JP2015083373A5 - - Google Patents
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- Publication number
- JP2015083373A5 JP2015083373A5 JP2014187212A JP2014187212A JP2015083373A5 JP 2015083373 A5 JP2015083373 A5 JP 2015083373A5 JP 2014187212 A JP2014187212 A JP 2014187212A JP 2014187212 A JP2014187212 A JP 2014187212A JP 2015083373 A5 JP2015083373 A5 JP 2015083373A5
- Authority
- JP
- Japan
- Prior art keywords
- support
- adhesive layer
- supplied
- unit
- laminate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012790 adhesive layer Substances 0.000 claims 20
- 238000004519 manufacturing process Methods 0.000 claims 6
- 238000010030 laminating Methods 0.000 claims 2
- 238000004804 winding Methods 0.000 claims 2
- 238000000926 separation method Methods 0.000 claims 1
- 239000002344 surface layer Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014187212A JP6460689B2 (ja) | 2013-09-18 | 2014-09-16 | 積層体の作製装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013193314 | 2013-09-18 | ||
| JP2013193314 | 2013-09-18 | ||
| JP2014187212A JP6460689B2 (ja) | 2013-09-18 | 2014-09-16 | 積層体の作製装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018240869A Division JP6732002B2 (ja) | 2013-09-18 | 2018-12-25 | 積層体の作製装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015083373A JP2015083373A (ja) | 2015-04-30 |
| JP2015083373A5 true JP2015083373A5 (enExample) | 2017-10-26 |
| JP6460689B2 JP6460689B2 (ja) | 2019-01-30 |
Family
ID=52666884
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014187212A Expired - Fee Related JP6460689B2 (ja) | 2013-09-18 | 2014-09-16 | 積層体の作製装置 |
| JP2018240869A Active JP6732002B2 (ja) | 2013-09-18 | 2018-12-25 | 積層体の作製装置 |
| JP2020117076A Withdrawn JP2020184090A (ja) | 2013-09-18 | 2020-07-07 | 表示装置 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018240869A Active JP6732002B2 (ja) | 2013-09-18 | 2018-12-25 | 積層体の作製装置 |
| JP2020117076A Withdrawn JP2020184090A (ja) | 2013-09-18 | 2020-07-07 | 表示装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9981457B2 (enExample) |
| JP (3) | JP6460689B2 (enExample) |
| KR (1) | KR102302067B1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9229481B2 (en) | 2013-12-20 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| KR102358935B1 (ko) * | 2014-02-12 | 2022-02-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전자 기기 |
| CN110625540B (zh) | 2014-05-03 | 2021-10-29 | 株式会社半导体能源研究所 | 薄膜状部件支撑设备 |
| JP6548871B2 (ja) | 2014-05-03 | 2019-07-24 | 株式会社半導体エネルギー研究所 | 積層体の基板剥離装置 |
| JP6378530B2 (ja) | 2014-05-03 | 2018-08-22 | 株式会社半導体エネルギー研究所 | フィルム吸着機構 |
| KR102368997B1 (ko) | 2014-06-27 | 2022-02-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 장치, 모듈, 전자 기기, 발광 장치의 제작 방법 |
| US11158841B2 (en) * | 2015-12-28 | 2021-10-26 | Hon Hai Precision Industry Co., Ltd. | Method for manufacturing organic el display device |
| US10259207B2 (en) | 2016-01-26 | 2019-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming separation starting point and separation method |
| US10279576B2 (en) | 2016-04-26 | 2019-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Peeling method and manufacturing method of flexible device |
| US10804407B2 (en) * | 2016-05-12 | 2020-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Laser processing apparatus and stack processing apparatus |
| IT201600087263A1 (it) * | 2016-08-25 | 2018-02-25 | Automatic Lamination Tech S R L | Apparecchiatura per la realizzazione di un pannello composito comprendente una pellicola biadesiva interposta tra due sottili lastre metalliche |
| CN107120875B (zh) * | 2017-05-09 | 2022-05-20 | 澳柯玛股份有限公司 | 一种使内冷凝器贴合箱壳的装置及方法 |
| CN110216975B (zh) * | 2019-07-09 | 2025-03-11 | 安吉八塔机器人有限公司 | 一种多功能复合机器人系统 |
| CN110881252B (zh) * | 2019-11-26 | 2021-02-19 | 南通深南电路有限公司 | 印制电路板生产设备的控制方法及印制电路板生产设备 |
| CN111683460A (zh) * | 2020-05-26 | 2020-09-18 | 江西源盛泰电子科技有限公司 | 一种fpc钢片生产设备 |
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| JP2810532B2 (ja) | 1990-11-29 | 1998-10-15 | キヤノン株式会社 | 堆積膜形成方法及び堆積膜形成装置 |
| JP2975151B2 (ja) | 1991-03-28 | 1999-11-10 | キヤノン株式会社 | 半導体素子の連続的製造装置 |
| JP3118037B2 (ja) | 1991-10-28 | 2000-12-18 | キヤノン株式会社 | 堆積膜形成方法および堆積膜形成装置 |
| US6171674B1 (en) | 1993-07-20 | 2001-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Hard carbon coating for magnetic recording medium |
| US5457299A (en) * | 1993-10-29 | 1995-10-10 | International Business Machines Corporation | Semiconductor chip packaging method which heat cures an encapsulant deposited on a chip using a laser beam to heat the back side of the chip |
| JP3175894B2 (ja) | 1994-03-25 | 2001-06-11 | 株式会社半導体エネルギー研究所 | プラズマ処理装置及びプラズマ処理方法 |
| JPH08153759A (ja) * | 1994-11-29 | 1996-06-11 | Nec Yamagata Ltd | シングルポイントボンダーおよび半導体装置の製造方法 |
| JP3698749B2 (ja) | 1995-01-11 | 2005-09-21 | 株式会社半導体エネルギー研究所 | 液晶セルの作製方法およびその作製装置、液晶セルの生産システム |
| US5736431A (en) | 1995-02-28 | 1998-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing thin film solar battery |
| US6273955B1 (en) | 1995-08-28 | 2001-08-14 | Canon Kabushiki Kaisha | Film forming apparatus |
| JPH10328612A (ja) * | 1997-05-29 | 1998-12-15 | Idemitsu Kosan Co Ltd | 液晶光学素子の製造方法 |
| JPH11204548A (ja) * | 1998-01-09 | 1999-07-30 | Hitachi Cable Ltd | 半導体チップの貼付方法および貼付装置 |
| JP4293385B2 (ja) | 1998-01-27 | 2009-07-08 | 株式会社半導体エネルギー研究所 | 光電変換装置の作製方法 |
| US20030009876A1 (en) * | 2000-01-14 | 2003-01-16 | Akira Yamauchi | Method and device for chip mounting |
| JP2001316818A (ja) | 2000-02-29 | 2001-11-16 | Canon Inc | 膜形成方法及び形成装置、並びにシリコン系膜、起電力素子及びそれを用いた太陽電池、センサー及び撮像素子 |
| JP4316767B2 (ja) | 2000-03-22 | 2009-08-19 | 株式会社半導体エネルギー研究所 | 基板処理装置 |
| JP2001274179A (ja) * | 2000-03-28 | 2001-10-05 | Hitachi Ltd | チップマウンタおよび半導体装置の製造方法 |
| US6680724B2 (en) * | 2001-05-31 | 2004-01-20 | Hewlett-Packard Development Company, L.P. | Flexible electronic viewing device |
| US8415208B2 (en) | 2001-07-16 | 2013-04-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and peeling off method and method of manufacturing semiconductor device |
| JP4027740B2 (ja) | 2001-07-16 | 2007-12-26 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| TW558743B (en) * | 2001-08-22 | 2003-10-21 | Semiconductor Energy Lab | Peeling method and method of manufacturing semiconductor device |
| US6885146B2 (en) | 2002-03-14 | 2005-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Display device comprising substrates, contrast medium and barrier layers between contrast medium and each of substrates |
| EP1376658B1 (en) * | 2002-06-25 | 2011-07-06 | Kabushiki Kaisha Toshiba | Method and apparatus for manufacturing semiconductor device |
| WO2004070810A1 (ja) | 2003-02-05 | 2004-08-19 | Semiconductor Energy Laboratory Co., Ltd. | 表示装置の製造方法 |
| US7554121B2 (en) | 2003-12-26 | 2009-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Organic semiconductor device |
| JP4505721B2 (ja) * | 2004-02-02 | 2010-07-21 | セイコーエプソン株式会社 | 電気光学装置およびこれを備えた電子機器 |
| KR101187403B1 (ko) | 2004-06-02 | 2012-10-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 제조방법 |
| US7591863B2 (en) | 2004-07-16 | 2009-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Laminating system, IC sheet, roll of IC sheet, and method for manufacturing IC chip |
| CN100530575C (zh) | 2004-07-30 | 2009-08-19 | 株式会社半导体能源研究所 | 层压系统、ic薄片、ic薄片卷、以及ic芯片的制造方法 |
| US8040469B2 (en) | 2004-09-10 | 2011-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Display device, method for manufacturing the same and apparatus for manufacturing the same |
| JP2006323032A (ja) * | 2005-05-17 | 2006-11-30 | Sony Corp | フラットパネルディスプレイディバイスの欠陥画素リペア装置及びその欠陥画素リペア方法 |
| JP4916680B2 (ja) * | 2005-06-30 | 2012-04-18 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法、剥離方法 |
| US7666766B2 (en) | 2005-09-27 | 2010-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Film formation apparatus, method for forming film, and method for manufacturing photoelectric conversion device |
| US20070183184A1 (en) | 2006-02-03 | 2007-08-09 | Semiconductor Energy Laboratory Ltd. | Apparatus and method for manufacturing semiconductor device |
| JP2008015041A (ja) * | 2006-07-03 | 2008-01-24 | Dainippon Printing Co Ltd | アライメント貼合装置及びアライメント貼合方法 |
| TWI433306B (zh) | 2006-09-29 | 2014-04-01 | Semiconductor Energy Lab | 半導體裝置的製造方法 |
| US8137417B2 (en) | 2006-09-29 | 2012-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Peeling apparatus and manufacturing apparatus of semiconductor device |
| KR100781708B1 (ko) * | 2006-10-12 | 2007-12-03 | 삼성전자주식회사 | 플렉서블 표시부 및 그를 갖는 휴대 단말기 |
| JP5108293B2 (ja) * | 2006-12-20 | 2012-12-26 | 富士フイルム株式会社 | 携帯機器及び撮像装置 |
| US7897482B2 (en) * | 2007-05-31 | 2011-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| US8387674B2 (en) * | 2007-11-30 | 2013-03-05 | Taiwan Semiconductor Manufacturing Comany, Ltd. | Chip on wafer bonder |
| KR20110007134A (ko) * | 2008-04-17 | 2011-01-21 | 아사히 가라스 가부시키가이샤 | 유리 적층체, 지지체를 부착한 표시 장치용 패널 및 이들의 제조 방법 |
| JP5151653B2 (ja) * | 2008-04-23 | 2013-02-27 | 大日本印刷株式会社 | 貼合装置及び貼合方法 |
| JP2010267420A (ja) * | 2009-05-13 | 2010-11-25 | Panasonic Corp | 有機el素子検査リペア方法および装置 |
| WO2011024690A1 (ja) * | 2009-08-27 | 2011-03-03 | 旭硝子株式会社 | フレキシブル基材-支持体の積層構造体、支持体付き電子デバイス用パネル、および電子デバイス用パネルの製造方法 |
| KR101176474B1 (ko) * | 2011-05-12 | 2012-08-24 | 주식회사 코윈디에스티 | 픽셀재생장치 및 이를 이용한 픽셀재생방법 |
| US9487880B2 (en) | 2011-11-25 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Flexible substrate processing apparatus |
| DE102012101210A1 (de) * | 2012-02-15 | 2013-08-22 | Maxim Stührenberg | Anzeigevorrichtung mit einem Gehäuse und mit einer flexiblen elektronisch ansteuerbaren Anzeigeeinrichtung |
-
2014
- 2014-09-12 US US14/484,802 patent/US9981457B2/en active Active
- 2014-09-16 KR KR1020140123007A patent/KR102302067B1/ko not_active Expired - Fee Related
- 2014-09-16 JP JP2014187212A patent/JP6460689B2/ja not_active Expired - Fee Related
-
2018
- 2018-12-25 JP JP2018240869A patent/JP6732002B2/ja active Active
-
2020
- 2020-07-07 JP JP2020117076A patent/JP2020184090A/ja not_active Withdrawn
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