FR2951025B1 - Procede d'ajustement a la fabrication d'un circuit comprenant un element resonant - Google Patents

Procede d'ajustement a la fabrication d'un circuit comprenant un element resonant

Info

Publication number
FR2951025B1
FR2951025B1 FR0956860A FR0956860A FR2951025B1 FR 2951025 B1 FR2951025 B1 FR 2951025B1 FR 0956860 A FR0956860 A FR 0956860A FR 0956860 A FR0956860 A FR 0956860A FR 2951025 B1 FR2951025 B1 FR 2951025B1
Authority
FR
France
Prior art keywords
manufacture
adjusting
circuit
resonant element
resonant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0956860A
Other languages
English (en)
Other versions
FR2951025A1 (fr
Inventor
Pierre Bar
Sylvain Joblot
David Petit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR0956860A priority Critical patent/FR2951025B1/fr
Priority to US12/896,093 priority patent/US8587921B2/en
Publication of FR2951025A1 publication Critical patent/FR2951025A1/fr
Priority to US13/159,244 priority patent/US8756778B2/en
Application granted granted Critical
Publication of FR2951025B1 publication Critical patent/FR2951025B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/228Terminals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/002Details
    • H01G4/255Means for correcting the capacitance value
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/14Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40Capacitors
    • H01L28/60Electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/43Electric condenser making
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49004Electrical device making including measuring or testing of device or component part

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
FR0956860A 2009-10-01 2009-10-01 Procede d'ajustement a la fabrication d'un circuit comprenant un element resonant Expired - Fee Related FR2951025B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0956860A FR2951025B1 (fr) 2009-10-01 2009-10-01 Procede d'ajustement a la fabrication d'un circuit comprenant un element resonant
US12/896,093 US8587921B2 (en) 2009-10-01 2010-10-01 Method of adjustment on manufacturing of a circuit having a resonant element
US13/159,244 US8756778B2 (en) 2009-10-01 2011-06-13 Method of adjustment during manufacture of a circuit having a capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0956860A FR2951025B1 (fr) 2009-10-01 2009-10-01 Procede d'ajustement a la fabrication d'un circuit comprenant un element resonant

Publications (2)

Publication Number Publication Date
FR2951025A1 FR2951025A1 (fr) 2011-04-08
FR2951025B1 true FR2951025B1 (fr) 2012-03-23

Family

ID=42269859

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0956860A Expired - Fee Related FR2951025B1 (fr) 2009-10-01 2009-10-01 Procede d'ajustement a la fabrication d'un circuit comprenant un element resonant

Country Status (2)

Country Link
US (1) US8587921B2 (fr)
FR (1) FR2951025B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8756778B2 (en) * 2009-10-01 2014-06-24 Stmicroelectronics Sa Method of adjustment during manufacture of a circuit having a capacitor
JP2015133424A (ja) * 2014-01-14 2015-07-23 住友電工デバイス・イノベーション株式会社 電子部品の製造方法
KR101700840B1 (ko) * 2014-11-13 2017-02-01 (주)와이솔 Saw 필터용 커패시터, saw 필터 및 그 제조 방법
US11532697B2 (en) * 2019-10-16 2022-12-20 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor structure and method for forming the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5622893A (en) * 1994-08-01 1997-04-22 Texas Instruments Incorporated Method of forming conductive noble-metal-insulator-alloy barrier layer for high-dielectric-constant material electrodes
US7327582B2 (en) * 2000-09-21 2008-02-05 Ultrasource, Inc. Integrated thin film capacitor/inductor/interconnect system and method
US6806553B2 (en) * 2001-03-30 2004-10-19 Kyocera Corporation Tunable thin film capacitor
TW540173B (en) * 2002-05-03 2003-07-01 Asia Pacific Microsystems Inc Bulk acoustic device having integrated fine-tuning and trimming devices
US6869895B1 (en) * 2003-09-30 2005-03-22 International Business Machines Corporation Method for adjusting capacitance of an on-chip capacitor
KR100568306B1 (ko) * 2004-07-23 2006-04-05 삼성전기주식회사 박막형 다층 세라믹 캐패시터 및 그 제조방법
US20070205849A1 (en) * 2006-03-03 2007-09-06 Brian Otis Frequency-selective transformer and mixer incorporating same
US8198538B2 (en) * 2008-02-29 2012-06-12 Industrial Technology Research Institute Capacitor devices having multi-sectional conductors

Also Published As

Publication number Publication date
US8587921B2 (en) 2013-11-19
FR2951025A1 (fr) 2011-04-08
US20110080687A1 (en) 2011-04-07

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20150630