JP2007220700A5 - - Google Patents

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Publication number
JP2007220700A5
JP2007220700A5 JP2006036026A JP2006036026A JP2007220700A5 JP 2007220700 A5 JP2007220700 A5 JP 2007220700A5 JP 2006036026 A JP2006036026 A JP 2006036026A JP 2006036026 A JP2006036026 A JP 2006036026A JP 2007220700 A5 JP2007220700 A5 JP 2007220700A5
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JP
Japan
Prior art keywords
plasma
plasma processing
processed
generator according
apparatus characterized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006036026A
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English (en)
Japanese (ja)
Other versions
JP4883556B2 (ja
JP2007220700A (ja
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Publication date
Application filed filed Critical
Priority to JP2006036026A priority Critical patent/JP4883556B2/ja
Priority claimed from JP2006036026A external-priority patent/JP4883556B2/ja
Publication of JP2007220700A publication Critical patent/JP2007220700A/ja
Publication of JP2007220700A5 publication Critical patent/JP2007220700A5/ja
Application granted granted Critical
Publication of JP4883556B2 publication Critical patent/JP4883556B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006036026A 2006-02-14 2006-02-14 マイクロ波透過窓、マイクロ波プラズマ発生装置及びマイクロ波プラズマ処理装置 Expired - Fee Related JP4883556B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006036026A JP4883556B2 (ja) 2006-02-14 2006-02-14 マイクロ波透過窓、マイクロ波プラズマ発生装置及びマイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006036026A JP4883556B2 (ja) 2006-02-14 2006-02-14 マイクロ波透過窓、マイクロ波プラズマ発生装置及びマイクロ波プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2007220700A JP2007220700A (ja) 2007-08-30
JP2007220700A5 true JP2007220700A5 (enExample) 2009-04-02
JP4883556B2 JP4883556B2 (ja) 2012-02-22

Family

ID=38497693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006036026A Expired - Fee Related JP4883556B2 (ja) 2006-02-14 2006-02-14 マイクロ波透過窓、マイクロ波プラズマ発生装置及びマイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP4883556B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4793662B2 (ja) * 2008-03-28 2011-10-12 独立行政法人産業技術総合研究所 マイクロ波プラズマ処理装置
JP5356390B2 (ja) * 2008-08-08 2013-12-04 東京エレクトロン株式会社 マイクロ波プラズマ発生装置およびマイクロ波プラズマ処理装置
WO2011122422A1 (ja) * 2010-03-30 2011-10-06 東京エレクトロン株式会社 プラズマ処理装置、および誘電体窓
JP6850636B2 (ja) * 2017-03-03 2021-03-31 東京エレクトロン株式会社 プラズマ処理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04173969A (ja) * 1990-11-08 1992-06-22 Nippon Telegr & Teleph Corp <Ntt> 薄膜形成装置
JP3155199B2 (ja) * 1996-04-12 2001-04-09 東京エレクトロン株式会社 プラズマ処理装置
JP2000012291A (ja) * 1998-06-22 2000-01-14 Sumitomo Metal Ind Ltd プラズマ処理装置
JP4680400B2 (ja) * 2001-02-16 2011-05-11 東京エレクトロン株式会社 プラズマ装置及びその製造方法

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