JP2012203926A - 抵抗変化メモリ - Google Patents
抵抗変化メモリ Download PDFInfo
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- 230000008859 change Effects 0.000 title claims abstract description 130
- 230000007704 transition Effects 0.000 claims description 55
- 238000010586 diagram Methods 0.000 description 18
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 230000006870 function Effects 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052976 metal sulfide Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
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Abstract
【解決手段】第1電極1a及び第2電極1bと、第1電極1aと第2電極1bとの間に配置された可変抵抗層1cとを有し、少なくとも3つの状態を有するメモリセルMCと、第1電極1aと第2電極1bとの間に電圧を印加して、書き込み、消去、及び読み出しを行う制御回路2とを備える。制御回路2は、書き込み動作時に、第1電極1aと第2電極1bとの間に、第1電圧パルスを与え、前記第1電圧パルスを与えた後、前記第1電圧パルスと極性の異なる第2電圧パルスを与える。
【選択図】図9
Description
まず、実施形態の概念を説明する。
第1実施形態の抵抗変化メモリについて説明する。ここでは、抵抗変化メモリとして、クロスポイント型の抵抗変化メモリを例に取る。
図2は、第1実施形態の抵抗変化メモリにおけるメモリセルアレイ構造を示す図である。
図3は、図1に示したメモリセル(抵抗変化素子)MCの構成を示す図である。
オフ状態もしくは中間状態からオン状態に遷移させることが可能な電圧パルス条件。
オン状態から中間状態に遷移させることが可能な電圧パルス条件。
オン状態もしくは中間状態からオフ状態に遷移させることが可能な電圧パルス条件。
中間状態からオン状態に遷移させることが可能な電圧パルス条件。
第1実施形態の抵抗変化素子に対する書き込み、消去、及び読み出しの動作について説明する。
図5Aは、書き込み時における抵抗変化素子の状態遷移を示す図である。書き込みでは、図5Aに示すように、抵抗変化素子を中間状態に遷移させる。具体的には、図5Bに示すように、電圧パルス条件1の電圧パルスとして電圧Vset以上の正電圧を印加して、オフ状態からオン状態へ遷移させる。その後、図5Cに示すように、電圧パルス条件Bの電圧パルスとして絶対値が|Vreset2|以上|Vreset|未満の負電圧を印加して、オン状態から中間状態へ遷移させる。
図6Aは、消去時における抵抗変化素子の状態遷移を示す図である。消去では、図6Aに示すように、抵抗変化素子を中間状態からオフ状態へ遷移させる。具体的には、図6Bに示すように、電圧パルス条件3の電圧パルスとして絶対値が|Vreset|以上の負電圧を印加して、中間状態からオフ状態へ遷移させる。
図7Aは、読み出し時における抵抗変化素子の状態遷移を示す図である。この読み出しは、中間状態にあった抵抗変化素子が読み出し電圧の印加終了後に自動的に中間状態に戻る場合に用いられる。
図8Aは、他の読み出し時における抵抗変化素子の状態の遷移を示す図である。この読み出しは、中間状態にあった抵抗変化素子が読み出し電圧の印加終了後に中間状態に戻らない場合に用いられる。
第1実施形態によれば、読み出し時は大きな電流差を有するオン状態とオフ状態に分かれるが、読み出し時以外は、書き込まれた素子あるいは消去された素子のいずれも中間状態あるいはオフ状態であり、抵抗変化素子に流れる電流は抑制された状態となる。
第2実施形態の抵抗変化メモリについて説明する。第2実施形態では、メモリセルとしてイオン伝導型の抵抗変化素子を備える場合を述べる。なお、メモリセルアレイの構造は、第1実施形態と同様であるため、説明は省略する。
抵抗変化素子には、例えばイオン伝導型の抵抗変化素子が用いられる。以下に、イオン伝導型の抵抗変化素子について詳細に述べる。
図10B、図11A及び図11Bに示した特性を有する抵抗変化素子をメモリセルとして用いた場合の書き込み、消去、及び読み出しの動作を、3×3のメモリセルアレイを例として具体的に説明する。制御回路2は、書き込み、消去、及び読み出しの動作において、以下のような電圧パルスを抵抗変化素子MCに印加する。
図12は、書き込み時における抵抗変化素子の状態遷移と印加電圧を示す図である。
図14は、消去時における抵抗変化素子の状態遷移と印加電圧を示す図である。
図16は、読み出し時における抵抗変化素子の状態遷移と印加電圧を示す図である。
電圧パルスP4の印加によって、抵抗変化素子は中間状態からオン状態へ遷移する。その後、電圧パルスP2の印加によって、抵抗変化素子はオン状態から中間状態へ遷移する。
クロスポイント型のメモリセルアレイにおいては、以下のような一般的な問題がある。図18に示すように、メモリセルMC(0−2)を選択的に読み出す場合、実際には図18に点線で示すような経路に回り込み電流が流れ、それにより選択メモリセルMC(0−2)の状態の判別が困難になる。
Claims (5)
- 第1及び第2電極と、前記第1電極と前記第2電極との間に配置された可変抵抗層と、を有するメモリセルと、
前記第1電極と前記第2電極との間に電圧を印加して、書き込み、消去、及び読み出しを行う制御回路とを具備し、
前記制御回路は、書き込み動作時に、前記第1電極と前記第2電極との間に、第1電圧パルスを与え、前記第1電圧パルスを与えた後、前記第1電圧パルスと極性の異なる第2電圧パルスを与えることを特徴とする抵抗変化メモリ。 - 前記制御回路は、消去動作時に、前記第1電極と前記第2電極との間に、前記第2電圧パルスと極性が同じで、パルス振幅とパルス幅の積が前記第2電圧パルスより大きい第3電圧パルスを与えることを特徴とする請求項1に記載の抵抗変化メモリ。
- 前記制御回路は、読み出し動作時に、前記第1電極と前記第2電極との間に、前記第1電圧パルスと極性が同じで、パルス振幅とパルス幅の積が前記第1電圧パルスより小さい第4電圧パルスを与えることを特徴とする請求項1または2に記載の抵抗変化メモリ。
- 前記制御回路は、前記読み出し動作時に、前記第1電極と前記第2電極との間に、前記第4電圧パルスを与えた後に、前記第2電圧パルスを与えることを特徴とする請求項3に記載の抵抗変化メモリ。
- 第1及び第2電極と、
前記第1電極と前記第2電極との間に配置された可変抵抗層と、
前記第1電極と前記第2電極との間に電圧を印加する制御回路とを具備し、
前記可変抵抗層は、オン状態、オフ状態、及び中間状態のいずれかの状態を備え、前記オフ状態の抵抗値は前記オン状態の抵抗値より大きく、前記中間状態の抵抗値は前記オン状態の抵抗値よりも大きく、
前記制御回路により、第1電圧パルスが印加されると、前記可変抵抗層は前記オン状態に遷移し、前記オン状態にある前記可変抵抗層は、前記第1電圧パルスと極性の異なる第2電圧パルスが印加されると前記中間状態に遷移し、前記中間状態にある前記可変抵抗層は、前記第2電圧パルスよりパルス振幅とパルス幅の積が大きい第3電圧パルスが印加されると前記オフ状態に遷移し、前記中間状態にある前記可変抵抗層は、前記第1電圧パルスよりパルス振幅とパルス幅の積が小さい第4電圧パルスが印加されるとオン状態に遷移することを特徴とする抵抗変化メモリ。
Priority Applications (12)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011064933A JP5404683B2 (ja) | 2011-03-23 | 2011-03-23 | 抵抗変化メモリ |
KR1020157002465A KR101520600B1 (ko) | 2011-03-23 | 2011-09-16 | 저항 변화 메모리 |
PCT/JP2011/071769 WO2012127718A1 (en) | 2011-03-23 | 2011-09-16 | Resistance-change memory |
KR1020137022749A KR101520565B1 (ko) | 2011-03-23 | 2011-09-16 | 저항 변화 메모리 |
CN201180068942.8A CN103415888B (zh) | 2011-03-23 | 2011-09-16 | 电阻变化存储器 |
KR1020157002466A KR101574055B1 (ko) | 2011-03-23 | 2011-09-16 | 저항 변화 메모리 |
EP11861820.6A EP2689423B1 (en) | 2011-03-23 | 2011-09-16 | Resistance-change memory |
TW100133608A TWI502727B (zh) | 2011-03-23 | 2011-09-19 | 抗變化記憶體 |
TW104123087A TW201539707A (zh) | 2011-03-23 | 2011-09-19 | 抗變化記憶體 |
US14/016,614 US9053786B2 (en) | 2011-03-23 | 2013-09-03 | Resistance-change memory |
US14/621,071 US9601192B2 (en) | 2011-03-23 | 2015-02-12 | Resistance-change memory having on-state, off-state, and intermediate state |
US15/425,388 US9928908B2 (en) | 2011-03-23 | 2017-02-06 | Resistance-change memory operating with read pulses of opposite polarity |
Applications Claiming Priority (1)
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JP2011064933A JP5404683B2 (ja) | 2011-03-23 | 2011-03-23 | 抵抗変化メモリ |
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JP2015018591A (ja) * | 2013-07-12 | 2015-01-29 | 株式会社東芝 | 不揮発性半導体記憶装置 |
US8995168B2 (en) | 2013-03-15 | 2015-03-31 | Kabushiki Kaisha Toshiba | Semiconductor storage device |
US9024287B2 (en) | 2013-09-17 | 2015-05-05 | Kabushiki Kaisha Toshiba | Memory device |
JP2017523545A (ja) * | 2014-05-07 | 2017-08-17 | マイクロン テクノロジー, インク. | クロスポイント型アレイの双方向アクセスのための装置および方法 |
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JP2013197420A (ja) | 2012-03-21 | 2013-09-30 | Toshiba Corp | 抵抗変化メモリ素子 |
JP5602175B2 (ja) | 2012-03-26 | 2014-10-08 | 株式会社東芝 | 不揮発性半導体記憶装置及びそのデータ書き込み方法 |
WO2016198965A1 (en) * | 2015-06-10 | 2016-12-15 | Kabushiki Kaisha Toshiba | Resistance change memory |
TWI564898B (zh) * | 2015-10-26 | 2017-01-01 | 國立中山大學 | 電阻式記憶體 |
US10998064B2 (en) | 2018-03-05 | 2021-05-04 | Crossbar, Inc. | Resistive random access memory program and erase techniques and apparatus |
US10755781B2 (en) | 2018-06-06 | 2020-08-25 | Micron Technology, Inc. | Techniques for programming multi-level self-selecting memory cell |
TWI742347B (zh) * | 2019-03-05 | 2021-10-11 | 美商橫杆股份有限公司 | 電阻性隨機存取記憶體程式化及抹除技術及設備 |
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- 2011-09-16 CN CN201180068942.8A patent/CN103415888B/zh active Active
- 2011-09-16 KR KR1020157002465A patent/KR101520600B1/ko active IP Right Grant
- 2011-09-16 WO PCT/JP2011/071769 patent/WO2012127718A1/en active Application Filing
- 2011-09-19 TW TW100133608A patent/TWI502727B/zh not_active IP Right Cessation
- 2011-09-19 TW TW104123087A patent/TW201539707A/zh unknown
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Also Published As
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KR101574055B1 (ko) | 2015-12-02 |
KR101520565B1 (ko) | 2015-05-14 |
EP2689423B1 (en) | 2018-01-24 |
KR20150024434A (ko) | 2015-03-06 |
US20170148516A1 (en) | 2017-05-25 |
EP2689423A4 (en) | 2015-03-04 |
CN103415888B (zh) | 2016-04-20 |
TW201539707A (zh) | 2015-10-16 |
KR101520600B1 (ko) | 2015-05-14 |
WO2012127718A1 (en) | 2012-09-27 |
EP2689423A1 (en) | 2014-01-29 |
CN103415888A (zh) | 2013-11-27 |
JP5404683B2 (ja) | 2014-02-05 |
KR20130119493A (ko) | 2013-10-31 |
US9601192B2 (en) | 2017-03-21 |
US9053786B2 (en) | 2015-06-09 |
US20140003130A1 (en) | 2014-01-02 |
TWI502727B (zh) | 2015-10-01 |
KR20150024433A (ko) | 2015-03-06 |
US9928908B2 (en) | 2018-03-27 |
TW201240065A (en) | 2012-10-01 |
US20150155035A1 (en) | 2015-06-04 |
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