JP2015172595A5 - - Google Patents

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JP2015172595A5
JP2015172595A5 JP2015111833A JP2015111833A JP2015172595A5 JP 2015172595 A5 JP2015172595 A5 JP 2015172595A5 JP 2015111833 A JP2015111833 A JP 2015111833A JP 2015111833 A JP2015111833 A JP 2015111833A JP 2015172595 A5 JP2015172595 A5 JP 2015172595A5
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electrodes
gas sensor
sensor according
electrode
detection
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JP2015172595A (ja
JP6335140B2 (ja
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JP2015111833A 2007-10-09 2015-06-02 集積温度制御コントロール及び温度センサを備えた多機能電位差ガスセンサアレイ Active JP6335140B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US97869607P 2007-10-09 2007-10-09
US60/978,696 2007-10-09

Related Parent Applications (1)

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JP2010529056A Division JP2011501127A (ja) 2007-10-09 2008-10-09 集積温度制御コントロール及び温度センサを備えた多機能電位差ガスセンサアレイ

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JP2015172595A JP2015172595A (ja) 2015-10-01
JP2015172595A5 true JP2015172595A5 (https=) 2015-11-12
JP6335140B2 JP6335140B2 (ja) 2018-05-30

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JP2010529056A Pending JP2011501127A (ja) 2007-10-09 2008-10-09 集積温度制御コントロール及び温度センサを備えた多機能電位差ガスセンサアレイ
JP2015111833A Active JP6335140B2 (ja) 2007-10-09 2015-06-02 集積温度制御コントロール及び温度センサを備えた多機能電位差ガスセンサアレイ

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JP2010529056A Pending JP2011501127A (ja) 2007-10-09 2008-10-09 集積温度制御コントロール及び温度センサを備えた多機能電位差ガスセンサアレイ

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US (2) US9027387B2 (https=)
EP (1) EP2201357B1 (https=)
JP (2) JP2011501127A (https=)
KR (4) KR101931044B1 (https=)
CN (1) CN101889201B (https=)
BR (1) BRPI0817851B1 (https=)
CA (1) CA2701942C (https=)
WO (1) WO2009049091A2 (https=)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101526494B (zh) * 2009-03-31 2012-05-23 西安交通大学 基于Pt反应电极的气体传感器及温度补偿方法
US20110210013A1 (en) * 2010-02-26 2011-09-01 General Electric Company Selective gas sensor device and associated method
SG187977A1 (en) * 2010-09-09 2013-04-30 S E A Medical Systems Inc Systems and methods for intravenous drug management using immittance spectroscopy
CN102539492A (zh) * 2010-12-27 2012-07-04 深圳光启高等理工研究院 一种基于物联网的信息获取装置及设备
US20130161205A1 (en) * 2011-12-06 2013-06-27 Abdul-Majeed Azad Methods and devices for detecting nitrogen oxides
RU2615795C2 (ru) * 2011-12-23 2017-04-11 Санофи-Авентис Дойчланд Гмбх Сенсорное устройство для упаковки медикамента
CN103175866A (zh) * 2011-12-26 2013-06-26 中国第一汽车股份有限公司 集成平面式气体传感器衬底
EP2823292A1 (en) 2012-03-08 2015-01-14 Nextech Materials, Ltd Amperometric solid electrolyte gas sensor and detection method wherein the sensing electrode comprises at least one tungstate or molybdate compound
US9395344B2 (en) * 2013-02-06 2016-07-19 Veris Industries, Llc Gas sensor with thermal measurement compensation
US9178032B2 (en) * 2013-02-15 2015-11-03 Electronics And Telecommunications Research Institute Gas sensor and manufacturing method thereof
DE102013110291A1 (de) * 2013-03-06 2014-09-11 Heraeus Sensor Technology Gmbh Verfahren zur Herstellung eines Rußsensors mit einem Laserstrahl
DE102013204469A1 (de) * 2013-03-14 2014-09-18 Robert Bosch Gmbh Mikroelektrochemischer Sensor und Verfahren zum Betreiben eines mikroelektrochemischen Sensors
WO2014143782A1 (en) * 2013-03-15 2014-09-18 The Cleveland Clinic Foundation Miniaturized gas sensor device and method
DE102014214371A1 (de) * 2014-07-23 2016-01-28 Siemens Aktiengesellschaft Gassensor zur Detektion von NO und NO2 und Betriebsverfahren für den Gassensor
DE102014214368A1 (de) * 2014-07-23 2016-01-28 Siemens Aktiengesellschaft Gassensor zur Detektion von NO und/oder NO2 und Betriebsverfahren für einen solchen Gassensor
WO2016040963A1 (en) * 2014-09-12 2016-03-17 Nextech Materials, Ltd. Amperometric solid electrolyte sensor and method for detecting nh3 and nox
US11761923B2 (en) * 2014-09-12 2023-09-19 Nextech Materials, Ltd. Amperometric electrochemical sensors, sensor systems and detection methods
WO2016166126A1 (en) 2015-04-13 2016-10-20 Danmarks Tekniske Universitet Gas sensor with multiple internal reference electrodes and sensing electrodes
JP6586694B2 (ja) * 2015-07-07 2019-10-09 国立大学法人九州工業大学 ガスセンサ用材料及びその製造方法、並びにこれを用いたガスセンサの製造方法
CN105301071A (zh) * 2015-10-28 2016-02-03 周丽娜 一种新型工业废气检测装置及其制作方法
CN105259237A (zh) * 2015-10-28 2016-01-20 陈杨珑 一种新型废气检测装置及其制作方法
CN105259232A (zh) * 2015-10-28 2016-01-20 李琴琴 一种炼油厂及其实施方法
CN105241934A (zh) * 2015-10-28 2016-01-13 胡丽春 一种发电厂及其实施方法
CN105259238A (zh) * 2015-10-28 2016-01-20 肖锐 一种电气柜及其制作方法
CN106706710A (zh) * 2015-11-11 2017-05-24 中国科学院上海微系统与信息技术研究所 基于硫掺杂石墨烯的氮氧化物气体传感器及其制备方法
US10041898B2 (en) 2015-12-01 2018-08-07 International Business Machines Corporation 3D micro and nanoheater design for ultra-low power gas sensors
CN105606674A (zh) * 2015-12-22 2016-05-25 张利琴 一种修饰金电极及其制备方法
CN107966478A (zh) * 2016-10-19 2018-04-27 华邦电子股份有限公司 感测器阵列、其制造方法及感测方法
US10393718B2 (en) 2016-12-29 2019-08-27 Industrial Technology Research Institute Micro-electromechanical apparatus for thermal energy control
TWI633046B (zh) * 2016-12-29 2018-08-21 財團法人工業技術研究院 一種可控制加熱能量的微機電裝置
US20180252667A1 (en) * 2017-03-03 2018-09-06 Ngk Spark Plug Co. Ltd. Gas sensor
EP3647777B1 (en) * 2017-06-27 2024-07-10 Kyocera Corporation Sensor substrate and sensor device
US11275043B2 (en) 2017-10-10 2022-03-15 Indian Institute Of Science Nano-sensor for detecting gaseous components
JP7126238B2 (ja) * 2018-03-05 2022-08-26 国立研究開発法人産業技術総合研究所 可燃性ガスの分析方法
JP7396587B2 (ja) * 2018-12-14 2023-12-12 日本特殊陶業株式会社 センサ素子及びガスセンサ
CN110031591A (zh) * 2019-04-19 2019-07-19 东北大学 一种微纳气体传感阵列动态测试方法
KR101991120B1 (ko) * 2019-06-03 2019-06-19 한림대학교 산학협력단 온도 및 임피던스 통합 센서 제조방법
EP3795986B1 (en) * 2019-09-19 2023-06-07 Université catholique de Louvain Manufacturing process for multi-pixel gas microsensors with multiple sensing capabilities
KR102223882B1 (ko) * 2019-09-24 2021-03-04 김현명 미량가스 탐지가 용이한 미세누출감지 가스탐지장치
TWI702392B (zh) * 2019-12-20 2020-08-21 財團法人工業技術研究院 氣體感測裝置及氣體濃度感測方法
US11581206B2 (en) * 2020-03-06 2023-02-14 Applied Materials, Inc. Capacitive sensor for chamber condition monitoring
DE102020208982A1 (de) * 2020-07-17 2022-01-20 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Bestimmen eines Nikotingehalts in einem Gasgemisch
CN111830087A (zh) * 2020-07-21 2020-10-27 艾感科技(广东)有限公司 一种通过调控光和温度制备气体传感器阵列的方法及装置
CN112268938B (zh) * 2020-10-21 2023-08-15 有研工程技术研究院有限公司 一种NOx气体传感器
US12480908B1 (en) * 2021-01-21 2025-11-25 Triad National Security, Llc Solid state multi-electrode sensor array for real-time monitoring of multi-gas mixtures
CN113340356B (zh) * 2021-06-29 2022-08-26 北京科技大学 一种阵列式温度压力协同传感器及应用方法
KR102588967B1 (ko) * 2021-08-02 2023-10-12 울산과학기술원 가스 센서를 자가 보정하는 방법 및 상기 방법을 수행하는 가스 센서 보정 시스템
TWI821853B (zh) * 2022-01-05 2023-11-11 財團法人工業技術研究院 微機電感測裝置及其感測模組
CN114594141B (zh) * 2022-02-21 2024-11-22 清华大学 集成电子鼻传感结构及其使用方法
JP7831107B2 (ja) * 2022-04-14 2026-03-17 富士電機株式会社 ガスセンサ
CN115096944B (zh) * 2022-06-23 2025-11-11 哈尔滨理工大学 AlN陶瓷基四悬臂桥连微热板气体传感器阵列及其制备方法
DE102022116825A1 (de) * 2022-07-06 2024-01-11 Dräger Safety AG & Co. KGaA Sensor-Anordnung mit einem elektrochemischen Sensor und einem Temperatur-Sensor und Verfahren unter Verwendung einer solchen Sensor-Anordnung
CN115753944B (zh) * 2022-11-02 2023-09-12 宁波大学 车用高温尾气传感器的交流阻抗测试系统及测试方法
GB202302557D0 (en) * 2023-02-22 2023-04-05 Mcgowan Sensor Labs Ltd A solid-state oxygen sensor chip

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59217151A (ja) * 1983-05-26 1984-12-07 Toyota Central Res & Dev Lab Inc 酸素イオン導電性固体電解質を用いた限界電流式酸素センサによる複数のガス成分濃度の検出装置
US5389225A (en) * 1989-01-24 1995-02-14 Gas Research Institute Solid-state oxygen microsensor and thin structure therefor
US5389218A (en) * 1989-01-24 1995-02-14 Gas Research Institute Process for operating a solid-state oxygen microsensor
DE69006503T2 (de) * 1990-09-13 1994-06-09 Honeywell Bv Verfahren und Messfühler zur Bestimmung von Sauerstoffpartialdruck.
US5429727A (en) * 1993-09-30 1995-07-04 Arch Development Corporation Electrocatalytic cermet gas detector/sensor
US5397442A (en) * 1994-03-09 1995-03-14 Gas Research Institute Sensor and method for accurately measuring concentrations of oxide compounds in gas mixtures
DE4408504A1 (de) 1994-03-14 1995-09-21 Bosch Gmbh Robert Sensor zur Bestimmung der Konzentration von Gaskomponenten in Gasgemischen
US5783833A (en) * 1994-12-12 1998-07-21 Nikon Corporation Method and apparatus for alignment with a substrate, using coma imparting optics
SE512866C2 (sv) * 1995-02-21 2000-05-29 Volvo Ab Anordning för analys av avgaser
US5788833A (en) 1995-03-27 1998-08-04 California Institute Of Technology Sensors for detecting analytes in fluids
US5591896A (en) * 1995-11-02 1997-01-07 Lin; Gang Solid-state gas sensors
JP3333678B2 (ja) * 1996-01-05 2002-10-15 株式会社日立製作所 ガス成分センサ及び触媒診断装置
AU2828897A (en) 1996-05-07 1997-11-26 Sri International Solid state electrochemical cell for measuring components of a gas mixture, and related measurement method
JP3090479B2 (ja) * 1996-09-17 2000-09-18 株式会社 リケン ガスセンサ
EP0937979A3 (en) * 1998-02-20 2000-11-22 NGK Spark Plug Co. Ltd. NOx sensor control circuit unit and NOx sensor system using the same
JP3489658B2 (ja) * 1998-04-03 2004-01-26 矢崎総業株式会社 固体電解質型二酸化炭素ガス・酸素ガスセンサ
JP2000206089A (ja) * 1999-01-14 2000-07-28 Yazaki Corp 固体電解質型二酸化炭素ガスセンサ
AU2001255348A1 (en) * 2000-04-13 2001-10-30 Patrick T. Moseley Sensors for oxidizing gases
US6849239B2 (en) * 2000-10-16 2005-02-01 E. I. Du Pont De Nemours And Company Method and apparatus for analyzing mixtures of gases
DE10058014C2 (de) * 2000-11-23 2002-12-12 Bosch Gmbh Robert Sensorelement eines Gassensors
US6598596B2 (en) * 2001-09-28 2003-07-29 University Of Florida Solid state potentiometric gaseous oxide sensor
DE10247144A1 (de) * 2001-10-09 2003-05-22 Riken Tokio Tokyo Kk Gasdetektorelement und diese enthaltendes Gasdetektorgerät
CA2490817C (en) * 2002-06-27 2012-11-06 Snap-On Incorporated Portal for distributing business and product information
KR20060012575A (ko) * 2003-03-26 2006-02-08 이 아이 듀폰 디 네모아 앤드 캄파니 가스 혼합물의 분석 장치
US20050214170A1 (en) * 2004-03-23 2005-09-29 Webasto Ag Gas sensor and process for producing a gas sensor
JP2005326394A (ja) * 2004-04-13 2005-11-24 Denso Corp ガスセンサ
CN1588030A (zh) * 2004-07-09 2005-03-02 大连理工大学 一种具有温湿补偿功能的便携式气体检测分析仪
JP2006098136A (ja) * 2004-09-28 2006-04-13 Tdk Corp ガス濃度測定方法及びガスセンサ
US20060070890A1 (en) * 2004-09-28 2006-04-06 Tdk Corporation Gas concentration measurement method gas sensor
US7611612B2 (en) * 2005-07-14 2009-11-03 Ceramatec, Inc. Multilayer ceramic NOx gas sensor device
US7294252B2 (en) * 2005-10-07 2007-11-13 Delphi Technologies, Inc. NOx sensor and methods of using the same
JP2007327933A (ja) * 2006-05-12 2007-12-20 Sumitomo Electric Ind Ltd ガスセンサ及びその製造方法
CN100559176C (zh) * 2006-10-09 2009-11-11 西南交通大学 一种气体传感器及其阵列

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