JP2012222157A5 - - Google Patents
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- Publication number
- JP2012222157A5 JP2012222157A5 JP2011086642A JP2011086642A JP2012222157A5 JP 2012222157 A5 JP2012222157 A5 JP 2012222157A5 JP 2011086642 A JP2011086642 A JP 2011086642A JP 2011086642 A JP2011086642 A JP 2011086642A JP 2012222157 A5 JP2012222157 A5 JP 2012222157A5
- Authority
- JP
- Japan
- Prior art keywords
- containing gas
- processing chamber
- reaction tube
- coating film
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 9
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims 5
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 5
- 239000011248 coating agent Substances 0.000 claims 5
- 238000000576 coating method Methods 0.000 claims 5
- 229910052711 selenium Inorganic materials 0.000 claims 5
- 239000011669 selenium Substances 0.000 claims 5
- 229910052717 sulfur Inorganic materials 0.000 claims 5
- 239000011593 sulfur Substances 0.000 claims 5
- 239000007769 metal material Substances 0.000 claims 3
- 230000007797 corrosion Effects 0.000 claims 2
- 238000005260 corrosion Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011086642A JP2012222157A (ja) | 2011-04-08 | 2011-04-08 | 基板処理装置、及び、太陽電池の製造方法 |
| KR1020120022171A KR20120115091A (ko) | 2011-04-08 | 2012-03-05 | 기판 처리 장치, 태양 전지의 제조 방법 및 기판의 제조 방법 |
| US13/427,419 US20120258566A1 (en) | 2011-04-08 | 2012-03-22 | Substrate processing apparatus, method for manufacturing solar battery, and method for manufacturing substrate |
| TW101110714A TWI462322B (zh) | 2011-04-08 | 2012-03-28 | 基板處理裝置，太陽電池之製造方法，基板之製造方法及反應管 |
| CN201210104813.6A CN102738261B (zh) | 2011-04-08 | 2012-04-06 | 衬底处理装置、太阳能电池的制造方法及衬底的制造方法 |
| KR20140158573A KR20150002556A (ko) | 2011-04-08 | 2014-11-14 | 기판 처리 장치, 태양 전지의 제조 방법 및 기판의 제조 방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011086642A JP2012222157A (ja) | 2011-04-08 | 2011-04-08 | 基板処理装置、及び、太陽電池の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012222157A JP2012222157A (ja) | 2012-11-12 |
| JP2012222157A5 true JP2012222157A5 (enExample) | 2014-05-15 |
Family
ID=46966423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011086642A Pending JP2012222157A (ja) | 2011-04-08 | 2011-04-08 | 基板処理装置、及び、太陽電池の製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20120258566A1 (enExample) |
| JP (1) | JP2012222157A (enExample) |
| KR (2) | KR20120115091A (enExample) |
| CN (1) | CN102738261B (enExample) |
| TW (1) | TWI462322B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102015106693B4 (de) * | 2015-04-29 | 2024-11-28 | Infineon Technologies Austria Ag | Superjunction-Halbleitervorrichtung mit Übergangsabschlusserstreckungsstruktur |
| JP5741921B2 (ja) * | 2011-04-08 | 2015-07-01 | 株式会社日立国際電気 | 基板処理装置、基板処理装置に用いられる反応管の表面へのコーティング膜の形成方法、および、太陽電池の製造方法 |
| JP6068633B2 (ja) * | 2013-05-31 | 2017-01-25 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及び炉口蓋体 |
| CN105531808A (zh) * | 2013-09-10 | 2016-04-27 | 泰拉半导体株式会社 | 热处理装置的腔室及其制造方法 |
| CN104677116B (zh) * | 2014-12-30 | 2017-09-19 | 湖南顶立科技有限公司 | 一种自膨胀式超高温加热器 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2855458B2 (ja) * | 1989-12-15 | 1999-02-10 | 東芝セラミックス株式会社 | 半導体用処理部材 |
| US5273911A (en) * | 1991-03-07 | 1993-12-28 | Mitsubishi Denki Kabushiki Kaisha | Method of producing a thin-film solar cell |
| US5680013A (en) * | 1994-03-15 | 1997-10-21 | Applied Materials, Inc. | Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces |
| JP4380211B2 (ja) * | 2002-08-30 | 2009-12-09 | 東ソー株式会社 | 石英ガラス部品及びその製造方法並びにそれを用いた装置 |
| WO2004027849A1 (ja) * | 2002-09-20 | 2004-04-01 | Hitachi Kokusai Electric Inc. | 半導体装置の製造方法および基板処理装置 |
| JP2010509779A (ja) * | 2006-11-10 | 2010-03-25 | ソロパワー、インコーポレイテッド | 太陽電池吸収体を形成するための前駆体膜のオープンリール式反応 |
| US20080210168A1 (en) * | 2007-01-18 | 2008-09-04 | May Su | Single chamber, multiple tube high efficiency vertical furnace system |
| JP5154814B2 (ja) * | 2007-03-29 | 2013-02-27 | 東ソー・クォーツ株式会社 | 石英ガラス材料の製造方法 |
| WO2010060646A1 (de) * | 2008-11-28 | 2010-06-03 | Volker Probst | Verfahren zum herstellen von halbleiterschichten bzw. von mit elementarem selen und/oder schwefel behandelten beschichteten substraten, insbesondere flächigen substraten |
| EP2144026B1 (de) * | 2008-06-20 | 2016-04-13 | Volker Probst | Prozessvorrichtung und verfahren zum prozessieren von gestapelten prozessgütern |
| WO2011031521A2 (en) * | 2009-08-27 | 2011-03-17 | Applied Materials, Inc. | Method of decontamination of process chamber after in-situ chamber clean |
-
2011
- 2011-04-08 JP JP2011086642A patent/JP2012222157A/ja active Pending
-
2012
- 2012-03-05 KR KR1020120022171A patent/KR20120115091A/ko not_active Ceased
- 2012-03-22 US US13/427,419 patent/US20120258566A1/en not_active Abandoned
- 2012-03-28 TW TW101110714A patent/TWI462322B/zh active
- 2012-04-06 CN CN201210104813.6A patent/CN102738261B/zh active Active
-
2014
- 2014-11-14 KR KR20140158573A patent/KR20150002556A/ko not_active Abandoned
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