JP6874928B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6874928B2 JP6874928B2 JP2017205093A JP2017205093A JP6874928B2 JP 6874928 B2 JP6874928 B2 JP 6874928B2 JP 2017205093 A JP2017205093 A JP 2017205093A JP 2017205093 A JP2017205093 A JP 2017205093A JP 6874928 B2 JP6874928 B2 JP 6874928B2
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- 239000004065 semiconductor Substances 0.000 title claims description 64
- 150000004767 nitrides Chemical class 0.000 claims description 40
- 239000000758 substrate Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 11
- 239000010931 gold Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 239000010936 titanium Substances 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007687 exposure technique Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 150000003608 titanium Chemical class 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
- H01L29/7783—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Description
最初に、本発明の実施形態の内容を列記して説明する。一実施形態に係る半導体装置は、窒化物半導体層と、窒化物半導体層上に設けられ、第1方向に並ぶソース電極、ゲート電極、及びドレイン電極と、窒化物半導体層上に設けられ、ゲート電極を覆う第1部分を含む絶縁膜と、絶縁膜の第1部分上に設けられたフィールドプレートと、ソース電極の表面と接触し、ソース電極の表面上から第1方向と交差する第2方向に延びるソース配線と、を備える。ゲート電極は、第2方向におけるソース電極の端部外方へ延在する。フィールドプレートは、第1部分上からゲート電極上をソース電極の端部外方へ延在する部分を含み、該部分においてソース配線と接触する。
本発明の実施形態に係る半導体装置の製造方法および半導体装置の具体例を、以下に図面を参照しつつ説明する。なお、本発明はこれらの例示に限定されるものではなく、特許請求の範囲によって示され、特許請求の範囲と均等の意味及び範囲内でのすべての変更が含まれることが意図される。以下の説明では、図面の説明において同一の要素には同一の符号を付し、重複する説明を省略する。
Claims (4)
- 窒化物半導体層と、
前記窒化物半導体層上に設けられ、第1方向に並ぶソース電極、ゲート電極、及びドレイン電極と、
前記窒化物半導体層上に設けられ、前記ゲート電極を覆う第1部分を含む絶縁膜と、
前記絶縁膜の前記第1部分上に設けられたフィールドプレートと、
前記ソース電極の表面と接触し、前記ソース電極の前記表面上から前記第1方向と交差する第2方向に延びるソース配線と、
を備え、
前記ゲート電極は、前記第2方向における前記ソース電極の端部外方へ延在しており、
前記フィールドプレートは、前記第1部分上から前記ゲート電極上を前記ソース電極の端部外方へ延在する部分を含み、該部分において前記ソース配線と接触する、半導体装置。 - 前記絶縁膜は、前記ゲート電極と前記ドレイン電極との間に位置する第2部分を更に含み、
前記フィールドプレートは、前記絶縁膜の前記第2部分上にも設けられており、前記第2部分上から前記ゲート電極の側面に沿って前記ソース電極の端部外方へ延在する部分を更に含み、該部分においても前記ソース配線と接触する、請求項1に記載の半導体装置。 - 前記フィールドプレートにおいて前記ソース電極と接触する部分の前記第2方向における幅は、前記フィールドプレートにおいて前記ソース電極と前記ドレイン電極との間に位置する部分の前記第1方向における幅よりも広い、請求項1または2に記載の半導体装置。
- 前記ソース電極の端部外方は、前記窒化物半導体層の不活性領域上である、請求項1〜3の何れか1項に記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2017205093A JP6874928B2 (ja) | 2017-10-24 | 2017-10-24 | 半導体装置 |
CN201811242525.0A CN109698236B (zh) | 2017-10-24 | 2018-10-24 | 半导体装置 |
US16/169,826 US10546935B2 (en) | 2017-10-24 | 2018-10-24 | Semiconductor device |
TW107137508A TWI772545B (zh) | 2017-10-24 | 2018-10-24 | 半導體裝置 |
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JP2017205093A JP6874928B2 (ja) | 2017-10-24 | 2017-10-24 | 半導体装置 |
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JP2019079909A JP2019079909A (ja) | 2019-05-23 |
JP6874928B2 true JP6874928B2 (ja) | 2021-05-19 |
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US (1) | US10546935B2 (ja) |
JP (1) | JP6874928B2 (ja) |
CN (1) | CN109698236B (ja) |
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CN113436975B (zh) * | 2021-08-27 | 2021-12-14 | 深圳市时代速信科技有限公司 | 一种半导体器件及制备方法 |
CN113506821B (zh) * | 2021-09-09 | 2021-12-14 | 深圳市时代速信科技有限公司 | 半导体器件 |
WO2024030127A1 (en) * | 2022-08-03 | 2024-02-08 | Vishay Siliconix Llc | P-gan high electron mobility transistor field plating |
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EP1111683A3 (en) * | 1999-12-17 | 2005-02-02 | Matsushita Electric Industrial Co., Ltd. | High-voltage semiconductor device |
US7573078B2 (en) * | 2004-05-11 | 2009-08-11 | Cree, Inc. | Wide bandgap transistors with multiple field plates |
JP2007273920A (ja) * | 2006-03-31 | 2007-10-18 | Eudyna Devices Inc | 半導体装置およびその製造方法 |
JP2008277604A (ja) | 2007-05-01 | 2008-11-13 | Oki Electric Ind Co Ltd | 電界効果トランジスタ |
JP2010219117A (ja) * | 2009-03-13 | 2010-09-30 | Toshiba Corp | 半導体装置 |
WO2014050054A1 (ja) | 2012-09-28 | 2014-04-03 | パナソニック株式会社 | 半導体装置 |
US9745840B2 (en) * | 2012-11-16 | 2017-08-29 | Us Well Services Llc | Electric powered pump down |
US9847411B2 (en) * | 2013-06-09 | 2017-12-19 | Cree, Inc. | Recessed field plate transistor structures |
JP2015122361A (ja) * | 2013-12-20 | 2015-07-02 | 株式会社東芝 | 電界効果トランジスタ |
JP6496149B2 (ja) * | 2015-01-22 | 2019-04-03 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
JP2016171260A (ja) * | 2015-03-13 | 2016-09-23 | 株式会社東芝 | 半導体装置 |
US10541323B2 (en) * | 2016-04-15 | 2020-01-21 | Macom Technology Solutions Holdings, Inc. | High-voltage GaN high electron mobility transistors |
US10263085B2 (en) * | 2016-12-30 | 2019-04-16 | Texas Instruments Incorporated | Transistor with source field plates and non-overlapping gate runner layers |
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- 2018-10-24 CN CN201811242525.0A patent/CN109698236B/zh active Active
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TW201935688A (zh) | 2019-09-01 |
CN109698236A (zh) | 2019-04-30 |
CN109698236B (zh) | 2023-09-01 |
US20190123152A1 (en) | 2019-04-25 |
JP2019079909A (ja) | 2019-05-23 |
TWI772545B (zh) | 2022-08-01 |
US10546935B2 (en) | 2020-01-28 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |