JP2011133873A - 表示装置 - Google Patents
表示装置 Download PDFInfo
- Publication number
- JP2011133873A JP2011133873A JP2010260723A JP2010260723A JP2011133873A JP 2011133873 A JP2011133873 A JP 2011133873A JP 2010260723 A JP2010260723 A JP 2010260723A JP 2010260723 A JP2010260723 A JP 2010260723A JP 2011133873 A JP2011133873 A JP 2011133873A
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- Prior art keywords
- layer
- thin film
- film transistor
- semiconductor layer
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- QQQSFSZALRVCSZ-UHFFFAOYSA-N triethoxysilane Chemical compound CCO[SiH](OCC)OCC QQQSFSZALRVCSZ-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H—ELECTRICITY
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1251—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs comprising TFTs having a different architecture, e.g. top- and bottom gate TFTs
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1233—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with different thicknesses of the active layer in different devices
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
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- H—ELECTRICITY
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78645—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate
- H01L29/78648—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate arranged on opposing sides of the channel
Abstract
【解決手段】駆動回路及び画素部を有し、駆動回路は、デュアルゲート型の薄膜トランジスタを用いて構成され、画素部はシングルゲート型の薄膜トランジスタを用いて構成される表示装置である。該表示装置おけるデュアルゲート型の薄膜トランジスタは、半導体層が微結晶半導体領域及び一対の非晶質半導体領域で形成され、ゲート絶縁層及び絶縁層が半導体層の微結晶半導体領域に接する。
【選択図】図2
Description
したがって、本発明は以下に示す実施の形態及び実施例の記載内容のみに限定して解釈されるものではない。なお、図面を用いて本発明の構成を説明するにあたり、同じものを指す符号は異なる図面間でも共通して用いる。
本実施の形態では、本発明の一形態である表示装置について、図1乃至図4を参照して説明する。なお、表示装置に用いる薄膜トランジスタは、p型よりもn型の方が、キャリアの移動度が高い。また、同一の基板上に形成する薄膜トランジスタを全て同じ極性に統一すると、工程数を抑えることができ、好ましい。そのため、本実施の形態では、n型の薄膜トランジスタについて説明する。
本実施の形態では、実施の形態1と異なる薄膜トランジスタについて、図5を用いて説明する。
本実施の形態では、実施の形態1と異なる構造の薄膜トランジスタについて、図6を用いて説明する。
ここでは、図1に示す表示装置の作製方法について、図7乃至図10を用いて示す。
本実施の形態では、n型の薄膜トランジスタの作製方法について説明する。
本実施の形態では、実施の形態2に示す薄膜トランジスタの作製方法について、図7を用いて説明する。
上記実施の形態を踏まえて、薄膜トランジスタを作製し、該薄膜トランジスタを画素部、さらには駆動回路に用いて表示機能を有する半導体装置(表示装置ともいう)を作製することができる。また、薄膜トランジスタの駆動回路の一部または全体を、画素部と同じ基板上に一体形成し、システムオンパネルを形成することができる。
本実施の形態では、半導体装置として電子ペーパーの例を示す。
半導体装置として発光表示装置の例を示す。表示装置の有する表示素子としては、ここではエレクトロルミネッセンスを利用する発光素子を用いて示す。エレクトロルミネッセンスを利用する発光素子は、発光材料が有機化合物であるか、無機化合物であるかによって区別され、一般的に、前者は有機EL素子、後者は無機EL素子と呼ばれている。
本明細書に開示する半導体装置は、電子ペーパーとして適用することができる。電子ペーパーは、情報を表示するものであればあらゆる分野の電子機器に用いることが可能である。例えば、電子ペーパーを用いて、電子書籍(電子ブック)、ポスター、デジタルサイネージ、PID(Public Information Display)、電車などの乗り物の車内広告、クレジットカード等の各種カードにおける表示等に適用することができる。電子機器の一例を図19に示す。
本明細書に開示する半導体装置は、さまざまな電子機器(遊技機も含む)に適用することができる。電子機器としては、例えば、テレビジョン装置(テレビ、またはテレビジョン受信機ともいう)、コンピュータ用などのモニタ、デジタルカメラ、デジタルビデオカメラ、デジタルフォトフレーム、携帯電話機(携帯電話、携帯電話装置ともいう)、携帯型ゲーム機、携帯情報端末、音響再生装置、パチンコ機などの大型ゲーム機などが挙げられる。
53 走査線駆動回路
55 信号線駆動回路
63 第1の走査線駆動回路
61 画素部
65 第2の走査線駆動回路
67 信号線駆動回路
100a 駆動回路
100b 画素部
101 基板
103 ゲート電極
105 ゲート電極
107 ゲート絶縁層
109 微結晶半導体層
111 半導体層
111a 微結晶半導体領域
111b 非晶質半導体領域
113 不純物半導体層
115 導電層
119 レジストマスク
121 レジストマスク
123 半導体層
125 半導体層
125a 微結晶半導体領域
125b 非晶質半導体領域
126 不純物半導体層
127 不純物半導体層
129 導電層
131 導電層
133a レジストマスク
133b レジストマスク
139 半導体層
141a 不純物半導体層
141b 不純物半導体層
143 不純物半導体層
145a 導電層
145b 導電層
147 導電層
149a レジストマスク
149b レジストマスク
151a レジストマスク
151b レジストマスク
153 半導体層
153a 微結晶半導体領域
153b 非晶質半導体領域
155 半導体層
155a 微結晶半導体領域
155b 非晶質半導体領域
157a 不純物半導体層
157b 不純物半導体層
159a 不純物半導体層
159b 不純物半導体層
159a 不純物半導体層
159b 不純物半導体層
157a 不純物半導体層
157b 不純物半導体層
159a 不純物半導体層
159b 不純物半導体層
161a 配線
161b 配線
163a 配線
163b 配線
164a 薄膜トランジスタ
164b 薄膜トランジスタ
165 絶縁層
167 バックゲート電極
169 画素電極
174a 薄膜トランジスタ
174b 薄膜トランジスタ
175 ゲート電極
177 ゲート電極
178a 薄膜トランジスタ
178b 薄膜トランジスタ
179 半導体層
179a 微結晶半導体領域
179b 非晶質半導体領域
181 半導体層
181a 微結晶半導体領域
181b 非晶質半導体領域
280 グレートーンマスク
285 ハーフトーンマスク
281 基板
282 遮光部
283 回折格子部
287 半透光部
288 遮光部
301 基板
303 絶縁層
305 ゲート電極
307 ゲート絶縁層
309 微結晶半導体層
313 不純物半導体層
315 半導体層
317 不純物半導体層
319 導電層
321 配線
327 絶縁層
329 半導体層
331 バックゲート電極
339 薄膜トランジスタ
341 薄膜トランジスタ
580 基板
581 薄膜トランジスタ
583 絶縁層
585 絶縁膜
596 基板
587 第1の電極
588 第2の電極
589 球形粒子
590a 黒色領域
590b 白色領域
594 キャビティ
595 充填材
2700 電子書籍
2701 筐体
2703 筐体
2705 表示部
2707 表示部
2711 該軸部
2721 電源
2723 操作キー
2725 スピーカ
4001 第1の基板
4002 画素部
4003 信号線駆動回路
4004 走査線駆動回路
4005 シール材
4006 第2の基板
4008 液晶層
4010 薄膜トランジスタ
4011 薄膜トランジスタ
4013 液晶素子
4015 接続端子電極
4016 端子電極
4018 FPC
4019 異方性導電膜
4021 絶縁膜
4030 画素電極
4031 対向電極
4032 絶縁膜
4033 絶縁膜
4501 第1の基板
4502 画素部
4503a 信号線駆動回路
4503b 信号線駆動回路
4504a 走査線駆動回路
4504b 走査線駆動回路
4505 シール材
4506 第2の基板
4507 充填材
4509 薄膜トランジスタ
4510 薄膜トランジスタ
4511 発光素子
4517 第1の電極
4512 EL層
4513 第2の電極
4515 接続端子電極
4518a FPC
4518b FPC
4520 隔壁
9301 上部筐体
9302 下部筐体
9305 外部接続ポート
9600 テレビジョン装置
9601 筐体
9603 表示部
9304 キーボード
9605 スタンド
9607 表示部
Claims (6)
- 駆動回路及び画素部を有し、
前記駆動回路は、デュアルゲート型の薄膜トランジスタを用いて構成され、
前記画素部はシングルゲート型の薄膜トランジスタを用いて構成され、
前記デュアルゲート型の薄膜トランジスタは、
第1のゲート電極と、
前記第1のゲート電極に接するゲート絶縁層と、
バックゲート電極と、前記バックゲート電極に接する絶縁層と、
前記ゲート絶縁層及び前記絶縁層の間に有する第1の半導体層及び第1の配線とを有し、
前記第1の半導体層は、前記第1のゲート電極上で前記ゲート絶縁層及び前記絶縁層に接する第1の微結晶半導体領域と、前記第1の微結晶半導体領域及び前記第1の配線の間に設けられる一対の第1の非晶質半導体領域で形成されることを特徴とし、
前記シングルゲート型の薄膜トランジスタは、
第2のゲート電極と、
前記第2のゲート電極に接する前記ゲート絶縁層と、
前記絶縁層と、
前記ゲート絶縁層及び前記絶縁層の間に有する第2の半導体層及び第2の配線とを有し、
前記第2の半導体層は第2の微結晶半導体領域及び第2の非晶質半導体領域で形成され、
前記ゲート絶縁層は前記第2の微結晶半導体領域に接し、前記絶縁層は前記第2の非晶質半導体領域に接することを特徴とする表示装置。 - 請求項1において、
前記第1の微結晶半導体領域及び一対の第1の非晶質半導体領域の界面、並びに第2の微結晶半導体領域及び第2の非晶質半導体領域の界面は、平坦であることを特徴とする表示装置。 - 請求項1において、
前記第1の微結晶半導体領域及び一対の第1の非晶質半導体領域の界面、並びに第2の微結晶半導体領域及び第2の非晶質半導体領域の界面は、凹凸状であることを特徴とする表示装置。 - 請求項3において、前記凹凸状の凸部は鈍角であることを特徴とする表示装置。
- 請求項3において、前記凹凸状の凸部は錐形であることを特徴とする表示装置。
- 請求項1乃至請求項5のいずれか一項において、前記第1のゲート電極と前記バックゲート電極が接続していることを特徴とする表示装置。
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US8598586B2 (en) * | 2009-12-21 | 2013-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor and manufacturing method thereof |
US8383434B2 (en) * | 2010-02-22 | 2013-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor and manufacturing method thereof |
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