JP2015172595A5 - - Google Patents
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- Publication number
- JP2015172595A5 JP2015172595A5 JP2015111833A JP2015111833A JP2015172595A5 JP 2015172595 A5 JP2015172595 A5 JP 2015172595A5 JP 2015111833 A JP2015111833 A JP 2015111833A JP 2015111833 A JP2015111833 A JP 2015111833A JP 2015172595 A5 JP2015172595 A5 JP 2015172595A5
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- gas sensor
- sensor according
- electrode
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 97
- 238000001514 detection method Methods 0.000 claims 61
- 239000003792 electrolyte Substances 0.000 claims 15
- 239000000463 material Substances 0.000 claims 11
- 238000010438 heat treatment Methods 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229910044991 metal oxide Inorganic materials 0.000 claims 2
- -1 metal oxide compound Chemical class 0.000 claims 2
- 229910052697 platinum Inorganic materials 0.000 claims 2
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims 1
- 229910006404 SnO 2 Inorganic materials 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical group 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US97869607P | 2007-10-09 | 2007-10-09 | |
| US60/978,696 | 2007-10-09 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010529056A Division JP2011501127A (ja) | 2007-10-09 | 2008-10-09 | 集積温度制御コントロール及び温度センサを備えた多機能電位差ガスセンサアレイ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015172595A JP2015172595A (ja) | 2015-10-01 |
| JP2015172595A5 true JP2015172595A5 (enExample) | 2015-11-12 |
| JP6335140B2 JP6335140B2 (ja) | 2018-05-30 |
Family
ID=40549838
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010529056A Pending JP2011501127A (ja) | 2007-10-09 | 2008-10-09 | 集積温度制御コントロール及び温度センサを備えた多機能電位差ガスセンサアレイ |
| JP2015111833A Active JP6335140B2 (ja) | 2007-10-09 | 2015-06-02 | 集積温度制御コントロール及び温度センサを備えた多機能電位差ガスセンサアレイ |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010529056A Pending JP2011501127A (ja) | 2007-10-09 | 2008-10-09 | 集積温度制御コントロール及び温度センサを備えた多機能電位差ガスセンサアレイ |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US9027387B2 (enExample) |
| EP (1) | EP2201357B1 (enExample) |
| JP (2) | JP2011501127A (enExample) |
| KR (4) | KR20160090405A (enExample) |
| CN (1) | CN101889201B (enExample) |
| BR (1) | BRPI0817851B1 (enExample) |
| CA (1) | CA2701942C (enExample) |
| WO (1) | WO2009049091A2 (enExample) |
Families Citing this family (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101526494B (zh) * | 2009-03-31 | 2012-05-23 | 西安交通大学 | 基于Pt反应电极的气体传感器及温度补偿方法 |
| US20110210013A1 (en) * | 2010-02-26 | 2011-09-01 | General Electric Company | Selective gas sensor device and associated method |
| JP2013542414A (ja) * | 2010-09-09 | 2013-11-21 | エス.イー.エイ. メディカル システムズ インコーポレイテッド | イミタンス分光法を使用する静注薬物管理のためのシステム及び方法 |
| CN102539492A (zh) * | 2010-12-27 | 2012-07-04 | 深圳光启高等理工研究院 | 一种基于物联网的信息获取装置及设备 |
| US20130161205A1 (en) * | 2011-12-06 | 2013-06-27 | Abdul-Majeed Azad | Methods and devices for detecting nitrogen oxides |
| WO2013092823A1 (en) * | 2011-12-23 | 2013-06-27 | Sanofi-Aventis Deutschland Gmbh | Sensor arrangement for a packaging of a medicament |
| CN103175866A (zh) * | 2011-12-26 | 2013-06-26 | 中国第一汽车股份有限公司 | 集成平面式气体传感器衬底 |
| WO2013134738A1 (en) | 2012-03-08 | 2013-09-12 | Nextech Materials, Ltd. | Amperometric solid electrolyte gas sensor and detection method wherein the sensing electrode comprises at least one tungstate or molybdate compound |
| US9395344B2 (en) * | 2013-02-06 | 2016-07-19 | Veris Industries, Llc | Gas sensor with thermal measurement compensation |
| US9178032B2 (en) * | 2013-02-15 | 2015-11-03 | Electronics And Telecommunications Research Institute | Gas sensor and manufacturing method thereof |
| DE102013110291A1 (de) * | 2013-03-06 | 2014-09-11 | Heraeus Sensor Technology Gmbh | Verfahren zur Herstellung eines Rußsensors mit einem Laserstrahl |
| DE102013204469A1 (de) * | 2013-03-14 | 2014-09-18 | Robert Bosch Gmbh | Mikroelektrochemischer Sensor und Verfahren zum Betreiben eines mikroelektrochemischen Sensors |
| EP2972282A1 (en) | 2013-03-15 | 2016-01-20 | The Cleveland Clinic Foundation | Miniaturized gas sensor device and method |
| DE102014214371A1 (de) * | 2014-07-23 | 2016-01-28 | Siemens Aktiengesellschaft | Gassensor zur Detektion von NO und NO2 und Betriebsverfahren für den Gassensor |
| DE102014214368A1 (de) * | 2014-07-23 | 2016-01-28 | Siemens Aktiengesellschaft | Gassensor zur Detektion von NO und/oder NO2 und Betriebsverfahren für einen solchen Gassensor |
| US20160077044A1 (en) * | 2014-09-12 | 2016-03-17 | Gene B. Arkenberg | Amperometric electrochemical sensors, sensor systems and detection methods |
| US11761923B2 (en) * | 2014-09-12 | 2023-09-19 | Nextech Materials, Ltd. | Amperometric electrochemical sensors, sensor systems and detection methods |
| WO2016166126A1 (en) | 2015-04-13 | 2016-10-20 | Danmarks Tekniske Universitet | Gas sensor with multiple internal reference electrodes and sensing electrodes |
| JP6586694B2 (ja) * | 2015-07-07 | 2019-10-09 | 国立大学法人九州工業大学 | ガスセンサ用材料及びその製造方法、並びにこれを用いたガスセンサの製造方法 |
| CN105301071A (zh) * | 2015-10-28 | 2016-02-03 | 周丽娜 | 一种新型工业废气检测装置及其制作方法 |
| CN105259232A (zh) * | 2015-10-28 | 2016-01-20 | 李琴琴 | 一种炼油厂及其实施方法 |
| CN105259237A (zh) * | 2015-10-28 | 2016-01-20 | 陈杨珑 | 一种新型废气检测装置及其制作方法 |
| CN105259238A (zh) * | 2015-10-28 | 2016-01-20 | 肖锐 | 一种电气柜及其制作方法 |
| CN105241934A (zh) * | 2015-10-28 | 2016-01-13 | 胡丽春 | 一种发电厂及其实施方法 |
| CN106706710A (zh) * | 2015-11-11 | 2017-05-24 | 中国科学院上海微系统与信息技术研究所 | 基于硫掺杂石墨烯的氮氧化物气体传感器及其制备方法 |
| US10041898B2 (en) | 2015-12-01 | 2018-08-07 | International Business Machines Corporation | 3D micro and nanoheater design for ultra-low power gas sensors |
| CN105606674A (zh) * | 2015-12-22 | 2016-05-25 | 张利琴 | 一种修饰金电极及其制备方法 |
| CN107966478A (zh) * | 2016-10-19 | 2018-04-27 | 华邦电子股份有限公司 | 感测器阵列、其制造方法及感测方法 |
| TWI633046B (zh) * | 2016-12-29 | 2018-08-21 | 財團法人工業技術研究院 | 一種可控制加熱能量的微機電裝置 |
| US10393718B2 (en) | 2016-12-29 | 2019-08-27 | Industrial Technology Research Institute | Micro-electromechanical apparatus for thermal energy control |
| US20180252667A1 (en) * | 2017-03-03 | 2018-09-06 | Ngk Spark Plug Co. Ltd. | Gas sensor |
| WO2019003612A1 (ja) * | 2017-06-27 | 2019-01-03 | 京セラ株式会社 | センサ基板およびセンサ装置 |
| WO2019073483A1 (en) * | 2017-10-10 | 2019-04-18 | Indian Institute Of Science | NANO-SENSOR FOR THE DETECTION OF GASEOUS COMPONENTS |
| JP7126238B2 (ja) * | 2018-03-05 | 2022-08-26 | 国立研究開発法人産業技術総合研究所 | 可燃性ガスの分析方法 |
| JP7396587B2 (ja) * | 2018-12-14 | 2023-12-12 | 日本特殊陶業株式会社 | センサ素子及びガスセンサ |
| CN110031591A (zh) * | 2019-04-19 | 2019-07-19 | 东北大学 | 一种微纳气体传感阵列动态测试方法 |
| KR101991120B1 (ko) * | 2019-06-03 | 2019-06-19 | 한림대학교 산학협력단 | 온도 및 임피던스 통합 센서 제조방법 |
| EP3795986B1 (en) * | 2019-09-19 | 2023-06-07 | Université catholique de Louvain | Manufacturing process for multi-pixel gas microsensors with multiple sensing capabilities |
| KR102223882B1 (ko) * | 2019-09-24 | 2021-03-04 | 김현명 | 미량가스 탐지가 용이한 미세누출감지 가스탐지장치 |
| TWI702392B (zh) * | 2019-12-20 | 2020-08-21 | 財團法人工業技術研究院 | 氣體感測裝置及氣體濃度感測方法 |
| US11581206B2 (en) * | 2020-03-06 | 2023-02-14 | Applied Materials, Inc. | Capacitive sensor for chamber condition monitoring |
| DE102020208982A1 (de) * | 2020-07-17 | 2022-01-20 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zum Bestimmen eines Nikotingehalts in einem Gasgemisch |
| CN111830087A (zh) * | 2020-07-21 | 2020-10-27 | 艾感科技(广东)有限公司 | 一种通过调控光和温度制备气体传感器阵列的方法及装置 |
| CN112268938B (zh) * | 2020-10-21 | 2023-08-15 | 有研工程技术研究院有限公司 | 一种NOx气体传感器 |
| US12480908B1 (en) * | 2021-01-21 | 2025-11-25 | Triad National Security, Llc | Solid state multi-electrode sensor array for real-time monitoring of multi-gas mixtures |
| CN113340356B (zh) * | 2021-06-29 | 2022-08-26 | 北京科技大学 | 一种阵列式温度压力协同传感器及应用方法 |
| KR102588967B1 (ko) * | 2021-08-02 | 2023-10-12 | 울산과학기술원 | 가스 센서를 자가 보정하는 방법 및 상기 방법을 수행하는 가스 센서 보정 시스템 |
| TWI821853B (zh) * | 2022-01-05 | 2023-11-11 | 財團法人工業技術研究院 | 微機電感測裝置及其感測模組 |
| CN114594141B (zh) * | 2022-02-21 | 2024-11-22 | 清华大学 | 集成电子鼻传感结构及其使用方法 |
| CN115096944B (zh) * | 2022-06-23 | 2025-11-11 | 哈尔滨理工大学 | AlN陶瓷基四悬臂桥连微热板气体传感器阵列及其制备方法 |
| CN115753944B (zh) * | 2022-11-02 | 2023-09-12 | 宁波大学 | 车用高温尾气传感器的交流阻抗测试系统及测试方法 |
| GB202302557D0 (en) * | 2023-02-22 | 2023-04-05 | Mcgowan Sensor Labs Ltd | A solid-state oxygen sensor chip |
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| JP2000206089A (ja) | 1999-01-14 | 2000-07-28 | Yazaki Corp | 固体電解質型二酸化炭素ガスセンサ |
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| DE10247144A1 (de) * | 2001-10-09 | 2003-05-22 | Riken Tokio Tokyo Kk | Gasdetektorelement und diese enthaltendes Gasdetektorgerät |
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| JP2006098136A (ja) | 2004-09-28 | 2006-04-13 | Tdk Corp | ガス濃度測定方法及びガスセンサ |
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| JP2007327933A (ja) | 2006-05-12 | 2007-12-20 | Sumitomo Electric Ind Ltd | ガスセンサ及びその製造方法 |
| CN100559176C (zh) * | 2006-10-09 | 2009-11-11 | 西南交通大学 | 一种气体传感器及其阵列 |
-
2008
- 2008-10-09 CN CN2008801197645A patent/CN101889201B/zh not_active Expired - Fee Related
- 2008-10-09 JP JP2010529056A patent/JP2011501127A/ja active Pending
- 2008-10-09 BR BRPI0817851-8A patent/BRPI0817851B1/pt not_active IP Right Cessation
- 2008-10-09 KR KR1020167020023A patent/KR20160090405A/ko not_active Ceased
- 2008-10-09 KR KR1020107008945A patent/KR20100081326A/ko not_active Ceased
- 2008-10-09 EP EP08838074.6A patent/EP2201357B1/en active Active
- 2008-10-09 WO PCT/US2008/079416 patent/WO2009049091A2/en not_active Ceased
- 2008-10-09 CA CA2701942A patent/CA2701942C/en active Active
- 2008-10-09 KR KR1020157033888A patent/KR20150138430A/ko not_active Ceased
- 2008-10-09 KR KR1020177017878A patent/KR101931044B1/ko active Active
- 2008-10-09 US US12/682,365 patent/US9027387B2/en active Active
-
2015
- 2015-05-11 US US14/708,935 patent/US20150241383A1/en not_active Abandoned
- 2015-06-02 JP JP2015111833A patent/JP6335140B2/ja active Active
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