JP2012033472A5 - - Google Patents

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Publication number
JP2012033472A5
JP2012033472A5 JP2011139632A JP2011139632A JP2012033472A5 JP 2012033472 A5 JP2012033472 A5 JP 2012033472A5 JP 2011139632 A JP2011139632 A JP 2011139632A JP 2011139632 A JP2011139632 A JP 2011139632A JP 2012033472 A5 JP2012033472 A5 JP 2012033472A5
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JP
Japan
Prior art keywords
manufacturing
storage device
current collector
power storage
crystalline silicon
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JP2011139632A
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JP5663414B2 (ja
JP2012033472A (ja
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Priority to JP2011139632A priority Critical patent/JP5663414B2/ja
Priority claimed from JP2011139632A external-priority patent/JP5663414B2/ja
Publication of JP2012033472A publication Critical patent/JP2012033472A/ja
Publication of JP2012033472A5 publication Critical patent/JP2012033472A5/ja
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Publication of JP5663414B2 publication Critical patent/JP5663414B2/ja
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Claims (4)

  1. 集電体上に、シリコンを含むガスと窒素ガスとを用いた減圧化学的気相成長法により、ウィスカー群を含む結晶性シリコン層を形成することを特徴とする蓄電装置の作製方法。
  2. 集電体上に、シリコンを含むガスとヘリウムガスとを用いた減圧化学的気相成長法により、ウィスカー群を含む結晶性シリコン層を形成することを特徴とする蓄電装置の作製方法。
  3. 請求項1又は請求項2において、
    前記集電体として、チタンを用いることを特徴とする蓄電装置の作製方法。
  4. 請求項1乃至請求項3のいずれか一において、
    前記結晶性シリコン層は、活物質層として機能することを特徴とする蓄電装置の作製方法。
JP2011139632A 2010-06-30 2011-06-23 蓄電装置の作製方法 Expired - Fee Related JP5663414B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011139632A JP5663414B2 (ja) 2010-06-30 2011-06-23 蓄電装置の作製方法

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2010149164 2010-06-30
JP2010149175 2010-06-30
JP2010149164 2010-06-30
JP2010149175 2010-06-30
JP2011139632A JP5663414B2 (ja) 2010-06-30 2011-06-23 蓄電装置の作製方法

Publications (3)

Publication Number Publication Date
JP2012033472A JP2012033472A (ja) 2012-02-16
JP2012033472A5 true JP2012033472A5 (ja) 2014-05-15
JP5663414B2 JP5663414B2 (ja) 2015-02-04

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JP2011139632A Expired - Fee Related JP5663414B2 (ja) 2010-06-30 2011-06-23 蓄電装置の作製方法

Country Status (4)

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US (1) US20120003383A1 (ja)
JP (1) JP5663414B2 (ja)
KR (1) KR101830194B1 (ja)
TW (1) TWI527294B (ja)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011136028A1 (en) 2010-04-28 2011-11-03 Semiconductor Energy Laboratory Co., Ltd. Power storage device and method for manufacturing the same
KR101838627B1 (ko) 2010-05-28 2018-03-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 축전 장치 및 그 제작 방법
US8852294B2 (en) 2010-05-28 2014-10-07 Semiconductor Energy Laboratory Co., Ltd. Power storage device and method for manufacturing the same
WO2011152190A1 (en) 2010-06-02 2011-12-08 Semiconductor Energy Laboratory Co., Ltd. Power storage device and method for manufacturing the same
WO2011155397A1 (en) 2010-06-11 2011-12-15 Semiconductor Energy Laboratory Co., Ltd. Power storage device
US8846530B2 (en) 2010-06-30 2014-09-30 Semiconductor Energy Laboratory Co., Ltd. Method for forming semiconductor region and method for manufacturing power storage device
WO2012002136A1 (en) 2010-06-30 2012-01-05 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of power storage device
US9543577B2 (en) 2010-12-16 2017-01-10 Semiconductor Energy Laboratory Co., Ltd. Active material, electrode including the active material and manufacturing method thereof, and secondary battery
JP6035054B2 (ja) 2011-06-24 2016-11-30 株式会社半導体エネルギー研究所 蓄電装置の電極の作製方法
KR20130006301A (ko) 2011-07-08 2013-01-16 가부시키가이샤 한도오따이 에네루기 켄큐쇼 실리콘막의 제작 방법 및 축전 장치의 제작 방법
US8814956B2 (en) 2011-07-14 2014-08-26 Semiconductor Energy Laboratory Co., Ltd. Power storage device, electrode, and manufacturing method thereof
WO2013027561A1 (en) 2011-08-19 2013-02-28 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing graphene-coated object, negative electrode of secondary battery including graphene-coated object, and secondary battery including the negative electrode
JP6025284B2 (ja) 2011-08-19 2016-11-16 株式会社半導体エネルギー研究所 蓄電装置用の電極及び蓄電装置
WO2013031526A1 (en) 2011-08-26 2013-03-07 Semiconductor Energy Laboratory Co., Ltd. Power storage device
KR20130024769A (ko) 2011-08-30 2013-03-08 가부시키가이샤 한도오따이 에네루기 켄큐쇼 축전 장치
JP6034621B2 (ja) 2011-09-02 2016-11-30 株式会社半導体エネルギー研究所 蓄電装置の電極および蓄電装置
US9401247B2 (en) 2011-09-21 2016-07-26 Semiconductor Energy Laboratory Co., Ltd. Negative electrode for power storage device and power storage device
JP6050106B2 (ja) * 2011-12-21 2016-12-21 株式会社半導体エネルギー研究所 非水二次電池用シリコン負極の製造方法
KR102581914B1 (ko) 2013-04-19 2023-09-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 이차 전지 및 그 제작 방법
KR101882396B1 (ko) * 2016-10-18 2018-07-26 서울대학교산학협력단 리튬 전지 및 리튬 전지의 전극 제조방법
JP6530866B2 (ja) * 2016-12-19 2019-06-12 京セラ株式会社 リチウムイオン二次電池用負極、リチウムイオン二次電池、リチウムイオン二次電池用負極の製造方法
US11043676B1 (en) * 2019-12-05 2021-06-22 Enevate Corporation Method and system for silosilazanes, silosiloxanes, and siloxanes as additives for silicon dominant anodes

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JP2001210315A (ja) * 2000-01-25 2001-08-03 Sanyo Electric Co Ltd リチウム二次電池用電極及びこれを用いたリチウム二次電池
KR101530379B1 (ko) * 2006-03-29 2015-06-22 삼성전자주식회사 다공성 글래스 템플릿을 이용한 실리콘 나노 와이어의제조방법 및 이에 의해 형성된 실리콘 나노 와이어를포함하는 소자
KR100723882B1 (ko) * 2006-06-15 2007-05-31 한국전자통신연구원 실리콘 나노점 박막을 이용한 실리콘 나노와이어 제조 방법
JP2008269827A (ja) * 2007-04-17 2008-11-06 Matsushita Electric Ind Co Ltd 電気化学素子の電極材料およびその製造方法並びにそれを用いた電極極板および電気化学素子
JP2008305781A (ja) * 2007-05-09 2008-12-18 Mitsubishi Chemicals Corp 電極及びその製造方法、並びに非水電解質二次電池
JP2010262752A (ja) * 2009-04-30 2010-11-18 Furukawa Electric Co Ltd:The リチウムイオン二次電池用の負極、それを用いたリチウムイオン二次電池、リチウムイオン二次電池用の負極の製造方法
EP2543098B1 (en) * 2010-03-03 2019-07-31 Amprius, Inc. Template electrode structures for depositing active materials

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