JP2014216645A - 半導体素子、その形成方法、半導体パッケージ、及び電子システム - Google Patents
半導体素子、その形成方法、半導体パッケージ、及び電子システム Download PDFInfo
- Publication number
- JP2014216645A JP2014216645A JP2014076229A JP2014076229A JP2014216645A JP 2014216645 A JP2014216645 A JP 2014216645A JP 2014076229 A JP2014076229 A JP 2014076229A JP 2014076229 A JP2014076229 A JP 2014076229A JP 2014216645 A JP2014216645 A JP 2014216645A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- chip
- semiconductor
- conductive
- conductive structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 407
- 238000000034 method Methods 0.000 title claims description 37
- 239000000758 substrate Substances 0.000 claims abstract description 322
- 239000000463 material Substances 0.000 claims description 74
- 230000017525 heat dissipation Effects 0.000 description 20
- 238000005452 bending Methods 0.000 description 19
- 229910000679 solder Inorganic materials 0.000 description 15
- 238000010586 diagram Methods 0.000 description 12
- 230000004888 barrier function Effects 0.000 description 11
- 230000006870 function Effects 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 230000000149 penetrating effect Effects 0.000 description 8
- 239000010949 copper Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 230000008054 signal transmission Effects 0.000 description 7
- 239000004020 conductor Substances 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- IVHJCRXBQPGLOV-UHFFFAOYSA-N azanylidynetungsten Chemical compound [W]#N IVHJCRXBQPGLOV-UHFFFAOYSA-N 0.000 description 2
- 239000011162 core material Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 238000004347 surface barrier Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910007637 SnAg Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
- H01L23/5225—Shielding layers formed together with wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/03—Manufacturing methods
- H01L2224/034—Manufacturing methods by blanket deposition of the material of the bonding area
- H01L2224/0346—Plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/03—Manufacturing methods
- H01L2224/036—Manufacturing methods by patterning a pre-deposited material
- H01L2224/03618—Manufacturing methods by patterning a pre-deposited material with selective exposure, development and removal of a photosensitive material, e.g. of a photosensitive conductive resin
- H01L2224/0362—Photolithography
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05075—Plural internal layers
- H01L2224/0508—Plural internal layers being stacked
- H01L2224/05082—Two-layer arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05147—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05155—Nickel [Ni] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/05166—Titanium [Ti] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/05176—Ruthenium [Ru] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/05181—Tantalum [Ta] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05163—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than 1550°C
- H01L2224/05184—Tungsten [W] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05568—Disposition the whole external layer protruding from the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/0557—Disposition the external layer being disposed on a via connection of the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05601—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/05611—Tin [Sn] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05644—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05647—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05655—Nickel [Ni] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0605—Shape
- H01L2224/06051—Bonding areas having different shapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0612—Layout
- H01L2224/0613—Square or rectangular array
- H01L2224/06134—Square or rectangular array covering only portions of the surface to be connected
- H01L2224/06136—Covering only the central area of the surface to be connected, i.e. central arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0618—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/06181—On opposite sides of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0651—Function
- H01L2224/06515—Bonding areas having different functions
- H01L2224/06517—Bonding areas having different functions including bonding areas providing primarily mechanical bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0651—Function
- H01L2224/06515—Bonding areas having different functions
- H01L2224/06519—Bonding areas having different functions including bonding areas providing primarily thermal dissipation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/17—Structure, shape, material or disposition of the bump connectors after the connecting process of a plurality of bump connectors
- H01L2224/1751—Function
- H01L2224/17515—Bump connectors having different functions
- H01L2224/17517—Bump connectors having different functions including bump connectors providing primarily mechanical support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/17—Structure, shape, material or disposition of the bump connectors after the connecting process of a plurality of bump connectors
- H01L2224/1751—Function
- H01L2224/17515—Bump connectors having different functions
- H01L2224/17519—Bump connectors having different functions including bump connectors providing primarily thermal dissipation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73203—Bump and layer connectors
- H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
- H01L2224/81815—Reflow soldering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06513—Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06517—Bump or bump-like direct electrical connections from device to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06527—Special adaptation of electrical connections, e.g. rewiring, engineering changes, pressure contacts, layout
- H01L2225/06537—Electromagnetic shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06541—Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06555—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking
- H01L2225/06565—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking the devices having the same size and there being no auxiliary carrier between the devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06589—Thermal management, e.g. cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/562—Protection against mechanical damage
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/1026—Compound semiconductors
- H01L2924/1027—IV
- H01L2924/10271—Silicon-germanium [SiGe]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/1026—Compound semiconductors
- H01L2924/1027—IV
- H01L2924/10272—Silicon Carbide [SiC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
【解決手段】半導体素子は前面及び該前面に対向する後面、及び前記前面と前記後面とを連結する複数の側面を有する基板を含む。前記基板の前記前面の上に、又は前記前面の近傍に内部回路が配置される。前記基板内に信号入出力貫通ビア構造体が配置される。前記基板の前記後面上に前記信号入出力貫通ビア構造体と電気的に接続された後面導電性パターンが配置される。前記基板の前記後面上に前記信号入出力貫通ビア構造体から離隔された後面導電性構造体が配置される。前記後面導電性構造体は互いに平行な複数のサポータ部分を含む。
【選択図】図1
Description
本発明の技術的思想が解決しようとする技術的課題は、半導体素子(チップ)の曲がりなどの変形を防止することができるサポータ部分を有する半導体素子を提供することにある。
本発明の技術的思想が解決しようとする技術的課題は、積層チップ構造体を有する半導体素子を提供することにある。
本発明の技術的思想が解決しようとする技術的課題は、複数のチップを含む半導体パッケージを提供することにある。
本発明の技術的思想が解決しようとする技術的課題は、複数のチップを含み、チップのうちの何れか1つにチップの曲がりを防止することができるサポータ部分を有する半導体パッケージを提供することにある。
他の実施形態において、前記後面導電性構造体の前記互いに平行な複数のサポータ部分は、前記後面導電性パターンより大きいサイズを有することができる。
さらに他の実施形態において、前記後面導電性パターンは、前記後面導電性構造体の前記互いに平行な複数のサポータ部分に挟まれた領域に配置されることができる。
さらに他の実施形態において、前記後面導電性構造体の前記互いに平行な複数のサポータ部分は、前記基板の複数の側面のうちの1つに平行であることができる。
また、前記後面導電性構造体の前記互いに平行な複数のサポータ部分は、前記後面導電性パターンと前記基板の前記側面との間に配置されることができる。
さらに他の実施形態において、前記後面導電性構造体は、前記互いに平行な複数のサポータ部分の間の領域に配置された中間サポータ部分をさらに含むことができる。
前記中間サポータ部分は複数の前記後面導電性パターンの間の領域を通ることができる。
前記中間サポータ部分は前記平行なサポータ部分の中間部との間に配置されることができる。
他の実施形態において、前記複数の側面は少なくとも対向する第1側面と第2側面を含み、前記後面導電性構造体の前記第1部分は前記基板の対向する第1及び第2側面との間に配置されることができる。ここで、前記第1部分は前記第1側面の中間部と前記第2側面の中間部とを連結する線に沿って配置されることができる。
さらに他の実施形態において、前記後面導電性構造体は、前記基板の対向する第1及び第2側面に平行な第1部分、前記第1部分に垂直な第2部分、及び前記第1部分と垂直であり且つ前記第2部分に平行な第3部分を含むことができる。
前記第1部分は前記第2と第3部分との間に位置することができる。
さらに他の実施形態において、前記基板は、前面及び後面を有する半導体基板、前記半導体基板の前記前面上の前面絶縁膜及び前記半導体基板の前記後面上に順に積層された第1後面絶縁膜及び第2後面絶縁膜を含むことができる。
前記貫通ビア構造体は、前記半導体基板を貫通し、且つ前記第1後面絶縁膜を貫通し、前記後面導電性パターン及び前記後面導電性構造体は前記第1後面絶縁膜と前記第2後面絶縁膜との間に介在されることができる。
前記第2後面絶縁膜上に配置された後面信号入出力接続パターンをさらに含むことができる。前記後面信号入出力接続パターンは前記後面導電性パターンと電気的に接続されることができる。
さらに他の実施形態において、前記基板内の接地貫通ビア構造体をさらに含むことができる。
前記後面導電性構造体は、前記接地貫通ビア構造体と電気的に接続された接地部分及び前記基板の側面のうちの何れか一側面と平行なサポータ部分を含むことができる。前記後面導電性構造体の前記接地部分及び前記サポータ部分は電気的に接続されることができる。
他の実施形態において、前記後面導電性構造体は互いに平行であり、且つ同一の長さを有する複数一対のサポータ部分を含むことができる。
さらに他の実施形態において、前記第2半導体チップが、前記第2半導体チップの前記第2前面上に配置された複数の前面ダミーパターンをさらに含むことができる。
前記複数の前面ダミーパターンと前記後面導電性構造体との間に緩衝バンプをさらに含むことができる。前記後面導電性構造体は前記複数の前面ダミーパターンと対向し、前記緩衝バンプは前記複数の前面ダミーパターンと前記後面導電性構造体とを物理的に接続することができる。
前記後面導電性構造体は前記前面ダミーパターンよりも大きい幅を有することができる。
いくつかの実施形態において、前記後面導電性構造体は、前記半導体チップの側面のうちの何れか一側面と平行なバー又はライン状の部分を有することができる。
他の実施形態において、前記基板の前記第1面上に前記複数の前記貫通電極構造体と前記複数の前記第1導電性パターンから離隔された複数のダミー導電性パターンを形成することをさらに含むことができる。
さらに他の実施形態において、前記導電性構造体は平行なサポータ部分を含むことができる。
前記複数の前記第2導電性パターンは前記導電性構造体の前記平行なサポータ部分との間に配置されることができる。
前記複数の第2導電性パターンの一部は前記平行なサポータ部分の間に配置され、前記複数の第2導電性パターンの残りは前記平行なサポータ部分の外側に配置されることができる。
他の実施形態において、前記第1チップの前記第1及び第2側面と接触する熱伝達物質膜(thermal interface material layer)をさらに含み、前記熱伝達物質膜は前記導電性構造体と接触することができる。
さらに他の実施形態において、前記熱伝達物質膜と接触するヒットスプレッダ(heat spreader)をさらに含むことができる。
図4(A)は本発明の技術的思想の実施形態による半導体素子のさらに他の例を示す斜視図であって、図4(B)は本発明の技術的思想の実施形態による半導体素子のさらに他の例を説明するための概念的な断面図である。図4(A)及び図4(B)を参照すると、本発明の技術的思想の実施形態による半導体素子は半導体チップ90cを含む。半導体チップ90cは、図1(A)及び図1(B)に示したのと同様に、前面50fs及び後面50bsを有する基板50、基板50の前面50fs上の前面導電性パターン30及び基板50の後面50bs上の後面導電性パターン64を含む。基板50は、図1(A)及び図1(B)の場合に説明したように、半導体基板1、前面絶縁膜24、後面絶縁膜39、貫通ビア構造体15、及び内部回路19を含む。
図10(A)において、サポータ部分166d_1、166d_2、166d_3は、半導体チップ190eの第3、第4側面150s_3、150s_4に到達していないのに対して、図10(B)において、サポータ部分166d’_1、166d’_2、166d’_3は、半導体チップ190e’の第3、第4側面150s_3、150s_4に到達している。
サポータ部分166g_1、166g_2は後面導電性パターン164よりも大きい幅を有する部分166g_1を含む。サポータ部分166g_1、166g_2は基板150の互いに対向する第1及び第2側面150s_1、150s_2と平行な部分166g_1を含む。前面信号入出力接続パターン130io、信号入出力貫通ビア構造体115io及び後面信号入出力接続パターン164ioは基板面に対して垂直方向に順次配列されて電気的に接続される。前面接地接続パターン130g、接地貫通ビア構造体115g及び後面導電性構造体166g_1の接地部分166g_gは基板面に対して垂直方向に順次配列されて電気的に接続される。
マイクロプロセッサユニット2620、パワー供給ユニット2630、機能ユニット2640、及びディスプレイコントローラユニット2650は、ボディー2610上に実装又は装着される。
TR 貫通ビア構造体領域
1 半導体基板
1fs 半導体基板の前面
1bs 半導体基板の後面
3 単位素子
6 下部前面絶縁膜
12 ビア絶縁パターン
15 貫通ビア構造体
15io 信号入出力貫通ビア構造体
15g 接地貫通ビア構造体
17 コンタクトプラグ
18a ビアパッド
18b 内部配線
19 内部回路
21 上部前面絶縁膜
24 前面絶縁膜
27 内部ビア
30 前面導電性パターン
30io 前面信号入出力接続パターン
30g 前面接地接続パターン
31a 前面ダミーパターン
31a_1 中間前面ダミーパターン
31a_2、31a_3 サイド前面ダミーパターン
39 後面絶縁膜
50 基板
50fs 前面
50bs 後面
50s_1〜50s_4 第1〜第4側面
64 後面導電性パターン
66a、66b、66b’、66c、66c’、66d 後面導電性構造体
66a_1、66b_1、66b’_1、66c_1、66c’_1 中間サポータ部分
66a_2、66a_3 サイドサポータ部分
66b_2、66b_3 サイドサポータ部分
66c_2、66c_3 サイドサポータ部分
66c’_2、66c’_3 サイドサポータ部分
66c_g、66c’_g 接地部分
66c_s、66c’_s サポータ部分
66b’_2、66b’_3 サイドサポータ部分
90a、90b、90b’、90c、90c’、90d 半導体チップ
100 半導体基板
100fs 半導体基板の前面
100bs 半導体基板の後面
103 単位素子
106 下部前面絶縁膜
112 ビア絶縁パターン
115 貫通ビア構造体
115io 信号入出力貫通ビア構造体
115g 接地貫通ビア構造体
117 コンタクトプラグ、プラグ
118a ビアパッド
118b 内部配線
119 内部回路
121 上部前面絶縁膜
124 前面絶縁膜
127 内部ビア
130、130b 前面導電性パターン
130io 前面信号入出力接続パターン
130g 前面接地接続パターン
131 前面ダミーパターン
139 後面絶縁膜
150 基板
150fs 前面
150bs 後面
150s_1〜150s_4 第1〜第4側面
164、164b 後面導電性パターン
164io 後面信号入出力接続パターン
166a、166b、166c、166d、166d’、166e、166f、166g 後面導電性構造体
166a_1、166b_1、166d_1、166d’_1、166e_1 中間サポータ部分
166a_2、166a_3 サイドサポータ部分
166b_2、166b_3 サイドサポータ部分
166d_2、166d_3 サイドサポータ部分
166d’_2、166d’_3 サイドサポータ部分
166e_2、166e_3 サイドサポータ部分
190a、190b、190c、190d、190e、190f、190g、190h 半導体チップ
164io 後面信号入出力接続パターン
164mp、164op 後面内側、後面外側導電性パターン
165 後面ダミーパターン
166f_1〜166f_4 第1〜第4サポータ部分
166g_1、166g_2 サポータ部分
166g_g 接地部分
200 半導体
200fs 前面
200bs 後面
203 単位素子
209 コンタクトプラグ
210a ビアパッド
210b 第1内部配線
212 ビア絶縁パターン
215 貫通ビア構造体
217a パッドプラグ
217b 配線プラグ
218b 第2内部配線
219 内部回路
224 前面絶縁膜
206 下部前面絶縁膜
213 中間前面絶縁膜
221 上部前面絶縁膜
230a 前面導電性パターン
239 後面絶縁膜
233 第1後面絶縁膜
237 第2後面絶縁膜
235 第1後面導電性パターン
236、266 後面導電性構造体
250 基板
250fs 前面
250bs 後面
264 第2後面導電性パターン、後面信号入出力接続パターン
290a、290b 半導体チップ
Claims (35)
- 前面、該前面に対向する後面、及び前記前面と前記後面とを連結する複数の側面を有する基板と、
前記基板の前記前面の上に、又は前記前面の近傍に配置された内部回路と、
前記基板内の信号入出力貫通ビア構造体と、
前記基板の前記後面の上に配置され、前記信号入出力貫通ビア構造体と電気的に接続された後面導電性パターンと、
前記基板の前記後面の上に配置され、前記基板内の信号入出力貫通ビア構造体から離隔された後面導電性構造体と、を含み、
前記後面導電性構造体は、互いに平行な複数のサポータ部分を含むことを特徴とする半導体素子。 - 前記後面導電性構造体は、前記後面導電性パターンと同一物質からなり且つ同一厚さに形成されていることを特徴とする請求項1に記載の半導体素子。
- 前記後面導電性パターンは、前記後面導電性構造体の前記互いに平行な複数のサポータ部分に挟まれた領域に配置されていることを特徴とする請求項1に記載の半導体素子。
- 前記後面導電性構造体の前記互いに平行な複数のサポータ部分は、前記基板の複数の側面のうちの1つに平行であることを特徴とする請求項1に記載の半導体素子。
- 前記後面導電性構造体は、前記互いに平行な複数のサポータ部分の間の領域に配置された中間サポータ部分をさらに含むことを特徴とする請求項1に記載の半導体素子。
- 前記中間サポータ部分は、複数の前記後面導電性パターンの間の領域を通ることを特徴とする請求項5に記載の半導体素子。
- 前記中間サポータ部分は、前記平行なサポータ部分の中間部との間に配置されていることを特徴とする請求項5に記載の半導体素子。
- 前面及び該前面に対向する後面を有する基板と、
前記基板の前記前面上又は近くの内部回路と、
前記基板内の信号入出力貫通ビア構造体と、
前記基板の前記前面上に配置されて前記信号入出力貫通ビア構造体と電気的に接続された前面信号入出力接続パターンと、前記基板の前記後面上の後面導電性パターン及び後面導電性構造体と、を含み、
前記後面導電性パターンは前記信号入出力貫通ビア構造体と電気的に接続され、
前記後面導電性構造体は、前記信号入出力貫通ビア構造体から電気的に絶縁され、前記後面導電性パターンと同一物質からなり且つ同一厚さに形成されていることを特徴とする半導体素子。 - 前記後面導電性構造体は、バー又はライン状の第1部分を含むことを特徴とする請求項8に記載の半導体素子。
- 前記複数の側面は少なくとも対向する第1側面と第2側面を含み、
前記後面導電性構造体の前記第1部分は、前記基板の対向する第1及び第2側面の間に配置され、前記第1部分は前記第1側面の中間部と前記第2側面の中間部とを連結する線に沿って配置されることを特徴とする請求項9に記載の半導体素子。 - 前記後面導電性構造体は、
前記基板の対向する第1及び第2側面に平行な第1部分と、
前記第1部分に垂直な第2部分と、
前記第1部分と垂直であり且つ前記第2部分に平行な第3部分と、を含むことを特徴とする請求項8に記載の半導体素子。 - 前記第1部分は、前記第2及び第3部分の間に位置することを特徴とする請求項11に記載の半導体素子。
- 前記基板は、
前面及び後面を有する半導体基板と、
前記半導体基板の前記前面上の前面絶縁膜と、
前記半導体基板の前記後面上に順に積層された第1後面絶縁膜及び第2後面絶縁膜と、を含むことを特徴とする請求項8に記載の半導体素子。 - 前記貫通ビア構造体は前記半導体基板を貫通し、且つ前記第1後面絶縁膜を貫通し、前記後面導電性パターン及び前記後面導電性構造体は前記第1後面絶縁膜及び前記第2後面絶縁膜の間に介在されていることを特徴とする請求項13に記載の半導体素子。
- 前記第2後面絶縁膜上に配置された後面信号入出力接続パターンをさらに含み、前記後面信号入出力接続パターンは、前記後面導電性パターンと電気的に接続されていることを特徴とする請求項14に記載の半導体素子。
- 前記基板内の接地貫通ビア構造体をさらに含み、
前記接地貫通ビア構造体は、前記後面導電性構造体と接続され、前記信号入出力貫通ビア構造体から離隔されていることを特徴とする請求項8に記載の半導体素子。 - 前記後面導電性構造体は、
前記接地貫通ビア構造体と電気的に接続された接地部分と、
前記基板の側面のうちの何れか一側面と平行なサポータ部分と、を含み、
前記後面導電性構造体の前記接地部分及び前記サポータ部分は電気的に接続されていることを特徴とする請求項16に記載の半導体素子。 - パッケージ基板上に配置され、第1前面及び前記第1前面に対向する第1後面を有する第1半導体チップと、
前記第1半導体チップ上に配置され、前記第1半導体チップと対向する第2前面及び前記第2前面に対向する第2後面を有する第2半導体チップと、
前記第1半導体チップと前記第2半導体チップとの間のチップ間バンプと、を含み、
前記第1半導体チップは、
前記第1半導体チップ内の信号入出力貫通ビア構造体と、
前記第1半導体チップの前記第1後面上に配置され、前記信号入出力貫通ビア構造体に電気的に接続された後面導電性パターンと、
前記第1半導体チップの前記第1後面上に配置され、前記信号入出力貫通ビア構造体から離隔された後面導電性構造体と、を含み、
前記第2半導体チップは、前記第2半導体チップの前記第2前面上に配置され、前記後面導電性パターンと対向する前面導電性パターンを含み、
前記チップ間バンプは、前記前面導電性パターンと、前記後面導電性パターンとの間に介在されていることを特徴とする半導体パッケージ。 - 前記後面導電性構造体は、前記後面導電性パターンと同一物質からなり且つ同一厚さに形成されていることを特徴とする請求項18に記載の半導体パッケージ。
- 前記後面導電性構造体は、互いに平行であり、且つ同一の長さを有する複数のサポータ部分を含むことを特徴とする請求項18に記載の半導体パッケージ。
- 前記第2半導体チップが、前記第2半導体チップの前記第2前面上に配置された複数の前面ダミーパターンをさらに含むことを特徴とする請求項18に記載の半導体パッケージ。
- 前記複数の前面ダミーパターンと前記後面導電性構造体との間に緩衝バンプをさらに含み、
前記後面導電性構造体は前記複数の前面ダミーパターンと対向し、
前記緩衝バンプは、前記複数の前面ダミーパターンと前記後面導電性構造体とを物理的に接続することを特徴とする請求項21に記載の半導体パッケージ。 - 前記後面導電性構造体は、前記前面ダミーパターンよりも大きい幅を有することを特徴とする請求項22に記載の半導体パッケージ。
- ボードと、
該ボード上の半導体パッケージと、を含み、
前記半導体パッケージは、
パッケージ基板と、
該パッケージ基板と対向する前面及び該前面と対向する後面を有する半導体チップと、を含み、
前記半導体チップは、
前記パッケージ基板と対向する前面及び該前面に対向する後面を有する前記半導体チップ内の信号入出力貫通ビア構造体と、
前記半導体チップの前記後面上の後面信号入出力接続パターン及び後面導電性構造体と、を含み、
前記後面信号入出力接続パターンは、前記信号入出力貫通ビア構造体に電気的に接続され、前記後面導電性構造体は前記信号入出力貫通ビア構造体から離隔されていることを特徴とする電子システム。 - 前記後面導電性構造体は、前記半導体チップの側面のうちの何れか一側面と平行なバー又はライン状の部分を有することを特徴とする請求項24に記載の電子システム。
- 基板内に複数の貫通ビア構造体を形成し、
前記基板の第1面上に前記複数の貫通ビア構造体と電気的に接続された複数の第1導電性パターンを形成し、
前記基板の前記第1面に対向する前記基板の第2面上に前記複数の貫通ビア構造体と電気的に接続された複数の第2導電性パターンを形成し、
前記基板の前記第2面上に前記複数の前記第2導電性パターンから離隔された導電性構造体を形成することを含むことを特徴とする半導体素子形成方法。 - 前記基板内の接地貫通ビア構造体を形成することをさらに含み、
前記導電性構造体は、前記接地貫通ビア構造体に電気的に接続された接地部分を含むことを特徴とする請求項26に記載の半導体素子形成方法。 - 前記基板の前記第1面上に前記複数の前記貫通電極構造体と前記複数の前記第1導電性パターンから離隔された複数のダミー導電性パターンを形成することをさらに含むことを特徴とする請求項26に記載の半導体素子形成方法
- 前記導電性構造体は、平行なサポータ部分を含むことを特徴とする請求項26に記載の半導体素子形成方法。
- 前記複数の前記第2導電性パターンは、前記導電性構造体の前記平行なサポータ部分の間に配置されていることを特徴とする請求項29に記載の半導体素子形成方法。
- 前記複数の第2導電性パターンの一部は前記平行なサポータ部分の間に配置され、
前記複数の第2導電性パターンの残りは、前記平行なサポータ部分の外側に配置されていることを特徴とする請求項29に記載の半導体素子形成方法。 - 複数の貫通ビア構造体及び導電性構造体を有する第1チップと、
第2チップと、を含み、
前記複数の貫通ビア構造体は、前記第1チップの第1面上の複数の第1導電性パターン及び前記第1チップの第2面上の複数の第2導電性パターンに電気的に接続され、
前記導電性構造体は、前記第1チップの前記第2面上に形成され、前記複数の前記第2導電性パターンから離隔され、
前記第1チップは互いに対向する第1側面及び第2側面を有し、
前記導電性構造体は前記第1チップの第1側面と接触し、前記第1チップの前記第2側面と接触するように延長された部分を含み、
前記第2チップは前記第2チップの前記第1面上の複数の第3導電性パターンを有し、
前記複数の第3導電性パターンは、前記複数の第2導電性パターンに電気的に接続されていることを特徴とする半導体パッケージ。 - 前記複数の貫通ビア構造体の少なくとも1つは、前記導電性構造体に接続され接地されていることを特徴とする請求項32に記載の半導体パッケージ。
- 前記第1チップの前記第1及び第2側面と接触する熱伝達物質膜(thermal interface material layer)をさらに含み、
前記熱伝達物質膜は、前記導電性構造体と接触されることを特徴とする請求項32に記載の半導体パッケージ。 - 前記熱伝達物質膜と接触するヒートスプレッダ(heat spreader)をさらに含むことを特徴とする請求項34に記載の半導体パッケージ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2013-0044439 | 2013-04-22 | ||
KR1020130044439A KR102032907B1 (ko) | 2013-04-22 | 2013-04-22 | 반도체 소자, 반도체 패키지 및 전자 시스템 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014216645A true JP2014216645A (ja) | 2014-11-17 |
JP6615430B2 JP6615430B2 (ja) | 2019-12-04 |
Family
ID=51728412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014076229A Active JP6615430B2 (ja) | 2013-04-22 | 2014-04-02 | 半導体パッケージ、及び半導体素子形成方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9240366B2 (ja) |
JP (1) | JP6615430B2 (ja) |
KR (1) | KR102032907B1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018168384A1 (ja) * | 2017-03-15 | 2018-09-20 | アオイ電子株式会社 | 半導体装置の製造方法および半導体装置 |
JP2019079862A (ja) * | 2017-10-20 | 2019-05-23 | 電子商取引安全技術研究組合 | 半導体装置 |
WO2019175950A1 (ja) * | 2018-03-13 | 2019-09-19 | 新電元工業株式会社 | 電子モジュール及び電源装置 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI583195B (zh) | 2012-07-06 | 2017-05-11 | 新力股份有限公司 | A solid-state imaging device and a solid-state imaging device, and an electronic device |
TWI528525B (zh) * | 2013-09-03 | 2016-04-01 | 瑞昱半導體股份有限公司 | 金屬溝渠減噪結構及其製造方法 |
US9543373B2 (en) * | 2013-10-23 | 2017-01-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structure and manufacturing method thereof |
US9523307B2 (en) | 2014-09-22 | 2016-12-20 | Hyundai Motor Company | Engine system having coolant control valve |
ITUB20160251A1 (it) * | 2016-02-01 | 2017-08-01 | St Microelectronics Srl | Procedimento per ridurre gli stress termo-meccanici in dispositivi a semiconduttore e corrispondente dispositivo |
CN108304048B (zh) * | 2017-01-12 | 2021-04-13 | 上海宝存信息科技有限公司 | 服务器及其固态储存装置 |
US10181447B2 (en) * | 2017-04-21 | 2019-01-15 | Invensas Corporation | 3D-interconnect |
US10431517B2 (en) * | 2017-08-25 | 2019-10-01 | Advanced Micro Devices, Inc. | Arrangement and thermal management of 3D stacked dies |
US20190088695A1 (en) * | 2017-09-18 | 2019-03-21 | Stmicroelectronics (Crolles 2) Sas | Bonding pad architecture using capacitive deep trench isolation (cdti) structures for electrical connection |
US10312221B1 (en) | 2017-12-17 | 2019-06-04 | Advanced Micro Devices, Inc. | Stacked dies and dummy components for improved thermal performance |
US11469194B2 (en) | 2018-08-08 | 2022-10-11 | Stmicroelectronics S.R.L. | Method of manufacturing a redistribution layer, redistribution layer and integrated circuit including the redistribution layer |
JP7102481B2 (ja) * | 2020-10-09 | 2022-07-19 | Nissha株式会社 | 射出成形品及びその製造方法 |
US20220173046A1 (en) * | 2020-12-01 | 2022-06-02 | Intel Corporation | Integrated circuit assemblies with direct chip attach to circuit boards |
KR20220112922A (ko) * | 2021-02-05 | 2022-08-12 | 엘지이노텍 주식회사 | 회로기판 및 이를 포함하는 패키지 기판 |
KR20240070456A (ko) * | 2021-09-28 | 2024-05-21 | 엘지전자 주식회사 | 차량에 배치되는 안테나 모듈 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006245311A (ja) * | 2005-03-03 | 2006-09-14 | Oki Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2007115922A (ja) * | 2005-10-20 | 2007-05-10 | Nec Electronics Corp | 半導体装置 |
JP2009200233A (ja) * | 2008-02-21 | 2009-09-03 | Hitachi Ltd | 半導体装置 |
JP2010103195A (ja) * | 2008-10-21 | 2010-05-06 | Nikon Corp | 積層型半導体装置、積層型半導体装置の製造方法 |
JP2011054820A (ja) * | 2009-09-03 | 2011-03-17 | Hitachi Ltd | 半導体装置 |
JP2011171567A (ja) * | 2010-02-19 | 2011-09-01 | Elpida Memory Inc | 基板構造物の製造方法及び半導体装置の製造方法 |
US20110241217A1 (en) * | 2010-03-30 | 2011-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multi-Layer Interconnect Structure for Stacked Dies |
JP2012104829A (ja) * | 2010-11-08 | 2012-05-31 | Samsung Electronics Co Ltd | 半導体装置及びその製造方法 |
JP2012119689A (ja) * | 2010-12-03 | 2012-06-21 | Samsung Electronics Co Ltd | 半導体装置の製造方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03289858A (ja) | 1990-04-06 | 1991-12-19 | Canon Inc | フアクシミリ装置 |
JP3289858B2 (ja) | 1993-09-29 | 2002-06-10 | 凸版印刷株式会社 | マルチチップモジュールの製造方法およびプリント配線板への実装方法 |
EP0999728A1 (en) * | 1998-11-04 | 2000-05-10 | TELEFONAKTIEBOLAGET L M ERICSSON (publ) | An electrical component and an electrical circuit module having connected ground planes |
JP2001093863A (ja) | 1999-09-24 | 2001-04-06 | Toshiba Corp | ウェーハ裏面スパッタリング方法及び半導体製造装置 |
JP4887559B2 (ja) | 2000-11-07 | 2012-02-29 | 富士電機株式会社 | 半導体装置の製造方法 |
JP2003324170A (ja) | 2002-04-26 | 2003-11-14 | Ngk Spark Plug Co Ltd | セラミック基板及びセラミック基板の製造方法 |
US7449780B2 (en) | 2003-03-31 | 2008-11-11 | Intel Corporation | Apparatus to minimize thermal impedance using copper on die backside |
FR2863681B1 (fr) | 2003-12-11 | 2006-02-24 | Vallourec Mannesmann Oil & Gas | Joint tubulaire a filetages coniques resistant a la fatigue |
KR20050120138A (ko) | 2004-06-18 | 2005-12-22 | 삼성전자주식회사 | 반도체 칩의 휨 현상을 방지하는 반도체 패키지 |
KR20060075431A (ko) | 2004-12-28 | 2006-07-04 | 주식회사 하이닉스반도체 | Fbga 패키지의 제조방법 |
TWI246794B (en) * | 2005-02-05 | 2006-01-01 | Benq Corp | Communicator and antenna used in the communicator |
KR100655446B1 (ko) | 2005-10-14 | 2006-12-08 | 삼성전자주식회사 | 웨이퍼 휨 시뮬레이션 방법 |
US8008997B2 (en) * | 2007-10-09 | 2011-08-30 | Itt Manufacturing Enterprises, Inc. | Printed circuit board filter having rows of vias defining a quasi cavity that is below a cutoff frequency |
JP2009238957A (ja) | 2008-03-26 | 2009-10-15 | Panasonic Electric Works Co Ltd | 基板へのビアの形成方法 |
US8080870B2 (en) | 2009-06-18 | 2011-12-20 | Intel Corporation | Die-warpage compensation structures for thinned-die devices, and methods of assembling same |
US20110031596A1 (en) | 2009-08-05 | 2011-02-10 | Gruenhagen Mike D | Nickel-titanum soldering layers in semiconductor devices |
AU2010306171B2 (en) * | 2009-10-14 | 2015-06-18 | Landis+Gyr (Europe) Ag | Antenna coupler |
JP5480299B2 (ja) * | 2010-01-05 | 2014-04-23 | 株式会社東芝 | アンテナ及び無線装置 |
KR101158730B1 (ko) | 2010-07-15 | 2012-06-22 | 한국과학기술원 | 무전해도금을 이용한 적층 칩의 접합 방법 |
US9063058B2 (en) * | 2011-08-04 | 2015-06-23 | Mnemonics, Inc. | Wireless surface acoustic wave corrosion sensor and interrogation system for concrete structures |
US9917118B2 (en) * | 2011-09-09 | 2018-03-13 | Zecotek Imaging Systems Pte. Ltd. | Photodetector array and method of manufacture |
-
2013
- 2013-04-22 KR KR1020130044439A patent/KR102032907B1/ko active IP Right Grant
-
2014
- 2014-01-30 US US14/168,317 patent/US9240366B2/en active Active
- 2014-04-02 JP JP2014076229A patent/JP6615430B2/ja active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006245311A (ja) * | 2005-03-03 | 2006-09-14 | Oki Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2007115922A (ja) * | 2005-10-20 | 2007-05-10 | Nec Electronics Corp | 半導体装置 |
JP2009200233A (ja) * | 2008-02-21 | 2009-09-03 | Hitachi Ltd | 半導体装置 |
JP2010103195A (ja) * | 2008-10-21 | 2010-05-06 | Nikon Corp | 積層型半導体装置、積層型半導体装置の製造方法 |
JP2011054820A (ja) * | 2009-09-03 | 2011-03-17 | Hitachi Ltd | 半導体装置 |
JP2011171567A (ja) * | 2010-02-19 | 2011-09-01 | Elpida Memory Inc | 基板構造物の製造方法及び半導体装置の製造方法 |
US20110241217A1 (en) * | 2010-03-30 | 2011-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multi-Layer Interconnect Structure for Stacked Dies |
JP2012104829A (ja) * | 2010-11-08 | 2012-05-31 | Samsung Electronics Co Ltd | 半導体装置及びその製造方法 |
JP2012119689A (ja) * | 2010-12-03 | 2012-06-21 | Samsung Electronics Co Ltd | 半導体装置の製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018168384A1 (ja) * | 2017-03-15 | 2018-09-20 | アオイ電子株式会社 | 半導体装置の製造方法および半導体装置 |
JP2018152538A (ja) * | 2017-03-15 | 2018-09-27 | アオイ電子株式会社 | 半導体装置および半導体装置の製造方法 |
JP2019079862A (ja) * | 2017-10-20 | 2019-05-23 | 電子商取引安全技術研究組合 | 半導体装置 |
JP7010428B2 (ja) | 2017-10-20 | 2022-01-26 | 電子商取引安全技術研究組合 | 半導体装置 |
WO2019175950A1 (ja) * | 2018-03-13 | 2019-09-19 | 新電元工業株式会社 | 電子モジュール及び電源装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20140126196A (ko) | 2014-10-30 |
JP6615430B2 (ja) | 2019-12-04 |
US20140312491A1 (en) | 2014-10-23 |
KR102032907B1 (ko) | 2019-10-16 |
US9240366B2 (en) | 2016-01-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6615430B2 (ja) | 半導体パッケージ、及び半導体素子形成方法 | |
US11233036B2 (en) | Interconnect structure with redundant electrical connectors and associated systems and methods | |
TWI534979B (zh) | 用於射頻多晶片積體電路封裝的電磁干擾外殼 | |
US9368456B2 (en) | Semiconductor package having EMI shielding and method of fabricating the same | |
US8921993B2 (en) | Semiconductor package having EMI shielding function and heat dissipation function | |
KR102021884B1 (ko) | 후면 본딩 구조체를 갖는 반도체 소자 | |
JP2014057065A (ja) | Tsv構造を備える集積回路素子及びその製造方法 | |
KR20150049622A (ko) | 패키지 온 패키지 장치 | |
JP2000223653A (ja) | チップ・オン・チップ構造の半導体装置およびそれに用いる半導体チップ | |
TW202133712A (zh) | 耦合至經組態以提供屏蔽之步進散熱器之整合式裝置 | |
TW200937747A (en) | Printed circuit board, semiconductor package, card apparatus, and system | |
TW202213698A (zh) | 包括被配置為電磁干擾遮罩件的被動元件的封裝 | |
TW201230283A (en) | Semiconductor package and fabrication method thereof | |
TWI787266B (zh) | 用於電子設備的能量收穫設備及裝置 | |
TW201308534A (zh) | 半導體裝置與相關方法 | |
EP4362086A1 (en) | Chip package structure and electronic apparatus | |
TWI281244B (en) | Chip package substrate | |
US9343401B2 (en) | Semiconductor package and fabrication method thereof | |
TW202416473A (zh) | 包括各向異性導熱通道和隔熱材料的設備 | |
JP2003347506A (ja) | チップ・オン・チップ構造の半導体装置およびそれに用いる半導体チップ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170213 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180306 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180606 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20181030 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190130 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20190423 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190822 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20190828 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191023 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20191106 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6615430 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |