JP2011233784A5 - - Google Patents
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- Publication number
- JP2011233784A5 JP2011233784A5 JP2010104443A JP2010104443A JP2011233784A5 JP 2011233784 A5 JP2011233784 A5 JP 2011233784A5 JP 2010104443 A JP2010104443 A JP 2010104443A JP 2010104443 A JP2010104443 A JP 2010104443A JP 2011233784 A5 JP2011233784 A5 JP 2011233784A5
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- semiconductor light
- film
- emitting device
- emitting element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 65
- 239000004065 semiconductor Substances 0.000 claims description 34
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 6
- 229910008051 Si-OH Inorganic materials 0.000 claims description 4
- 229910006358 Si—OH Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 4
- 239000010410 layer Substances 0.000 claims 6
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010104443A JP2011233784A (ja) | 2010-04-28 | 2010-04-28 | 半導体発光素子、半導体発光素子の保護膜及びその作製方法 |
| US13/582,192 US20130037850A1 (en) | 2010-04-28 | 2011-02-10 | Semiconductor light-emitting element, protective film of semiconductor light-emitting element, and method for fabricating same |
| KR1020127022725A KR20120125326A (ko) | 2010-04-28 | 2011-02-10 | 반도체 발광 소자, 반도체 발광 소자의 보호막 및 그 제작 방법 |
| EP11774674.3A EP2565946A4 (en) | 2010-04-28 | 2011-02-10 | LIGHT-EMITTING SEMICONDUCTOR COMPONENT, PROTECTIVE FILM FOR THE LIGHT-EMITTING SEMICONDUCTOR COMPONENT AND METHOD OF MANUFACTURING THEREOF |
| PCT/JP2011/052814 WO2011135889A1 (ja) | 2010-04-28 | 2011-02-10 | 半導体発光素子、半導体発光素子の保護膜及びその作製方法 |
| TW100105984A TW201203613A (en) | 2010-04-28 | 2011-02-23 | Semiconductor light-emitting element, protective film of semiconductor light-emitting element, and method for fabricating same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010104443A JP2011233784A (ja) | 2010-04-28 | 2010-04-28 | 半導体発光素子、半導体発光素子の保護膜及びその作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011233784A JP2011233784A (ja) | 2011-11-17 |
| JP2011233784A5 true JP2011233784A5 (enExample) | 2013-06-06 |
Family
ID=44861210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010104443A Pending JP2011233784A (ja) | 2010-04-28 | 2010-04-28 | 半導体発光素子、半導体発光素子の保護膜及びその作製方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20130037850A1 (enExample) |
| EP (1) | EP2565946A4 (enExample) |
| JP (1) | JP2011233784A (enExample) |
| KR (1) | KR20120125326A (enExample) |
| TW (1) | TW201203613A (enExample) |
| WO (1) | WO2011135889A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011233783A (ja) * | 2010-04-28 | 2011-11-17 | Mitsubishi Heavy Ind Ltd | 半導体発光素子、半導体発光素子の保護膜及びその作製方法 |
| JP2013251423A (ja) * | 2012-06-01 | 2013-12-12 | Mitsubishi Heavy Ind Ltd | 発光素子の保護膜の作製方法及び装置 |
| JP6476854B2 (ja) * | 2014-12-26 | 2019-03-06 | 日亜化学工業株式会社 | 発光素子の製造方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07240535A (ja) * | 1994-02-28 | 1995-09-12 | Kyocera Corp | 薄膜パターンの形成方法 |
| DE69516933T2 (de) * | 1994-04-06 | 2000-12-07 | At&T Ipm Corp., Coral Gables | Herstellungsverfahren für eine Vorrichtung mit einer SiOx Schicht |
| JP3723434B2 (ja) * | 1999-09-24 | 2005-12-07 | 三洋電機株式会社 | 半導体発光素子 |
| JP2003332616A (ja) * | 2002-05-14 | 2003-11-21 | Sharp Corp | 化合物半導体素子およびその製造方法 |
| JP2005286135A (ja) * | 2004-03-30 | 2005-10-13 | Eudyna Devices Inc | 半導体装置および半導体装置の製造方法 |
| JP4543732B2 (ja) * | 2004-04-20 | 2010-09-15 | 日立電線株式会社 | 発光ダイオードアレイ |
| JP2006041403A (ja) | 2004-07-29 | 2006-02-09 | Nichia Chem Ind Ltd | 半導体発光素子 |
| JP2007189097A (ja) | 2006-01-13 | 2007-07-26 | Nichia Chem Ind Ltd | 半導体発光素子 |
| WO2009057655A1 (ja) * | 2007-10-29 | 2009-05-07 | Mitsubishi Chemical Corporation | 半導体発光素子およびその製造方法 |
| US8031754B2 (en) * | 2008-04-24 | 2011-10-04 | The Furukawa Electric Co., Ltd. | Surface emitting laser element, surface emitting laser element array, method of fabricating a surface emitting laser element |
-
2010
- 2010-04-28 JP JP2010104443A patent/JP2011233784A/ja active Pending
-
2011
- 2011-02-10 US US13/582,192 patent/US20130037850A1/en not_active Abandoned
- 2011-02-10 KR KR1020127022725A patent/KR20120125326A/ko not_active Ceased
- 2011-02-10 WO PCT/JP2011/052814 patent/WO2011135889A1/ja not_active Ceased
- 2011-02-10 EP EP11774674.3A patent/EP2565946A4/en not_active Withdrawn
- 2011-02-23 TW TW100105984A patent/TW201203613A/zh unknown
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