に、それぞれ下記の化合物の濃度を変えて添加して、スラリー組成物を調整した。
(2)ポリ−N−ビニルピロリドンK90(以下、添加剤2として参照する。)
(3)ポリ−N−ビニルピロリドンK15(以下、添加剤3として参照する。)
(4)ポリ−2−エチルオキサゾリン(添加剤4として参照する。)、
(5)ポリグリセリン(添加剤5として参照する。)
(6)PEG8000(添加剤6として参照する。)、
(7)PEO(平均分子量40000)(添加剤7として参照する。)、
(8)PEO(平均分子量400000)(添加剤8として参照する。)、
(9)PEO(平均分子量1000000)(添加剤9として参照する。)、
(10)エチレンオキシドエチレンジアミン付加物(添加剤10として参照する。)、
(11)PEG−PPGブロック共重合体(添加剤11として参照する。)、
(12)ポリ−N−ビニルアセトアミド(添加剤12として参照する。)、
(13)ポリビニルアルコール(添加剤13として参照する。)、
(14)ポリアクリル酸(Mw25000、添加剤14として参照する。)、
(15)ポリアクリル酸塩(添加剤15として参照する。)
1で作成したスラリー組成物を使用して、8インチp型シリコンウェーハ、抵抗率0.1〜100Ω・cm)、結晶方位<100>をフッ化水素酸(0.5%)で23℃・2分間洗浄して自然酸化膜を除去した後、スラリー組成物を水で20倍希釈して以下の条件で研磨処理を適用した。
(1)研磨装置:8インチ片面研磨機、エム・エー・ティー社製MAT−ARW−681MS
(2)ウェハヘッド:テンプレート方式水貼り保持
(3)研磨パッド:DOW社製 SPM3100
(4)定盤回転数:30rpm
(5)研磨ヘッド回転数:26rpm
(6)研磨圧:3psi=210g/cm2=20.7kPa
(7)スラリー供給量:350mL/min(かけ流し)
(8)研磨時間:5min
洗浄後のシリコンウェーハ表面の表面粗さ(ヘイズ)は、KLA Tencor社製のSurfscan SP2を用い、暗視野ワイド斜入射チャネル(DWO)で測定されるDWOの値を用いた。LPDは、同じくKLA Tencor社製のSurfscan SP2を用い、暗視野コンポジット斜入射チャネル(DCO)における37nm以上のサイズのLPDの値を用いた。また研磨速度は、研磨前後のウェハ重量差を、シリコンウェーハの密度、面積および研磨時間にて除して、単位時間当たりの研磨速度を求めた。同一の添加剤について同一条件で少なくとも2回測定を行ない、その平均値を各値とした。
各添加剤についての測定結果を図1〜図4に示す。図1は、HazeおよびRRの測定結果を、添加剤、その添加量に対応づけて表として示したものである。図2は、HazeおよびRRの溶解度パラメータ依存性を示す。なお、図2中、「◇」の記号は、研磨レート(RR)であり、「○」の記号が、Hazeを示す。図2に示すように、溶解度パラメータが小さい程、RRの低下(図中、上側の曲線)に比較してHazeが減少すること、すなわちHazeが改善される傾向が見られた。
Claims (8)
- 水と、
研磨砥粒と、
溶解度パラメータが9〜10の範囲であり、3級アミンを含む繰返し構造単位を少なくとも2個含む重合体と
を含有する、化学的機械研磨用のスラリー組成物。 - 前記3級アミンは、N−アルキレン基を含み、前記繰返し構造単位は、N−アルキレンアミン構造を含む、請求項1に記載のスラリー組成物。
- 前記重合体は、重量平均分子量が5000〜100000である、請求項1または2に記載のスラリー組成物。
- 前記繰返し構造単位は、N−ポリエチレンオキシド重合体、N−ポリプロピレンオキシド重合体またはN原子に結合したエチレンオキシド・プロピレンオキシド共重合体を含む、請求項1〜3のいずれか1項に記載のスラリー組成物。
- 前記重合体は、前記スラリー組成物中に、1〜5000ppmで存在する、請求項1〜4のいずれか1項に記載のスラリー組成物。
- 前記重合体は、下記一般式(1)で与えられる、請求項1〜5のいずれか1項に記載のスラリー組成物。
- さらにセルロース誘導体、ポリ−N−ビニルピロリドン、ポリ−N−ビニルアセトアミド、ポリグリセリン、PEG、PEO、PEG−PPG共重合体、エチレンオキシドエチレンジアミン付加物、ポリ−2−エチルオキサゾリン、ポリビニルアルコール、ポリアクリル酸、ポリアクリル酸塩からなる群から選択される少なくとも1種の水溶性高分子を含有する、請求項1〜6のいずれか1項に記載のスラリー組成物。
- 請求項1〜7のいずれか1項に記載のスラリー組成物を、研磨基板に付着させる工程と、
研磨基板を、前記スラリー組成物により研磨パッドで研磨する工程と
を含む基板研磨方法。
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