JP2013505368A5 - - Google Patents
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- JP2013505368A5 JP2013505368A5 JP2012530934A JP2012530934A JP2013505368A5 JP 2013505368 A5 JP2013505368 A5 JP 2013505368A5 JP 2012530934 A JP2012530934 A JP 2012530934A JP 2012530934 A JP2012530934 A JP 2012530934A JP 2013505368 A5 JP2013505368 A5 JP 2013505368A5
- Authority
- JP
- Japan
- Prior art keywords
- ceramic substrate
- item
- porous non
- porous
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000000034 method Methods 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 23
- 239000000919 ceramic Substances 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 229920000307 polymer substrate Polymers 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 229910052976 metal sulfide Inorganic materials 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US24471309P | 2009-09-22 | 2009-09-22 | |
| US24469609P | 2009-09-22 | 2009-09-22 | |
| US61/244,696 | 2009-09-22 | ||
| US61/244,713 | 2009-09-22 | ||
| PCT/US2010/048902 WO2011037798A1 (en) | 2009-09-22 | 2010-09-15 | Method of applying atomic layer deposition coatings onto porous non-ceramic substrates |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013505368A JP2013505368A (ja) | 2013-02-14 |
| JP2013505368A5 true JP2013505368A5 (enExample) | 2013-10-03 |
| JP5681192B2 JP5681192B2 (ja) | 2015-03-04 |
Family
ID=43796159
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012530934A Expired - Fee Related JP5681192B2 (ja) | 2009-09-22 | 2010-09-15 | 多孔性非セラミック基材上に原子層堆積コーティングを適用する方法 |
| JP2012530946A Pending JP2013505156A (ja) | 2009-09-22 | 2010-09-17 | 上部にコンフォーマル層を有する多孔性基材を含む物品 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012530946A Pending JP2013505156A (ja) | 2009-09-22 | 2010-09-17 | 上部にコンフォーマル層を有する多孔性基材を含む物品 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8859040B2 (enExample) |
| EP (2) | EP2480703A4 (enExample) |
| JP (2) | JP5681192B2 (enExample) |
| KR (2) | KR101714814B1 (enExample) |
| CN (2) | CN102575346B (enExample) |
| BR (2) | BR112012005212A2 (enExample) |
| WO (2) | WO2011037798A1 (enExample) |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011013983A2 (en) | 2009-07-27 | 2011-02-03 | Lg Electronics Inc. | A method and an apparatus for processing an audio signal |
| BR112012005212A2 (pt) * | 2009-09-22 | 2016-03-15 | 3M Innovative Properties Co | método para aplicação de revestimetos por deposição de camada atômica em subtratos não cerâmicos porosos |
| WO2011057341A1 (en) * | 2009-11-11 | 2011-05-19 | Nano-Nouvelle Pty Ltd | Porous materials |
| US20140017637A1 (en) | 2011-03-24 | 2014-01-16 | 3M Iinnovative Properties Company | Dental adhesive comprising a coated polymeric component |
| WO2012149487A1 (en) * | 2011-04-27 | 2012-11-01 | Ohio University | Methods and devices for the detection of biofilms |
| JP6231483B2 (ja) * | 2011-10-31 | 2017-11-15 | スリーエム イノベイティブ プロパティズ カンパニー | ロール形態の基材にコーティングを適用する方法 |
| EP2825508A4 (en) | 2012-03-15 | 2015-10-21 | Massachusetts Inst Technology | FILTER BASED ON GRAPHENE |
| WO2014121450A1 (zh) * | 2013-02-05 | 2014-08-14 | Wang Dongjun | 卷对卷式原子层沉积设备及其使用方法 |
| CN103111549A (zh) * | 2013-02-05 | 2013-05-22 | 苏州红荔汽车零部件有限公司 | 汽车座椅骨架u型连接管件的生产自动线 |
| US11326255B2 (en) * | 2013-02-07 | 2022-05-10 | Uchicago Argonne, Llc | ALD reactor for coating porous substrates |
| KR20160032128A (ko) | 2013-07-16 | 2016-03-23 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 필름의 롤 가공 |
| US9598769B2 (en) | 2013-07-24 | 2017-03-21 | Uchicago Argonne, Llc | Method and system for continuous atomic layer deposition |
| CN106413859B (zh) | 2013-11-01 | 2019-07-05 | 麻省理工学院 | 减轻膜中的渗漏 |
| US9902141B2 (en) | 2014-03-14 | 2018-02-27 | University Of Maryland | Layer-by-layer assembly of graphene oxide membranes via electrostatic interaction and eludication of water and solute transport mechanisms |
| KR20200103890A (ko) * | 2015-02-13 | 2020-09-02 | 엔테그리스, 아이엔씨. | 기판 제품 및 장치의 특성 및 성능을 향상시키기 위한 코팅 |
| US10232130B2 (en) * | 2015-03-26 | 2019-03-19 | Becton, Dickinson And Company | Anti-run dry membrane |
| US10702689B2 (en) | 2015-03-26 | 2020-07-07 | Becton, Dickinson And Company | Auto-stop vent plug |
| US10201667B2 (en) | 2015-03-26 | 2019-02-12 | Becton, Dickinson And Company | IV membrane attachment systems and methods |
| US10646648B2 (en) | 2015-04-01 | 2020-05-12 | Becton, Dickinson And Company | IV flow management systems and methods |
| ES2759992T3 (es) | 2015-07-07 | 2020-05-12 | I3 Membrane Gmbh | Procedimiento para electrosorción y electrofiltración mediante una membrana de polímeros revestida con metal, y procedimiento para ello |
| US10124299B2 (en) * | 2015-09-08 | 2018-11-13 | Gwangju Institute Of Science And Technology | Membrane based on graphene and method of manufacturing same |
| US10550010B2 (en) | 2015-12-11 | 2020-02-04 | Uchicago Argonne, Llc | Oleophilic foams for oil spill mitigation |
| CA3022311A1 (en) | 2016-05-11 | 2017-11-16 | Massachusetts Institute Of Technology | Graphene oxide membranes and related methods |
| WO2018009882A1 (en) | 2016-07-08 | 2018-01-11 | Uchicago Argonne, Llc | Functionalized foams |
| KR102218855B1 (ko) * | 2017-07-12 | 2021-02-23 | 주식회사 엘지화학 | 다공성 기재의 표면 코팅 장치 및 방법 |
| US11896935B2 (en) | 2017-08-17 | 2024-02-13 | Uchicago Argonne, Llc | Filtration membranes |
| US12012559B2 (en) | 2018-05-11 | 2024-06-18 | Uchicago Argonne, Llc | Janus membranes via atomic layer deposition |
| US11590456B2 (en) * | 2018-05-31 | 2023-02-28 | Uchicago Argonne, Llc | Systems and methods for oleophobic composite membranes |
| WO2020006484A1 (en) | 2018-06-28 | 2020-01-02 | Massachusetts Institute Of Technology | Coatings to improve the selectivity of atomically thin membranes |
| US11351478B2 (en) | 2018-09-06 | 2022-06-07 | Uchicago Argonne, Llc | Oil skimmer with oleophilic coating |
| US11548798B2 (en) | 2019-04-23 | 2023-01-10 | Uchicago Argonne, Llc | Compressible foam electrode |
| KR102745250B1 (ko) * | 2019-04-29 | 2024-12-23 | 주식회사 엘지에너지솔루션 | 원자층 증착 장치 |
| EP3969158A1 (en) | 2019-05-15 | 2022-03-23 | Via Separations, Inc. | Filtration apparatus containing graphene oxide membrane |
| JP7572972B2 (ja) | 2019-05-15 | 2024-10-24 | ヴィア セパレイションズ，インコーポレイテッド | 耐久性のある酸化グラフェン膜 |
| KR20200141002A (ko) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 배기 가스 분석을 포함한 기상 반응기 시스템을 사용하는 방법 |
| US11117346B2 (en) * | 2019-07-18 | 2021-09-14 | Hamilton Sundstrand Corporation | Thermally-conductive polymer and components |
| US11111578B1 (en) | 2020-02-13 | 2021-09-07 | Uchicago Argonne, Llc | Atomic layer deposition of fluoride thin films |
| JP2021130227A (ja) * | 2020-02-19 | 2021-09-09 | 株式会社リコー | フィルタおよびその製造方法、水の浄化装置、発電装置、並びに発電システム |
| US12042764B2 (en) * | 2020-05-11 | 2024-07-23 | Hamilton Sundstrand Corporation | Aircraft air management systems for deactivating contaminants |
| FR3112796B1 (fr) * | 2020-07-21 | 2022-11-25 | Inst Polytechnique Grenoble | Procédé de fonctionnalisation d’un substrat à base d’un polymère par dépôt chimique d’une couche mince |
| US12154698B2 (en) * | 2020-08-05 | 2024-11-26 | Uchicago Argonne, Llc | Coated fuel pellets, methods of making and using same |
| JP7608267B2 (ja) | 2021-05-19 | 2025-01-06 | 日本航空電子工業株式会社 | マルチバンドアンテナ |
| JP7591972B2 (ja) | 2021-05-19 | 2024-11-29 | 日本航空電子工業株式会社 | マルチバンドアンテナ |
| US12065738B2 (en) | 2021-10-22 | 2024-08-20 | Uchicago Argonne, Llc | Method of making thin films of sodium fluorides and their derivatives by ALD |
| EP4440717A1 (en) | 2021-11-29 | 2024-10-09 | Via Separations, Inc. | Heat exchanger integration with membrane system for evaporator pre-concentration |
| US12256485B2 (en) * | 2022-01-19 | 2025-03-18 | Ken Gen Energy, Llc | Pulse energy generator system |
| US11901169B2 (en) | 2022-02-14 | 2024-02-13 | Uchicago Argonne, Llc | Barrier coatings |
| DE102022106876A1 (de) | 2022-03-23 | 2023-09-28 | Technische Universität Dresden, Körperschaft des öffentlichen Rechts | Filterstruktur sowie deren Herstellung und Verwendung |
| CN116695091B (zh) * | 2023-08-01 | 2023-09-29 | 南京原磊纳米材料有限公司 | 一种疏水导电性薄膜及其制备方法和应用 |
Family Cites Families (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3300095A1 (de) * | 1982-01-06 | 1983-07-28 | Sando Iron Works Co., Ltd., Wakayama | Anlage zum kontinuierlichen behandeln von textilprodukten mit hilfe von niedertemperatur-plasma |
| US4726989A (en) | 1986-12-11 | 1988-02-23 | Minnesota Mining And Manufacturing | Microporous materials incorporating a nucleating agent and methods for making same |
| US5120594A (en) | 1989-11-20 | 1992-06-09 | Minnesota Mining And Manufacturing Company | Microporous polyolefin shaped articles with patterned surface areas of different porosity |
| EP0695622B1 (de) * | 1994-07-22 | 2001-11-14 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zur Plasmamodifizierung von flächigen porösen Gegenständen |
| JP3682465B2 (ja) * | 1999-03-31 | 2005-08-10 | 独立行政法人産業技術総合研究所 | 樹脂成形物表面層の改質方法およびそのための装置および表面層が改質された樹脂成形物、および樹脂成形物表面層の着色方法およびそのための装置および表面層が着色された樹脂成形物、および表面層の改質により機能性を付与された樹脂成形物 |
| US6613383B1 (en) | 1999-06-21 | 2003-09-02 | Regents Of The University Of Colorado | Atomic layer controlled deposition on particle surfaces |
| JP2001279453A (ja) * | 2000-03-29 | 2001-10-10 | Japan Vilene Co Ltd | 多孔質体の放電処理装置及び多孔質体の放電処理方法 |
| US6713177B2 (en) | 2000-06-21 | 2004-03-30 | Regents Of The University Of Colorado | Insulating and functionalizing fine metal-containing particles with conformal ultra-thin films |
| FR2818291B1 (fr) * | 2000-12-19 | 2003-11-07 | Snecma Moteurs | Densification de substrats poreux creux par infiltration chimique en phase vapeur |
| US20040194691A1 (en) * | 2001-07-18 | 2004-10-07 | George Steven M | Method of depositing an inorganic film on an organic polymer |
| US6878419B2 (en) * | 2001-12-14 | 2005-04-12 | 3M Innovative Properties Co. | Plasma treatment of porous materials |
| US7157117B2 (en) | 2002-06-26 | 2007-01-02 | Sigma Laboratories Of Arizona, Llc | Functionalization of porous materials by vacuum deposition of polymers |
| WO2004007353A2 (en) * | 2002-07-17 | 2004-01-22 | Hitco Carbon Composites, Inc. | Continuous chemical vapor deposition process and process furnace |
| US7045205B1 (en) * | 2004-02-19 | 2006-05-16 | Nanosolar, Inc. | Device based on coated nanoporous structure |
| US8304019B1 (en) * | 2004-02-19 | 2012-11-06 | Nanosolar Inc. | Roll-to-roll atomic layer deposition method and system |
| US20060234210A1 (en) | 2004-04-14 | 2006-10-19 | Affinergy, Inc. | Filtration device and method for removing selected materials from biological fluids |
| JP4534565B2 (ja) * | 2004-04-16 | 2010-09-01 | 株式会社デンソー | セラミック多孔質の製造方法 |
| FI117247B (fi) | 2004-06-24 | 2006-08-15 | Beneq Oy | Materiaalin seostaminen selektiivisesti |
| WO2006127946A2 (en) | 2005-05-25 | 2006-11-30 | Gore Enterprise Holdings, Inc. | Multi-functional coatings on microporous substrates |
| US20080254312A1 (en) | 2005-10-11 | 2008-10-16 | Nv Bekaert Sa | Coated Porous Metal Medium |
| EP1968792B1 (en) * | 2005-12-30 | 2013-12-11 | 3M Innovative Properties Company | Functionalized substrates |
| US7767114B2 (en) | 2006-02-07 | 2010-08-03 | President And Fellows Of Harvard College | Gas-phase functionalization of carbon nanotubes |
| US20070272606A1 (en) * | 2006-05-25 | 2007-11-29 | Freese Donald T | Multi-functional coatings on microporous substrates |
| US20070281089A1 (en) * | 2006-06-05 | 2007-12-06 | General Electric Company | Systems and methods for roll-to-roll atomic layer deposition on continuously fed objects |
| EP1884578A1 (en) | 2006-07-31 | 2008-02-06 | MPG Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | A method of manufacturing a self-ordered porous structure of aluminium oxide, a nanoporous article and a nano object |
| US20080119098A1 (en) | 2006-11-21 | 2008-05-22 | Igor Palley | Atomic layer deposition on fibrous materials |
| WO2008136882A2 (en) * | 2007-02-14 | 2008-11-13 | The Board Of Trustees Of The Leland Stanford Junior University | Fabrication method of size-controlled, spatially distributed nanostructures by atomic layer deposition |
| US7842214B2 (en) | 2007-03-28 | 2010-11-30 | 3M Innovative Properties Company | Process for forming microporous membranes |
| JP5060224B2 (ja) | 2007-09-12 | 2012-10-31 | 株式会社東芝 | 信号処理装置及びその方法 |
| US20090081356A1 (en) * | 2007-09-26 | 2009-03-26 | Fedorovskaya Elena A | Process for forming thin film encapsulation layers |
| US20090137043A1 (en) | 2007-11-27 | 2009-05-28 | North Carolina State University | Methods for modification of polymers, fibers and textile media |
| US9564629B2 (en) * | 2008-01-02 | 2017-02-07 | Nanotek Instruments, Inc. | Hybrid nano-filament anode compositions for lithium ion batteries |
| US9309044B2 (en) * | 2008-01-24 | 2016-04-12 | Nestec S.A. | Capsule with integrated antimicrobial filter |
| US9279120B2 (en) * | 2008-05-14 | 2016-03-08 | The Regents Of The University Of Colorado, A Body Corporate | Implantable devices having ceramic coating applied via an atomic layer deposition method |
| JP5711127B2 (ja) | 2008-09-19 | 2015-04-30 | スリーエム イノベイティブ プロパティズ カンパニー | リガンドグラフト官能化基材 |
| WO2010120531A2 (en) | 2009-04-01 | 2010-10-21 | Cornell University | Conformal particle coatings on fiber materials for use in spectroscopic methods for detecting targets of interest and methods based thereon |
| WO2011035195A1 (en) | 2009-09-18 | 2011-03-24 | Nano Terra Inc. | Functional nanofibers and methods of making and using the same |
| BR112012005212A2 (pt) * | 2009-09-22 | 2016-03-15 | 3M Innovative Properties Co | método para aplicação de revestimetos por deposição de camada atômica em subtratos não cerâmicos porosos |
-
2010
- 2010-09-15 BR BR112012005212A patent/BR112012005212A2/pt not_active IP Right Cessation
- 2010-09-15 CN CN201080042180.XA patent/CN102575346B/zh not_active Expired - Fee Related
- 2010-09-15 US US13/392,213 patent/US8859040B2/en not_active Expired - Fee Related
- 2010-09-15 EP EP10819262.6A patent/EP2480703A4/en not_active Withdrawn
- 2010-09-15 JP JP2012530934A patent/JP5681192B2/ja not_active Expired - Fee Related
- 2010-09-15 KR KR1020127010021A patent/KR101714814B1/ko not_active Expired - Fee Related
- 2010-09-15 WO PCT/US2010/048902 patent/WO2011037798A1/en not_active Ceased
- 2010-09-17 EP EP10819281.6A patent/EP2480702A4/en not_active Withdrawn
- 2010-09-17 KR KR1020127010019A patent/KR101720821B1/ko not_active Expired - Fee Related
- 2010-09-17 US US13/390,900 patent/US20120171403A1/en not_active Abandoned
- 2010-09-17 JP JP2012530946A patent/JP2013505156A/ja active Pending
- 2010-09-17 WO PCT/US2010/049250 patent/WO2011037831A2/en not_active Ceased
- 2010-09-17 CN CN201080042237.6A patent/CN102782179B/zh not_active Expired - Fee Related
- 2010-09-17 BR BR112012005997A patent/BR112012005997A2/pt not_active IP Right Cessation
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