JP2012519773A5 - - Google Patents
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- Publication number
- JP2012519773A5 JP2012519773A5 JP2011552450A JP2011552450A JP2012519773A5 JP 2012519773 A5 JP2012519773 A5 JP 2012519773A5 JP 2011552450 A JP2011552450 A JP 2011552450A JP 2011552450 A JP2011552450 A JP 2011552450A JP 2012519773 A5 JP2012519773 A5 JP 2012519773A5
- Authority
- JP
- Japan
- Prior art keywords
- tube
- injection
- reactant
- injection point
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002347 injection Methods 0.000 claims description 33
- 239000007924 injection Substances 0.000 claims description 33
- 239000002245 particle Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 18
- 239000000376 reactant Substances 0.000 claims description 16
- 239000012159 carrier gas Substances 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 claims 7
- 239000006227 byproduct Substances 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002243 precursor Substances 0.000 claims 1
- 238000011437 continuous method Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2002590A NL2002590C2 (en) | 2009-03-04 | 2009-03-04 | Apparatus and process for atomic or molecular layer deposition onto particles during pneumatic transport. |
| NL2002590 | 2009-03-04 | ||
| PCT/EP2010/052769 WO2010100235A1 (en) | 2009-03-04 | 2010-03-04 | Apparatus and process for atomic or molecular layer deposition onto particles during pneumatic transport |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012519773A JP2012519773A (ja) | 2012-08-30 |
| JP2012519773A5 true JP2012519773A5 (https=) | 2013-04-18 |
| JP5438779B2 JP5438779B2 (ja) | 2014-03-12 |
Family
ID=42167451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011552450A Active JP5438779B2 (ja) | 2009-03-04 | 2010-03-04 | 圧気輸送の間の粒子への原子又は分子層堆積のための装置及び方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (4) | US9845532B2 (https=) |
| EP (1) | EP2403976B1 (https=) |
| JP (1) | JP5438779B2 (https=) |
| KR (1) | KR101696946B1 (https=) |
| CN (1) | CN102414342B (https=) |
| CA (1) | CA2754093C (https=) |
| DK (1) | DK2403976T3 (https=) |
| NL (1) | NL2002590C2 (https=) |
| WO (1) | WO2010100235A1 (https=) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0747371Y2 (ja) | 1989-08-30 | 1995-11-01 | 三菱原子燃料株式会社 | 円柱体の搬送装置 |
| NL2002590C2 (en) * | 2009-03-04 | 2010-09-07 | Univ Delft Technology | Apparatus and process for atomic or molecular layer deposition onto particles during pneumatic transport. |
| FI20095307A0 (fi) * | 2009-03-25 | 2009-03-25 | Beneq Oy | Päällystysmenetelmä ja -laitteisto |
| JP2016508544A (ja) * | 2013-01-23 | 2016-03-22 | ピコサン オーワイPicosun Oy | 粒子材料の処理のための方法及び装置 |
| KR101550500B1 (ko) | 2013-02-28 | 2015-09-04 | 고려대학교 산학협력단 | 파우더 이송형 원자층 증착 장치 |
| US10030851B2 (en) | 2013-03-20 | 2018-07-24 | Lumileds Llc | Encapsulated quantum dots in porous particles |
| US9873940B2 (en) | 2013-12-31 | 2018-01-23 | Lam Research Corporation | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus |
| JP6732658B2 (ja) | 2014-04-01 | 2020-07-29 | ニューマティコート テクノロジーズ リミティド ライアビリティ カンパニー | 被覆ナノ粒子を含む受動電子部品及びその製造と使用方法 |
| NL2014348B1 (en) * | 2015-02-25 | 2016-10-13 | Univ Delft Tech | Controlled release from particles encapsulated by molecular layer deposition. |
| WO2016205242A1 (en) | 2015-06-15 | 2016-12-22 | Ald Nanosolutions, Inc. | Continuous spatial atomic layer deposition process and apparatus for applying films on particles |
| WO2018050954A1 (en) | 2016-09-16 | 2018-03-22 | Picosun Oy | Particle coating by atomic layer depostion (ald) |
| JP7127036B2 (ja) | 2017-01-23 | 2022-08-29 | ビーエーエスエフ ソシエタス・ヨーロピア | カソード材料の製造方法、及び当該方法を行うことに適する反応器 |
| KR102086574B1 (ko) | 2018-04-03 | 2020-03-09 | 전남대학교산학협력단 | 분말 입자를 코팅할 수 있는 증착장치 및 분말 입자의 코팅 방법 |
| TW202229622A (zh) | 2019-04-24 | 2022-08-01 | 美商應用材料股份有限公司 | 用於在具有旋轉槳的固定的腔室中塗覆顆粒的反應器 |
| TWI765795B (zh) | 2019-04-24 | 2022-05-21 | 美商應用材料股份有限公司 | 具有旋轉葉片與氣體注入之用於在固定腔室中塗覆粒子的反應器 |
| WO2021097143A2 (en) | 2019-11-12 | 2021-05-20 | Forge Nano Inc. | Coatings on particles of high energy materials and methods of forming same |
| US12220678B2 (en) | 2020-07-30 | 2025-02-11 | Applied Materials, Inc. | Paddle configuration for a particle coating reactor |
| NL2026635B1 (en) | 2020-10-07 | 2022-06-07 | Univ Delft Tech | Integrated manufacturing of core-shell particles for Li-ion batteries |
| EP4289632A1 (en) | 2022-06-09 | 2023-12-13 | Continental Reifen Deutschland GmbH | Method for producing a rubber composition using pretreated filler |
| NL2036587B1 (en) | 2023-12-19 | 2025-07-01 | Powall Holding B V | Particulate Composite Iridium Oxide Materials and Preparation Method and Application Thereof |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE393967B (sv) * | 1974-11-29 | 1977-05-31 | Sateko Oy | Forfarande och for utforande av stroleggning mellan lagren i ett virkespaket |
| JPH074523B2 (ja) * | 1986-09-25 | 1995-01-25 | キヤノン株式会社 | 反応装置 |
| CA1304572C (en) | 1988-01-18 | 1992-07-07 | Leonard George Wiseman | System for coating particles employing a pneumatic transport reactor |
| US5227196A (en) * | 1989-02-16 | 1993-07-13 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming a carbon film on a substrate made of an oxide material |
| US5227195A (en) | 1989-04-04 | 1993-07-13 | Sri International | Low temperature method of forming materials using one or more metal reactants and a halogen-containing reactant to form one or more reactive intermediates |
| US5198029A (en) * | 1989-08-01 | 1993-03-30 | Gte Products Corporation | Apparatus for coating small solids |
| US5169913A (en) * | 1991-05-31 | 1992-12-08 | Procedyne Corp. | Fluidized multistaged reaction system for polymerization |
| ES2095118T3 (es) * | 1993-11-27 | 1997-02-01 | Basf Ag | Procedimiento para el recubrimiento o el tratamiento superficial de particulas de producto solido mediante una capa fluidificada de plasma. |
| US5876793A (en) * | 1996-02-21 | 1999-03-02 | Ultramet | Fine powders and method for manufacturing |
| US6383301B1 (en) * | 1998-08-04 | 2002-05-07 | E. I. Du Pont De Nemours And Company | Treatment of deagglomerated particles with plasma-activated species |
| US6713177B2 (en) * | 2000-06-21 | 2004-03-30 | Regents Of The University Of Colorado | Insulating and functionalizing fine metal-containing particles with conformal ultra-thin films |
| DE60232884D1 (de) * | 2001-07-18 | 2009-08-20 | Univ Colorado | Isolierende und funktionelle feine metallhaltige teilchen mit konformen ultradünnen filmen |
| US6773813B2 (en) * | 2001-09-27 | 2004-08-10 | Osram Sylvania Inc. | Particles with vapor deposition coating |
| US7250148B2 (en) * | 2002-07-31 | 2007-07-31 | Carbon Nanotechnologies, Inc. | Method for making single-wall carbon nanotubes using supported catalysts |
| KR100452946B1 (ko) * | 2002-11-26 | 2004-10-14 | 한국전자통신연구원 | 저전력형 미세 열순환 소자 및 그 제조 방법 |
| ITTO20021124A1 (it) * | 2002-12-24 | 2004-06-25 | Giuliano Cavaglia | Reattore e metodo per polimerizzare in continuo in fase solida il polietilentereftalato (pet). |
| US7306823B2 (en) | 2004-09-18 | 2007-12-11 | Nanosolar, Inc. | Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells |
| US20050214737A1 (en) * | 2004-03-26 | 2005-09-29 | Dejneka Matthew J | Transparent filtered capillaries |
| US8298666B2 (en) * | 2006-01-26 | 2012-10-30 | Global Tungsten & Powders Corp. | Moisture resistant electroluminescent phosphor with high initial brightness and method of making |
| US20070280895A1 (en) * | 2006-06-02 | 2007-12-06 | Weimer Alan W | Coated particles and sunscreen and cosmetic products containing same |
| US7789961B2 (en) * | 2007-01-08 | 2010-09-07 | Eastman Kodak Company | Delivery device comprising gas diffuser for thin film deposition |
| NL2002590C2 (en) * | 2009-03-04 | 2010-09-07 | Univ Delft Technology | Apparatus and process for atomic or molecular layer deposition onto particles during pneumatic transport. |
-
2009
- 2009-03-04 NL NL2002590A patent/NL2002590C2/en not_active IP Right Cessation
-
2010
- 2010-03-04 DK DK10707270T patent/DK2403976T3/da active
- 2010-03-04 WO PCT/EP2010/052769 patent/WO2010100235A1/en not_active Ceased
- 2010-03-04 KR KR1020117022758A patent/KR101696946B1/ko active Active
- 2010-03-04 US US13/254,854 patent/US9845532B2/en active Active
- 2010-03-04 JP JP2011552450A patent/JP5438779B2/ja active Active
- 2010-03-04 CN CN201080019618.2A patent/CN102414342B/zh active Active
- 2010-03-04 EP EP20100707270 patent/EP2403976B1/en active Active
- 2010-03-04 CA CA2754093A patent/CA2754093C/en active Active
-
2017
- 2017-11-15 US US15/813,840 patent/US20180073138A1/en not_active Abandoned
-
2020
- 2020-11-16 US US17/099,565 patent/US20210102288A1/en not_active Abandoned
-
2023
- 2023-07-03 US US18/217,741 patent/US20230340665A1/en active Pending
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