JP5891636B2 - 多結晶ダイヤモンドおよびその製造方法 - Google Patents
多結晶ダイヤモンドおよびその製造方法 Download PDFInfo
- Publication number
- JP5891636B2 JP5891636B2 JP2011165746A JP2011165746A JP5891636B2 JP 5891636 B2 JP5891636 B2 JP 5891636B2 JP 2011165746 A JP2011165746 A JP 2011165746A JP 2011165746 A JP2011165746 A JP 2011165746A JP 5891636 B2 JP5891636 B2 JP 5891636B2
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline diamond
- diamond
- graphite
- mass
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010432 diamond Substances 0.000 title claims description 602
- 229910003460 diamond Inorganic materials 0.000 title claims description 601
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 306
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 226
- 229910002804 graphite Inorganic materials 0.000 claims description 219
- 239000010439 graphite Substances 0.000 claims description 219
- 239000000758 substrate Substances 0.000 claims description 116
- 229910052757 nitrogen Inorganic materials 0.000 claims description 113
- 239000013078 crystal Substances 0.000 claims description 90
- 229910052799 carbon Inorganic materials 0.000 claims description 87
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 63
- 229910052796 boron Inorganic materials 0.000 claims description 63
- 229910052739 hydrogen Inorganic materials 0.000 claims description 63
- 239000001257 hydrogen Substances 0.000 claims description 63
- 238000001004 secondary ion mass spectrometry Methods 0.000 claims description 62
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 61
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 61
- 239000007789 gas Substances 0.000 claims description 61
- 229910052760 oxygen Inorganic materials 0.000 claims description 61
- 239000001301 oxygen Substances 0.000 claims description 61
- 229910052710 silicon Inorganic materials 0.000 claims description 61
- 239000010703 silicon Substances 0.000 claims description 61
- 238000010438 heat treatment Methods 0.000 claims description 58
- 239000000126 substance Substances 0.000 claims description 58
- 150000002431 hydrogen Chemical class 0.000 claims description 57
- 229930195733 hydrocarbon Natural products 0.000 claims description 11
- 150000002430 hydrocarbons Chemical class 0.000 claims description 11
- 239000004215 Carbon black (E152) Substances 0.000 claims description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 238000005245 sintering Methods 0.000 claims description 4
- 239000003054 catalyst Substances 0.000 claims description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 102
- 238000004458 analytical method Methods 0.000 description 57
- 238000000034 method Methods 0.000 description 56
- 238000001514 detection method Methods 0.000 description 54
- 230000008859 change Effects 0.000 description 53
- 230000008569 process Effects 0.000 description 52
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 50
- 238000002441 X-ray diffraction Methods 0.000 description 50
- 230000001133 acceleration Effects 0.000 description 50
- 230000005284 excitation Effects 0.000 description 50
- 229910052719 titanium Inorganic materials 0.000 description 50
- 239000010936 titanium Substances 0.000 description 50
- 239000012535 impurity Substances 0.000 description 41
- 239000000463 material Substances 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000003575 carbonaceous material Substances 0.000 description 7
- 238000003786 synthesis reaction Methods 0.000 description 7
- 238000009616 inductively coupled plasma Methods 0.000 description 4
- 239000002105 nanoparticle Substances 0.000 description 3
- 229910052723 transition metal Inorganic materials 0.000 description 3
- 150000003624 transition metals Chemical class 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 239000000571 coke Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000005204 segregation Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 229910000734 martensite Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Landscapes
- Carbon And Carbon Compounds (AREA)
Description
本実施の形態におけるナノ多結晶ダイヤモンドは、炭素同位体12Cで実質的に構成され、不純物量が極めて少ないものである。ここで、本明細書において「不純物」とは、炭素以外の元素をいう。典型的には、ナノ多結晶ダイヤモンドには複数の不可避不純物が含まれるが、本実施の形態におけるナノ多結晶ダイヤモンドでは、各不純物の濃度が、それぞれ0.01質量%以下である。
本実施の形態に係るナノ多結晶ダイヤモンドは、炭素同位体12Cの純度が99.9質量%以上であり(炭素同位体13Cを含む場合には、炭素同位体13Cの濃度が0.1質量%以下)、化学純度が99質量%以上である炭化水素ガスを熱分解して得られる黒鉛に、高温高圧プレス装置内で熱処理を施してダイヤモンドに変換することで作製可能である。つまり、本実施の形態に係るナノ多結晶ダイヤモンドは、真空雰囲気で、高純度の炭素同位体12Cで実質的に構成され極めて低不純物濃度の固相の炭素に熱処理を施して作製することができる。
以上のように本発明の実施の形態および実施例について説明を行なったが、上述の実施の形態および実施例を様々に変形することも可能である。また、本発明の範囲は上述の実施の形態および実施例に限定されるものではない。本発明の範囲は、特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更を含むことが意図される。
Claims (9)
- 炭素同位体12Cの純度が99.9質量%以上である炭素で構成され、
水素、酸素、窒素、シリコンおよび硼素の二次イオン質量分析法(SIMS)に基づく濃度がそれぞれ0.01質量%以下であり、結晶粒径が500nm以下である、磁気センシングに用いられる多結晶ダイヤモンド。 - 前記多結晶ダイヤモンドの結晶粒界における前記水素、前記酸素、前記窒素、前記シリコンおよび前記硼素の二次イオン質量分析法(SIMS)に基づく濃度がそれぞれ0.01質量%以下である、請求項1に記載の多結晶ダイヤモンド。
- ヌープ硬度が150GPa以上である、請求項1または請求項2に記載の多結晶ダイヤモンド。
- 前記水素の二次イオン質量分析法(SIMS)に基づく濃度が2×1018/cm3以下であり、
前記酸素の二次イオン質量分析法(SIMS)に基づく濃度が2×1017/cm3以下であり、
前記窒素の二次イオン質量分析法(SIMS)に基づく濃度が4×1016/cm3以下であり、
前記シリコンの二次イオン質量分析法(SIMS)に基づく濃度が1×1016/cm3以下であり、
前記硼素の二次イオン質量分析法(SIMS)に基づく濃度が2×1015/cm3以下である、請求項1から請求項3のいずれかに記載の多結晶ダイヤモンド。 - 炭素同位体12Cの純度が99.9質量%以上であり、化学純度が99質量%以上である炭化水素ガスを熱分解して得られる黒鉛を準備する工程と、
高温高圧プレス装置内で前記黒鉛に熱処理を施して前記黒鉛をダイヤモンドに変換する工程と、
を備えた、磁気センシングに用いられる多結晶ダイヤモンドの製造方法。 - 前記黒鉛をダイヤモンドに変換する工程では、焼結助剤や触媒を添加することなく、高圧下で前記黒鉛に熱処理を施す、請求項5に記載の多結晶ダイヤモンドの製造方法。
- 前記黒鉛を準備する工程は、真空チャンバ内に導入した前記炭化水素ガスを1500℃以上の温度で熱分解して基材上に黒鉛を形成する工程を含む、請求項5または請求項6に記載の多結晶ダイヤモンドの製造方法。
- 前記黒鉛をダイヤモンドに変換する工程では、前記基材上に形成された前記黒鉛に7GPa以上の高圧下で1500℃以上の熱処理を施す、請求項7に記載の多結晶ダイヤモンドの製造方法。
- 前記黒鉛のかさ密度が1.4g/cm3以上である、請求項5から請求項8のいずれかに記載の多結晶ダイヤモンドの製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011165746A JP5891636B2 (ja) | 2011-07-28 | 2011-07-28 | 多結晶ダイヤモンドおよびその製造方法 |
EP12817420.8A EP2738139B1 (en) | 2011-07-28 | 2012-07-26 | Polycrystalline diamond and manufacturing method therefor |
CN201280037414.0A CN103732535B (zh) | 2011-07-28 | 2012-07-26 | 多晶金刚石及其制造方法 |
PCT/JP2012/068930 WO2013015347A1 (ja) | 2011-07-28 | 2012-07-26 | 多結晶ダイヤモンドおよびその製造方法 |
US14/235,758 US9850135B2 (en) | 2011-07-28 | 2012-07-26 | Polycrystalline diamond and manufacturing method thereof |
US15/131,971 US9878914B2 (en) | 2011-07-28 | 2016-04-18 | Polycrystalline diamond and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011165746A JP5891636B2 (ja) | 2011-07-28 | 2011-07-28 | 多結晶ダイヤモンドおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013028497A JP2013028497A (ja) | 2013-02-07 |
JP5891636B2 true JP5891636B2 (ja) | 2016-03-23 |
Family
ID=47785922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011165746A Active JP5891636B2 (ja) | 2011-07-28 | 2011-07-28 | 多結晶ダイヤモンドおよびその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5891636B2 (ja) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9910105B2 (en) | 2014-03-20 | 2018-03-06 | Lockheed Martin Corporation | DNV magnetic field detector |
US10012704B2 (en) | 2015-11-04 | 2018-07-03 | Lockheed Martin Corporation | Magnetic low-pass filter |
US9829545B2 (en) | 2015-11-20 | 2017-11-28 | Lockheed Martin Corporation | Apparatus and method for hypersensitivity detection of magnetic field |
US9835693B2 (en) | 2016-01-21 | 2017-12-05 | Lockheed Martin Corporation | Higher magnetic sensitivity through fluorescence manipulation by phonon spectrum control |
US9853837B2 (en) | 2014-04-07 | 2017-12-26 | Lockheed Martin Corporation | High bit-rate magnetic communication |
US9557391B2 (en) | 2015-01-23 | 2017-01-31 | Lockheed Martin Corporation | Apparatus and method for high sensitivity magnetometry measurement and signal processing in a magnetic detection system |
US10088336B2 (en) | 2016-01-21 | 2018-10-02 | Lockheed Martin Corporation | Diamond nitrogen vacancy sensed ferro-fluid hydrophone |
US9824597B2 (en) | 2015-01-28 | 2017-11-21 | Lockheed Martin Corporation | Magnetic navigation methods and systems utilizing power grid and communication network |
US10520558B2 (en) | 2016-01-21 | 2019-12-31 | Lockheed Martin Corporation | Diamond nitrogen vacancy sensor with nitrogen-vacancy center diamond located between dual RF sources |
US9638821B2 (en) | 2014-03-20 | 2017-05-02 | Lockheed Martin Corporation | Mapping and monitoring of hydraulic fractures using vector magnetometers |
US10168393B2 (en) | 2014-09-25 | 2019-01-01 | Lockheed Martin Corporation | Micro-vacancy center device |
US9551763B1 (en) | 2016-01-21 | 2017-01-24 | Lockheed Martin Corporation | Diamond nitrogen vacancy sensor with common RF and magnetic fields generator |
US9910104B2 (en) | 2015-01-23 | 2018-03-06 | Lockheed Martin Corporation | DNV magnetic field detector |
CA2945016A1 (en) | 2014-04-07 | 2015-10-15 | Lockheed Martin Corporation | Energy efficient controlled magnetic field generator circuit |
CA2975103A1 (en) | 2015-01-28 | 2016-08-04 | Stephen M. SEKELSKY | In-situ power charging |
WO2016126436A1 (en) | 2015-02-04 | 2016-08-11 | Lockheed Martin Corporation | Apparatus and method for recovery of three dimensional magnetic field from a magnetic detection system |
WO2016126435A1 (en) | 2015-02-04 | 2016-08-11 | Lockheed Martin Corporation | Apparatus and method for estimating absolute axes' orientations for a magnetic detection system |
WO2017087013A1 (en) | 2015-11-20 | 2017-05-26 | Lockheed Martin Corporation | Apparatus and method for closed loop processing for a magnetic detection system |
WO2017095454A1 (en) | 2015-12-01 | 2017-06-08 | Lockheed Martin Corporation | Communication via a magnio |
WO2017123261A1 (en) | 2016-01-12 | 2017-07-20 | Lockheed Martin Corporation | Defect detector for conductive materials |
WO2017127081A1 (en) | 2016-01-21 | 2017-07-27 | Lockheed Martin Corporation | Diamond nitrogen vacancy sensor with circuitry on diamond |
GB2562958A (en) | 2016-01-21 | 2018-11-28 | Lockheed Corp | Magnetometer with a light emitting diode |
WO2017127079A1 (en) | 2016-01-21 | 2017-07-27 | Lockheed Martin Corporation | Ac vector magnetic anomaly detection with diamond nitrogen vacancies |
WO2017127094A1 (en) | 2016-01-21 | 2017-07-27 | Lockheed Martin Corporation | Magnetometer with light pipe |
US10281550B2 (en) | 2016-11-14 | 2019-05-07 | Lockheed Martin Corporation | Spin relaxometry based molecular sequencing |
US20170343621A1 (en) | 2016-05-31 | 2017-11-30 | Lockheed Martin Corporation | Magneto-optical defect center magnetometer |
US10228429B2 (en) | 2017-03-24 | 2019-03-12 | Lockheed Martin Corporation | Apparatus and method for resonance magneto-optical defect center material pulsed mode referencing |
US10345396B2 (en) | 2016-05-31 | 2019-07-09 | Lockheed Martin Corporation | Selected volume continuous illumination magnetometer |
US10338163B2 (en) | 2016-07-11 | 2019-07-02 | Lockheed Martin Corporation | Multi-frequency excitation schemes for high sensitivity magnetometry measurement with drift error compensation |
US10345395B2 (en) | 2016-12-12 | 2019-07-09 | Lockheed Martin Corporation | Vector magnetometry localization of subsurface liquids |
US10274550B2 (en) | 2017-03-24 | 2019-04-30 | Lockheed Martin Corporation | High speed sequential cancellation for pulsed mode |
US10677953B2 (en) | 2016-05-31 | 2020-06-09 | Lockheed Martin Corporation | Magneto-optical detecting apparatus and methods |
US10527746B2 (en) | 2016-05-31 | 2020-01-07 | Lockheed Martin Corporation | Array of UAVS with magnetometers |
US10359479B2 (en) | 2017-02-20 | 2019-07-23 | Lockheed Martin Corporation | Efficient thermal drift compensation in DNV vector magnetometry |
US10408890B2 (en) | 2017-03-24 | 2019-09-10 | Lockheed Martin Corporation | Pulsed RF methods for optimization of CW measurements |
US10371765B2 (en) | 2016-07-11 | 2019-08-06 | Lockheed Martin Corporation | Geolocation of magnetic sources using vector magnetometer sensors |
US10330744B2 (en) | 2017-03-24 | 2019-06-25 | Lockheed Martin Corporation | Magnetometer with a waveguide |
US10317279B2 (en) | 2016-05-31 | 2019-06-11 | Lockheed Martin Corporation | Optical filtration system for diamond material with nitrogen vacancy centers |
US10145910B2 (en) | 2017-03-24 | 2018-12-04 | Lockheed Martin Corporation | Photodetector circuit saturation mitigation for magneto-optical high intensity pulses |
US10571530B2 (en) | 2016-05-31 | 2020-02-25 | Lockheed Martin Corporation | Buoy array of magnetometers |
US10379174B2 (en) | 2017-03-24 | 2019-08-13 | Lockheed Martin Corporation | Bias magnet array for magnetometer |
US10459041B2 (en) | 2017-03-24 | 2019-10-29 | Lockheed Martin Corporation | Magnetic detection system with highly integrated diamond nitrogen vacancy sensor |
US10338164B2 (en) | 2017-03-24 | 2019-07-02 | Lockheed Martin Corporation | Vacancy center material with highly efficient RF excitation |
US10371760B2 (en) | 2017-03-24 | 2019-08-06 | Lockheed Martin Corporation | Standing-wave radio frequency exciter |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0388707A (ja) * | 1989-08-31 | 1991-04-15 | Mitsubishi Materials Corp | 高純度人工ダイヤモンド粉末の製造法 |
CA2070436A1 (en) * | 1991-07-08 | 1993-01-09 | Harold P. Bovenkerk | Isotopically-pure carbon-12 or carbon-13 polycrystalline diamond possessing enhanced thermal conductivity |
JP3452665B2 (ja) * | 1994-11-22 | 2003-09-29 | 東京瓦斯株式会社 | ダイヤモンド単結晶の合成方法及び単結晶ダイヤモンド |
JPH1045473A (ja) * | 1996-08-01 | 1998-02-17 | Toyo Tanso Kk | 耐酸化性に優れた熱分解炭素被覆黒鉛材 |
CA2456847C (en) * | 2001-08-08 | 2013-04-23 | Apollo Diamond, Inc. | System and method for producing synthetic diamond |
JP4275896B2 (ja) * | 2002-04-01 | 2009-06-10 | 株式会社テクノネットワーク四国 | ダイヤモンド多結晶体およびその製造方法 |
JP2009067609A (ja) * | 2007-09-11 | 2009-04-02 | Sumitomo Electric Ind Ltd | 高純度ダイヤモンド多結晶体およびその製造方法 |
KR101604730B1 (ko) * | 2008-02-06 | 2016-03-18 | 스미토모덴키고교가부시키가이샤 | 다이아몬드 다결정체 |
-
2011
- 2011-07-28 JP JP2011165746A patent/JP5891636B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2013028497A (ja) | 2013-02-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5891636B2 (ja) | 多結晶ダイヤモンドおよびその製造方法 | |
US9878914B2 (en) | Polycrystalline diamond and manufacturing method thereof | |
Sun et al. | Low‐temperature and rapid growth of large single‐crystalline graphene with ethane | |
JP2012121748A (ja) | ダイヤモンド及びこれを用いた磁気センサー | |
US20120295112A1 (en) | Silicon carbide powder and method for producing silicon carbide powder | |
CN110104651B (zh) | 一种高纯碳化硅、碳化硅晶圆及其制备方法 | |
JP5674009B2 (ja) | 高硬度導電性ダイヤモンド多結晶体およびその製造方法 | |
US9725826B2 (en) | Single-crystal diamond and manufacturing method thereof | |
WO2012086240A1 (ja) | 単結晶炭化ケイ素液相エピタキシャル成長用シード材及び単結晶炭化ケイ素の液相エピタキシャル成長方法 | |
JP5987629B2 (ja) | 多結晶ダイヤモンドおよびその製造方法 | |
JP5891634B2 (ja) | 多結晶ダイヤモンドおよびその製造方法 | |
JP5891637B2 (ja) | 多結晶ダイヤモンドおよびその製造方法 | |
US20100092363A1 (en) | Combustion synthesis method and materials produced therefrom | |
Wang et al. | Oxygen reduction through specific surface area control of AlN powder for AlN single-crystal growth by physical vapor transport | |
JP5880200B2 (ja) | 単結晶ダイヤモンドおよびその製造方法 | |
JP5776415B2 (ja) | 黒鉛の製造方法 | |
WO2008056761A1 (fr) | Procédé de fabrication d'un monocristal de carbure de silicium | |
Han et al. | Epitaxial Growth of Graphene on SiC by Thermal Shock Annealing Within Seconds | |
JP2013028496A (ja) | 多結晶ダイヤモンドおよびその製造方法 | |
Weidong et al. | A novel method of fabricating a well-faceted large-crystal diamond through MPCVD | |
JP6047925B2 (ja) | 多結晶ダイヤモンド砥粒およびその製造方法、スラリー、並びに固定砥粒式ワイヤ | |
Manfredotti et al. | Vibronic spectrum of c-BN measured with cathodoluminescence | |
US8182778B2 (en) | Boron carbide and method for making same | |
JP5793815B2 (ja) | 単結晶炭化ケイ素液相エピタキシャル成長用シード材及び単結晶炭化ケイ素の液相エピタキシャル成長方法 | |
Lin et al. | Study of intercalation and deintercalation of Na_xCoO_2 yH_2O single crystals |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140523 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150630 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150821 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160126 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160208 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5891636 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |