JP2014216459A - 半導体装置 - Google Patents

半導体装置 Download PDF

Info

Publication number
JP2014216459A
JP2014216459A JP2013092227A JP2013092227A JP2014216459A JP 2014216459 A JP2014216459 A JP 2014216459A JP 2013092227 A JP2013092227 A JP 2013092227A JP 2013092227 A JP2013092227 A JP 2013092227A JP 2014216459 A JP2014216459 A JP 2014216459A
Authority
JP
Japan
Prior art keywords
groove
semiconductor element
semiconductor
semiconductor device
heat spreader
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013092227A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014216459A5 (enrdf_load_stackoverflow
Inventor
山本 圭
Kei Yamamoto
圭 山本
井高 志織
Shiori Idaka
志織 井高
寺井 護
Mamoru Terai
護 寺井
洋平 大本
Yohei Omoto
洋平 大本
康滋 椋木
Yasushige Kuraki
康滋 椋木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2013092227A priority Critical patent/JP2014216459A/ja
Publication of JP2014216459A publication Critical patent/JP2014216459A/ja
Publication of JP2014216459A5 publication Critical patent/JP2014216459A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1203Rectifying Diode
    • H01L2924/12032Schottky diode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1305Bipolar Junction Transistor [BJT]
    • H01L2924/13055Insulated gate bipolar transistor [IGBT]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/13091Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19107Disposition of discrete passive components off-chip wires

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP2013092227A 2013-04-25 2013-04-25 半導体装置 Pending JP2014216459A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013092227A JP2014216459A (ja) 2013-04-25 2013-04-25 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013092227A JP2014216459A (ja) 2013-04-25 2013-04-25 半導体装置

Publications (2)

Publication Number Publication Date
JP2014216459A true JP2014216459A (ja) 2014-11-17
JP2014216459A5 JP2014216459A5 (enrdf_load_stackoverflow) 2016-01-21

Family

ID=51941961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013092227A Pending JP2014216459A (ja) 2013-04-25 2013-04-25 半導体装置

Country Status (1)

Country Link
JP (1) JP2014216459A (enrdf_load_stackoverflow)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016115704A (ja) * 2014-12-11 2016-06-23 トヨタ自動車株式会社 半導体装置
WO2017006771A1 (ja) * 2015-07-06 2017-01-12 ローム株式会社 パワーモジュールおよびインバータ装置
JP2017054878A (ja) * 2015-09-08 2017-03-16 株式会社村田製作所 半導体モジュール
JP2017073529A (ja) * 2015-10-09 2017-04-13 三菱電機株式会社 半導体装置
JP2017084921A (ja) * 2015-10-27 2017-05-18 三菱マテリアル株式会社 パワーモジュール
WO2017086248A1 (ja) * 2015-11-20 2017-05-26 三菱電機株式会社 電力用半導体装置および電力用半導体装置の製造方法
DE102017207117A1 (de) 2016-07-19 2018-01-25 Mitsubishi Electric Corporation Halbleiteranordnung
CN112447628A (zh) * 2019-09-05 2021-03-05 联想(新加坡)私人有限公司 散热机构和电子设备
JP2021089914A (ja) * 2019-12-02 2021-06-10 昭和電工株式会社 放熱装置及び放熱装置の製造方法
WO2022137704A1 (ja) * 2020-12-22 2022-06-30 日立Astemo株式会社 パワーモジュールおよび電力変換装置
WO2022168618A1 (ja) * 2021-02-03 2022-08-11 ローム株式会社 半導体装置
JP2022177207A (ja) * 2017-03-23 2022-11-30 株式会社東芝 セラミックス金属回路基板およびそれを用いた半導体装置
DE102021211643A1 (de) 2021-10-14 2023-04-20 Robert Bosch Gesellschaft mit beschränkter Haftung Elektronikvorrichtung
JP2023127713A (ja) * 2022-03-02 2023-09-14 三菱電機株式会社 半導体装置および半導体装置の製造方法
WO2023243278A1 (ja) * 2022-06-14 2023-12-21 ローム株式会社 半導体装置
US12009310B2 (en) 2020-01-07 2024-06-11 Fuji Electric Co., Ltd. Semiconductor device
WO2025027845A1 (ja) * 2023-08-03 2025-02-06 三菱電機株式会社 半導体装置および半導体装置の製造方法

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200546A (ja) * 1984-03-26 1985-10-11 Hitachi Ltd 半導体装置
JPH01270336A (ja) * 1988-04-22 1989-10-27 Hitachi Ltd 半導体装置の製造方法
JPH02283041A (ja) * 1989-04-25 1990-11-20 Seiko Epson Corp 半導体装置
US5278446A (en) * 1992-07-06 1994-01-11 Motorola, Inc. Reduced stress plastic package
JPH1084059A (ja) * 1996-09-09 1998-03-31 Toshiba Corp 窒化けい素回路基板
JP2003124406A (ja) * 2001-08-06 2003-04-25 Denso Corp 半導体装置
JP2004071888A (ja) * 2002-08-07 2004-03-04 Mitsubishi Electric Corp 半導体装置用回路基板及び半導体装置
JP2005191178A (ja) * 2003-12-25 2005-07-14 Mitsubishi Electric Corp 半導体装置
JP2005353945A (ja) * 2004-06-14 2005-12-22 Mitsubishi Electric Corp 半導体装置およびその製造方法
JP2006222347A (ja) * 2005-02-14 2006-08-24 Toyota Motor Corp 半導体モジュールと半導体モジュールの製造方法
JP2006303216A (ja) * 2005-04-21 2006-11-02 Denso Corp 樹脂封止型半導体装置
JP2012151164A (ja) * 2011-01-17 2012-08-09 Mitsubishi Electric Corp 半導体装置
JP2012191010A (ja) * 2011-03-10 2012-10-04 Fuji Electric Co Ltd 半導体装置およびその製造方法
WO2013136895A1 (ja) * 2012-03-15 2013-09-19 富士電機株式会社 半導体装置

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200546A (ja) * 1984-03-26 1985-10-11 Hitachi Ltd 半導体装置
JPH01270336A (ja) * 1988-04-22 1989-10-27 Hitachi Ltd 半導体装置の製造方法
JPH02283041A (ja) * 1989-04-25 1990-11-20 Seiko Epson Corp 半導体装置
US5278446A (en) * 1992-07-06 1994-01-11 Motorola, Inc. Reduced stress plastic package
JPH0677353A (ja) * 1992-07-06 1994-03-18 Motorola Inc 応力を軽減したプラスチック・パッケージ
JPH1084059A (ja) * 1996-09-09 1998-03-31 Toshiba Corp 窒化けい素回路基板
JP2003124406A (ja) * 2001-08-06 2003-04-25 Denso Corp 半導体装置
JP2004071888A (ja) * 2002-08-07 2004-03-04 Mitsubishi Electric Corp 半導体装置用回路基板及び半導体装置
JP2005191178A (ja) * 2003-12-25 2005-07-14 Mitsubishi Electric Corp 半導体装置
JP2005353945A (ja) * 2004-06-14 2005-12-22 Mitsubishi Electric Corp 半導体装置およびその製造方法
JP2006222347A (ja) * 2005-02-14 2006-08-24 Toyota Motor Corp 半導体モジュールと半導体モジュールの製造方法
JP2006303216A (ja) * 2005-04-21 2006-11-02 Denso Corp 樹脂封止型半導体装置
JP2012151164A (ja) * 2011-01-17 2012-08-09 Mitsubishi Electric Corp 半導体装置
JP2012191010A (ja) * 2011-03-10 2012-10-04 Fuji Electric Co Ltd 半導体装置およびその製造方法
WO2013136895A1 (ja) * 2012-03-15 2013-09-19 富士電機株式会社 半導体装置

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016115704A (ja) * 2014-12-11 2016-06-23 トヨタ自動車株式会社 半導体装置
WO2017006771A1 (ja) * 2015-07-06 2017-01-12 ローム株式会社 パワーモジュールおよびインバータ装置
JP2017017283A (ja) * 2015-07-06 2017-01-19 ローム株式会社 パワーモジュールおよびインバータ装置
US10748826B2 (en) 2015-07-06 2020-08-18 Rohm Co., Ltd. Power module and inverter equipment
JP2017054878A (ja) * 2015-09-08 2017-03-16 株式会社村田製作所 半導体モジュール
CN107104080A (zh) * 2015-10-09 2017-08-29 三菱电机株式会社 半导体装置
DE102016214155B4 (de) 2015-10-09 2023-10-26 Mitsubishi Electric Corporation Halbleiteranordnung
JP2017073529A (ja) * 2015-10-09 2017-04-13 三菱電機株式会社 半導体装置
US10658324B2 (en) 2015-10-09 2020-05-19 Mitsubishi Electric Corporation Semiconductor device
JP2017084921A (ja) * 2015-10-27 2017-05-18 三菱マテリアル株式会社 パワーモジュール
WO2017086248A1 (ja) * 2015-11-20 2017-05-26 三菱電機株式会社 電力用半導体装置および電力用半導体装置の製造方法
US9960126B2 (en) 2016-07-19 2018-05-01 Mitsubishi Electric Corporation Semiconductor device
DE102017207117A1 (de) 2016-07-19 2018-01-25 Mitsubishi Electric Corporation Halbleiteranordnung
CN107634036B (zh) * 2016-07-19 2020-06-30 三菱电机株式会社 半导体装置
CN107634036A (zh) * 2016-07-19 2018-01-26 三菱电机株式会社 半导体装置
JP2018014357A (ja) * 2016-07-19 2018-01-25 三菱電機株式会社 半導体装置
JP7451638B2 (ja) 2017-03-23 2024-03-18 株式会社東芝 セラミックス金属回路基板の製造方法および半導体装置の製造方法
US11973003B2 (en) 2017-03-23 2024-04-30 Kabushiki Kaisha Toshiba Ceramic metal circuit board and semiconductor device using the same
JP2022177207A (ja) * 2017-03-23 2022-11-30 株式会社東芝 セラミックス金属回路基板およびそれを用いた半導体装置
JP2021040096A (ja) * 2019-09-05 2021-03-11 レノボ・シンガポール・プライベート・リミテッド 放熱機構および電子機器
CN112447628A (zh) * 2019-09-05 2021-03-05 联想(新加坡)私人有限公司 散热机构和电子设备
JP2021089914A (ja) * 2019-12-02 2021-06-10 昭和電工株式会社 放熱装置及び放熱装置の製造方法
US12009310B2 (en) 2020-01-07 2024-06-11 Fuji Electric Co., Ltd. Semiconductor device
WO2022137704A1 (ja) * 2020-12-22 2022-06-30 日立Astemo株式会社 パワーモジュールおよび電力変換装置
JP2022098581A (ja) * 2020-12-22 2022-07-04 日立Astemo株式会社 パワーモジュールおよび電力変換装置
JP7549520B2 (ja) 2020-12-22 2024-09-11 日立Astemo株式会社 パワーモジュールおよび電力変換装置
WO2022168618A1 (ja) * 2021-02-03 2022-08-11 ローム株式会社 半導体装置
DE102021211643A1 (de) 2021-10-14 2023-04-20 Robert Bosch Gesellschaft mit beschränkter Haftung Elektronikvorrichtung
JP2023127713A (ja) * 2022-03-02 2023-09-14 三菱電機株式会社 半導体装置および半導体装置の製造方法
WO2023243278A1 (ja) * 2022-06-14 2023-12-21 ローム株式会社 半導体装置
WO2025027845A1 (ja) * 2023-08-03 2025-02-06 三菱電機株式会社 半導体装置および半導体装置の製造方法

Similar Documents

Publication Publication Date Title
JP2014216459A (ja) 半導体装置
JP5900620B2 (ja) 半導体装置
JP6300633B2 (ja) パワーモジュール
US8569890B2 (en) Power semiconductor device module
JP5373713B2 (ja) 半導体装置
JPWO2017175612A1 (ja) パワーモジュール、パワー半導体装置及びパワーモジュール製造方法
CN109637983B (zh) 芯片封装
JP2016018866A (ja) パワーモジュール
WO2018055667A1 (ja) 半導体装置
JPWO2016125419A1 (ja) 半導体装置
JP6150866B2 (ja) 電力半導体装置
JP5126201B2 (ja) 半導体モジュールおよびその製造方法
US12009332B2 (en) Semiconductor device having high yield strength intermediate plate
JPWO2019187125A1 (ja) 半導体装置
JP5258825B2 (ja) パワー半導体装置及びその製造方法
JP2012209470A (ja) 半導体装置、半導体装置モジュール及び半導体装置の製造方法
CN104798194B (zh) 半导体器件
JP5975866B2 (ja) 電力用半導体装置
JP2012209469A (ja) 電力用半導体装置
US20230282541A1 (en) Semiconductor device
JP2017135310A (ja) 半導体装置
TWI660471B (zh) 晶片封裝
CN113921484A (zh) 包括具有改进的处理特性的热界面材料的半导体器件封装
JP2017191807A (ja) パワー半導体装置およびパワー半導体装置の製造方法
JP7136367B2 (ja) 半導体パッケージ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20151126

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20151126

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20161012

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20161025

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161208

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170314

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170510

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20170926