JP6374653B2 - 弾性波フィルタ及び分波器 - Google Patents
弾性波フィルタ及び分波器 Download PDFInfo
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- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
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- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
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- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/203—Strip line filters
- H01P1/2039—Galvanic coupling between Input/Output
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/12—Coupling devices having more than two ports
- H01P5/16—Conjugate devices, i.e. devices having at least one port decoupled from one other port
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P7/00—Resonators of the waveguide type
- H01P7/08—Strip line resonators
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
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- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
- H03H9/605—Electric coupling means therefor consisting of a ladder configuration
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- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/703—Networks using bulk acoustic wave devices
- H03H9/706—Duplexers
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- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/203—Strip line filters
- H01P1/20327—Electromagnetic interstage coupling
- H01P1/20354—Non-comb or non-interdigital filters
- H01P1/20381—Special shape resonators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/02—Coupling devices of the waveguide type with invariable factor of coupling
- H01P5/022—Transitions between lines of the same kind and shape, but with different dimensions
- H01P5/028—Transitions between lines of the same kind and shape, but with different dimensions between strip lines
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/021—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the air-gap type
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0407—Temperature coefficient
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- Physics & Mathematics (AREA)
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- Crystallography & Structural Chemistry (AREA)
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
12 高音響インピーダンス膜
14〜14b 温度補償膜
16 下部電極
18 圧電膜
20 上部電極
22 パッシベーション膜
24〜24b 付加膜
30、30a 空隙
32 共振領域
34 導入路
36 孔部
38 開口
40 犠牲層
42 音響反射膜
50 分波器
52 送信フィルタ
54 受信フィルタ
Claims (14)
- 同一基板上に設けられた圧電膜と前記圧電膜を挟んで対向した下部電極及び上部電極とをそれぞれ有する直列共振子及び並列共振子を含む弾性波フィルタであって、
前記直列共振子及び前記並列共振子の一方は、前記圧電膜を挟み前記下部電極と前記上部電極とが対向する共振領域において、前記下部電極又は前記上部電極の前記圧電膜に対して反対側の面に前記圧電膜の弾性定数の温度係数とは逆符号の温度係数の弾性定数を有する温度補償膜を備え且つ前記圧電膜よりも前記下部電極側又は前記上部電極側のうちの前記温度補償膜が設けられた側と同じ側に付加膜を備えてなく、
前記直列共振子及び前記並列共振子の他方は、前記共振領域において、前記圧電膜よりも前記下部電極側又は前記上部電極側のうち前記直列共振子及び前記並列共振子の前記一方において前記温度補償膜が設けられた側と同じ側に前記付加膜を備え且つ前記下部電極又は前記上部電極の前記圧電膜に対して反対側の面のうちの前記直列共振子及び前記並列共振子の前記一方において前記温度補償膜が設けられた側の面に前記温度補償膜を備えていないことを特徴とする弾性波フィルタ。 - 同一基板上に設けられた圧電膜と前記圧電膜を挟んで対向した下部電極及び上部電極とをそれぞれ有する直列共振子及び並列共振子を含む弾性波フィルタであって、
前記直列共振子及び前記並列共振子の一方は、前記圧電膜を挟み前記下部電極と前記上部電極とが対向する共振領域において、前記下部電極又は前記上部電極の前記圧電膜に対して反対側の面に前記圧電膜の弾性定数の温度係数とは逆符号の温度係数の弾性定数を有する温度補償膜を備え且つ前記圧電膜よりも前記下部電極側又は前記上部電極側のうちの前記温度補償膜が設けられた側と同じ側に付加膜を備えてなく、
前記直列共振子及び前記並列共振子の他方は、前記共振領域において、前記圧電膜よりも前記下部電極側又は前記上部電極側のうち前記直列共振子及び前記並列共振子の前記一方において前記温度補償膜が設けられた側と同じ側に前記付加膜を備え且つ前記下部電極又は前記上部電極の前記圧電膜に対して反対側の面のうちの前記直列共振子及び前記並列共振子の前記一方において前記温度補償膜が設けられた側の面に前記温度補償膜を備え、
前記直列共振子及び前記並列共振子の前記一方における前記温度補償膜の厚さは、前記他方における前記温度補償膜の厚さよりも厚いことを特徴とする弾性波フィルタ。 - 同一基板上に設けられた圧電膜と前記圧電膜を挟んで対向した下部電極及び上部電極とをそれぞれ有する直列共振子及び並列共振子を含む弾性波フィルタであって、
前記直列共振子及び前記並列共振子の一方は、前記圧電膜を挟み前記下部電極と前記上部電極とが対向する共振領域において、前記下部電極又は前記上部電極の前記圧電膜に対して反対側の面に前記圧電膜の弾性定数の温度係数とは逆符号の温度係数の弾性定数を有する温度補償膜を備え、
前記直列共振子及び前記並列共振子の他方は、前記共振領域において、前記圧電膜よりも前記下部電極側又は前記上部電極側のうち前記直列共振子及び前記並列共振子の前記一方において前記温度補償膜が設けられた側と同じ側に付加膜を備え、
前記付加膜は、前記下部電極又は前記上部電極と前記圧電膜との間に設けられた圧電材からなり、
前記直列共振子及び前記並列共振子の前記他方の前記共振領域における圧電材の厚さは、前記直列共振子及び前記並列共振子の前記一方の前記共振領域における圧電材よりも厚いことを特徴とする弾性波フィルタ。 - 前記付加膜は、前記下部電極又は前記上部電極に接して設けられた金属からなり、
前記直列共振子及び前記並列共振子の前記他方の前記共振領域における前記圧電膜上又は前記圧電膜下のうち前記付加膜が設けられた側における金属からなる膜の合計の厚さは、前記直列共振子及び前記並列共振子の前記一方の前記共振領域における前記圧電膜上又は前記圧電膜下のうち前記直列共振子及び前記並列共振子の前記他方において前記付加膜が設けられた側と同じ側における金属からなる膜の合計の厚さよりも厚いことを特徴とする請求項1または2記載の弾性波フィルタ。 - 前記温度補償膜は、前記下部電極の前記圧電膜に対して反対側の面に設けられ、
前記付加膜は、前記圧電膜よりも前記下部電極側に設けられ、
前記圧電膜は、前記下部電極の端面を覆うように前記下部電極上から前記基板上に延在して設けられていることを特徴とする請求項1から4のいずれか一項記載の弾性波フィルタ。 - 前記直列共振子及び前記並列共振子の前記一方には、前記付加膜が備わらないことを特徴とする請求項3記載の弾性波フィルタ。
- 前記温度補償膜の前記圧電膜に対して反対側の面に、前記温度補償膜よりも高い音響インピーダンスを有する高音響インピーダンス膜を備えることを特徴とする請求項1から6のいずれか一項記載の弾性波フィルタ。
- 前記共振領域から延びる前記下部電極又は前記上部電極の引き出し部の少なくとも一部には、前記温度補償膜が設けられていないことを特徴とする請求項1から7のいずれか一項記載の弾性波フィルタ。
- 前記温度補償膜は、酸化シリコン又は窒化シリコンを主成分とすることを特徴とする請求項1から8のいずれか一項記載の弾性波フィルタ。
- 前記温度補償膜は、フッ素がドープされた酸化シリコンからなることを特徴とする請求項9記載の弾性波フィルタ。
- 前記圧電膜は、窒化アルミニウムを主成分とすることを特徴とする請求項1から10のいずれか一項記載の弾性波フィルタ。
- 前記共振領域において、前記基板と前記下部電極との間に空隙が形成されていることを特徴とする請求項1から11のいずれか一項記載の弾性波フィルタ。
- 前記共振領域において、前記下部電極下に前記圧電膜を伝搬する弾性波を反射する音響反射膜を備えることを特徴とする請求項1から11のいずれか一項記載の弾性波フィルタ。
- 送信フィルタと受信フィルタとを備え、
前記送信フィルタ及び前記受信フィルタの少なくとも一方が請求項1から13のいずれか一項記載の弾性波フィルタであることを特徴とする分波器。
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CN201410655028.9A CN104660211B (zh) | 2013-11-18 | 2014-11-17 | 声波滤波器和双工器 |
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CN110463036B (zh) * | 2017-03-31 | 2024-05-24 | 英特尔公司 | 宽带滤波器结构和装置 |
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