JP2010106327A5 - - Google Patents
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- Publication number
- JP2010106327A5 JP2010106327A5 JP2008280723A JP2008280723A JP2010106327A5 JP 2010106327 A5 JP2010106327 A5 JP 2010106327A5 JP 2008280723 A JP2008280723 A JP 2008280723A JP 2008280723 A JP2008280723 A JP 2008280723A JP 2010106327 A5 JP2010106327 A5 JP 2010106327A5
- Authority
- JP
- Japan
- Prior art keywords
- halogen
- gadolinium oxide
- blocked
- samples
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229940075613 gadolinium oxide Drugs 0.000 description 2
- 229910001938 gadolinium oxide Inorganic materials 0.000 description 2
- CMIHHWBVHJVIGI-UHFFFAOYSA-N gadolinium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[Gd+3].[Gd+3] CMIHHWBVHJVIGI-UHFFFAOYSA-N 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008280723A JP5545792B2 (ja) | 2008-10-31 | 2008-10-31 | 耐食性部材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008280723A JP5545792B2 (ja) | 2008-10-31 | 2008-10-31 | 耐食性部材 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010106327A JP2010106327A (ja) | 2010-05-13 |
| JP2010106327A5 true JP2010106327A5 (enExample) | 2011-12-01 |
| JP5545792B2 JP5545792B2 (ja) | 2014-07-09 |
Family
ID=42296064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008280723A Expired - Fee Related JP5545792B2 (ja) | 2008-10-31 | 2008-10-31 | 耐食性部材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5545792B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9212099B2 (en) | 2012-02-22 | 2015-12-15 | Applied Materials, Inc. | Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9034199B2 (en) | 2012-02-21 | 2015-05-19 | Applied Materials, Inc. | Ceramic article with reduced surface defect density and process for producing a ceramic article |
| US9090046B2 (en) | 2012-04-16 | 2015-07-28 | Applied Materials, Inc. | Ceramic coated article and process for applying ceramic coating |
| US9604249B2 (en) * | 2012-07-26 | 2017-03-28 | Applied Materials, Inc. | Innovative top-coat approach for advanced device on-wafer particle performance |
| US9343289B2 (en) | 2012-07-27 | 2016-05-17 | Applied Materials, Inc. | Chemistry compatible coating material for advanced device on-wafer particle performance |
| US9865434B2 (en) | 2013-06-05 | 2018-01-09 | Applied Materials, Inc. | Rare-earth oxide based erosion resistant coatings for semiconductor application |
| US9850568B2 (en) | 2013-06-20 | 2017-12-26 | Applied Materials, Inc. | Plasma erosion resistant rare-earth oxide based thin film coatings |
| US11047035B2 (en) | 2018-02-23 | 2021-06-29 | Applied Materials, Inc. | Protective yttria coating for semiconductor equipment parts |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004190056A (ja) * | 2002-12-09 | 2004-07-08 | Shin Etsu Chem Co Ltd | 耐熱性被覆部材 |
| JP4985928B2 (ja) * | 2005-10-21 | 2012-07-25 | 信越化学工業株式会社 | 多層コート耐食性部材 |
| JP5390166B2 (ja) * | 2008-10-30 | 2014-01-15 | 株式会社日本セラテック | 耐食性部材 |
| JP5390167B2 (ja) * | 2008-10-30 | 2014-01-15 | 株式会社日本セラテック | 耐食性部材 |
-
2008
- 2008-10-31 JP JP2008280723A patent/JP5545792B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9212099B2 (en) | 2012-02-22 | 2015-12-15 | Applied Materials, Inc. | Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics |
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