JP2016121403A5 - - Google Patents

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JP2016121403A5
JP2016121403A5 JP2016040969A JP2016040969A JP2016121403A5 JP 2016121403 A5 JP2016121403 A5 JP 2016121403A5 JP 2016040969 A JP2016040969 A JP 2016040969A JP 2016040969 A JP2016040969 A JP 2016040969A JP 2016121403 A5 JP2016121403 A5 JP 2016121403A5
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introducing
germanium
steps
film
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JP6371322B2 (ja
JP2016121403A (ja
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JP2016040969A 2013-04-11 2016-03-03 多成分膜の製造方法 Active JP6371322B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201361810919P 2013-04-11 2013-04-11
US61/810,919 2013-04-11
US14/245,403 US9214630B2 (en) 2013-04-11 2014-04-04 Method of making a multicomponent film
US14/245,403 2014-04-04

Related Parent Applications (1)

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JP2014082211A Division JP5902743B2 (ja) 2013-04-11 2014-04-11 多成分膜の製造方法

Publications (3)

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JP2016121403A JP2016121403A (ja) 2016-07-07
JP2016121403A5 true JP2016121403A5 (enExample) 2016-12-28
JP6371322B2 JP6371322B2 (ja) 2018-08-08

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JP2014082211A Active JP5902743B2 (ja) 2013-04-11 2014-04-11 多成分膜の製造方法
JP2016040969A Active JP6371322B2 (ja) 2013-04-11 2016-03-03 多成分膜の製造方法

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US (2) US9214630B2 (enExample)
EP (1) EP2789712B1 (enExample)
JP (2) JP5902743B2 (enExample)
KR (2) KR101634742B1 (enExample)
CN (1) CN104099578B (enExample)
TW (1) TWI507562B (enExample)

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JP5624083B2 (ja) * 2011-06-09 2014-11-12 エア プロダクツ アンド ケミカルズ インコーポレイテッドＡｉｒ Ｐｒｏｄｕｃｔｓａｎｄ Ｃｈｅｍｉｃａｌｓｉｎｃｏｒｐｏｒａｔｅｄ 二元及び三元金属カルコゲニド材料ならびにその製造方法及び使用方法
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