JP2012142275A5 - 活物質 - Google Patents

活物質 Download PDF

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Publication number
JP2012142275A5
JP2012142275A5 JP2011275164A JP2011275164A JP2012142275A5 JP 2012142275 A5 JP2012142275 A5 JP 2012142275A5 JP 2011275164 A JP2011275164 A JP 2011275164A JP 2011275164 A JP2011275164 A JP 2011275164A JP 2012142275 A5 JP2012142275 A5 JP 2012142275A5
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JP
Japan
Prior art keywords
active material
thin film
fluorine
less
film active
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JP2011275164A
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JP2012142275A (ja
JP5922925B2 (ja
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Priority to JP2011275164A priority Critical patent/JP5922925B2/ja
Priority claimed from JP2011275164A external-priority patent/JP5922925B2/ja
Publication of JP2012142275A publication Critical patent/JP2012142275A/ja
Publication of JP2012142275A5 publication Critical patent/JP2012142275A5/ja
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Publication of JP5922925B2 publication Critical patent/JP5922925B2/ja
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Claims (5)

  1. 複数の突起を有する形状の、結晶性シリコンの表面に接して、厚さが０ｎｍより大きく１０ｎｍ以下の、薄膜を有し、
    前記薄膜は、フッ素を有することを特徴とする活物質。
  2. 複数の突起を有する形状の、結晶性シリコンの表面に接して、厚さが４ｎｍ以上９ｎｍ以下の、薄膜を有し、
    前記薄膜は、フッ素を有することを特徴とする活物質。
  3. 請求項１または請求項２において、
    前記薄膜は、酸化シリコン膜であることを特徴とする活物質。
  4. 請求項１乃至請求項３のいずれか一において、
    前記薄膜は、５．０×１０１９ａｔｏｍｓ・ｃｍ−３以上のフッ素を有することを特徴とする活物質。
  5. 請求項１乃至請求項４のいずれか一において、
    前記薄膜は、６．０×１０２０ａｔｏｍｓ・ｃｍ−３以下の窒素を有することを特徴とする活物質。
JP2011275164A 2010-12-16 2011-12-16 蓄電装置 Active JP5922925B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011275164A JP5922925B2 (ja) 2010-12-16 2011-12-16 蓄電装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010280754 2010-12-16
JP2010280754 2010-12-16
JP2011275164A JP5922925B2 (ja) 2010-12-16 2011-12-16 蓄電装置

Related Child Applications (1)

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JP2016081710A Division JP6247715B2 (ja) 2010-12-16 2016-04-15 蓄電装置

Publications (3)

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JP2012142275A JP2012142275A (ja) 2012-07-26
JP2012142275A5 true JP2012142275A5 (ja) 2014-11-06
JP5922925B2 JP5922925B2 (ja) 2016-05-24

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JP2011275164A Active JP5922925B2 (ja) 2010-12-16 2011-12-16 蓄電装置
JP2016081710A Expired - Fee Related JP6247715B2 (ja) 2010-12-16 2016-04-15 蓄電装置

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JP2016081710A Expired - Fee Related JP6247715B2 (ja) 2010-12-16 2016-04-15 蓄電装置

Country Status (3)

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US (1) US9543577B2 (ja)
JP (2) JP5922925B2 (ja)
KR (1) KR101877378B1 (ja)

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