JP2014503996A5 - - Google Patents

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JP2014503996A5
JP2014503996A5 JP2013540036A JP2013540036A JP2014503996A5 JP 2014503996 A5 JP2014503996 A5 JP 2014503996A5 JP 2013540036 A JP2013540036 A JP 2013540036A JP 2013540036 A JP2013540036 A JP 2013540036A JP 2014503996 A5 JP2014503996 A5 JP 2014503996A5
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nanostructures
array
nanowires
forming
nanowire
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JP2013540036A
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JP2014503996A (ja
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Priority claimed from PCT/US2011/061301 external-priority patent/WO2012068426A2/en
Publication of JP2014503996A publication Critical patent/JP2014503996A/ja
Publication of JP2014503996A5 publication Critical patent/JP2014503996A5/ja
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JP2013540036A 2010-11-19 2011-11-18 半導体物質の長いナノ構造のアレイおよびその製造方法 Pending JP2014503996A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US41557710P 2010-11-19 2010-11-19
US61/415,577 2010-11-19
PCT/US2011/061301 WO2012068426A2 (en) 2010-11-19 2011-11-18 Arrays of long nanostructures in semiconductor materials and method thereof

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JP2014503996A JP2014503996A (ja) 2014-02-13
JP2014503996A5 true JP2014503996A5 (enExample) 2015-01-08

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JP2013540036A Pending JP2014503996A (ja) 2010-11-19 2011-11-18 半導体物質の長いナノ構造のアレイおよびその製造方法

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US (2) US9240328B2 (enExample)
EP (1) EP2641280A4 (enExample)
JP (1) JP2014503996A (enExample)
KR (1) KR20130120488A (enExample)
CN (1) CN103460417A (enExample)
CA (1) CA2818368A1 (enExample)
WO (1) WO2012068426A2 (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101631043B1 (ko) 2007-08-21 2016-06-24 더 리전트 오브 더 유니버시티 오브 캘리포니아 고성능 열전 속성을 갖는 나노구조체
US20110114146A1 (en) * 2009-11-13 2011-05-19 Alphabet Energy, Inc. Uniwafer thermoelectric modules
KR20140009182A (ko) 2010-10-22 2014-01-22 캘리포니아 인스티튜트 오브 테크놀로지 낮은 열전도율을 위한 나노메쉬 포노닉 구조들 및 열전 에너지 변환 재료들
US9240328B2 (en) 2010-11-19 2016-01-19 Alphabet Energy, Inc. Arrays of long nanostructures in semiconductor materials and methods thereof
US8736011B2 (en) * 2010-12-03 2014-05-27 Alphabet Energy, Inc. Low thermal conductivity matrices with embedded nanostructures and methods thereof
DE102011012834A1 (de) * 2011-02-22 2012-08-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung von Leichtbaustrukturelementen
US20130019918A1 (en) 2011-07-18 2013-01-24 The Regents Of The University Of Michigan Thermoelectric devices, systems and methods
US10205080B2 (en) 2012-01-17 2019-02-12 Matrix Industries, Inc. Systems and methods for forming thermoelectric devices
EP2807682A1 (en) 2012-01-25 2014-12-03 Alphabet Energy, Inc. Modular thermoelectric units for heat recovery systems and methods thereof
US9051175B2 (en) 2012-03-07 2015-06-09 Alphabet Energy, Inc. Bulk nano-ribbon and/or nano-porous structures for thermoelectric devices and methods for making the same
WO2013149205A1 (en) 2012-03-29 2013-10-03 California Institute Of Technology Phononic structures and related devices and methods
US9257627B2 (en) 2012-07-23 2016-02-09 Alphabet Energy, Inc. Method and structure for thermoelectric unicouple assembly
KR20150086466A (ko) * 2012-08-17 2015-07-28 실리시움 에너지, 인크. 열전 디바이스 형성 시스템 및 형성 방법
US9082930B1 (en) * 2012-10-25 2015-07-14 Alphabet Energy, Inc. Nanostructured thermolectric elements and methods of making the same
WO2014070795A1 (en) 2012-10-31 2014-05-08 Silicium Energy, Inc. Methods for forming thermoelectric elements
US9466668B2 (en) 2013-02-08 2016-10-11 Taiwan Semiconductor Manufacturing Company, Ltd. Inducing localized strain in vertical nanowire transistors
US9368619B2 (en) 2013-02-08 2016-06-14 Taiwan Semiconductor Manufacturing Company, Ltd. Method for inducing strain in vertical semiconductor columns
US9978863B2 (en) * 2013-08-16 2018-05-22 Taiwan Semiconductor Manufacturing Company Limited Semiconductor arrangement with one or more semiconductor columns
US9065017B2 (en) 2013-09-01 2015-06-23 Alphabet Energy, Inc. Thermoelectric devices having reduced thermal stress and contact resistance, and methods of forming and using the same
EP3123532B1 (en) 2014-03-25 2018-11-21 Matrix Industries, Inc. Thermoelectric devices and systems
WO2015157501A1 (en) * 2014-04-10 2015-10-15 Alphabet Energy, Inc. Ultra-long silicon nanostructures, and methods of forming and transferring the same
DE102014107167B4 (de) * 2014-05-21 2022-04-21 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung eines Halbleiterbauelements mit einer Strukturschicht mit einer Mehrzahl von dreidimensionalen Strukturelementen und strahlungsemittierendes Halbleiterbauelement mit einer Strukturschicht mit einer Mehrzahl von dreidimensionalen Strukturelementen
KR102334301B1 (ko) * 2014-07-24 2021-12-02 삼성전자주식회사 열전 소자, 이의 제조 방법 및 이를 포함하는 반도체 장치
CN104118843B (zh) * 2014-07-24 2017-12-01 上海师范大学 纳米结构阵列材料及其制备方法
US9564493B2 (en) 2015-03-13 2017-02-07 Taiwan Semiconductor Manufacturing Company, Ltd. Devices having a semiconductor material that is semimetal in bulk and methods of forming the same
CN104986723B (zh) * 2015-05-29 2017-01-04 中国科学技术大学先进技术研究院 一种适用纳米材料的电极的工业化生产设备及其控制方法
TW201809931A (zh) 2016-05-03 2018-03-16 麥崔克斯工業股份有限公司 熱電裝置及系統
JP2018056161A (ja) * 2016-09-26 2018-04-05 株式会社東芝 熱電変換装置
USD819627S1 (en) 2016-11-11 2018-06-05 Matrix Industries, Inc. Thermoelectric smartwatch
WO2019068034A2 (en) 2017-09-29 2019-04-04 Biothlon, Inc. NANOPORA DEVICE AND METHOD FOR MANUFACTURING THE SAME
KR102492733B1 (ko) 2017-09-29 2023-01-27 삼성디스플레이 주식회사 구리 플라즈마 식각 방법 및 디스플레이 패널 제조 방법
JP7656867B2 (ja) * 2019-10-25 2025-04-04 パナソニックＩｐマネジメント株式会社 熱電変換装置、熱電変換装置の制御方法、熱電変換装置を用いて対象物を冷却及び／又は加熱する方法及び電子デバイス
WO2021079732A1 (ja) * 2019-10-25 2021-04-29 パナソニックＩｐマネジメント株式会社 熱電変換装置、熱電変換装置の制御方法、熱電変換装置を用いて対象物を冷却及び／又は加熱する方法及び電子デバイス
CN113363150A (zh) * 2021-05-21 2021-09-07 中国科学院微电子研究所 一种硅纳米结构的制备方法及激光器

Family Cites Families (131)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2588254A (en) 1950-05-09 1952-03-04 Purdue Research Foundation Photoelectric and thermoelectric device utilizing semiconducting material
DE1483298B1 (de) 1965-06-11 1971-01-28 Siemens Ag Elektrische Kontaktanordnung zwischen einem Germanium-Silizium-Halbleiterkoerper und einem Kontaktstueck und Verfahren zur Herstellung derselben
US4251286A (en) 1979-09-18 1981-02-17 The University Of Delaware Thin film photovoltaic cells having blocking layers
US4493939A (en) 1983-10-31 1985-01-15 Varo, Inc. Method and apparatus for fabricating a thermoelectric array
US4842699A (en) 1988-05-10 1989-06-27 Avantek, Inc. Method of selective via-hole and heat sink plating using a metal mask
US5391914A (en) 1994-03-16 1995-02-21 The United States Of America As Represented By The Secretary Of The Navy Diamond multilayer multichip module substrate
US5824561A (en) 1994-05-23 1998-10-20 Seiko Instruments Inc. Thermoelectric device and a method of manufacturing thereof
US5837929A (en) 1994-07-05 1998-11-17 Mantron, Inc. Microelectronic thermoelectric device and systems incorporating such device
CN1104746C (zh) 1996-05-28 2003-04-02 松下电工株式会社 热电组件的制造方法
AU6783598A (en) 1997-03-31 1998-10-22 Research Triangle Institute Thin-film thermoelectric device and fabrication method of same
US6388185B1 (en) 1998-08-07 2002-05-14 California Institute Of Technology Microfabricated thermoelectric power-generation devices
US6489704B1 (en) 1999-03-11 2002-12-03 Eneco, Inc. Hybrid thermionic energy converter and method
KR101008294B1 (ko) 2001-03-30 2011-01-13 더 리전트 오브 더 유니버시티 오브 캘리포니아 나노구조체 및 나노와이어의 제조 방법 및 그로부터 제조되는 디바이스
CN101638216B (zh) 2001-03-30 2012-12-19 加利福尼亚大学董事会 纳米结构和纳米线的制造方法及由其制造的器件
US7619158B2 (en) 2001-06-01 2009-11-17 Marlow Industries, Inc. Thermoelectric device having P-type and N-type materials
US6843902B1 (en) 2001-07-20 2005-01-18 The Regents Of The University Of California Methods for fabricating metal nanowires
US20040251539A1 (en) 2001-09-12 2004-12-16 Faris Sadeg M. Thermoelectric cooler array
US7342169B2 (en) 2001-10-05 2008-03-11 Nextreme Thermal Solutions Phonon-blocking, electron-transmitting low-dimensional structures
WO2003046265A2 (en) 2001-11-26 2003-06-05 Massachusetts Institute Of Technology Thick porous anodic alumina films and nanowire arrays grown on a solid substrate
CN1167141C (zh) 2001-12-06 2004-09-15 天津大学 由一维纳米线阵列结构温差电材料制造的微温差电池
US7220310B2 (en) 2002-01-08 2007-05-22 Georgia Tech Research Corporation Nanoscale junction arrays and methods for making same
US8154093B2 (en) 2002-01-16 2012-04-10 Nanomix, Inc. Nano-electronic sensors for chemical and biological analytes, including capacitance and bio-membrane devices
KR20030064292A (ko) 2002-01-25 2003-07-31 가부시키가이샤 고마쓰 세이사쿠쇼 열전모듈
US6972146B2 (en) 2002-03-15 2005-12-06 Canon Kabushiki Kaisha Structure having holes and method for producing the same
US20030189202A1 (en) 2002-04-05 2003-10-09 Jun Li Nanowire devices and methods of fabrication
US7361313B2 (en) 2003-02-18 2008-04-22 Intel Corporation Methods for uniform metal impregnation into a nanoporous material
JP2004031696A (ja) 2002-06-26 2004-01-29 Kyocera Corp 熱電モジュール及びその製造方法
US6639242B1 (en) 2002-07-01 2003-10-28 International Business Machines Corporation Monolithically integrated solid-state SiGe thermoelectric energy converter for high speed and low power circuits
US7135728B2 (en) 2002-09-30 2006-11-14 Nanosys, Inc. Large-area nanoenabled macroelectronic substrates and uses therefor
US7067867B2 (en) 2002-09-30 2006-06-27 Nanosys, Inc. Large-area nonenabled macroelectronic substrates and uses therefor
US7163659B2 (en) * 2002-12-03 2007-01-16 Hewlett-Packard Development Company, L.P. Free-standing nanowire sensor and method for detecting an analyte in a fluid
JP4235440B2 (ja) 2002-12-13 2009-03-11 キヤノン株式会社 半導体デバイスアレイ及びその製造方法
WO2004071949A2 (en) 2003-02-13 2004-08-26 The Regents Of The University Of California Nanostructured casting of organic and bio-polymers in porous silicon templates
US7579077B2 (en) 2003-05-05 2009-08-25 Nanosys, Inc. Nanofiber surfaces for use in enhanced surface area applications
US7605327B2 (en) 2003-05-21 2009-10-20 Nanosolar, Inc. Photovoltaic devices fabricated from nanostructured template
US7538010B2 (en) 2003-07-24 2009-05-26 S.O.I.Tec Silicon On Insulator Technologies Method of fabricating an epitaxially grown layer
KR101132076B1 (ko) 2003-08-04 2012-04-02 나노시스, 인크. 나노선 복합체 및 나노선 복합체로부터 전자 기판을제조하기 위한 시스템 및 프로세스
US20050045702A1 (en) 2003-08-29 2005-03-03 William Freeman Thermoelectric modules and methods of manufacture
US20050060884A1 (en) 2003-09-19 2005-03-24 Canon Kabushiki Kaisha Fabrication of nanoscale thermoelectric devices
CN100397671C (zh) 2003-10-29 2008-06-25 京瓷株式会社 热电换能模块
US6969679B2 (en) 2003-11-25 2005-11-29 Canon Kabushiki Kaisha Fabrication of nanoscale thermoelectric devices
JP2007520877A (ja) 2003-12-23 2007-07-26 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ ヘテロ接合を備える半導体デバイス
KR100552707B1 (ko) 2004-04-07 2006-02-20 삼성전자주식회사 나노와이어 발광소자 및 그 제조방법
US20060233692A1 (en) 2004-04-26 2006-10-19 Mainstream Engineering Corp. Nanotube/metal substrate composites and methods for producing such composites
US20050257821A1 (en) 2004-05-19 2005-11-24 Shriram Ramanathan Thermoelectric nano-wire devices
EP1612870A1 (en) 2004-07-01 2006-01-04 Interuniversitair Microelektronica Centrum Vzw Method of manufacturing a thermoelectric generator and thermoelectric generator thus obtained
WO2006078281A2 (en) 2004-07-07 2006-07-27 Nanosys, Inc. Systems and methods for harvesting and integrating nanowires
WO2006019059A1 (ja) 2004-08-17 2006-02-23 The Furukawa Electric Co., Ltd. 熱電冷却装置
US20060076046A1 (en) 2004-10-08 2006-04-13 Nanocoolers, Inc. Thermoelectric device structure and apparatus incorporating same
US20060157101A1 (en) 2004-10-29 2006-07-20 Sakamoto Jeff S System and method for fabrication of high-efficiency durable thermoelectric devices
US9865790B2 (en) * 2004-12-07 2018-01-09 Toyota Motor Engineering & Manufacturing North America, Inc. Nanostructured bulk thermoelectric material
US7309830B2 (en) * 2005-05-03 2007-12-18 Toyota Motor Engineering & Manufacturing North America, Inc. Nanostructured bulk thermoelectric material
WO2006065806A2 (en) 2004-12-14 2006-06-22 The Regents Of The University Of California Polymer composite photonic particles
US7569202B2 (en) 2005-05-09 2009-08-04 Vesta Research, Ltd. Silicon nanosponge particles
JP2006332188A (ja) 2005-05-24 2006-12-07 Toyota Motor Corp 熱電発電モジュール
US8039726B2 (en) 2005-05-26 2011-10-18 General Electric Company Thermal transfer and power generation devices and methods of making the same
RU2296055C2 (ru) 2005-05-31 2007-03-27 Общество с ограниченной ответственностью "Восток" Наноструктурированное покрытие несущей основы
JP4522340B2 (ja) 2005-08-01 2010-08-11 シャープ株式会社 平面導波路素子
WO2007022359A2 (en) 2005-08-16 2007-02-22 The Regents Of The University Of California Vertical integrated silicon nanowire field effect transistors and methods of fabrication
EP1938391A4 (en) 2005-08-22 2016-06-29 Q1 Nanosystems Inc NANOSTRUCTURE AND THIS IMPLEMENTING PHOTOVOLTAGE CELL
JP2007059647A (ja) * 2005-08-25 2007-03-08 Denso Corp 熱電変換素子およびその製造方法
US7833816B2 (en) 2005-12-07 2010-11-16 Intel Corporation Forming a thin film thermoelectric cooler and structures formed thereby
US20070131269A1 (en) 2005-12-09 2007-06-14 Biprodas Dutta High density nanowire arrays in glassy matrix
DE102005063038A1 (de) 2005-12-29 2007-07-05 Basf Ag Nano Thermoelektrika
US7855396B2 (en) 2006-02-20 2010-12-21 Industrial Technology Research Institute Light emitting diode package structure
JP5483887B2 (ja) * 2006-03-08 2014-05-07 クナノ アーベー Ｓｉ上のエピタキシャルな半導体ナノワイヤの金属無しでの合成方法
US20070261730A1 (en) 2006-05-12 2007-11-15 General Electric Company Low dimensional thermoelectrics fabricated by semiconductor wafer etching
FR2904146B1 (fr) 2006-07-20 2008-10-17 Commissariat Energie Atomique Procede de fabrication d'une nanostructure a base de nanofils interconnectes,nanostructure et utilisation comme convertisseur thermoelectrique
US20080178921A1 (en) 2006-08-23 2008-07-31 Qi Laura Ye Thermoelectric nanowire composites
DE602006017856D1 (de) 2006-09-12 2010-12-09 Fiat Ricerche Generator von elektrischer Energie basiert auf den thermoelektrischen Effekt
US7850941B2 (en) 2006-10-20 2010-12-14 General Electric Company Nanostructure arrays and methods for forming same
DE102006055120B4 (de) 2006-11-21 2015-10-01 Evonik Degussa Gmbh Thermoelektrische Elemente, Verfahren zu deren Herstellung und deren Verwendung
US8049203B2 (en) 2006-12-22 2011-11-01 Qunano Ab Nanoelectronic structure and method of producing such
US20080178920A1 (en) 2006-12-28 2008-07-31 Schlumberger Technology Corporation Devices for cooling and power
GB0701069D0 (en) 2007-01-19 2007-02-28 Univ Bath Nanostructure template and production of semiconductors using the template
US7943234B2 (en) 2007-02-27 2011-05-17 Innovative Surface Technology, Inc. Nanotextured super or ultra hydrophobic coatings
US8641912B2 (en) 2007-05-23 2014-02-04 California Institute Of Technology Method for fabricating monolithic two-dimensional nanostructures
US7905013B2 (en) 2007-06-04 2011-03-15 Sharp Laboratories Of America, Inc. Method for forming an iridium oxide (IrOx) nanowire neural sensor array
US9209375B2 (en) 2007-07-20 2015-12-08 California Institute Of Technology Methods and devices for controlling thermal conductivity and thermoelectric power of semiconductor nanowires
KR101631043B1 (ko) 2007-08-21 2016-06-24 더 리전트 오브 더 유니버시티 오브 캘리포니아 고성능 열전 속성을 갖는 나노구조체
US20090214848A1 (en) 2007-10-04 2009-08-27 Purdue Research Foundation Fabrication of nanowire array composites for thermoelectric power generators and microcoolers
JP2009094378A (ja) 2007-10-11 2009-04-30 Panasonic Corp 半導体装置及びその製造方法
WO2009051835A1 (en) 2007-10-18 2009-04-23 United States Of America As Representated By The Administrator Of The National Aeronautics And Space Administration X-ray diffraction wafer mapping method for rhombohedral super-hetero-epitaxy
FR2923601B1 (fr) 2007-11-12 2010-01-01 Commissariat Energie Atomique Detecteur de rayonnement electromagnetique a connexion par nanofil et procede de realisation
TW200935635A (en) 2008-02-15 2009-08-16 Univ Nat Chiao Tung Method of manufacturing nanometer-scale thermoelectric device
DE102008015333B4 (de) * 2008-03-20 2021-05-12 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Nanodraht-Strukturelement, Verfahren zu dessen Herstellung, Mikroreaktorsystem und Katalysatorsystem
US20090236317A1 (en) 2008-03-21 2009-09-24 Midwest Research Institute Anti-reflection etching of silicon surfaces catalyzed with ionic metal solutions
ITRM20080193A1 (it) 2008-04-11 2009-10-12 Univ Milano Bicocca Dispositivo di conversione termo-elettrica bidirezionale ad effetto seebeck/peltier impiegante nanofili di materiale conduttore o semiconduttore.
WO2009137241A2 (en) * 2008-04-14 2009-11-12 Bandgap Engineering, Inc. Process for fabricating nanowire arrays
US7994027B2 (en) 2008-05-09 2011-08-09 George Mason Intellectual Properties, Inc. Microwave heating for semiconductor nanostructure fabrication
RU2011104079A (ru) 2008-07-06 2012-08-20 Ламос Инк. (Be) Раздельная термоэлектрическая структура, устройства и системы, в которых используется эта структура
KR101005803B1 (ko) 2008-08-11 2011-01-05 한국표준과학연구원 양자점나노선 어레이 태양광 소자 및 그 제조 방법
EP2321860B1 (en) 2008-08-11 2016-05-04 Samsung Electronics Co., Ltd. Anisotropically elongated thermoelectric material and device comprising the material
KR20100021336A (ko) 2008-08-14 2010-02-24 삼성전자주식회사 나노 헬릭스를 이용한 태양전지
US9343490B2 (en) 2013-08-09 2016-05-17 Zena Technologies, Inc. Nanowire structured color filter arrays and fabrication method of the same
US20100072461A1 (en) 2008-09-24 2010-03-25 Hanvision Co., Ltd. Thermo-electric semiconductor device and method for manufacturing the same
TWI380487B (en) 2008-12-12 2012-12-21 Ind Tech Res Inst Thermoelectric device
TWI401830B (zh) 2008-12-31 2013-07-11 Ind Tech Res Inst 低熱回流之熱電奈米線陣列及其製造方法
JP5241928B2 (ja) 2009-02-05 2013-07-17 エルジー・ケム・リミテッド 熱電素子モジュール及び熱電素子の製造方法
AU2010224003B2 (en) 2009-03-12 2013-02-14 The Curators Of The University Of Missouri High energy-density radioisotope micro power sources
WO2010120564A2 (en) 2009-03-31 2010-10-21 The Regents Of The University Of Michigan Shaping nanostructure arrays
US8470409B2 (en) 2009-04-28 2013-06-25 Ben Gurion University Of The Negev Research And Development Authority Nanowires, method of fabrication the same and uses thereof
WO2010151556A1 (en) 2009-06-22 2010-12-29 Q1 Nanosystems, Inc. Nanostructure and methods of making the same
JP2011014612A (ja) 2009-06-30 2011-01-20 Ibiden Co Ltd 配線基板及び配線基板の製造方法
US20110114146A1 (en) 2009-11-13 2011-05-19 Alphabet Energy, Inc. Uniwafer thermoelectric modules
IT1397679B1 (it) 2009-12-15 2013-01-18 Univ Milano Bicocca Elemento di conversione termo-elettrica seebeck/peltier comprendente nanofili paralleli di materiale conduttore o semiconduttore organizzati in file e colonne attraverso un corpo isolante e procedimento
EP2545585A2 (en) 2010-03-09 2013-01-16 Board of Regents of the University of Texas System Porous and non-porous nanostructures
US20130000688A1 (en) * 2010-03-23 2013-01-03 Cho Hans S Thermoelectric device
US8138068B2 (en) 2010-08-11 2012-03-20 International Business Machines Corporation Method to form nanopore array
US8512588B2 (en) 2010-08-13 2013-08-20 Lawrence Livermore National Security, Llc Method of fabricating a scalable nanoporous membrane filter
KR101075772B1 (ko) 2010-08-30 2011-10-26 삼성전기주식회사 열전 모듈 및 이를 제조하는 방법
US9240328B2 (en) 2010-11-19 2016-01-19 Alphabet Energy, Inc. Arrays of long nanostructures in semiconductor materials and methods thereof
US8736011B2 (en) 2010-12-03 2014-05-27 Alphabet Energy, Inc. Low thermal conductivity matrices with embedded nanostructures and methods thereof
US20120152295A1 (en) 2010-12-21 2012-06-21 Alphabet Energy, Inc. Arrays of filled nanostructures with protruding segments and methods thereof
US20120247527A1 (en) 2010-12-21 2012-10-04 Alphabet Energy, Inc. Electrode structures for arrays of nanostructures and methods thereof
US20120282435A1 (en) 2011-03-24 2012-11-08 University Of Massachusetts Nanostructured Silicon with Useful Thermoelectric Properties
WO2013006701A1 (en) 2011-07-05 2013-01-10 Excelitas Technologies Led Solutions, Inc Graphene-based thermopile
US8779276B2 (en) 2011-07-14 2014-07-15 Sony Corporation Thermoelectric device
US20130019918A1 (en) 2011-07-18 2013-01-24 The Regents Of The University Of Michigan Thermoelectric devices, systems and methods
US9444027B2 (en) 2011-10-04 2016-09-13 Infineon Technologies Ag Thermoelectrical device and method for manufacturing same
WO2013119298A2 (en) 2011-11-21 2013-08-15 Research Triangle Institute Nanoparticle compact materials for thermoelectric application
US8822309B2 (en) 2011-12-23 2014-09-02 Athenaeum, Llc Heterogeneous integration process incorporating layer transfer in epitaxy level packaging
EP2807682A1 (en) 2012-01-25 2014-12-03 Alphabet Energy, Inc. Modular thermoelectric units for heat recovery systems and methods thereof
US20130175654A1 (en) 2012-02-10 2013-07-11 Sylvain Muckenhirn Bulk nanohole structures for thermoelectric devices and methods for making the same
US9051175B2 (en) 2012-03-07 2015-06-09 Alphabet Energy, Inc. Bulk nano-ribbon and/or nano-porous structures for thermoelectric devices and methods for making the same
US9000557B2 (en) 2012-03-17 2015-04-07 Zvi Or-Bach Semiconductor device and structure
US8557632B1 (en) 2012-04-09 2013-10-15 Monolithic 3D Inc. Method for fabrication of a semiconductor device and structure
US9257627B2 (en) 2012-07-23 2016-02-09 Alphabet Energy, Inc. Method and structure for thermoelectric unicouple assembly
WO2014062559A2 (en) 2012-10-15 2014-04-24 Alphabet Energy, Inc. Structures and methods for multi-leg package thermoelectric devices
US9082930B1 (en) 2012-10-25 2015-07-14 Alphabet Energy, Inc. Nanostructured thermolectric elements and methods of making the same
US20140116491A1 (en) 2012-10-29 2014-05-01 Alphabet Energy, Inc. Bulk-size nanostructured materials and methods for making the same by sintering nanowires

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