JP2014233834A5 - - Google Patents
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- Publication number
- JP2014233834A5 JP2014233834A5 JP2014112281A JP2014112281A JP2014233834A5 JP 2014233834 A5 JP2014233834 A5 JP 2014233834A5 JP 2014112281 A JP2014112281 A JP 2014112281A JP 2014112281 A JP2014112281 A JP 2014112281A JP 2014233834 A5 JP2014233834 A5 JP 2014233834A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- curing agent
- layer
- hard layer
- chemical mechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims 46
- 239000003795 chemical substances by application Substances 0.000 claims 20
- 239000000126 substance Substances 0.000 claims 12
- 229920005862 polyol Polymers 0.000 claims 8
- 150000003077 polyols Chemical class 0.000 claims 8
- 239000000853 adhesive Substances 0.000 claims 7
- 230000001070 adhesive effect Effects 0.000 claims 7
- 239000004831 Hot glue Substances 0.000 claims 6
- 238000001514 detection method Methods 0.000 claims 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 6
- 239000012948 isocyanate Substances 0.000 claims 6
- 150000002513 isocyanates Chemical class 0.000 claims 6
- IBOFVQJTBBUKMU-UHFFFAOYSA-N 4,4'-methylene-bis-(2-chloroaniline) Chemical compound C1=C(Cl)C(N)=CC=C1CC1=CC=C(N)C(Cl)=C1 IBOFVQJTBBUKMU-UHFFFAOYSA-N 0.000 claims 4
- VIOMIGLBMQVNLY-UHFFFAOYSA-N 4-[(4-amino-2-chloro-3,5-diethylphenyl)methyl]-3-chloro-2,6-diethylaniline Chemical compound CCC1=C(N)C(CC)=CC(CC=2C(=C(CC)C(N)=C(CC)C=2)Cl)=C1Cl VIOMIGLBMQVNLY-UHFFFAOYSA-N 0.000 claims 4
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims 4
- 150000001412 amines Chemical class 0.000 claims 4
- 230000001588 bifunctional effect Effects 0.000 claims 4
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 4
- HOSGXJWQVBHGLT-UHFFFAOYSA-N 6-hydroxy-3,4-dihydro-1h-quinolin-2-one Chemical group N1C(=O)CCC2=CC(O)=CC=C21 HOSGXJWQVBHGLT-UHFFFAOYSA-N 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 claims 2
- 150000004985 diamines Chemical class 0.000 claims 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 2
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- SYSQUGFVNFXIIT-UHFFFAOYSA-N n-[4-(1,3-benzoxazol-2-yl)phenyl]-4-nitrobenzenesulfonamide Chemical class C1=CC([N+](=O)[O-])=CC=C1S(=O)(=O)NC1=CC=C(C=2OC3=CC=CC=C3N=2)C=C1 SYSQUGFVNFXIIT-UHFFFAOYSA-N 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- -1 polyethylene terephthalate Polymers 0.000 claims 1
- 229920000139 polyethylene terephthalate Polymers 0.000 claims 1
- 239000005020 polyethylene terephthalate Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/906,765 US9238295B2 (en) | 2013-05-31 | 2013-05-31 | Soft and conditionable chemical mechanical window polishing pad |
| US13/906,765 | 2013-05-31 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014233834A JP2014233834A (ja) | 2014-12-15 |
| JP2014233834A5 true JP2014233834A5 (enExample) | 2017-06-29 |
| JP6290004B2 JP6290004B2 (ja) | 2018-03-07 |
Family
ID=51168261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014112281A Active JP6290004B2 (ja) | 2013-05-31 | 2014-05-30 | 軟質かつコンディショニング可能な化学機械ウィンドウ研磨パッド |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9238295B2 (enExample) |
| JP (1) | JP6290004B2 (enExample) |
| KR (1) | KR102195526B1 (enExample) |
| CN (1) | CN104209853B (enExample) |
| DE (1) | DE102014007027A1 (enExample) |
| FR (1) | FR3006219B1 (enExample) |
| TW (1) | TWI574784B (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9216489B2 (en) * | 2014-03-28 | 2015-12-22 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad with endpoint detection window |
| US9259820B2 (en) * | 2014-03-28 | 2016-02-16 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad with polishing layer and window |
| US9259821B2 (en) * | 2014-06-25 | 2016-02-16 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing layer formulation with conditioning tolerance |
| TW201629467A (zh) * | 2014-12-29 | 2016-08-16 | 陶氏全球科技責任有限公司 | 化學機械拋光墊、拋光層分析器及方法 |
| US9630293B2 (en) * | 2015-06-26 | 2017-04-25 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad composite polishing layer formulation |
| US10144115B2 (en) * | 2015-06-26 | 2018-12-04 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Method of making polishing layer for chemical mechanical polishing pad |
| JP2017064887A (ja) * | 2015-10-02 | 2017-04-06 | 富士紡ホールディングス株式会社 | 研磨パッド |
| US9484212B1 (en) * | 2015-10-30 | 2016-11-01 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing method |
| TWI593511B (zh) * | 2016-06-08 | 2017-08-01 | 智勝科技股份有限公司 | 研磨墊及研磨方法 |
| US20180281149A1 (en) * | 2017-03-31 | 2018-10-04 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad |
| KR101945874B1 (ko) * | 2017-08-07 | 2019-02-11 | 에스케이씨 주식회사 | 표면 처리된 연마패드용 윈도우 및 이를 포함하는 연마패드 |
| CN107553313B (zh) * | 2017-08-31 | 2019-12-31 | 湖北鼎龙控股股份有限公司 | 一种抛光垫、聚氨酯抛光层及其制备方法 |
| US11179822B2 (en) * | 2017-08-31 | 2021-11-23 | Hubei Dinghui Microelectronics Materials Co., Ltd | Polyurethane polishing layer, polishing pad comprising polishing layer, method for preparing polishing layer and method for planarizing material |
| US10465097B2 (en) * | 2017-11-16 | 2019-11-05 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Aliphatic UV cured polyurethane optical endpoint detection windows with high UV transparency for CMP polishing pads |
| TW202225286A (zh) * | 2020-09-30 | 2022-07-01 | 日商富士紡控股股份有限公司 | 研磨墊及研磨墊之製造方法 |
| US20230059394A1 (en) * | 2021-07-02 | 2023-02-23 | Skc Solmics Co., Ltd. | Polishing pad and method for manufacturing semiconductor device using the same |
| KR102623920B1 (ko) * | 2021-07-27 | 2024-01-10 | 에스케이엔펄스 주식회사 | 연마패드 및 이를 이용한 반도체 소자의 제조방법 |
| KR20240132321A (ko) * | 2021-12-31 | 2024-09-03 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 플루오르화 중합체 윈도우를 포함하는 미세복제된 폴리싱 패드 |
| KR20230112387A (ko) * | 2022-01-20 | 2023-07-27 | 케이피엑스케미칼 주식회사 | 연마패드용 윈도우의 제조방법 및 이 방법으로 제조된 연마패드용 윈도우 |
| US20230390970A1 (en) * | 2022-06-02 | 2023-12-07 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Method of making low specific gravity polishing pads |
| CN117020936B (zh) * | 2023-10-10 | 2023-12-29 | 青禾晶元(天津)半导体材料有限公司 | 一种光催化复合抛光垫及其制备方法与抛光方法 |
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| JPH08216033A (ja) * | 1995-02-16 | 1996-08-27 | Fuji Photo Film Co Ltd | 研磨テープ |
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| KR100877390B1 (ko) | 2001-11-13 | 2009-01-07 | 도요 고무 고교 가부시키가이샤 | 연마 패드 및 그 제조 방법 |
| KR20050059123A (ko) * | 2002-08-30 | 2005-06-17 | 도레이 가부시끼가이샤 | 연마 패드, 정반 홀 커버 및 연마장치 및 연마방법 및 반도체 디바이스의 제조방법 |
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| US8697239B2 (en) * | 2009-07-24 | 2014-04-15 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Multi-functional polishing pad |
| US8551201B2 (en) | 2009-08-07 | 2013-10-08 | Praxair S.T. Technology, Inc. | Polyurethane composition for CMP pads and method of manufacturing same |
| US9156124B2 (en) | 2010-07-08 | 2015-10-13 | Nexplanar Corporation | Soft polishing pad for polishing a semiconductor substrate |
| JP5893479B2 (ja) * | 2011-04-21 | 2016-03-23 | 東洋ゴム工業株式会社 | 積層研磨パッド |
| US8512427B2 (en) * | 2011-09-29 | 2013-08-20 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Acrylate polyurethane chemical mechanical polishing layer |
| US9144880B2 (en) * | 2012-11-01 | 2015-09-29 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Soft and conditionable chemical mechanical polishing pad |
-
2013
- 2013-05-31 US US13/906,765 patent/US9238295B2/en active Active
-
2014
- 2014-05-13 DE DE102014007027.1A patent/DE102014007027A1/de active Pending
- 2014-05-28 KR KR1020140064223A patent/KR102195526B1/ko active Active
- 2014-05-30 TW TW103118951A patent/TWI574784B/zh active
- 2014-05-30 CN CN201410238604.XA patent/CN104209853B/zh active Active
- 2014-05-30 JP JP2014112281A patent/JP6290004B2/ja active Active
- 2014-05-30 FR FR1454943A patent/FR3006219B1/fr active Active
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