JP2013205098A - プローブ及びプローブカード - Google Patents
プローブ及びプローブカード Download PDFInfo
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- JP2013205098A JP2013205098A JP2012072014A JP2012072014A JP2013205098A JP 2013205098 A JP2013205098 A JP 2013205098A JP 2012072014 A JP2012072014 A JP 2012072014A JP 2012072014 A JP2012072014 A JP 2012072014A JP 2013205098 A JP2013205098 A JP 2013205098A
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- 239000000523 sample Substances 0.000 title claims abstract description 179
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 238000007689 inspection Methods 0.000 claims abstract description 11
- 238000003780 insertion Methods 0.000 description 11
- 230000037431 insertion Effects 0.000 description 11
- 239000004020 conductor Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
【解決手段】本発明のプローブは、基端がプローブカードの基板側に接触した状態で先端が検査対象部材の電極に接触する直線状の本体部と、当該本体部の基端部に設けられ、当該本体部を上記プローブカード側に弾性的に支持する弾性支持部とを備えたプローブである。上記弾性支持部は、その基端側を上記本体部の基端部に一体的に固定されて、先端側を上記本体部の先端部へ向けて当該本体部側へ円弧状に湾曲させて形成された。また、上記弾性支持部は、上記本体部の基端部に当該本体部を挟んで両側に対称に2つ設けられ、同じ曲率半径の円弧状に湾曲させて構成された。プローブカードに複数備えるプローブとして上記プローブを用いた。
【選択図】 図5
Description
上記実施形態では、プローブ27の弾性支持部36を本体部35の両側に2つ設けたが、図15に示すように、弾性支持部36を本体部35に1つだけ設けてもよい。この場合も、弾性支持部36で本体部35を弾性的に支持することができ、上記実施形態同様の作用、効果を奏することができる。
Claims (4)
- 基端がプローブカードの基板側に接触した状態で先端が検査対象部材の電極に接触する直線状の本体部と、
当該本体部の基端部に設けられ、当該本体部を上記プローブカード側に弾性的に支持する弾性支持部とを備えたことを特徴とするプローブ。 - 請求項1に記載のプローブにおいて、
上記弾性支持部は、その基端側を上記本体部の基端部に一体的に固定されて、先端側を上記本体部の先端部へ向けて当該本体部側へ円弧状に湾曲させて形成されたことを特徴とするプローブ。 - 請求項2に記載のプローブにおいて、
上記弾性支持部は、上記本体部の基端部に当該本体部を挟んで両側に対称に2つ設けられ、同じ曲率半径の円弧状に湾曲させて構成されたことを特徴とするプローブ。 - 複数のプローブを備えたプローブカードにおいて、
上記プローブとして請求項1乃至3のいずれか1項に記載のプローブを用いたことを特徴とするプローブカード。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012072014A JP5868239B2 (ja) | 2012-03-27 | 2012-03-27 | プローブ及びプローブカード |
TW102107837A TWI503550B (zh) | 2012-03-27 | 2013-03-06 | 探針及探針卡 |
KR1020130027116A KR101422566B1 (ko) | 2012-03-27 | 2013-03-14 | 프로브 및 프로브 카드 |
US13/836,387 US9194886B2 (en) | 2012-03-27 | 2013-03-15 | Probe and probe card |
EP13160968.7A EP2645113A3 (en) | 2012-03-27 | 2013-03-26 | Probe and probe card |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012072014A JP5868239B2 (ja) | 2012-03-27 | 2012-03-27 | プローブ及びプローブカード |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013205098A true JP2013205098A (ja) | 2013-10-07 |
JP2013205098A5 JP2013205098A5 (ja) | 2015-01-15 |
JP5868239B2 JP5868239B2 (ja) | 2016-02-24 |
Family
ID=48095544
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012072014A Active JP5868239B2 (ja) | 2012-03-27 | 2012-03-27 | プローブ及びプローブカード |
Country Status (5)
Country | Link |
---|---|
US (1) | US9194886B2 (ja) |
EP (1) | EP2645113A3 (ja) |
JP (1) | JP5868239B2 (ja) |
KR (1) | KR101422566B1 (ja) |
TW (1) | TWI503550B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016099337A (ja) * | 2015-07-27 | 2016-05-30 | 株式会社日本マイクロニクス | 接触検査装置 |
JP2016109664A (ja) * | 2014-11-26 | 2016-06-20 | 株式会社日本マイクロニクス | プローブ及び接触検査装置 |
KR20180004753A (ko) * | 2015-05-07 | 2018-01-12 | 테크노프로브 에스.피.에이. | 특히 감소된 피치 적용을 위한, 수직형 프로브를 구비한 테스트 헤드 |
WO2022059070A1 (ja) * | 2020-09-15 | 2022-03-24 | 日本電子材料株式会社 | プローブカード |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT515629B1 (de) * | 2014-04-14 | 2020-07-15 | Dr Gaggl Rainer | Nadelkarte |
JP6407672B2 (ja) * | 2014-11-18 | 2018-10-17 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
TWI626452B (zh) * | 2017-01-09 | 2018-06-11 | Probe head architecture for vertical probes and their probe cards | |
TWI630393B (zh) * | 2017-09-04 | 2018-07-21 | 中華精測科技股份有限公司 | 探針卡裝置及其矩形探針 |
TWI638166B (zh) * | 2018-01-24 | 2018-10-11 | 中華精測科技股份有限公司 | 探針卡裝置及矩形探針 |
US10608356B2 (en) * | 2018-08-30 | 2020-03-31 | L-3 Technologies, Inc. | Multiple node bus bar contacts for high-power electronic assemblies |
TWI766154B (zh) | 2019-03-27 | 2022-06-01 | 旺矽科技股份有限公司 | 探針頭及探針卡 |
IT201900014208A1 (it) | 2019-08-07 | 2021-02-07 | Technoprobe Spa | Testa di misura di dispositivi elettronici e relativa scheda di misura |
KR102329790B1 (ko) * | 2019-12-26 | 2021-11-23 | 주식회사 에스디에이 | 가변형 mems 프로브 카드 및 이의 조립방법 |
KR102509525B1 (ko) * | 2021-02-22 | 2023-03-14 | (주)포인트엔지니어링 | 전기 전도성 접촉핀 및 그 어셈블리 |
KR102321081B1 (ko) * | 2021-07-21 | 2021-11-03 | (주)새한마이크로텍 | 접촉 프로브 조립체 |
IT202100032882A1 (it) * | 2021-12-29 | 2023-06-29 | Technoprobe Spa | Sonda di contatto per teste di misura di dispositivi elettronici e relativa testa di misura |
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JPH0541417A (ja) * | 1991-07-12 | 1993-02-19 | Nec Corp | プローブカード |
JPH0954115A (ja) * | 1995-08-10 | 1997-02-25 | Nippon Denshi Zairyo Kk | 垂直型プローブカード及びそれに用いられるプローブ |
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2012
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-
2013
- 2013-03-06 TW TW102107837A patent/TWI503550B/zh active
- 2013-03-14 KR KR1020130027116A patent/KR101422566B1/ko active IP Right Grant
- 2013-03-15 US US13/836,387 patent/US9194886B2/en active Active
- 2013-03-26 EP EP13160968.7A patent/EP2645113A3/en active Pending
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2016109664A (ja) * | 2014-11-26 | 2016-06-20 | 株式会社日本マイクロニクス | プローブ及び接触検査装置 |
KR20180004753A (ko) * | 2015-05-07 | 2018-01-12 | 테크노프로브 에스.피.에이. | 특히 감소된 피치 적용을 위한, 수직형 프로브를 구비한 테스트 헤드 |
JP2018523095A (ja) * | 2015-05-07 | 2018-08-16 | テクノプローベ エス.ピー.エー. | 特に低減ピッチ用途のための、垂直プローブを有するテストヘッド |
KR102577451B1 (ko) * | 2015-05-07 | 2023-09-12 | 테크노프로브 에스.피.에이. | 특히 감소된 피치 적용을 위한, 수직형 프로브를 구비한 테스트 헤드 |
JP2016099337A (ja) * | 2015-07-27 | 2016-05-30 | 株式会社日本マイクロニクス | 接触検査装置 |
WO2022059070A1 (ja) * | 2020-09-15 | 2022-03-24 | 日本電子材料株式会社 | プローブカード |
Also Published As
Publication number | Publication date |
---|---|
US9194886B2 (en) | 2015-11-24 |
US20130265074A1 (en) | 2013-10-10 |
JP5868239B2 (ja) | 2016-02-24 |
KR20130110027A (ko) | 2013-10-08 |
EP2645113A2 (en) | 2013-10-02 |
TWI503550B (zh) | 2015-10-11 |
EP2645113A3 (en) | 2017-12-20 |
KR101422566B1 (ko) | 2014-07-25 |
TW201350858A (zh) | 2013-12-16 |
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