JP2013242962A - 軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材 - Google Patents
軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材 Download PDFInfo
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- JP2013242962A JP2013242962A JP2013178120A JP2013178120A JP2013242962A JP 2013242962 A JP2013242962 A JP 2013242962A JP 2013178120 A JP2013178120 A JP 2013178120A JP 2013178120 A JP2013178120 A JP 2013178120A JP 2013242962 A JP2013242962 A JP 2013242962A
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0433—Nickel- or cobalt-based alloys
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C19/00—Alloys based on nickel or cobalt
- C22C19/07—Alloys based on nickel or cobalt based on cobalt
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C33/00—Making ferrous alloys
- C22C33/02—Making ferrous alloys by powder metallurgy
- C22C33/0257—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements
- C22C33/0278—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements with at least one alloying element having a minimum content above 5%
- C22C33/0285—Making ferrous alloys by powder metallurgy characterised by the range of the alloying elements with at least one alloying element having a minimum content above 5% with Cr, Co, or Ni having a minimum content higher than 5%
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/10—Ferrous alloys, e.g. steel alloys containing cobalt
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/12—Ferrous alloys, e.g. steel alloys containing tungsten, tantalum, molybdenum, vanadium, or niobium
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
- C22C45/02—Amorphous alloys with iron as the major constituent
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
- C22C45/04—Amorphous alloys with nickel or cobalt as the major constituent
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/147—Alloys characterised by their composition
- H01F1/153—Amorphous metallic alloys, e.g. glassy metals
- H01F1/15308—Amorphous metallic alloys, e.g. glassy metals based on Fe/Ni
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/147—Alloys characterised by their composition
- H01F1/153—Amorphous metallic alloys, e.g. glassy metals
- H01F1/15316—Amorphous metallic alloys, e.g. glassy metals based on Co
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
- H01F41/183—Sputtering targets therefor
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C2200/00—Crystalline structure
- C22C2200/02—Amorphous
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C2202/00—Physical properties
- C22C2202/02—Magnetic
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
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- Dispersion Chemistry (AREA)
- Electromagnetism (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
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Abstract
【解決手段】本発明によれば、原子比における組成式が(FeX−Co100−X)、10≦X≦80で表されるFe−Co合金に、TaおよびNbから選ばれる1種または2種を14.5〜20原子%含有し、最大透磁率が250以下、PTFが10%以上である軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材が提供される。
【選択図】なし
Description
(PTF)=100×(ターゲット材を置いた状態での磁束の強さ)÷(ターゲット材を置かない状態での磁束の強さ)(%)
(PTF)=100×(ターゲット材を置いた状態での磁束の強さ)÷(ターゲット材を置かない状態での磁束の強さ)(%)
Claims (1)
- 原子比における組成式が(FeX−Co100−X)、10≦X≦80で表されるFe−Co合金に、TaおよびNbから選ばれる1種または2種を14.5〜20原子%含有し、最大透磁率が250以下、PTFが10%以上である軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材。
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JP2013178120A JP2013242962A (ja) | 2008-02-18 | 2013-08-29 | 軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材 |
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JP2008035615 | 2008-02-18 | ||
JP2008035615 | 2008-02-18 | ||
JP2013178120A JP2013242962A (ja) | 2008-02-18 | 2013-08-29 | 軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材 |
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JP2009554282A Division JP5359890B2 (ja) | 2008-02-18 | 2009-02-12 | 軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材 |
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JP2009554282A Active JP5359890B2 (ja) | 2008-02-18 | 2009-02-12 | 軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材 |
JP2013178120A Pending JP2013242962A (ja) | 2008-02-18 | 2013-08-29 | 軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材 |
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WO (1) | WO2009104509A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI602940B (zh) * | 2014-06-11 | 2017-10-21 | 光洋應用材料科技股份有限公司 | 軟磁性合金濺鍍靶材及軟磁性合金材料 |
TWI646208B (zh) * | 2015-02-26 | 2019-01-01 | 光洋應用材料科技股份有限公司 | 非晶軟磁靶材及非晶軟磁材料 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5397755B2 (ja) * | 2008-06-17 | 2014-01-22 | 日立金属株式会社 | 軟磁性膜形成用Fe−Co系合金スパッタリングターゲット材 |
JP5418897B2 (ja) * | 2008-08-04 | 2014-02-19 | 日立金属株式会社 | Co−Fe系合金スパッタリングターゲット材の製造方法 |
WO2013005785A1 (ja) | 2011-07-06 | 2013-01-10 | 日立金属株式会社 | 軟磁性下地層 |
CN104145043B (zh) | 2012-06-06 | 2015-11-25 | 日立金属株式会社 | Fe-Co系合金溅射靶材及其制造方法 |
WO2014017381A1 (ja) * | 2012-07-24 | 2014-01-30 | 日立金属株式会社 | ターゲット材およびその製造方法 |
TWI461557B (zh) * | 2013-06-11 | 2014-11-21 | Solar Applied Mat Tech Corp | 鐵鈷鉭合金濺鍍靶材 |
WO2016157922A1 (ja) * | 2015-03-27 | 2016-10-06 | 日立金属株式会社 | 軟磁性膜および軟磁性膜形成用スパッタリングターゲット |
Citations (5)
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US20020003009A1 (en) * | 1999-10-01 | 2002-01-10 | Michael Bartholomeusz | Wrought processing of brittle target alloy for sputtering applications |
US20030228238A1 (en) * | 2002-06-07 | 2003-12-11 | Wenjun Zhang | High-PTF sputtering targets and method of manufacturing |
JP2006144124A (ja) * | 2001-04-11 | 2006-06-08 | Heraeus Inc | 貴金属磁気スパッタリングターゲットの製造方法及びこの方法で製造された貴金属磁気スパッタリングターゲット |
JP2006265653A (ja) * | 2005-03-24 | 2006-10-05 | Hitachi Metals Ltd | Fe−Co基合金ターゲット材およびその製造方法 |
JP2007297688A (ja) * | 2006-05-02 | 2007-11-15 | Sanyo Special Steel Co Ltd | FeCo系ターゲット材 |
Family Cites Families (1)
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JP5111835B2 (ja) * | 2006-11-17 | 2013-01-09 | 山陽特殊製鋼株式会社 | (CoFe)ZrNb/Ta/Hf系ターゲット材およびその製造方法 |
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2009
- 2009-02-12 WO PCT/JP2009/052317 patent/WO2009104509A1/ja active Application Filing
- 2009-02-12 JP JP2009554282A patent/JP5359890B2/ja active Active
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2013
- 2013-08-29 JP JP2013178120A patent/JP2013242962A/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020003009A1 (en) * | 1999-10-01 | 2002-01-10 | Michael Bartholomeusz | Wrought processing of brittle target alloy for sputtering applications |
JP2006144124A (ja) * | 2001-04-11 | 2006-06-08 | Heraeus Inc | 貴金属磁気スパッタリングターゲットの製造方法及びこの方法で製造された貴金属磁気スパッタリングターゲット |
US20030228238A1 (en) * | 2002-06-07 | 2003-12-11 | Wenjun Zhang | High-PTF sputtering targets and method of manufacturing |
JP2005530925A (ja) * | 2002-06-07 | 2005-10-13 | ヘラエウス インコーポレーテッド | 高ptfスパッタリングターゲット及びその製造方法 |
JP2006265653A (ja) * | 2005-03-24 | 2006-10-05 | Hitachi Metals Ltd | Fe−Co基合金ターゲット材およびその製造方法 |
JP2007297688A (ja) * | 2006-05-02 | 2007-11-15 | Sanyo Special Steel Co Ltd | FeCo系ターゲット材 |
US20080038145A1 (en) * | 2006-05-02 | 2008-02-14 | Sanyo Special Steel Co., Ltd. | Fe-Co based target material and method for producing the same |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI602940B (zh) * | 2014-06-11 | 2017-10-21 | 光洋應用材料科技股份有限公司 | 軟磁性合金濺鍍靶材及軟磁性合金材料 |
TWI646208B (zh) * | 2015-02-26 | 2019-01-01 | 光洋應用材料科技股份有限公司 | 非晶軟磁靶材及非晶軟磁材料 |
Also Published As
Publication number | Publication date |
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JPWO2009104509A1 (ja) | 2011-06-23 |
WO2009104509A1 (ja) | 2009-08-27 |
JP5359890B2 (ja) | 2013-12-04 |
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