JP2013110655A5 - - Google Patents

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JP2013110655A5
JP2013110655A5 JP2011255545A JP2011255545A JP2013110655A5 JP 2013110655 A5 JP2013110655 A5 JP 2013110655A5 JP 2011255545 A JP2011255545 A JP 2011255545A JP 2011255545 A JP2011255545 A JP 2011255545A JP 2013110655 A5 JP2013110655 A5 JP 2013110655A5
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Japan
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resonator
thin film
piezoelectric thin
temperature coefficient
filter
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JP2011255545A
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Japanese (ja)
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JP2013110655A (ja
JP5877043B2 (ja
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Priority to JP2011255545A priority Critical patent/JP5877043B2/ja
Priority claimed from JP2011255545A external-priority patent/JP5877043B2/ja
Priority to US13/610,393 priority patent/US9240768B2/en
Priority to CN201210479096.5A priority patent/CN103138032B/zh
Publication of JP2013110655A publication Critical patent/JP2013110655A/ja
Publication of JP2013110655A5 publication Critical patent/JP2013110655A5/ja
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JP2011255545A 2011-11-22 2011-11-22 デュプレクサ Active JP5877043B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011255545A JP5877043B2 (ja) 2011-11-22 2011-11-22 デュプレクサ
US13/610,393 US9240768B2 (en) 2011-11-22 2012-09-11 Duplexer with transmission and reception filters each including resonators formed on different chips
CN201210479096.5A CN103138032B (zh) 2011-11-22 2012-11-22 双工器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011255545A JP5877043B2 (ja) 2011-11-22 2011-11-22 デュプレクサ

Publications (3)

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JP2013110655A JP2013110655A (ja) 2013-06-06
JP2013110655A5 true JP2013110655A5 (enExample) 2015-01-15
JP5877043B2 JP5877043B2 (ja) 2016-03-02

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US (1) US9240768B2 (enExample)
JP (1) JP5877043B2 (enExample)
CN (1) CN103138032B (enExample)

Families Citing this family (99)

* Cited by examiner, † Cited by third party
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JP6534366B2 (ja) 2016-06-07 2019-06-26 太陽誘電株式会社 弾性波デバイス
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US11206009B2 (en) 2019-08-28 2021-12-21 Resonant Inc. Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch
US10790802B2 (en) 2018-06-15 2020-09-29 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
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SG10201902753RA (en) 2018-04-12 2019-11-28 Skyworks Solutions Inc Filter Including Two Types Of Acoustic Wave Resonators
DE102018113624A1 (de) * 2018-06-07 2019-12-12 RF360 Europe GmbH Elektroakustischer Resonator und HF-Filter, das einen elektroakustischen Resonator umfasst
US11996822B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Wide bandwidth time division duplex transceiver
US11870423B2 (en) 2018-06-15 2024-01-09 Murata Manufacturing Co., Ltd. Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
US11264966B2 (en) 2018-06-15 2022-03-01 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
US12119808B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US10992284B2 (en) 2018-06-15 2021-04-27 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
US11888463B2 (en) 2018-06-15 2024-01-30 Murata Manufacturing Co., Ltd. Multi-port filter using transversely-excited film bulk acoustic resonators
US10819309B1 (en) 2019-04-05 2020-10-27 Resonant Inc. Transversely-excited film bulk acoustic resonator package and method
US11949402B2 (en) 2020-08-31 2024-04-02 Murata Manufacturing Co., Ltd. Resonators with different membrane thicknesses on the same die
US11329628B2 (en) 2020-06-17 2022-05-10 Resonant Inc. Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators
US11916539B2 (en) * 2020-02-28 2024-02-27 Murata Manufacturing Co., Ltd. Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators
US11967945B2 (en) 2018-06-15 2024-04-23 Murata Manufacturing Co., Ltd. Transversly-excited film bulk acoustic resonators and filters
US12040781B2 (en) 2018-06-15 2024-07-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US11146238B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Film bulk acoustic resonator fabrication method
US12113512B2 (en) 2021-03-29 2024-10-08 Murata Manufacturing Co., Ltd. Layout of XBARs with multiple sub-resonators in parallel
US11323091B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with diaphragm support pedestals
US11876498B2 (en) 2018-06-15 2024-01-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
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US12224732B2 (en) 2018-06-15 2025-02-11 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands
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US12184261B2 (en) 2018-06-15 2024-12-31 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with a cavity having round end zones
US12009798B2 (en) 2018-06-15 2024-06-11 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes
US11374549B2 (en) 2018-06-15 2022-06-28 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US10985728B2 (en) 2018-06-15 2021-04-20 Resonant Inc. Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
US12155371B2 (en) 2021-03-29 2024-11-26 Murata Manufacturing Co., Ltd. Layout of xbars with multiple sub-resonators in series
US11349450B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
US10826462B2 (en) 2018-06-15 2020-11-03 Resonant Inc. Transversely-excited film bulk acoustic resonators with molybdenum conductors
US12463619B2 (en) 2018-06-15 2025-11-04 Murata Manufacturing Co., Ltd. Filter device
US12212306B2 (en) 2018-06-15 2025-01-28 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
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US12191838B2 (en) 2018-06-15 2025-01-07 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic device and method
US12301212B2 (en) 2018-06-15 2025-05-13 Murata Manufacturing Co., Ltd. XBAR resonators with non-rectangular diaphragms
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US10917072B2 (en) * 2019-06-24 2021-02-09 Resonant Inc. Split ladder acoustic wave filters
US11909381B2 (en) 2018-06-15 2024-02-20 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US12155374B2 (en) 2021-04-02 2024-11-26 Murata Manufacturing Co., Ltd. Tiled transversely-excited film bulk acoustic resonator high power filters
US10797675B2 (en) 2018-06-15 2020-10-06 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate
US12132464B2 (en) 2018-06-15 2024-10-29 Murata Manufacturing Co., Ltd. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US12081187B2 (en) 2018-06-15 2024-09-03 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator
US12149227B2 (en) 2018-06-15 2024-11-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
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CN115051680A (zh) * 2021-03-08 2022-09-13 诺思(天津)微系统有限责任公司 具有单晶和多晶体声波谐振器的滤波器及电子设备
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CN113507275A (zh) * 2021-07-15 2021-10-15 绍兴汉天下微电子有限公司 一种体声波滤波器、版图布局方法以及通信器件
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