JP2014040634A - 希土類元素オキシフッ化物粉末溶射材料及び希土類元素オキシフッ化物溶射部材 - Google Patents
希土類元素オキシフッ化物粉末溶射材料及び希土類元素オキシフッ化物溶射部材 Download PDFInfo
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- 229910052761 rare earth metal Inorganic materials 0.000 title claims abstract description 119
- 239000000463 material Substances 0.000 title claims abstract description 81
- 239000007921 spray Substances 0.000 title claims abstract description 69
- 239000000843 powder Substances 0.000 title claims abstract description 35
- 239000002245 particle Substances 0.000 claims abstract description 41
- 238000005507 spraying Methods 0.000 claims abstract description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 21
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000001301 oxygen Substances 0.000 claims abstract description 18
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 18
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims abstract description 17
- 238000007750 plasma spraying Methods 0.000 claims description 17
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 16
- 238000002156 mixing Methods 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 6
- 229910052727 yttrium Inorganic materials 0.000 claims description 6
- 229910052691 Erbium Inorganic materials 0.000 claims description 5
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 5
- 238000010304 firing Methods 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 abstract description 20
- 230000007797 corrosion Effects 0.000 abstract description 20
- -1 rare-earth fluoride Chemical class 0.000 abstract description 18
- 239000007789 gas Substances 0.000 abstract description 14
- 150000002910 rare earth metals Chemical class 0.000 abstract description 11
- 238000001020 plasma etching Methods 0.000 abstract description 7
- 229910052736 halogen Inorganic materials 0.000 abstract description 4
- 150000002367 halogens Chemical class 0.000 abstract description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 9
- 239000002002 slurry Substances 0.000 description 9
- 239000011230 binding agent Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 238000007751 thermal spraying Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000001768 carboxy methyl cellulose Substances 0.000 description 4
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 4
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 4
- 229940098458 powder spray Drugs 0.000 description 4
- 238000001694 spray drying Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 2
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 2
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 229940105963 yttrium fluoride Drugs 0.000 description 2
- RBORBHYCVONNJH-UHFFFAOYSA-K yttrium(iii) fluoride Chemical compound F[Y](F)F RBORBHYCVONNJH-UHFFFAOYSA-K 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 239000011361 granulated particle Substances 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004255 ion exchange chromatography Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000007561 laser diffraction method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/18—Fireproof paints including high temperature resistant paints
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
- Y10T428/24372—Particulate matter
- Y10T428/24413—Metal or metal compound
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
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- Plasma & Fusion (AREA)
- Organic Chemistry (AREA)
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- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Coating By Spraying Or Casting (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Abstract
【効果】本発明によれば、大気中プラズマ溶射に適した希土類元素オキシフッ化物粉末溶射材料を得ることができる。本発明の希土類元素オキシフッ化物粉末溶射材料を用いて製造した希土類元素フッ化物溶射部材はハロゲンガス中での耐プラズマ部材として使用した場合、希土類酸化物や希土類フッ化物の溶射皮膜を形成したものに比べて、プラズマエッチングに対する耐食性に優れ、より長い寿命を実現できる部材となる。
【選択図】なし
Description
〔1〕
希土類元素オキシフッ化物粒子の外形のアスペクト比が2以下、平均粒子径が10μm以上100μm以下、嵩密度が0.8g/cm3以上2g/cm3以下、炭素を0.5質量%以下、酸素を3質量%以上15質量%以下含有することを特徴とする希土類元素オキシフッ化物粉末溶射材料。
〔2〕
希土類元素がY及びLaからLuまでの3A族元素から選ばれる1種又は2種以上である〔1〕に記載の溶射材料。
〔3〕
希土類元素がY、Gd及びErから選ばれる〔2〕に記載の溶射材料。
〔4〕
平均粒子径が0.01μm以上5μm以下の希土類酸化物を10質量%以上70質量%以下と、残分が平均粒子径0.1μm以上5μm以下の希土類元素フッ化物を混合、造粒、焼成することによって得られたものである〔1〕〜〔3〕のいずれかに記載の溶射材料。
〔5〕
基材に、〔1〕〜〔4〕のいずれかに記載の溶射材料をプラズマ溶射することにより、炭素含有量が0.1質量%以下、酸素含有量が3質量%以上15質量%以下の溶射皮膜を形成してなることを特徴とする希土類元素オキシフッ化物溶射部材。
1.流動性がよい、
2.プラズマ溶射で希土類酸化物に分解しない
ことが望ましく、本発明の溶射材料はかかる利点を備えている。
なお、平均粒子径はレーザー光回折法による粒度分布測定装置によって求めることができ、質量平均値D50(即ち、累積質量が50%となるときの粒子径又はメジアン径)として測定することができる。
〔溶射粉の製造〕
表1に示す原料を同表の割合で混合し、同表のバインダーに溶解してスラリーを調製し、これをスプレードライヤーを用いて造粒した後、同表の条件で焼成して、溶射粉末を得た。得られた各溶射粉末につき、粒子のアスペクト比、粒度分布、嵩密度、酸素濃度、フッ素濃度及び炭素濃度を測定した。結果を表1に示す。なお、粒度分布はレーザー回折法で測定し、フッ素濃度は溶解イオンクロマトグラフィ法、炭素濃度及び酸素濃度は燃焼IR法でそれぞれ分析した。また、粒子のアスペクト比はSEM写真により180個の粒子の短径と長径を測定して平均した。
実施例1〜4及び比較例1,2の溶射粉を用いてアルゴン40L/min、水素5L/minの混合ガスを用いた大気圧プラズマ溶射をアルミニウム基材に施工し、200μm程度の溶射皮膜を形成した部材を得た。実施例1〜4の溶射粉から得られた溶射皮膜は黒色、比較例1,2の溶射粉から得られた溶射皮膜は白色をそれぞれ呈していた。得られた各溶射皮膜の酸素濃度及び炭素濃度を燃焼IR法で測定した。結果を表1に示す。
得られた各部材について、マスキングテープでマスキングした部分と暴露部分を作った後に、リアクティブイオンプラズマ試験装置にセットし、周波数13.56MHz、プラズマ出力1000W、ガス種CF4+O2(20vol%)、流量50sccm、ガス圧50mtorr、12時間の条件でプラズマ耐食性試験を行った。レーザー顕微鏡を使用して、暴露部分とマスキング部分の腐食による高さ変化を4点測定して平均値を求め、耐食性を評価した。結果を表1に示す。
〔1〕
希土類元素オキシフッ化物粒子の外形のアスペクト比が2以下、平均粒子径が10μm以上100μm以下、嵩密度が0.8g/cm3以上2g/cm3以下、炭素を0.5質量%以下、酸素を3質量%以上15質量%以下含有することを特徴とする希土類元素オキシフッ化物粉末溶射材料。
〔2〕
希土類元素がY及びLaからLuまでの3A族元素から選ばれる1種又は2種以上である〔1〕に記載の溶射材料。
〔3〕
希土類元素がY、Gd及びErから選ばれる〔2〕に記載の溶射材料。
〔4〕
平均粒子径が0.01μm以上5μm以下の希土類元素酸化物を10質量%以上70質量%以下と、残分が平均粒子径0.1μm以上5μm以下の希土類元素フッ化物を混合、造粒、焼成することによって得られたものである〔1〕〜〔3〕のいずれかに記載の溶射材料。
〔5〕
基材に、〔1〕〜〔4〕のいずれかに記載の溶射材料をプラズマ溶射することにより、炭素含有量が0.1質量%以下、酸素含有量が3質量%以上15質量%以下の溶射皮膜を形成してなることを特徴とする希土類元素オキシフッ化物溶射部材。
1.流動性がよい、
2.プラズマ溶射で希土類元素酸化物に分解しない
ことが望ましく、本発明の溶射材料はかかる利点を備えている。
Claims (5)
- 希土類元素オキシフッ化物粒子の外形のアスペクト比が2以下、平均粒子径が10μm以上100μm以下、嵩密度が0.8g/cm3以上2g/cm3以下、炭素を0.5質量%以下、酸素を3質量%以上15質量%以下含有することを特徴とする希土類元素オキシフッ化物粉末溶射材料。
- 希土類元素がY及びLaからLuまでの3A族元素から選ばれる1種又は2種以上である請求項1に記載の溶射材料。
- 希土類元素がY、Gd及びErから選ばれる請求項2に記載の溶射材料。
- 平均粒子径が0.01μm以上5μm以下の希土類酸化物を10質量%以上70質量%以下と、残分が平均粒子径0.1μm以上5μm以下の希土類元素フッ化物を混合、造粒、焼成することによって得られたものである請求項1〜3のいずれか1項に記載の溶射材料。
- 基材に、請求項1〜4のいずれか1項に記載の溶射材料をプラズマ溶射することにより、炭素含有量が0.1質量%以下、酸素含有量が3質量%以上15質量%以下の溶射皮膜を形成してなることを特徴とする希土類元素オキシフッ化物溶射部材。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012183302A JP5939084B2 (ja) | 2012-08-22 | 2012-08-22 | 希土類元素オキシフッ化物粉末溶射材料の製造方法 |
US13/971,889 US20140057078A1 (en) | 2012-08-22 | 2013-08-21 | Rare earth element oxyflouride powder spray material and sprayed article |
KR1020130098814A KR20140025287A (ko) | 2012-08-22 | 2013-08-21 | 희토류 원소 옥시불화물 분말 용사 재료 및 희토류 원소 옥시불화물 용사 부재 |
US14/833,437 US10435569B2 (en) | 2012-08-22 | 2015-08-24 | Rare earth element oxyflouride powder spray material and sprayed article |
KR1020190110113A KR102066820B1 (ko) | 2012-08-22 | 2019-09-05 | 희토류 원소 옥시불화물 분말 용사 재료 및 희토류 원소 옥시불화물 용사 부재 |
KR1020200037988A KR20200039629A (ko) | 2012-08-22 | 2020-03-30 | 희토류 원소 옥시불화물 분말 용사 재료 및 희토류 원소 옥시불화물 용사 부재 |
KR1020210103873A KR20210100577A (ko) | 2012-08-22 | 2021-08-06 | 희토류 원소 옥시불화물 분말 용사 재료 및 희토류 원소 옥시불화물 용사 부재 |
KR1020220083075A KR20220100839A (ko) | 2012-08-22 | 2022-07-06 | 희토류 원소 옥시불화물 분말 용사 재료 및 희토류 원소 옥시불화물 용사 부재 |
KR1020240029075A KR20240032005A (ko) | 2012-08-22 | 2024-02-28 | 희토류 원소 옥시불화물 분말 용사 재료 및 희토류 원소 옥시불화물 용사 부재 |
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Also Published As
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KR20200039629A (ko) | 2020-04-16 |
KR102066820B1 (ko) | 2020-01-15 |
KR20240032005A (ko) | 2024-03-08 |
KR20140025287A (ko) | 2014-03-04 |
KR20190106959A (ko) | 2019-09-18 |
KR20210100577A (ko) | 2021-08-17 |
JP5939084B2 (ja) | 2016-06-22 |
KR20220100839A (ko) | 2022-07-18 |
US20150361540A1 (en) | 2015-12-17 |
US20140057078A1 (en) | 2014-02-27 |
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