JP2012009432A5 - 蓄電装置の作製方法 - Google Patents

蓄電装置の作製方法 Download PDF

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Publication number
JP2012009432A5
JP2012009432A5 JP2011117708A JP2011117708A JP2012009432A5 JP 2012009432 A5 JP2012009432 A5 JP 2012009432A5 JP 2011117708 A JP2011117708 A JP 2011117708A JP 2011117708 A JP2011117708 A JP 2011117708A JP 2012009432 A5 JP2012009432 A5 JP 2012009432A5
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Prior art keywords
storage device
power storage
metal element
manufacturing
manufacturing power
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JP2011117708A
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JP2012009432A (ja
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Priority to JP2011117708A priority Critical patent/JP2012009432A/ja
Priority claimed from JP2011117708A external-priority patent/JP2012009432A/ja
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Claims (3)

  1. 集電体上に、金属元素を分散させ、
    前記金属元素が分散された前記集電体表面に、低圧化学蒸着法によりウィスカーを含む結晶性シリコン層を活物質層として形成することを特徴とする蓄電装置の作製方法。
  2. 請求項1において、
    前記金属元素の分散は、1000ppm以上の前記金属元素を含む薬液を塗布することにより行うことを特徴とする蓄電装置の作製方法。
  3. 請求項1または請求項2において、
    前記金属元素は、シリサイドを形成する元素であることを特徴とする蓄電装置の作製方法。
JP2011117708A 2010-05-28 2011-05-26 蓄電装置及びその作製方法 Withdrawn JP2012009432A (ja)

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JP2011117708A JP2012009432A (ja) 2010-05-28 2011-05-26 蓄電装置及びその作製方法

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JP2010123260 2010-05-28
JP2010123260 2010-05-28
JP2011117708A JP2012009432A (ja) 2010-05-28 2011-05-26 蓄電装置及びその作製方法

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JP2012009432A JP2012009432A (ja) 2012-01-12
JP2012009432A5 true JP2012009432A5 (ja) 2014-06-05

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JP2015079062A Expired - Fee Related JP5883971B2 (ja) 2010-05-28 2015-04-08 蓄電装置の作製方法

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US (1) US9136530B2 (ja)
JP (2) JP2012009432A (ja)
KR (1) KR101838627B1 (ja)
TW (1) TWI517486B (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5841752B2 (ja) 2010-07-02 2016-01-13 株式会社半導体エネルギー研究所 半導体装置
US9543577B2 (en) 2010-12-16 2017-01-10 Semiconductor Energy Laboratory Co., Ltd. Active material, electrode including the active material and manufacturing method thereof, and secondary battery
JP6035054B2 (ja) 2011-06-24 2016-11-30 株式会社半導体エネルギー研究所 蓄電装置の電極の作製方法
KR20130006301A (ko) * 2011-07-08 2013-01-16 가부시키가이샤 한도오따이 에네루기 켄큐쇼 실리콘막의 제작 방법 및 축전 장치의 제작 방법
WO2013027561A1 (en) 2011-08-19 2013-02-28 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing graphene-coated object, negative electrode of secondary battery including graphene-coated object, and secondary battery including the negative electrode
JP6025284B2 (ja) 2011-08-19 2016-11-16 株式会社半導体エネルギー研究所 蓄電装置用の電極及び蓄電装置
KR20130024769A (ko) 2011-08-30 2013-03-08 가부시키가이샤 한도오따이 에네루기 켄큐쇼 축전 장치
JP6034621B2 (ja) 2011-09-02 2016-11-30 株式会社半導体エネルギー研究所 蓄電装置の電極および蓄電装置
JP6050106B2 (ja) 2011-12-21 2016-12-21 株式会社半導体エネルギー研究所 非水二次電池用シリコン負極の製造方法
KR20230137493A (ko) 2013-04-19 2023-10-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 이차 전지 및 그 제작 방법
US10347947B2 (en) 2013-11-06 2019-07-09 Nazarbayev University Research and Innovation System Aqueous lithium-ion battery
US11302967B2 (en) * 2018-01-15 2022-04-12 International Business Machines Corporation Low-voltage microbattery

Family Cites Families (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1198900A (en) 1967-10-25 1970-07-15 Hitachi Ltd Planar Transistor and Method of Making the Same
US4155781A (en) 1976-09-03 1979-05-22 Siemens Aktiengesellschaft Method of manufacturing solar cells, utilizing single-crystal whisker growth
JPS55149199A (en) 1979-05-07 1980-11-20 Sharp Corp Vapor phase deposition method under reduced pressure
US5338625A (en) 1992-07-29 1994-08-16 Martin Marietta Energy Systems, Inc. Thin film battery and method for making same
RU2099808C1 (ru) 1996-04-01 1997-12-20 Евгений Инвиевич Гиваргизов Способ выращивания ориентированных систем нитевидных кристаллов и устройство для его осуществления (варианты)
US20020168574A1 (en) 1997-06-27 2002-11-14 Soon-Ho Ahn Lithium ion secondary battery and manufacturing method of the same
KR100500344B1 (ko) 1999-10-22 2005-07-12 산요덴키가부시키가이샤 리튬 전지용 전극 및 리튬 2차전지
JP2002083594A (ja) 1999-10-22 2002-03-22 Sanyo Electric Co Ltd リチウム電池用電極並びにこれを用いたリチウム電池及びリチウム二次電池
EP1244164A4 (en) 1999-10-22 2007-11-14 Sanyo Electric Co ELECTRODE FOR LITHIUM CENTRIC CELL AND LITHIUM CENTRIC CELL
CA2388016C (en) 1999-10-22 2009-12-22 Sanyo Electric Co., Ltd. Method for fabricating electrode for rechargeable lithium battery
WO2001031723A1 (fr) 1999-10-22 2001-05-03 Sanyo Electric Co., Ltd. Electrode pour accumulateur au lithium et accumulateur au lithium
WO2001029913A1 (en) 1999-10-22 2001-04-26 Sanyo Electric Co., Ltd. Method for producing material for electrode for lithium cell
KR100520872B1 (ko) 1999-10-22 2005-10-12 산요덴키가부시키가이샤 리튬 전지용 전극 및 리튬 2차전지
JP2001210315A (ja) 2000-01-25 2001-08-03 Sanyo Electric Co Ltd リチウム二次電池用電極及びこれを用いたリチウム二次電池
US6402796B1 (en) * 2000-08-07 2002-06-11 Excellatron Solid State, Llc Method of producing a thin film battery
US6844113B2 (en) 2001-04-13 2005-01-18 Sanyo Electric Co., Ltd. Electrode for lithium secondary battery and method for producing the same
JP2003246700A (ja) 2002-02-22 2003-09-02 Japan Science & Technology Corp シリコンナノニードルの製法
JP4140765B2 (ja) 2002-09-19 2008-08-27 コバレントマテリアル株式会社 針状シリコン結晶およびその製造方法
US7015496B2 (en) 2002-12-27 2006-03-21 Semiconductor Energy Laboratory Co., Ltd. Field emission device and manufacturing method thereof
JP2004281317A (ja) 2003-03-18 2004-10-07 Matsushita Electric Ind Co Ltd 非水電解質二次電池用電極材料とその製造方法、ならびにそれを用いた非水電解質二次電池
US20070292339A1 (en) 2004-03-23 2007-12-20 Kanazawa R And D Ltd. Iron Oxide Whisker of High Aspect Ratio, Titanium Oxide Whisker of High Aspect Ratio, Structure Containing These and Process for Producing Them
CN101010780B (zh) * 2004-04-30 2012-07-25 纳米系统公司 纳米线生长和获取的体系和方法
US9614214B2 (en) 2004-12-16 2017-04-04 Lg Chem, Ltd. Method for improvement of performance of si thin film anode for lithium rechargeable battery
KR100707183B1 (ko) 2005-02-19 2007-04-13 삼성전자주식회사 나노입자의 적층 구조 및 그 제조 방법
US20090050204A1 (en) 2007-08-03 2009-02-26 Illuminex Corporation. Photovoltaic device using nanostructured material
JP2007188877A (ja) * 2005-12-14 2007-07-26 Mitsubishi Chemicals Corp 電極及びその製造方法、並びに非水電解質二次電池
JP5043338B2 (ja) 2006-01-19 2012-10-10 パナソニック株式会社 リチウム二次電池
US20070186627A1 (en) * 2006-02-10 2007-08-16 Sungsoo Yi High aspect ratio AFM probe and method of making
WO2007094311A1 (ja) 2006-02-14 2007-08-23 Matsushita Electric Industrial Co., Ltd. 非水電解質二次電池用電極およびその製造方法、ならびに非水電解質二次電池用電極を備えた非水電解質二次電池
KR101530379B1 (ko) 2006-03-29 2015-06-22 삼성전자주식회사 다공성 글래스 템플릿을 이용한 실리콘 나노 와이어의제조방법 및 이에 의해 형성된 실리콘 나노 와이어를포함하는 소자
KR100723882B1 (ko) 2006-06-15 2007-05-31 한국전자통신연구원 실리콘 나노점 박막을 이용한 실리콘 나노와이어 제조 방법
US7964307B2 (en) 2006-07-24 2011-06-21 Panasonic Corporation Negative electrode for lithium ion secondary battery, method for producing the same, and lithium ion secondary battery
WO2008024783A2 (en) 2006-08-24 2008-02-28 The Regents Of The University Of California Lithographically patterned nanowire electrodeposition
GB0619720D0 (en) * 2006-10-05 2006-11-15 Inverness Medical Switzerland Urine powered battery
JP5272297B2 (ja) 2006-10-17 2013-08-28 日産自動車株式会社 電池用電極
KR101109285B1 (ko) 2006-10-19 2012-01-31 파나소닉 주식회사 비수 전해질 2차 전지와 비수 전해질 2차 전지용 음극의제조 방법
WO2008090876A1 (ja) 2007-01-26 2008-07-31 Panasonic Corporation エネルギーデバイス、その製造方法及びそれを搭載した装置
JP2008269827A (ja) 2007-04-17 2008-11-06 Matsushita Electric Ind Co Ltd 電気化学素子の電極材料およびその製造方法並びにそれを用いた電極極板および電気化学素子
US7816031B2 (en) * 2007-08-10 2010-10-19 The Board Of Trustees Of The Leland Stanford Junior University Nanowire battery methods and arrangements
JP5169156B2 (ja) * 2007-11-09 2013-03-27 パナソニック株式会社 電気化学素子用電極
KR100898293B1 (ko) 2007-11-27 2009-05-18 삼성에스디아이 주식회사 리튬 이차 전지용 음극 활물질 및 이의 제조 방법
JP2009134917A (ja) 2007-11-29 2009-06-18 Panasonic Corp 非水系二次電池用電極板およびこれを用いた非水系二次電池
US9564629B2 (en) * 2008-01-02 2017-02-07 Nanotek Instruments, Inc. Hybrid nano-filament anode compositions for lithium ion batteries
US20090317726A1 (en) 2008-04-08 2009-12-24 Sony Corporation Anode and secondary battery
JP5298609B2 (ja) 2008-04-08 2013-09-25 ソニー株式会社 二次電池用負極および二次電池
JP4427629B2 (ja) 2008-04-11 2010-03-10 パナソニック株式会社 エネルギー蓄積デバイス、その製造方法及びそれを搭載した装置
US8927156B2 (en) 2009-02-19 2015-01-06 Semiconductor Energy Laboratory Co., Ltd. Power storage device
JP2010262752A (ja) 2009-04-30 2010-11-18 Furukawa Electric Co Ltd:The リチウムイオン二次電池用の負極、それを用いたリチウムイオン二次電池、リチウムイオン二次電池用の負極の製造方法
US20100285358A1 (en) 2009-05-07 2010-11-11 Amprius, Inc. Electrode Including Nanostructures for Rechargeable Cells
US9061902B2 (en) 2009-12-18 2015-06-23 The Board Of Trustees Of The Leland Stanford Junior University Crystalline-amorphous nanowires for battery electrodes
US9780365B2 (en) 2010-03-03 2017-10-03 Amprius, Inc. High-capacity electrodes with active material coatings on multilayered nanostructured templates
KR101906606B1 (ko) 2010-03-03 2018-10-10 암프리우스, 인코포레이티드 활물질을 증착하기 위한 템플릿 전극 구조체
US9172088B2 (en) 2010-05-24 2015-10-27 Amprius, Inc. Multidimensional electrochemically active structures for battery electrodes
CN102884658B (zh) 2010-03-22 2016-09-07 安普瑞斯股份有限公司 互连的电化学活性材料纳米结构
WO2011136028A1 (en) 2010-04-28 2011-11-03 Semiconductor Energy Laboratory Co., Ltd. Power storage device and method for manufacturing the same
WO2011149958A2 (en) 2010-05-24 2011-12-01 Amprius, Inc. Multidimensional electrochemically active structures for battery electrodes
US20110294005A1 (en) 2010-05-28 2011-12-01 Semiconductor Energy Laboratory Co., Ltd. Power storage device, electrode, and electric device
US8852294B2 (en) 2010-05-28 2014-10-07 Semiconductor Energy Laboratory Co., Ltd. Power storage device and method for manufacturing the same
WO2011152189A1 (en) 2010-06-01 2011-12-08 Semiconductor Energy Laboratory Co., Ltd. Energy storage device and manufacturing method thereof
WO2011152190A1 (en) 2010-06-02 2011-12-08 Semiconductor Energy Laboratory Co., Ltd. Power storage device and method for manufacturing the same
WO2011155397A1 (en) 2010-06-11 2011-12-15 Semiconductor Energy Laboratory Co., Ltd. Power storage device
KR101830194B1 (ko) 2010-06-30 2018-02-20 가부시키가이샤 한도오따이 에네루기 켄큐쇼 축전 장치의 제작 방법
US8846530B2 (en) 2010-06-30 2014-09-30 Semiconductor Energy Laboratory Co., Ltd. Method for forming semiconductor region and method for manufacturing power storage device
WO2012054767A2 (en) 2010-10-22 2012-04-26 Amprius Inc. Battery electrode structures for high mass loadings of high capacity active materials
JP6035054B2 (ja) 2011-06-24 2016-11-30 株式会社半導体エネルギー研究所 蓄電装置の電極の作製方法

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