JP2013508544A5 - - Google Patents

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Publication number
JP2013508544A5
JP2013508544A5 JP2012534380A JP2012534380A JP2013508544A5 JP 2013508544 A5 JP2013508544 A5 JP 2013508544A5 JP 2012534380 A JP2012534380 A JP 2012534380A JP 2012534380 A JP2012534380 A JP 2012534380A JP 2013508544 A5 JP2013508544 A5 JP 2013508544A5
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Japan
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precursor
substrate
zone
gas
excess
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JP2012534380A
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Japanese (ja)
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JP2013508544A (ja
JP5706903B2 (ja
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Priority claimed from PCT/US2010/052757 external-priority patent/WO2011047210A2/en
Publication of JP2013508544A publication Critical patent/JP2013508544A/ja
Publication of JP2013508544A5 publication Critical patent/JP2013508544A5/ja
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Publication of JP5706903B2 publication Critical patent/JP5706903B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012534380A 2009-10-14 2010-10-14 分離した前駆体ゾーン間の過剰な前駆体の運搬を抑えた原子層堆積システム Expired - Fee Related JP5706903B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25163909P 2009-10-14 2009-10-14
US61/251,639 2009-10-14
PCT/US2010/052757 WO2011047210A2 (en) 2009-10-14 2010-10-14 Inhibiting excess precursor transport between separate precursor zones in an atomic layer deposition system

Publications (3)

Publication Number Publication Date
JP2013508544A JP2013508544A (ja) 2013-03-07
JP2013508544A5 true JP2013508544A5 (https=) 2013-11-28
JP5706903B2 JP5706903B2 (ja) 2015-04-22

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Family Applications (1)

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JP2012534380A Expired - Fee Related JP5706903B2 (ja) 2009-10-14 2010-10-14 分離した前駆体ゾーン間の過剰な前駆体の運搬を抑えた原子層堆積システム

Country Status (7)

Country Link
US (1) US8637117B2 (https=)
EP (1) EP2488678B1 (https=)
JP (1) JP5706903B2 (https=)
KR (1) KR101714538B1 (https=)
CN (1) CN102639749B (https=)
BR (1) BR112012008642A2 (https=)
WO (1) WO2011047210A2 (https=)

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