JP2012525684A5 - - Google Patents

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Publication number
JP2012525684A5
JP2012525684A5 JP2012508591A JP2012508591A JP2012525684A5 JP 2012525684 A5 JP2012525684 A5 JP 2012525684A5 JP 2012508591 A JP2012508591 A JP 2012508591A JP 2012508591 A JP2012508591 A JP 2012508591A JP 2012525684 A5 JP2012525684 A5 JP 2012525684A5
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JP
Japan
Prior art keywords
plasma
strip
substrate
plasma generator
generator array
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JP2012508591A
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English (en)
Japanese (ja)
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JP5746147B2 (ja
JP2012525684A (ja
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Priority claimed from PCT/US2010/032571 external-priority patent/WO2010129277A2/en
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Publication of JP2012525684A5 publication Critical patent/JP2012525684A5/ja
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JP2012508591A 2009-04-28 2010-04-27 プラズマ発生器、プラズマ発生器アレイ、当該アレイを用いた変性方法 Active JP5746147B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17333409P 2009-04-28 2009-04-28
US61/173,334 2009-04-28
PCT/US2010/032571 WO2010129277A2 (en) 2009-04-28 2010-04-27 Microplasma generator and methods therefor

Publications (3)

Publication Number Publication Date
JP2012525684A JP2012525684A (ja) 2012-10-22
JP2012525684A5 true JP2012525684A5 (enExample) 2013-06-20
JP5746147B2 JP5746147B2 (ja) 2015-07-08

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JP2012508591A Active JP5746147B2 (ja) 2009-04-28 2010-04-27 プラズマ発生器、プラズマ発生器アレイ、当該アレイを用いた変性方法

Country Status (7)

Country Link
US (1) US9006972B2 (enExample)
EP (1) EP2425459A4 (enExample)
JP (1) JP5746147B2 (enExample)
KR (1) KR20120023030A (enExample)
AU (1) AU2010245048B2 (enExample)
CA (1) CA2797497A1 (enExample)
WO (1) WO2010129277A2 (enExample)

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US10125052B2 (en) 2008-05-06 2018-11-13 Massachusetts Institute Of Technology Method of fabricating electrically conductive aerogels
US10308377B2 (en) 2011-05-03 2019-06-04 Massachusetts Institute Of Technology Propellant tank and loading for electrospray thruster
WO2013016497A2 (en) * 2011-07-28 2013-01-31 Trustees Of Tufts College Microplasma generating array
US9960005B2 (en) 2012-08-08 2018-05-01 Massachusetts Institute Of Technology Microplasma generation devices and associated systems and methods
US9669416B2 (en) 2013-05-28 2017-06-06 Massachusetts Institute Of Technology Electrospraying systems and associated methods
US9330889B2 (en) * 2013-07-11 2016-05-03 Agilent Technologies Inc. Plasma generation device with microstrip resonator
US9647414B2 (en) 2014-01-30 2017-05-09 Physical Sciences, Inc. Optically pumped micro-plasma
WO2015183915A1 (en) * 2014-05-27 2015-12-03 The University Of Florida Research Foundation, Inc. Glass interposer integrated high quality electronic components and systems
TWI569690B (zh) * 2015-01-23 2017-02-01 國立臺灣大學 一種電漿產生裝置與其製備方法
US9736920B2 (en) 2015-02-06 2017-08-15 Mks Instruments, Inc. Apparatus and method for plasma ignition with a self-resonating device
CN104955259B (zh) * 2015-04-27 2018-03-23 华东师范大学 一种平面小功率微波微等离子体圆环形阵列源
US10832895B2 (en) 2016-05-19 2020-11-10 Plasmotica, LLC Stand alone microfluidic analytical chip device
JP6316920B1 (ja) * 2016-12-07 2018-04-25 國家中山科學研究院 ガラス基板のセレン化及び硫化工程に用いる設備
US10141855B2 (en) 2017-04-12 2018-11-27 Accion Systems, Inc. System and method for power conversion
US11355317B2 (en) * 2017-12-14 2022-06-07 Applied Materials, Inc. Methods and apparatus for dynamical control of radial uniformity in microwave chambers
JP7239134B2 (ja) * 2018-05-18 2023-03-14 国立大学法人大阪大学 樹脂材と金属材との接合体およびその製造方法
EP3806586B1 (en) * 2018-05-30 2022-07-13 Toshiba Mitsubishi-Electric Industrial Systems Corporation Active gas generation device
CN110049614B (zh) * 2019-04-28 2021-12-03 中国科学院微电子研究所 微波等离子体装置及等离子体激发方法
US11545351B2 (en) 2019-05-21 2023-01-03 Accion Systems, Inc. Apparatus for electrospray emission
EP3879946B1 (en) 2019-11-12 2023-02-15 Toshiba Mitsubishi-Electric Industrial Systems Corporation Activated gas generation device
WO2021106100A1 (ja) 2019-11-27 2021-06-03 東芝三菱電機産業システム株式会社 活性ガス生成装置
FI129609B (en) 2020-01-10 2022-05-31 Picosun Oy Substrate processing apparatus
EP4200218A4 (en) 2020-08-24 2024-08-07 Accion Systems, Inc. PROPELLANT DEVICE
EP4260049A4 (en) * 2020-12-11 2025-01-15 Inficon, Inc. HIGH TEMPERATURE CO-FIRED CERAMIC ANTENNA FOR PLASMA GENERATION
FR3131378B1 (fr) * 2021-12-29 2024-05-31 Centre Nat Etd Spatiales Dispositif de déclenchement de décharge électrostatique et procédé d’utilisation associé.

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