JP2011529018A5 - - Google Patents

Download PDF

Info

Publication number
JP2011529018A5
JP2011529018A5 JP2011519235A JP2011519235A JP2011529018A5 JP 2011529018 A5 JP2011529018 A5 JP 2011529018A5 JP 2011519235 A JP2011519235 A JP 2011519235A JP 2011519235 A JP2011519235 A JP 2011519235A JP 2011529018 A5 JP2011529018 A5 JP 2011529018A5
Authority
JP
Japan
Prior art keywords
less
source gas
vapor deposition
chemical vapor
deposition method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011519235A
Other languages
English (en)
Japanese (ja)
Other versions
JP5536056B2 (ja
JP2011529018A (ja
Filing date
Publication date
Priority claimed from GBGB0813491.8A external-priority patent/GB0813491D0/en
Application filed filed Critical
Publication of JP2011529018A publication Critical patent/JP2011529018A/ja
Publication of JP2011529018A5 publication Critical patent/JP2011529018A5/ja
Application granted granted Critical
Publication of JP5536056B2 publication Critical patent/JP5536056B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011519235A 2008-07-23 2009-07-22 ダイヤモンド材料 Active JP5536056B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0813491.8A GB0813491D0 (en) 2008-07-23 2008-07-23 Diamond Material
GB0813491.8 2008-07-23
PCT/GB2009/001826 WO2010010352A1 (en) 2008-07-23 2009-07-22 Diamond material

Publications (3)

Publication Number Publication Date
JP2011529018A JP2011529018A (ja) 2011-12-01
JP2011529018A5 true JP2011529018A5 (https=) 2014-03-27
JP5536056B2 JP5536056B2 (ja) 2014-07-02

Family

ID=39737531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011519235A Active JP5536056B2 (ja) 2008-07-23 2009-07-22 ダイヤモンド材料

Country Status (9)

Country Link
US (1) US9317811B2 (https=)
EP (1) EP2300643A1 (https=)
JP (1) JP5536056B2 (https=)
KR (1) KR20110043529A (https=)
CN (1) CN102076891B (https=)
AU (1) AU2009275284A1 (https=)
CA (1) CA2725084A1 (https=)
GB (1) GB0813491D0 (https=)
WO (1) WO2010010352A1 (https=)

Families Citing this family (114)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1990313A1 (en) 2007-05-10 2008-11-12 INSERM (Institut National de la Santé et de la Recherche Médicale) Method to produce light-emitting nano-particles of diamond
US9255009B2 (en) 2009-06-26 2016-02-09 Element Six Technologies Limited Diamond material
JP5891564B2 (ja) 2009-06-26 2016-03-23 エレメント シックス リミテッド ファンシーな淡い青色又はファンシーな淡い青色／緑色の単結晶ｃｖｄダイヤモンドの製造方法及び得られた製品
AU2011220332B2 (en) * 2010-02-24 2013-06-27 Macquarie University Mid to far infrared diamond Raman laser systems and methods
GB201013112D0 (en) 2010-08-04 2010-09-22 Element Six Ltd A diamond optical element
GB201015260D0 (en) 2010-09-14 2010-10-27 Element Six Ltd A microfluidic cell and a spin resonance device for use therewith
GB201107552D0 (en) 2011-05-06 2011-06-22 Element Six Ltd Diamond sensors, detectors, and quantum devices
GB201107730D0 (en) 2011-05-10 2011-06-22 Element Six Ltd Diamond sensors, detectors and quantum devices
GB201108644D0 (en) * 2011-05-24 2011-07-06 Element Six Ltd Diamond sensors, detectors, and quantum devices
US9157859B2 (en) 2011-06-13 2015-10-13 President And Fellows Of Harvard College Efficient fluorescence detection in solid state spin systems
US9658301B2 (en) * 2011-06-13 2017-05-23 President And Fellows Of Harvard College Absorbtion-based detection of spin impurities in solid-state spin systems
EP2752506B1 (en) * 2011-09-02 2017-04-05 Sumitomo Electric Industries, Ltd. Single crystal diamond and method for producing same
JP5880200B2 (ja) * 2012-03-27 2016-03-08 住友電気工業株式会社 単結晶ダイヤモンドおよびその製造方法
GB2495632B (en) 2011-10-14 2016-08-03 Element Six Ltd Quantum processing device
FR2982405B1 (fr) * 2011-11-04 2013-11-08 Thales Sa Support de stockage de donnees et procede de lecture de ce support
GB201121642D0 (en) 2011-12-16 2012-01-25 Element Six Ltd Single crtstal cvd synthetic diamond material
US9361962B2 (en) 2011-12-23 2016-06-07 President And Fellows Of Harvard College Solid-state quantum memory based on a nuclear spin coupled to an electronic spin
WO2013152446A1 (en) * 2012-04-13 2013-10-17 Oti Lumionics Inc. Functionalization of a substrate
GB2515226A (en) * 2012-04-13 2014-12-17 Univ California Gyroscopes based on nitrogen-vacancy centers in diamond
US8853070B2 (en) 2012-04-13 2014-10-07 Oti Lumionics Inc. Functionalization of a substrate
US9698386B2 (en) * 2012-04-13 2017-07-04 Oti Lumionics Inc. Functionalization of a substrate
GB201214370D0 (en) 2012-08-13 2012-09-26 Element Six Ltd Thick polycrystalline synthetic diamond wafers for heat spreading applications and microwave plasma chemical vapour deposition synthesis techniques
US10041971B2 (en) 2012-08-22 2018-08-07 President And Fellows Of Harvard College Nanoscale scanning sensors
GB201301560D0 (en) 2013-01-29 2013-03-13 Element Six Ltd Synthetic Diamond Heat Spreaders
GB201301556D0 (en) * 2013-01-29 2013-03-13 Element Six Ltd Synthetic diamond materials for quantum and optical applications and methods of making the same
JP6037387B2 (ja) * 2013-03-01 2016-12-07 国立研究開発法人産業技術総合研究所 ダイヤモンドｎｖ光学中心を有するダイヤモンド単結晶
US10330750B2 (en) * 2013-04-05 2019-06-25 Research Foundation Of The City University Of New York Method and apparatus for polarizing nuclear and electronic spins
GB201320302D0 (en) 2013-11-18 2014-01-01 Element Six Ltd Diamond components for quantum imaging sensing and information processing devices
GB201320304D0 (en) 2013-11-18 2014-01-01 Element Six Ltd Methods of fabricating synthetic diamond materials using microwave plasma actived chemical vapour deposition techniques and products obtained using said
US10324142B2 (en) 2014-01-20 2019-06-18 Japan Science And Technology Agency Diamond crystal, diamond devices, magnetic sensor, magnetic sensor system, and method for manufacturing sensor array
US9638821B2 (en) 2014-03-20 2017-05-02 Lockheed Martin Corporation Mapping and monitoring of hydraulic fractures using vector magnetometers
US9823313B2 (en) 2016-01-21 2017-11-21 Lockheed Martin Corporation Diamond nitrogen vacancy sensor with circuitry on diamond
US9541610B2 (en) 2015-02-04 2017-01-10 Lockheed Martin Corporation Apparatus and method for recovery of three dimensional magnetic field from a magnetic detection system
US9910105B2 (en) 2014-03-20 2018-03-06 Lockheed Martin Corporation DNV magnetic field detector
US10012704B2 (en) 2015-11-04 2018-07-03 Lockheed Martin Corporation Magnetic low-pass filter
US10168393B2 (en) 2014-09-25 2019-01-01 Lockheed Martin Corporation Micro-vacancy center device
US9853837B2 (en) 2014-04-07 2017-12-26 Lockheed Martin Corporation High bit-rate magnetic communication
US9910104B2 (en) 2015-01-23 2018-03-06 Lockheed Martin Corporation DNV magnetic field detector
US9557391B2 (en) 2015-01-23 2017-01-31 Lockheed Martin Corporation Apparatus and method for high sensitivity magnetometry measurement and signal processing in a magnetic detection system
US9817081B2 (en) 2016-01-21 2017-11-14 Lockheed Martin Corporation Magnetometer with light pipe
US9614589B1 (en) 2015-12-01 2017-04-04 Lockheed Martin Corporation Communication via a magnio
US9835693B2 (en) 2016-01-21 2017-12-05 Lockheed Martin Corporation Higher magnetic sensitivity through fluorescence manipulation by phonon spectrum control
US20170212046A1 (en) * 2016-01-21 2017-07-27 Lockheed Martin Corporation Measurement parameters for qc metrology of synthetically generated diamond with nv centers
CA2945016A1 (en) 2014-04-07 2015-10-15 Lockheed Martin Corporation Energy efficient controlled magnetic field generator circuit
WO2016010028A1 (ja) * 2014-07-15 2016-01-21 住友電気工業株式会社 単結晶ダイヤモンド、単結晶ダイヤモンドの製造方法及び単結晶ダイヤモンドを用いた工具
SG10201505413VA (en) * 2015-01-14 2016-08-30 Iia Technologies Pte Ltd Electronic device grade single crystal diamonds and method of producing the same
PT3045570T (pt) * 2015-01-14 2019-09-27 Iia Tech Pte Ltd Diamantes de cristal único de grau de dispositivo eletrónico e respetivo método de produção
WO2016190909A2 (en) 2015-01-28 2016-12-01 Lockheed Martin Corporation Magnetic navigation methods and systems utilizing power grid and communication network
BR112017016261A2 (pt) 2015-01-28 2018-03-27 Lockheed Martin Corporation carga de energia in situ
GB2550809A (en) 2015-02-04 2017-11-29 Lockheed Corp Apparatus and method for estimating absolute axes' orientations for a magnetic detection system
US12037703B2 (en) 2015-02-06 2024-07-16 Ecotricity Group Limited Method of producing a synthetic diamond
GB2535152A (en) * 2015-02-06 2016-08-17 Ecotricity Group Ltd A method of producing a synthetic diamond
US12065357B2 (en) * 2015-02-09 2024-08-20 Saeed Alhassan Alkhazraji Process for manufacturing a pure porous 3D diamond
US10529564B2 (en) 2015-08-07 2020-01-07 North Carolina State University Synthesis and processing of novel phase of boron nitride (Q-BN)
GB201516814D0 (en) 2015-09-23 2015-11-04 Element Six Technologies Ltd Method of fabricating a plurality of single crystal CVD synthetic diamonds
WO2017087014A1 (en) 2015-11-20 2017-05-26 Lockheed Martin Corporation Apparatus and method for hypersensitivity detection of magnetic field
GB2560283A (en) 2015-11-20 2018-09-05 Lockheed Corp Apparatus and method for closed loop processing for a magnetic detection system
GB201522650D0 (en) 2015-12-22 2016-02-03 Element Six Technologies Ltd Nitrogen containing single crystal diamond materials optimized for magnetometr applications
WO2017123261A1 (en) 2016-01-12 2017-07-20 Lockheed Martin Corporation Defect detector for conductive materials
WO2017127098A1 (en) 2016-01-21 2017-07-27 Lockheed Martin Corporation Diamond nitrogen vacancy sensed ferro-fluid hydrophone
GB2562958A (en) 2016-01-21 2018-11-28 Lockheed Corp Magnetometer with a light emitting diode
WO2017127079A1 (en) 2016-01-21 2017-07-27 Lockheed Martin Corporation Ac vector magnetic anomaly detection with diamond nitrogen vacancies
WO2017127096A1 (en) 2016-01-21 2017-07-27 Lockheed Martin Corporation Diamond nitrogen vacancy sensor with dual rf sources
GB2562193B (en) 2016-01-21 2021-12-22 Lockheed Corp Diamond nitrogen vacancy sensor with common RF and magnetic fields generator
US10338163B2 (en) 2016-07-11 2019-07-02 Lockheed Martin Corporation Multi-frequency excitation schemes for high sensitivity magnetometry measurement with drift error compensation
US10317279B2 (en) 2016-05-31 2019-06-11 Lockheed Martin Corporation Optical filtration system for diamond material with nitrogen vacancy centers
US10330744B2 (en) 2017-03-24 2019-06-25 Lockheed Martin Corporation Magnetometer with a waveguide
US10145910B2 (en) 2017-03-24 2018-12-04 Lockheed Martin Corporation Photodetector circuit saturation mitigation for magneto-optical high intensity pulses
US10274550B2 (en) 2017-03-24 2019-04-30 Lockheed Martin Corporation High speed sequential cancellation for pulsed mode
US10281550B2 (en) 2016-11-14 2019-05-07 Lockheed Martin Corporation Spin relaxometry based molecular sequencing
US10408890B2 (en) 2017-03-24 2019-09-10 Lockheed Martin Corporation Pulsed RF methods for optimization of CW measurements
US20170343621A1 (en) 2016-05-31 2017-11-30 Lockheed Martin Corporation Magneto-optical defect center magnetometer
US10527746B2 (en) 2016-05-31 2020-01-07 Lockheed Martin Corporation Array of UAVS with magnetometers
US10228429B2 (en) 2017-03-24 2019-03-12 Lockheed Martin Corporation Apparatus and method for resonance magneto-optical defect center material pulsed mode referencing
US10345396B2 (en) 2016-05-31 2019-07-09 Lockheed Martin Corporation Selected volume continuous illumination magnetometer
US10371765B2 (en) 2016-07-11 2019-08-06 Lockheed Martin Corporation Geolocation of magnetic sources using vector magnetometer sensors
US10345395B2 (en) 2016-12-12 2019-07-09 Lockheed Martin Corporation Vector magnetometry localization of subsurface liquids
US10677953B2 (en) 2016-05-31 2020-06-09 Lockheed Martin Corporation Magneto-optical detecting apparatus and methods
US10571530B2 (en) 2016-05-31 2020-02-25 Lockheed Martin Corporation Buoy array of magnetometers
US10359479B2 (en) 2017-02-20 2019-07-23 Lockheed Martin Corporation Efficient thermal drift compensation in DNV vector magnetometry
GB201610053D0 (en) * 2016-06-09 2016-07-27 Element Six Tech Ltd Synthetic diamond heat spreaders
US10240251B2 (en) 2016-06-28 2019-03-26 North Carolina State University Synthesis and processing of pure and NV nanodiamonds and other nanostructures for quantum computing and magnetic sensing applications
US9922823B1 (en) * 2016-09-07 2018-03-20 Euclid Techlabs, Llc CVD reactor and method for nanometric delta doping of diamond
US10338164B2 (en) 2017-03-24 2019-07-02 Lockheed Martin Corporation Vacancy center material with highly efficient RF excitation
US10379174B2 (en) 2017-03-24 2019-08-13 Lockheed Martin Corporation Bias magnet array for magnetometer
US10371760B2 (en) 2017-03-24 2019-08-06 Lockheed Martin Corporation Standing-wave radio frequency exciter
US10459041B2 (en) 2017-03-24 2019-10-29 Lockheed Martin Corporation Magnetic detection system with highly integrated diamond nitrogen vacancy sensor
WO2019049876A1 (ja) * 2017-09-05 2019-03-14 国立大学法人東京工業大学 エピタキシャルシリコン薄膜の製造に用いられるシリコン基板及びその製造方法
CN107831153B (zh) * 2017-11-16 2023-08-29 中北大学 一种三维扫描的自旋浓度测量系统及测量方法
GB201801288D0 (en) 2018-01-26 2018-03-14 Element Six Tech Ltd Synthetic diamond material
JP6795803B2 (ja) * 2018-03-02 2020-12-02 国立大学法人京都大学 センサ素子、測定装置、センサ素子の製造方法、電子回路素子、および量子情報素子
GB201811162D0 (en) 2018-07-06 2018-08-29 Element Six Tech Ltd Method of manufacture of single crystal synthetic diamond material
WO2020046860A1 (en) * 2018-08-27 2020-03-05 Massachusetts Institute Of Technology Microwave resonator readout of an ensemble solid state spin sensor
GB201904435D0 (en) 2019-03-29 2019-05-15 Element Six Tech Ltd Single crystal synthetic diamond material
JP7131474B2 (ja) * 2019-05-08 2022-09-06 株式会社デンソー ダイヤモンド層の製造方法
GB201918883D0 (en) * 2019-12-19 2020-02-05 Element Six Tech Ltd Method for producing chemical vapour deposition diamond
JP7636737B2 (ja) * 2020-02-27 2025-02-27 国立大学法人京都大学 ダイヤモンドの製造方法
CN111355901B (zh) * 2020-03-14 2025-02-28 北京大学深圳研究生院 光电传感器、像素电路、图像传感器及光电感测方法
CN111257804A (zh) * 2020-04-01 2020-06-09 湖州中芯半导体科技有限公司 一种基于cvd钻石的高时间分辨率磁场测量设备
US11713250B2 (en) 2020-05-06 2023-08-01 Impossible Diamond, Inc. Diamond composition
US11760643B2 (en) 2020-05-06 2023-09-19 Impossible Diamond, Inc. Diamond composition
CN111652376B (zh) * 2020-07-03 2024-02-27 本源量子计算科技（合肥）股份有限公司 一种量子比特信号的读取方法及装置
US12384683B2 (en) * 2020-10-30 2025-08-12 The Regents Of The University Of California Dopant-vacancy centers in materials and methods of making thereof
GB2614218B (en) * 2021-07-06 2024-06-19 Element Six Tech Ltd Single crystal diamond component and method for producing
WO2023004169A1 (en) * 2021-07-23 2023-01-26 Impossible Diamond, Inc. A diamond composition
WO2023072384A1 (en) 2021-10-27 2023-05-04 Universität Ulm Method of implanting atoms in a substrate and method of forming a quantum register
GB2614068B (en) 2021-12-21 2024-05-22 Element Six Tech Ltd Sensor device
GB2614240B (en) 2021-12-21 2024-08-14 Element Six Tech Ltd Sensor device
GB2614530B (en) 2021-12-23 2024-12-11 Element Six Tech Ltd Diamond sensor
GB2620413A (en) * 2022-07-06 2024-01-10 Univ Warwick System for quantum information processing
DE102023206516B3 (de) * 2023-07-10 2024-10-24 Diatope GmbH Diamantelement und Verfahren zur Herstellung eines Diamantelements
WO2025182850A1 (ja) * 2024-02-28 2025-09-04 住友電気工業株式会社 ダイヤモンドスピンセンサおよびその製造方法
WO2025182849A1 (ja) * 2024-02-28 2025-09-04 住友電気工業株式会社 ダイヤモンドセンサ
WO2025230422A1 (en) * 2024-05-03 2025-11-06 Technische Universiteit Delft Method for annealing a diamond substrate that comprises a colour centre

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4859490A (en) 1986-07-23 1989-08-22 Sumitomo Electric Industries, Ltd. Method for synthesizing diamond
JPS63117995A (ja) * 1986-11-05 1988-05-21 Kobe Steel Ltd ダイヤモンドの気相合成法
JP2691219B2 (ja) 1988-10-17 1997-12-17 並木精密宝石株式会社 ダイヤモンドの合成法
JP2730144B2 (ja) 1989-03-07 1998-03-25 住友電気工業株式会社 単結晶ダイヤモンド層形成法
JP2730145B2 (ja) 1989-03-07 1998-03-25 住友電気工業株式会社 単結晶ダイヤモンド層の形成法
US6007916A (en) 1989-04-06 1999-12-28 Sumitomo Electric Industries, Ltd. Synthetic single crystal diamond for wiring drawing dies and process for producing the same
US5127983A (en) 1989-05-22 1992-07-07 Sumitomo Electric Industries, Ltd. Method of producing single crystal of high-pressure phase material
JP2775903B2 (ja) 1989-10-04 1998-07-16 住友電気工業株式会社 ダイヤモンド半導体素子
AU634601B2 (en) 1989-12-11 1993-02-25 General Electric Company Single-crystal diamond of very high thermal conductivity
US5360479A (en) 1990-07-02 1994-11-01 General Electric Company Isotopically pure single crystal epitaxial diamond films and their preparation
US5704976A (en) 1990-07-06 1998-01-06 The United States Of America As Represented By The Secretary Of The Navy High temperature, high rate, epitaxial synthesis of diamond in a laminar plasma
JPH0497988A (ja) * 1990-08-09 1992-03-30 Sumitomo Electric Ind Ltd 高熱伝導性ダイヤモンドの製造方法
US6162412A (en) 1990-08-03 2000-12-19 Sumitomo Electric Industries, Ltd. Chemical vapor deposition method of high quality diamond
JPH04305096A (ja) 1991-04-01 1992-10-28 Sumitomo Electric Ind Ltd 高品質気相合成ダイヤモンドの低温形成法
US5443032A (en) 1992-06-08 1995-08-22 Air Products And Chemicals, Inc. Method for the manufacture of large single crystals
US5614019A (en) 1992-06-08 1997-03-25 Air Products And Chemicals, Inc. Method for the growth of industrial crystals
EP0582397A3 (en) 1992-08-05 1995-01-25 Crystallume CVD diamond material for radiation detector and method for manufacturing the same.
US5334283A (en) 1992-08-31 1994-08-02 The University Of North Carolina At Chapel Hill Process for selectively etching diamond
US5474021A (en) 1992-09-24 1995-12-12 Sumitomo Electric Industries, Ltd. Epitaxial growth of diamond from vapor phase
JP3350992B2 (ja) * 1993-02-05 2002-11-25 住友電気工業株式会社 ダイヤモンドの合成方法
US5302331A (en) 1992-11-30 1994-04-12 Jenkins Robert E Waste treatment process
CA2127832C (en) 1993-07-20 2001-02-20 Grant Lu Cvd diamond radiation detector
JPH07277899A (ja) * 1994-04-04 1995-10-24 Kobe Steel Ltd ダイヤモンド半導体の製造方法
EP0678592A1 (en) * 1994-04-20 1995-10-25 General Electric Company Improved CVD diamond
EP0688026A1 (en) 1994-06-17 1995-12-20 General Electric Company Resistor coated on diamond substrate
US5587210A (en) 1994-06-28 1996-12-24 The United States Of America As Represented By The Secretary Of The Navy Growing and releasing diamonds
JP4032482B2 (ja) 1997-04-18 2008-01-16 住友電気工業株式会社 単結晶ダイヤモンドの製造方法
JP3125046B2 (ja) 1997-11-21 2001-01-15 工業技術院長 ダイヤモンド単結晶薄膜製造方法
US6582513B1 (en) * 1998-05-15 2003-06-24 Apollo Diamond, Inc. System and method for producing synthetic diamond
US6858080B2 (en) 1998-05-15 2005-02-22 Apollo Diamond, Inc. Tunable CVD diamond structures
CZ302228B6 (cs) 2000-06-15 2011-01-05 Element Six (Pty) Ltd Monokrystalická diamantová vrstva pripravená chemickým vylucováním z plynné fáze
EP1290251B8 (en) 2000-06-15 2006-02-01 Element Six (PTY) Ltd Thick single crystal diamond layer method for making it and gemstones produced from the layer
GB0130005D0 (en) 2001-12-14 2002-02-06 Diamanx Products Ltd Boron doped diamond
GB0130004D0 (en) 2001-12-14 2002-02-06 Diamanx Products Ltd Coloured diamond
RU2328563C2 (ru) 2002-09-06 2008-07-10 Элемент Сикс Лимитед Цветные алмазы
GB0221949D0 (en) 2002-09-20 2002-10-30 Diamanx Products Ltd Single crystal diamond
GB0227261D0 (en) 2002-11-21 2002-12-31 Element Six Ltd Optical quality diamond material
GB2441044A (en) 2003-12-12 2008-02-20 Element Six Ltd A method of incorporating a mark in CVD diamond.
US7829377B2 (en) 2005-01-11 2010-11-09 Apollo Diamond, Inc Diamond medical devices
US7122837B2 (en) 2005-01-11 2006-10-17 Apollo Diamond, Inc Structures formed in diamond
US20060163584A1 (en) 2005-01-26 2006-07-27 Robert Linares Boron-doped diamond semiconductor
AU2006260656A1 (en) 2005-06-22 2006-12-28 Element Six Limited High colour diamond layer
US8048223B2 (en) 2005-07-21 2011-11-01 Apollo Diamond, Inc. Grown diamond mosaic separation
US20090297429A1 (en) 2006-01-04 2009-12-03 Vohra Yogesh K High growth rate methods of producing high-quality diamonds
JP2010517263A (ja) 2007-01-22 2010-05-20 エレメント シックス リミテッド ダイヤモンド電子デバイス及びそれらの製造方法

Similar Documents

Publication Publication Date Title
JP2011529018A5 (https=)
JP6272360B2 (ja) バナジウムドープ単結晶およびその成長方法
JP5891636B2 (ja) 多結晶ダイヤモンドおよびその製造方法
JP5304713B2 (ja) 炭化珪素単結晶基板、炭化珪素エピタキシャルウェハ、及び薄膜エピタキシャルウェハ
KR101478331B1 (ko) 에피택셜 탄화규소 단결정 기판의 제조 방법
US9975779B2 (en) SiC formed body and method for producing SiC formed body
CN104451868B (zh) 单晶金刚石的制造方法
US20130313575A1 (en) Semi-insulating silicon carbide monocrystal and method of growing the same
US9633840B2 (en) Method of manufacturing silicon carbide semiconductor substrate and method of manufacturing silicon carbide semiconductor device
JPWO2015199180A1 (ja) ダイヤモンド基板の製造方法、ダイヤモンド基板、及び、ダイヤモンド複合基板
CN107532326A (zh) 晶体层叠结构体
WO2012042961A1 (ja) ＧａＮ結晶の成長方法およびＧａＮ結晶基板
JP4387159B2 (ja) 黒鉛材料、炭素繊維強化炭素複合材料、及び、膨張黒鉛シート
JP4733882B2 (ja) 炭化珪素単結晶及びその製造方法並びに炭化珪素単結晶育成用炭化珪素結晶原料
EP3112504B1 (en) Method for producing epitaxial silicon carbide wafer
US20140219907A1 (en) Single-crystal diamond and manufacturing method thereof
JP2008308377A (ja) 窒化ガリウム基板及び窒化ガリウム層の形成方法
US8802546B2 (en) Method for manufacturing silicon carbide semiconductor device
JP5880200B2 (ja) 単結晶ダイヤモンドおよびその製造方法
TWI766776B (zh) 碳化矽晶碇及其製備方法
JP5316487B2 (ja) シリコンエピタキシャルウェーハの製造方法
JP2010024066A (ja) ダイヤモンド単結晶基板とその製造方法
TW202528572A (zh) 鑽石基板及其製造方法以及感測器
CN121674945A (zh) 一种过渡处理的单晶金刚石二次生长方法、系统、mpcvd设备及介质
JPS5922320A (ja) 高純度３−５族半導体の気相成長方法