JP6302437B2 - 弾性波フィルタ、分波器、及びモジュール - Google Patents
弾性波フィルタ、分波器、及びモジュール Download PDFInfo
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- JP6302437B2 JP6302437B2 JP2015161411A JP2015161411A JP6302437B2 JP 6302437 B2 JP6302437 B2 JP 6302437B2 JP 2015161411 A JP2015161411 A JP 2015161411A JP 2015161411 A JP2015161411 A JP 2015161411A JP 6302437 B2 JP6302437 B2 JP 6302437B2
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
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- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/703—Networks using bulk acoustic wave devices
- H03H9/706—Duplexers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/566—Electric coupling means therefor
- H03H9/568—Electric coupling means therefor consisting of a ladder configuration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
- H03H9/605—Electric coupling means therefor consisting of a ladder configuration
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
12 出力端子
20 基板
22 下部電極
24 圧電膜
26 上部電極
28 付加膜
30 第1周波数調整膜
32 第2周波数調整膜
34 空隙
36 共振領域
50 島状パターン
52 開口パターン
60 音響反射膜
70 送信フィルタ
72 受信フィルタ
80 集積回路
82 アンテナ
84 ダイプレクサ
86 スイッチ
88 デュプレクサ
100 弾性波フィルタ
200 デュプレクサ
300 モジュール
Claims (9)
- 入力端子と出力端子との間に直列に接続された1又は複数の直列共振子と、
前記入力端子と前記出力端子との間に並列に接続され、圧電薄膜共振子からなる複数の並列共振子と、を備え、
前記複数の並列共振子のうちの少なくとも2つの共振子は、等ピッチ間隔で形成された複数の島状パターン又は複数の開口パターンを有する付加膜を、圧電膜を挟み下部電極と上部電極が対向する共振領域に備え、
前記少なくとも2つの共振子に備わる前記付加膜の前記複数の島状パターン又は前記複数の開口パターンのピッチ間隔は互いに異なることを特徴とする弾性波フィルタ。 - 入力端子と出力端子との間に直列に接続され、圧電薄膜共振子からなる複数の直列共振子と、
前記入力端子と前記出力端子との間に並列に接続された1又は複数の並列共振子と、を備え、
前記複数の直列共振子のうちの少なくとも2つの共振子は、等ピッチ間隔で形成された複数の島状パターン又は複数の開口パターンを有する付加膜を、圧電膜を挟み下部電極と上部電極が対向する共振領域に備え、
前記少なくとも2つの共振子に備わる前記付加膜の前記複数の島状パターン又は前記複数の開口パターンのピッチ間隔は互いに異なることを特徴とする弾性波フィルタ。 - 前記少なくとも2つの共振子の共振周波数は同じであることを特徴とする請求項1または2記載の弾性波フィルタ。
- 前記少なくとも2つの共振子に備わる前記付加膜は、前記共振領域の面積に対する前記複数の島状パターン又は前記複数の開口パターンの合計面積の割合が互いに同じであり、且つ、上面視における前記複数の島状パターン又は前記複数の開口パターンの大きさが互いに同じであることを特徴とする請求項1から3のいずれか一項記載の弾性波フィルタ。
- 前記少なくとも2つの共振子に備わる前記付加膜は、前記共振領域の面積に対する前記複数の島状パターン又は前記複数の開口パターンの合計面積の割合が互いに同じであり、且つ、上面視における前記複数の島状パターン又は前記複数の開口パターンの大きさが互いに異なることを特徴とする請求項1から3のいずれか一項記載の弾性波フィルタ。
- 前記複数の島状パターン又は前記複数の開口パターンのピッチ間隔は、前記圧電膜により励振される弾性波の波長以上であることを特徴とする請求項1から5のいずれか一項記載の弾性波フィルタ。
- 前記直列共振子と前記並列共振子は、ラダー型に接続されていることを特徴とする請求項1から6のいずれか一項記載の弾性波フィルタ。
- 送信フィルタと受信フィルタを備え、
前記送信フィルタ及び前記受信フィルタの少なくとも一方が請求項1から7のいずれか一項記載の弾性波フィルタであることを特徴とする分波器。 - 請求項1から7のいずれか一項記載の弾性波フィルタを備えることを特徴とするモジュール。
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JP2015161411A JP6302437B2 (ja) | 2015-08-18 | 2015-08-18 | 弾性波フィルタ、分波器、及びモジュール |
US15/236,109 US10069478B2 (en) | 2015-08-18 | 2016-08-12 | Acoustic wave filter, duplexer, and module |
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JP2015161411A JP6302437B2 (ja) | 2015-08-18 | 2015-08-18 | 弾性波フィルタ、分波器、及びモジュール |
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JP2017041709A JP2017041709A (ja) | 2017-02-23 |
JP6302437B2 true JP6302437B2 (ja) | 2018-03-28 |
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JP (1) | JP6302437B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11145982B2 (en) | 2016-06-30 | 2021-10-12 | Hrl Laboratories, Llc | Antenna loaded with electromechanical resonators |
US11211711B2 (en) | 2016-06-30 | 2021-12-28 | Hrl Laboratories, Llc | Antenna dynamically matched with electromechanical resonators |
US11894835B2 (en) * | 2020-09-21 | 2024-02-06 | Murata Manufacturing Co., Ltd. | Sandwiched XBAR for third harmonic operation |
US12021506B2 (en) | 2020-09-30 | 2024-06-25 | Skyworks Global Pte. Ltd. | Bulk acoustic wave resonators with patterned mass loading layers |
CN113810013B (zh) * | 2021-09-23 | 2023-02-28 | 武汉敏声新技术有限公司 | 谐振器、滤波器及双工器 |
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WO1999059244A2 (de) | 1998-05-08 | 1999-11-18 | Infineon Technologies Ag | Dünnfilm-piezoresonator |
WO2007000929A1 (ja) * | 2005-06-29 | 2007-01-04 | Matsushita Electric Industrial Co., Ltd. | 圧電共振器、圧電フィルタ、それを用いた共用器及び通信機器 |
JP2008035358A (ja) * | 2006-07-31 | 2008-02-14 | Hitachi Media Electoronics Co Ltd | 薄膜圧電バルク波共振器及びそれを用いた高周波フィルタ |
JP2008172494A (ja) * | 2007-01-11 | 2008-07-24 | Fujitsu Media Device Kk | 圧電薄膜共振器、弾性波デバイスおよび弾性波デバイスの製造方法。 |
JP2011041136A (ja) * | 2009-08-17 | 2011-02-24 | Taiyo Yuden Co Ltd | 弾性波デバイスおよびその製造方法 |
WO2011036995A1 (ja) | 2009-09-28 | 2011-03-31 | 太陽誘電株式会社 | 弾性波デバイス |
JP5555466B2 (ja) * | 2009-09-28 | 2014-07-23 | 太陽誘電株式会社 | 弾性波デバイス |
WO2011099319A1 (ja) * | 2010-02-10 | 2011-08-18 | 太陽誘電株式会社 | 圧電薄膜共振子、通信モジュール、通信装置 |
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2015
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JP2017041709A (ja) | 2017-02-23 |
US10069478B2 (en) | 2018-09-04 |
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