JP2015133424A - 電子部品の製造方法 - Google Patents

電子部品の製造方法 Download PDF

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Publication number
JP2015133424A
JP2015133424A JP2014004537A JP2014004537A JP2015133424A JP 2015133424 A JP2015133424 A JP 2015133424A JP 2014004537 A JP2014004537 A JP 2014004537A JP 2014004537 A JP2014004537 A JP 2014004537A JP 2015133424 A JP2015133424 A JP 2015133424A
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JP
Japan
Prior art keywords
upper electrode
metal layer
refractory metal
insulating film
forming
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014004537A
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English (en)
Japanese (ja)
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JP2015133424A5 (https=
Inventor
康紀 野中
Yasunori Nonaka
康紀 野中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Device Innovations Inc
Original Assignee
Sumitomo Electric Device Innovations Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Device Innovations Inc filed Critical Sumitomo Electric Device Innovations Inc
Priority to JP2014004537A priority Critical patent/JP2015133424A/ja
Priority to US14/595,996 priority patent/US20150200243A1/en
Publication of JP2015133424A publication Critical patent/JP2015133424A/ja
Publication of JP2015133424A5 publication Critical patent/JP2015133424A5/ja
Priority to US15/599,743 priority patent/US20170256605A1/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/692—Electrodes
    • H10D1/694—Electrodes comprising noble metals or noble metal oxides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/692—Electrodes
    • H10D1/696—Electrodes comprising multiple layers, e.g. comprising a barrier layer and a metal layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/425—Barrier, adhesion or liner layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/495—Capacitive arrangements or effects of, or between wiring layers
    • H10W20/496—Capacitor integral with wiring layers

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  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
JP2014004537A 2014-01-14 2014-01-14 電子部品の製造方法 Pending JP2015133424A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014004537A JP2015133424A (ja) 2014-01-14 2014-01-14 電子部品の製造方法
US14/595,996 US20150200243A1 (en) 2014-01-14 2015-01-13 Method for fabricating electronic device
US15/599,743 US20170256605A1 (en) 2014-01-14 2017-05-19 Method for fabricating electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014004537A JP2015133424A (ja) 2014-01-14 2014-01-14 電子部品の製造方法

Publications (2)

Publication Number Publication Date
JP2015133424A true JP2015133424A (ja) 2015-07-23
JP2015133424A5 JP2015133424A5 (https=) 2017-02-16

Family

ID=53522031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014004537A Pending JP2015133424A (ja) 2014-01-14 2014-01-14 電子部品の製造方法

Country Status (2)

Country Link
US (2) US20150200243A1 (https=)
JP (1) JP2015133424A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018006620A (ja) * 2016-07-05 2018-01-11 住友電工デバイス・イノベーション株式会社 コンデンサの製造方法
JP2019033154A (ja) * 2017-08-07 2019-02-28 住友電工デバイス・イノベーション株式会社 キャパシタ構造の作製方法
JP2024000604A (ja) * 2022-06-21 2024-01-09 住友電工デバイス・イノベーション株式会社 電子デバイス

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10008559B2 (en) * 2016-03-24 2018-06-26 Taiwan Semiconductor Manufacturing Company, Ltd. Etching process control in forming MIM capacitor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0521435A (ja) * 1990-11-29 1993-01-29 Seiko Epson Corp 半導体装置
JPH05102330A (ja) * 1991-06-25 1993-04-23 Fujitsu Ltd 半導体装置の製造方法
JPH05308104A (ja) * 1992-04-30 1993-11-19 Fujitsu Ltd 半導体装置の製造方法
JPH09289287A (ja) * 1996-02-22 1997-11-04 Sharp Corp Ｍｉｍキャパシタ及びその製造方法、並びに半導体装置
JPH11233725A (ja) * 1997-07-03 1999-08-27 Siemens Ag 電極構造、電極構造の形成方法及び電極構造の接触形成方法
JP2007103977A (ja) * 2007-01-22 2007-04-19 Renesas Technology Corp 半導体集積回路装置

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US5479316A (en) * 1993-08-24 1995-12-26 Analog Devices, Inc. Integrated circuit metal-oxide-metal capacitor and method of making same
US20030025143A1 (en) * 2001-08-01 2003-02-06 Lin Benjamin Szu-Min Metal-insulator-metal capacitor and method of manufacture
US6583491B1 (en) * 2002-05-09 2003-06-24 Taiwan Semiconductor Manufacturing Co., Ltd Microelectronic fabrication having microelectronic capacitor structure fabricated therein
US20120304742A1 (en) * 2004-04-02 2012-12-06 ChipSensors Limited Integrated cmos porous sensor
EP1878809B1 (en) * 2005-04-26 2011-02-23 Mitsui Mining and Smelting Co., Ltd. ELEMENT STRUCTURE USING A Al-Ni-B ALLOY WIRING MATERIAL
US7607227B2 (en) * 2006-02-08 2009-10-27 Eastman Kodak Company Method of forming a printhead
JP4699408B2 (ja) * 2006-08-24 2011-06-08 富士通株式会社 電子デバイス及びその製造方法
US7863665B2 (en) * 2007-03-29 2011-01-04 Raytheon Company Method and structure for reducing cracks in a dielectric layer in contact with metal
US8319312B2 (en) * 2007-07-23 2012-11-27 Wispry, Inc. Devices for fabricating tri-layer beams
JP5395360B2 (ja) * 2008-02-25 2014-01-22 新光電気工業株式会社 電子部品内蔵基板の製造方法
JP2010021171A (ja) * 2008-07-08 2010-01-28 Renesas Technology Corp 半導体装置の製造方法およびそれに用いる半導体製造装置
US8148249B2 (en) * 2008-09-12 2012-04-03 Taiwan Semiconductor Manufacturing Company, Ltd. Methods of fabricating high-k metal gate devices
WO2011036428A1 (en) * 2009-09-23 2011-03-31 X-Fab Semiconductor Foundries Ag Ultra-low voltage coefficient capacitors
FR2951025B1 (fr) * 2009-10-01 2012-03-23 St Microelectronics Sa Procede d'ajustement a la fabrication d'un circuit comprenant un element resonant
JP2011228462A (ja) * 2010-04-19 2011-11-10 Taiyo Yuden Co Ltd 薄膜キャパシタ
US8815677B2 (en) * 2011-06-14 2014-08-26 Intermolecular, Inc. Method of processing MIM capacitors to reduce leakage current

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0521435A (ja) * 1990-11-29 1993-01-29 Seiko Epson Corp 半導体装置
JPH05102330A (ja) * 1991-06-25 1993-04-23 Fujitsu Ltd 半導体装置の製造方法
JPH05308104A (ja) * 1992-04-30 1993-11-19 Fujitsu Ltd 半導体装置の製造方法
JPH09289287A (ja) * 1996-02-22 1997-11-04 Sharp Corp Ｍｉｍキャパシタ及びその製造方法、並びに半導体装置
JPH11233725A (ja) * 1997-07-03 1999-08-27 Siemens Ag 電極構造、電極構造の形成方法及び電極構造の接触形成方法
JP2007103977A (ja) * 2007-01-22 2007-04-19 Renesas Technology Corp 半導体集積回路装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018006620A (ja) * 2016-07-05 2018-01-11 住友電工デバイス・イノベーション株式会社 コンデンサの製造方法
JP2019033154A (ja) * 2017-08-07 2019-02-28 住友電工デバイス・イノベーション株式会社 キャパシタ構造の作製方法
JP2024000604A (ja) * 2022-06-21 2024-01-09 住友電工デバイス・イノベーション株式会社 電子デバイス
US12456681B2 (en) 2022-06-21 2025-10-28 Sumitomo Electric Device Innovations, Inc. Electronic device
JP7826857B2 (ja) 2022-06-21 2026-03-10 住友電工デバイス・イノベーション株式会社 電子デバイス

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Publication number Publication date
US20150200243A1 (en) 2015-07-16
US20170256605A1 (en) 2017-09-07

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