JP2015035575A - 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置 - Google Patents
圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置 Download PDFInfo
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- JP2015035575A JP2015035575A JP2014001901A JP2014001901A JP2015035575A JP 2015035575 A JP2015035575 A JP 2015035575A JP 2014001901 A JP2014001901 A JP 2014001901A JP 2014001901 A JP2014001901 A JP 2014001901A JP 2015035575 A JP2015035575 A JP 2015035575A
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- piezoelectric
- curie temperature
- piezoelectric material
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- NUMHJBONQMZPBW-UHFFFAOYSA-K bis(2-ethylhexanoyloxy)bismuthanyl 2-ethylhexanoate Chemical compound [Bi+3].CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O NUMHJBONQMZPBW-UHFFFAOYSA-K 0.000 description 4
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Images
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- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
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Abstract
Description
Phase Boundary)付近の組成を使用することにより、大きな圧電特性が得られることが知られている。しかしながら、横軸に組成を縦軸に温度を採った相図において、PZTはMPBラインが温度軸に対してほぼ平行に位置する、または組成軸に対して垂直に位置しているが、非鉛系圧電材料では、一般的には、そのMPBが温度軸に対して傾斜している(例えば、特許文献1の図1など参照)。このようにMBPラインが傾斜している場合、要求特性に応じて特定の温度例えば室温でMPB上に位置する組成を選んでも、使用環境温度が変化すれば組成−温度状態図上でMPBから離れることから、使用環境温度の変化や使用中の発熱等に起因して素子の圧電特性、誘電特性が低下する温度領域が存在するという問題がある。
かかる態様では、鉛を含有していないため環境負荷を低減することができ、広い使用環境温度範囲で圧電特性、誘電特性が高く、また、キュリー温度が高い圧電材料となる。
これによれば、鉛を含有していないため環境負荷を低減することができ、広い使用環境温度範囲で優れた特性が維持できる圧電素子が実現できる。
これによれば、鉛を含有していないため環境負荷を低減することができ、広い使用環境温度範囲で優れた特性が維持できる圧電素子を具備する液体噴射ヘッドが実現できる。
これによれば、鉛を含有していないため環境負荷を低減することができ、広い使用環境温度範囲で優れた特性が維持できる圧電素子を具備する液体噴射ヘッドを備えた液体噴射装置が実現できる。
これによれば、鉛を含有していないため環境負荷を低減することができ、広い使用環境温度範囲で優れた特性が維持できる圧電素子を具備する超音波センサーが実現できる。
これによれば、鉛を含有していないため環境負荷を低減することができ、広い使用環境温度範囲で優れた特性が維持できる圧電素子を具備する圧電モーターが実現できる。
これによれば、鉛を含有していないため環境負荷を低減することができ、広い使用環境温度範囲で優れた特性が維持できる圧電素子を具備する発電装置が実現できる。
(圧電材料)
本発明の圧電材料は、単独組成では菱面体晶であり且つキュリー温度がTc1であるペロブスカイト型構造を有する複合酸化物からなる第1成分と、単独組成では菱面体晶以外の結晶であり且つキュリー温度がTc2であるペロブスカイト型構造を有する複合酸化物からなる第2成分と、前記第2成分と同一のペロブスカイト型構造を有する複合酸化物からなり且つキュリー温度がTc3であるペロブスカイト型構造を有する複合酸化物からなる第3成分とを含有し、前記Tc1は前記Tc2より高く、前記Tc3は前記Tc1以上であり、(0.9×Tc1+0.1×Tc2)の値が280℃以下である。
例えば、第1成分がSr、Li及びCaから選択される少なくとも1種を添加した(Bi,Na)TiO3であり、第2成分がBaTiO3であり、第3成分がKNbO3である。
図1には、第1成分がSrを添加した(Bi,Na)TiO3であり、第2成分がBaTiO3である場合の横軸に前記第1成分の前記第1成分と前記第2成分の合計に対する割合(第1成分/(第1成分+第2成分))を、縦軸に温度を採った相図を示す。この場合、第1成分であるSrを添加した(Bi,Na)TiO3のキュリー温度Tcが268℃、第2成分であるBaTiO3のキュリー温度が123℃であり、MPBラインm1は、Srを添加した(Bi,Na)TiO3の組成比が0.33〜0.70に亘る範囲で傾斜している。このような系に、第3成分であるKNbO3(キュリー温度Tc3=435℃)を、第2成分と第3成分との合計に対して0.40の割合で混合すると、第2成分及び第3成分の組成のキュリー温度は310℃となる。第1成分の第1成分と第2成分の合計に対する割合を横軸とした相図におけるMPBラインM1は、垂直に近く立って、第1成分が0.50〜0.70の範囲に移項するだけである。また、MPBラインm1の頂点のキュリー温度が170℃であるのに対し、MPBラインM1の頂点のキュリー温度Tc4は300℃である。これにより、広い使用環境温度範囲で圧電特性、誘電特性が高く、また、キュリー温度が高い圧電材料が実現できる。ここで、相図は菱面体晶で構成される組成範囲(図ではRと表示)と正方晶(図ではTと表示)または斜方晶(図ではOと表示)と立方晶(図ではCと表示)で構成されている。
図4は、本発明の一実施形態に係る圧電素子を具備する液体噴射ヘッドの一例であるインクジェット式記録ヘッドの概略構成を示す分解斜視図であり、図5は、図4の平面図であり、図6は図5のA−A′線断面図である。図4〜図6に示すように、本実施形態の流路形成基板10は、シリコン単結晶基板からなり、その一方の面には二酸化シリコンからなる弾性膜50が形成されている。
まず、シリコンウェハーである流路形成基板用ウェハー110の表面に弾性膜50を構成する二酸化シリコン(SiO2)等からなる二酸化シリコン膜を熱酸化等で形成する。次いで、弾性膜50(二酸化シリコン膜)上に、酸化チタン等からなる密着層56を、反応性スパッター法や熱酸化等で形成する。
次に、流路形成基板用ウェハー上に、マスク膜を新たに形成し、所定形状にパターニングする。
第1成分としてSrを添加した(Bi0.5,Na0.5)TiO3、第2成分としてBaTiO3、第3成分としてKNbO3を選定し、三者のモル比を0.56:0.39:0.26となる組成の圧電材料を以下の通り形成した。
第1成分としてSrを添加した(Bi0.5,Na0.5)TiO3、第2成分として(Ba0.8,Ca0.2)TiO3、第3成分として(Bi0.5,K0.5)TiO3を選定し、三者のモル比を0.53:0.32:0.21となる組成の圧電材料を以下の通り形成した。
第1成分としてSrを添加した(Bi0.5,Na0.5)TiO3、第2成分として(Ba0.8,Ca0.2)TiO3、第3成分としてNaNbO3を選定し、三者のモル比を0.40:0.48:0.12となる組成の圧電材料を以下の通り形成した。
以上、本発明の圧電材料に関する一実施形態を説明したが、本発明の圧電材料の基本的構成は上述したものに限定されるものではない。
表1はペロブスカイト型結晶(ABO3:AとBは金属元素)を構成する組成(AサイトとBサイト)とその結晶系及びそのキュリー温度Tcを記載したものである。MPBは異なる結晶系の組合せで形成することができるので、以下の組合せでも圧電性能の向上とキュリー温度Tcの向上とを獲得することが出来る。
I 正方晶系と斜方晶系
II 正方晶系と単斜晶系
III 斜方晶系と単斜晶系
Mn、Ge、Si、B、Cu、Ag。
以上、本発明の一実施形態を説明したが、本発明の基本的構成は上述したものに限定されるものではない。例えば、上述した実施形態では、流路形成基板10として、シリコン単結晶基板を例示したが、特にこれに限定されず、例えば、SOI基板、ガラス等の材料を用いるようにしてもよい。
本発明の圧電素子は、良好な絶縁性及び圧電特性を示すため、上述したように、インクジェット式記録ヘッドに代表される液体噴射ヘッドの圧電素子に適用することができるものであるが、これに限定されるものではない。本発明に係る圧電素子は、優れた変位特性を示すことから、インクジェット式記録ヘッドに代表される液体噴射ヘッドに限られず、液体噴射装置、超音波センサー、圧電モーター、超音波モーター、圧電トランス、振動式ダスト除去装置、圧力−電気変換機、超音波発信機、圧力センサー、加速度センサーなどに搭載して好適に用いることができる。
また、本発明に係る圧電素子は、良好なエネルギー電気変換能力を示すことから、発電装置に搭載して好適に用いることができる。発電装置としては、圧力電気変換効果を使用した発電装置、光による電子励起(光起電力)を使用した発電装置、熱による電子励起(熱起電力)を使用した発電装置、振動を利用した発電装置などが挙げられる。
かかる態様では、鉛を含有していないため環境負荷を低減することができ、広い使用環境温度範囲で圧電特性、誘電特性が高く、また、キュリー温度が高い圧電材料となる。
図1には、第1成分がSrを添加した(Bi,Na)TiO3であり、第2成分がBaTiO3である場合の横軸に前記第2成分の、前記第1成分と前記第2成分の合計に対する割合(第2成分/(第1成分+第2成分))を、縦軸に温度を採った相図を示す。この場合、第1成分であるSrを添加した(Bi,Na)TiO3のキュリー温度Tcが268℃、第2成分であるBaTiO3のキュリー温度が123℃であり、MPBラインm1は、Srを添加した(Bi,Na)TiO3の組成比が0.33〜0.70に亘る範囲で傾斜している。このような系に、第3成分であるKNbO3(キュリー温度Tc3=435℃)を、第2成分と第3成分との合計に対して0.40の割合で混合すると、第2成分及び第3成分の組成のキュリー温度は310℃となる。第2成分及び第3成分の、第1成分と第2成分と第3成分との合計に対する割合を横軸とした相図におけるMPBラインM1は、垂直に近く立って、第1成分が0.50〜0.70の範囲で変化するだけである。また、MPBラインm1の頂点のキュリー温度が170℃であるのに対し、MPBラインM1の頂点のキュリー温度Tc4は300℃である。これにより、広い使用環境温度範囲で圧電特性、誘電特性が高く、また、キュリー温度が高い圧電材料が実現できる。ここで、相図は菱面体晶で構成される組成範囲(図ではRと表示)と正方晶(図ではTと表示)または斜方晶(図ではOと表示)と立方晶(図ではCと表示)で構成されている。
Claims (13)
- 単独組成では菱面体晶であり且つキュリー温度がTc1であるペロブスカイト型構造を有する複合酸化物からなる第1成分と、単独組成では菱面体晶以外の結晶であり且つキュリー温度がTc2であるペロブスカイト型構造を有する複合酸化物からなる第2成分と、単独組成では前記第2成分とは同一の結晶系で且つキュリー温度がTc3であるペロブスカイト型構造を有する複合酸化物からなる第3成分とを含有し、
前記Tc1は前記Tc2より高く、前記Tc3は前記Tc1以上であることを特徴とする圧電材料。 - (0.9×Tc1+0.1×Tc2)の値が280℃以下であり、
横軸に前記第1成分と、前記第1成分及び前記第2成分との組成比(第1成分/(第1成分+第2成分))を、縦軸に温度を採った相図におけるMPBライン近傍の組成を有し、当該組成のキュリー温度Tc4が280℃以上であることを特徴とする請求項1に圧電材料。 - (第2成分+第3成分)の(第1成分+第2成分+第3成分)に対するモル比率が0.1以上0.9以下であることを特徴とする請求項1又は2に記載の圧電材料。
- 第3成分の(第2成分+第3成分)に対するモル比率が0.05〜0.49であることを特徴とする請求項1〜3に記載の圧電材料。
- 前記第1成分がSr、Li及びCaから選択される少なくとも1種を添加した(Bi,Na)TiO3であり、前記第2成分がBaTiO3であり、前記第3成分がKNbO3であることを特徴とする請求項1〜4の何れか一項に記載の圧電材料。
- 前記第1成分がSr、Li及びCaから選択される少なくとも1種を添加した(Bi,Na)TiO3であり、前記第2成分が(Ba,Ca)TiO3であり、前記第3成分が(Bi,K)TiO3であることを特徴とする請求項1〜4の何れか一項に記載の圧電材料。
- 前記第1成分がSr、Li及びCaから選択される少なくとも1種を添加した(Bi,Na)TiO3であり、前記第2成分が(Ba,Ca)TiO3であり、前記第3成分がNaNbO3であることを特徴とする請求項1〜4の何れか一項に記載の圧電材料。
- 請求項1〜7の何れか一項の圧電材料からなる圧電体層と、前記圧電体層に設けられた電極と、を備えたことを特徴とする圧電素子。
- ノズル開口に連通する圧力発生室と、圧電体層及び該圧電体層に設けられた電極を備えた圧電素子と、を具備し、前記圧電体層が請求項1〜7の何れか一項の圧電材料からなることを特徴とする液体噴射ヘッド。
- 請求項9に記載する液体噴射ヘッドを具備することを特徴とする液体噴射装置。
- 請求項8に記載の圧電素子を駆動することによって生じる変位を外部に伝える振動部と、発生した圧力波を外部に伝える整合層を備えたことを特徴とする超音波センサー。
- 請求項8に記載の圧電素子を配した振動体と、接触する移動体とを少なくとも具備する圧電モータ−。
- 請求項8に記載の圧電素子により生じた電荷を上記電極から取り出す電極を備えたことを特徴とする発電装置。
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KR20150002442A (ko) | 2015-01-07 |
CN104253207B (zh) | 2017-06-30 |
EP2819196B1 (en) | 2016-09-07 |
CN104253207A (zh) | 2014-12-31 |
KR101586231B1 (ko) | 2016-01-18 |
EP2819196A1 (en) | 2014-12-31 |
US20150002585A1 (en) | 2015-01-01 |
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US9276193B2 (en) | 2016-03-01 |
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