CA2701942C - Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors - Google Patents

Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors Download PDF

Info

Publication number
CA2701942C
CA2701942C CA2701942A CA2701942A CA2701942C CA 2701942 C CA2701942 C CA 2701942C CA 2701942 A CA2701942 A CA 2701942A CA 2701942 A CA2701942 A CA 2701942A CA 2701942 C CA2701942 C CA 2701942C
Authority
CA
Canada
Prior art keywords
sensing electrodes
gas sensor
sensor according
sensing
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CA2701942A
Other languages
English (en)
French (fr)
Other versions
CA2701942A1 (en
Inventor
Bryan M. Blackburn
Eric D. Wachsman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Florida Research Foundation Inc
Original Assignee
University of Florida Research Foundation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Florida Research Foundation Inc filed Critical University of Florida Research Foundation Inc
Publication of CA2701942A1 publication Critical patent/CA2701942A1/en
Application granted granted Critical
Publication of CA2701942C publication Critical patent/CA2701942C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/417—Systems using cells, i.e. more than one cell and probes with solid electrolytes
    • G01N27/419—Measuring voltages or currents with a combination of oxygen pumping cells and oxygen concentration cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/4067—Means for heating or controlling the temperature of the solid electrolyte
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/417—Systems using cells, i.e. more than one cell and probes with solid electrolytes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
CA2701942A 2007-10-09 2008-10-09 Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors Active CA2701942C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US97869607P 2007-10-09 2007-10-09
US60/978,696 2007-10-09
PCT/US2008/079416 WO2009049091A2 (en) 2007-10-09 2008-10-09 Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors

Publications (2)

Publication Number Publication Date
CA2701942A1 CA2701942A1 (en) 2009-04-16
CA2701942C true CA2701942C (en) 2016-09-06

Family

ID=40549838

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2701942A Active CA2701942C (en) 2007-10-09 2008-10-09 Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors

Country Status (8)

Country Link
US (2) US9027387B2 (enExample)
EP (1) EP2201357B1 (enExample)
JP (2) JP2011501127A (enExample)
KR (4) KR20160090405A (enExample)
CN (1) CN101889201B (enExample)
BR (1) BRPI0817851B1 (enExample)
CA (1) CA2701942C (enExample)
WO (1) WO2009049091A2 (enExample)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101526494B (zh) * 2009-03-31 2012-05-23 西安交通大学 基于Pt反应电极的气体传感器及温度补偿方法
US20110210013A1 (en) * 2010-02-26 2011-09-01 General Electric Company Selective gas sensor device and associated method
JP2013542414A (ja) * 2010-09-09 2013-11-21 エス．イー．エイ． メディカル システムズ インコーポレイテッド イミタンス分光法を使用する静注薬物管理のためのシステム及び方法
CN102539492A (zh) * 2010-12-27 2012-07-04 深圳光启高等理工研究院 一种基于物联网的信息获取装置及设备
US20130161205A1 (en) * 2011-12-06 2013-06-27 Abdul-Majeed Azad Methods and devices for detecting nitrogen oxides
WO2013092823A1 (en) * 2011-12-23 2013-06-27 Sanofi-Aventis Deutschland Gmbh Sensor arrangement for a packaging of a medicament
CN103175866A (zh) * 2011-12-26 2013-06-26 中国第一汽车股份有限公司 集成平面式气体传感器衬底
WO2013134738A1 (en) 2012-03-08 2013-09-12 Nextech Materials, Ltd. Amperometric solid electrolyte gas sensor and detection method wherein the sensing electrode comprises at least one tungstate or molybdate compound
US9395344B2 (en) * 2013-02-06 2016-07-19 Veris Industries, Llc Gas sensor with thermal measurement compensation
US9178032B2 (en) * 2013-02-15 2015-11-03 Electronics And Telecommunications Research Institute Gas sensor and manufacturing method thereof
DE102013110291A1 (de) * 2013-03-06 2014-09-11 Heraeus Sensor Technology Gmbh Verfahren zur Herstellung eines Rußsensors mit einem Laserstrahl
DE102013204469A1 (de) * 2013-03-14 2014-09-18 Robert Bosch Gmbh Mikroelektrochemischer Sensor und Verfahren zum Betreiben eines mikroelektrochemischen Sensors
EP2972282A1 (en) 2013-03-15 2016-01-20 The Cleveland Clinic Foundation Miniaturized gas sensor device and method
DE102014214371A1 (de) * 2014-07-23 2016-01-28 Siemens Aktiengesellschaft Gassensor zur Detektion von NO und NO2 und Betriebsverfahren für den Gassensor
DE102014214368A1 (de) * 2014-07-23 2016-01-28 Siemens Aktiengesellschaft Gassensor zur Detektion von NO und/oder NO2 und Betriebsverfahren für einen solchen Gassensor
US20160077044A1 (en) * 2014-09-12 2016-03-17 Gene B. Arkenberg Amperometric electrochemical sensors, sensor systems and detection methods
US11761923B2 (en) * 2014-09-12 2023-09-19 Nextech Materials, Ltd. Amperometric electrochemical sensors, sensor systems and detection methods
WO2016166126A1 (en) 2015-04-13 2016-10-20 Danmarks Tekniske Universitet Gas sensor with multiple internal reference electrodes and sensing electrodes
JP6586694B2 (ja) * 2015-07-07 2019-10-09 国立大学法人九州工業大学 ガスセンサ用材料及びその製造方法、並びにこれを用いたガスセンサの製造方法
CN105301071A (zh) * 2015-10-28 2016-02-03 周丽娜 一种新型工业废气检测装置及其制作方法
CN105259232A (zh) * 2015-10-28 2016-01-20 李琴琴 一种炼油厂及其实施方法
CN105259237A (zh) * 2015-10-28 2016-01-20 陈杨珑 一种新型废气检测装置及其制作方法
CN105259238A (zh) * 2015-10-28 2016-01-20 肖锐 一种电气柜及其制作方法
CN105241934A (zh) * 2015-10-28 2016-01-13 胡丽春 一种发电厂及其实施方法
CN106706710A (zh) * 2015-11-11 2017-05-24 中国科学院上海微系统与信息技术研究所 基于硫掺杂石墨烯的氮氧化物气体传感器及其制备方法
US10041898B2 (en) 2015-12-01 2018-08-07 International Business Machines Corporation 3D micro and nanoheater design for ultra-low power gas sensors
CN105606674A (zh) * 2015-12-22 2016-05-25 张利琴 一种修饰金电极及其制备方法
CN107966478A (zh) * 2016-10-19 2018-04-27 华邦电子股份有限公司 感测器阵列、其制造方法及感测方法
TWI633046B (zh) * 2016-12-29 2018-08-21 財團法人工業技術研究院 一種可控制加熱能量的微機電裝置
US10393718B2 (en) 2016-12-29 2019-08-27 Industrial Technology Research Institute Micro-electromechanical apparatus for thermal energy control
US20180252667A1 (en) * 2017-03-03 2018-09-06 Ngk Spark Plug Co. Ltd. Gas sensor
WO2019003612A1 (ja) * 2017-06-27 2019-01-03 京セラ株式会社 センサ基板およびセンサ装置
WO2019073483A1 (en) * 2017-10-10 2019-04-18 Indian Institute Of Science NANO-SENSOR FOR THE DETECTION OF GASEOUS COMPONENTS
JP7126238B2 (ja) * 2018-03-05 2022-08-26 国立研究開発法人産業技術総合研究所 可燃性ガスの分析方法
JP7396587B2 (ja) * 2018-12-14 2023-12-12 日本特殊陶業株式会社 センサ素子及びガスセンサ
CN110031591A (zh) * 2019-04-19 2019-07-19 东北大学 一种微纳气体传感阵列动态测试方法
KR101991120B1 (ko) * 2019-06-03 2019-06-19 한림대학교 산학협력단 온도 및 임피던스 통합 센서 제조방법
EP3795986B1 (en) * 2019-09-19 2023-06-07 Université catholique de Louvain Manufacturing process for multi-pixel gas microsensors with multiple sensing capabilities
KR102223882B1 (ko) * 2019-09-24 2021-03-04 김현명 미량가스 탐지가 용이한 미세누출감지 가스탐지장치
TWI702392B (zh) * 2019-12-20 2020-08-21 財團法人工業技術研究院 氣體感測裝置及氣體濃度感測方法
US11581206B2 (en) * 2020-03-06 2023-02-14 Applied Materials, Inc. Capacitive sensor for chamber condition monitoring
DE102020208982A1 (de) * 2020-07-17 2022-01-20 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Bestimmen eines Nikotingehalts in einem Gasgemisch
CN111830087A (zh) * 2020-07-21 2020-10-27 艾感科技(广东)有限公司 一种通过调控光和温度制备气体传感器阵列的方法及装置
CN112268938B (zh) * 2020-10-21 2023-08-15 有研工程技术研究院有限公司 一种NOx气体传感器
US12480908B1 (en) * 2021-01-21 2025-11-25 Triad National Security, Llc Solid state multi-electrode sensor array for real-time monitoring of multi-gas mixtures
CN113340356B (zh) * 2021-06-29 2022-08-26 北京科技大学 一种阵列式温度压力协同传感器及应用方法
KR102588967B1 (ko) * 2021-08-02 2023-10-12 울산과학기술원 가스 센서를 자가 보정하는 방법 및 상기 방법을 수행하는 가스 센서 보정 시스템
TWI821853B (zh) * 2022-01-05 2023-11-11 財團法人工業技術研究院 微機電感測裝置及其感測模組
CN114594141B (zh) * 2022-02-21 2024-11-22 清华大学 集成电子鼻传感结构及其使用方法
CN115096944B (zh) * 2022-06-23 2025-11-11 哈尔滨理工大学 AlN陶瓷基四悬臂桥连微热板气体传感器阵列及其制备方法
CN115753944B (zh) * 2022-11-02 2023-09-12 宁波大学 车用高温尾气传感器的交流阻抗测试系统及测试方法
GB202302557D0 (en) * 2023-02-22 2023-04-05 Mcgowan Sensor Labs Ltd A solid-state oxygen sensor chip

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59217151A (ja) * 1983-05-26 1984-12-07 Toyota Central Res & Dev Lab Inc 酸素イオン導電性固体電解質を用いた限界電流式酸素センサによる複数のガス成分濃度の検出装置
US5389225A (en) 1989-01-24 1995-02-14 Gas Research Institute Solid-state oxygen microsensor and thin structure therefor
US5389218A (en) 1989-01-24 1995-02-14 Gas Research Institute Process for operating a solid-state oxygen microsensor
EP0480076B1 (en) * 1990-09-13 1994-02-02 Honeywell B.V. Method and sensor for measuring oxygen partial pressure
US5429727A (en) * 1993-09-30 1995-07-04 Arch Development Corporation Electrocatalytic cermet gas detector/sensor
US5397442A (en) 1994-03-09 1995-03-14 Gas Research Institute Sensor and method for accurately measuring concentrations of oxide compounds in gas mixtures
DE4408504A1 (de) 1994-03-14 1995-09-21 Bosch Gmbh Robert Sensor zur Bestimmung der Konzentration von Gaskomponenten in Gasgemischen
US5783833A (en) * 1994-12-12 1998-07-21 Nikon Corporation Method and apparatus for alignment with a substrate, using coma imparting optics
SE512866C2 (sv) * 1995-02-21 2000-05-29 Volvo Ab Anordning för analys av avgaser
US5788833A (en) 1995-03-27 1998-08-04 California Institute Of Technology Sensors for detecting analytes in fluids
US5591896A (en) * 1995-11-02 1997-01-07 Lin; Gang Solid-state gas sensors
JP3333678B2 (ja) * 1996-01-05 2002-10-15 株式会社日立製作所 ガス成分センサ及び触媒診断装置
WO1997042495A1 (en) * 1996-05-07 1997-11-13 Sri International Solid state electrochemical cell for measuring components of a gas mixture, and related measurement method
EP0862056B1 (en) * 1996-09-17 2006-02-22 Kabushiki Kaisha Riken Gas sensor
EP1890139B1 (en) * 1998-02-20 2012-12-12 NGK Spark Plug Co., Ltd. NOx sensor system with control circuit unit
JP3489658B2 (ja) 1998-04-03 2004-01-26 矢崎総業株式会社 固体電解質型二酸化炭素ガス・酸素ガスセンサ
JP2000206089A (ja) 1999-01-14 2000-07-28 Yazaki Corp 固体電解質型二酸化炭素ガスセンサ
WO2001079827A1 (en) * 2000-04-13 2001-10-25 Moseley Patrick T Sensors for oxidizing gases
US6849239B2 (en) * 2000-10-16 2005-02-01 E. I. Du Pont De Nemours And Company Method and apparatus for analyzing mixtures of gases
DE10058014C2 (de) * 2000-11-23 2002-12-12 Bosch Gmbh Robert Sensorelement eines Gassensors
US6598596B2 (en) * 2001-09-28 2003-07-29 University Of Florida Solid state potentiometric gaseous oxide sensor
DE10247144A1 (de) * 2001-10-09 2003-05-22 Riken Tokio Tokyo Kk Gasdetektorelement und diese enthaltendes Gasdetektorgerät
GB2406685B (en) * 2002-06-27 2006-01-04 Snap On Tech Inc Updating diagnositc device software and enabling features
WO2004086021A2 (en) * 2003-03-26 2004-10-07 E.I. Dupont De Nemours And Company Apparatus for analyzing mixtures of gases
US20050214170A1 (en) 2004-03-23 2005-09-29 Webasto Ag Gas sensor and process for producing a gas sensor
JP2005326394A (ja) * 2004-04-13 2005-11-24 Denso Corp ガスセンサ
CN1588030A (zh) * 2004-07-09 2005-03-02 大连理工大学 一种具有温湿补偿功能的便携式气体检测分析仪
US20060070890A1 (en) 2004-09-28 2006-04-06 Tdk Corporation Gas concentration measurement method gas sensor
JP2006098136A (ja) 2004-09-28 2006-04-13 Tdk Corp ガス濃度測定方法及びガスセンサ
US7611612B2 (en) 2005-07-14 2009-11-03 Ceramatec, Inc. Multilayer ceramic NOx gas sensor device
US7294252B2 (en) * 2005-10-07 2007-11-13 Delphi Technologies, Inc. NOx sensor and methods of using the same
JP2007327933A (ja) 2006-05-12 2007-12-20 Sumitomo Electric Ind Ltd ガスセンサ及びその製造方法
CN100559176C (zh) * 2006-10-09 2009-11-11 西南交通大学 一种气体传感器及其阵列

Also Published As

Publication number Publication date
CN101889201B (zh) 2013-11-13
KR20160090405A (ko) 2016-07-29
WO2009049091A2 (en) 2009-04-16
KR101931044B1 (ko) 2018-12-19
CN101889201A (zh) 2010-11-17
US20100264900A1 (en) 2010-10-21
CA2701942A1 (en) 2009-04-16
JP2015172595A (ja) 2015-10-01
BRPI0817851A2 (pt) 2015-04-07
US9027387B2 (en) 2015-05-12
EP2201357B1 (en) 2022-09-21
KR20100081326A (ko) 2010-07-14
JP6335140B2 (ja) 2018-05-30
EP2201357A4 (en) 2013-01-09
BRPI0817851B1 (pt) 2019-03-06
JP2011501127A (ja) 2011-01-06
EP2201357A2 (en) 2010-06-30
KR20150138430A (ko) 2015-12-09
WO2009049091A3 (en) 2009-07-16
KR20170085133A (ko) 2017-07-21
US20150241383A1 (en) 2015-08-27

Similar Documents

Publication Publication Date Title
CA2701942C (en) Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors
Gardner et al. CMOS interfacing for integrated gas sensors: A review
EP4191238A1 (en) Gas sensing method and device
Wu et al. Development of chemical sensors using microfabrication and micromachining techniques
US6691554B2 (en) Nanocrystalline films for gas-reactive applications
US20190293590A1 (en) Multi-parametric sensor with bridge structure
CN107250783A (zh) 用于制造用于检测测量介质中的至少一种气态分析物的气体传感器设备的方法以及用于检测测量介质中的至少一种气态分析物的方法和气体传感器设备
JP2017166826A (ja) ガスセンサ
US5389218A (en) Process for operating a solid-state oxygen microsensor
US20070278098A1 (en) Gas sensor and gas detection system using the same
Zosel et al. Mixed potential gas sensor with short response time
CN115078474A (zh) 一种高灵敏度气体传感装置
JP7456404B2 (ja) 熱式センサ、及び熱式センサを用いた計測方法
HK1141084B (en) Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors
HK1141084A (en) Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors
Röder-Roith et al. Thick-film solid electrolyte oxygen sensors using the direct ionic thermoelectric effect
Liu Development of chemical sensors using microfabrication and micromachining techniques
KR102827586B1 (ko) 고감도 광대역 수소센서
Blackburn et al. Multifunctional gas sensor array with improved selectivity through local thermal modification
RU165023U1 (ru) Адсорбционно-резистивный газовый сенсор
US20180188202A1 (en) NOx SENSOR WITH CATALYTIC FILTER AND POLARISATION
Blackburn et al. Multifunctional Potentiometric Gas Sensor Array with an Integrated Heater and Temperature Sensors
JP2023157201A (ja) ガスセンサ
Akbar Ceramic sensors for the glass industry
Yoon et al. Detection of hydrogen and NOx gases based on a thermoelectric gas sensor with an embedded tin oxide catalyst

Legal Events

Date Code Title Description
EEER Examination request

Effective date: 20131007