JP2011129684A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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Abstract
【解決手段】複数の半導体チップが積層され、各半導体チップに設けられた貫通電極がチップの積層順に電気的に接続されたチップ積層体と、チップ積層体の一方の端に設けられた第1の半導体チップに対向して配置され、第1の半導体チップの貫通電極と電気的に接続された電極を有する第1のサポート部材と、チップ積層体の一方の端とは反対側の端に設けられた第2の半導体チップに対向して配置され、第2の半導体チップに対向する面とは反対側の面に第2の半導体チップの貫通電極と電気的に接続された外部電極を有する配線基板と、を有する。
【選択図】図1
Description
複数の半導体チップが積層され、該複数の半導体チップのそれぞれに設けられた貫通電極が該複数の半導体チップの積層順に電気的に接続されたチップ積層体と、
前記複数の半導体チップの積層方向の、前記チップ積層体の一方の端に設けられた半導体チップである第1の半導体チップに対向して配置され、該第1の半導体チップの貫通電極と電気的に接続された電極を有する第1のサポート部材と、
前記複数の半導体チップの積層方向の、前記チップ積層体の一方の端とは反対側の端に設けられた半導体チップである第2の半導体チップに対向して配置され、該第2の半導体チップに対向する面とは反対側の面に該第2の半導体チップの貫通電極と電気的に接続された外部電極を有する配線基板と、
を有する構成である。
電極を備えた第1のサポート部材の該電極が設けられた面の上に貫通電極を備えた第1の半導体チップを載せ、該第1のサポート部材の電極と該第1の半導体チップの貫通電極とを接続し、
前記第1の半導体チップの上に、貫通電極を備えた第2の半導体チップを1つ以上積層して隣り合う半導体チップの貫通電極同士を接続し、
前記第1の半導体チップ及び1つ以上の前記第2の半導体チップを積層したチップ積層体の半導体チップ間、並びに該チップ積層体と前記第1のサポート部材との間に樹脂層を埋め込み、
前記チップ積層体の1つ以上の前記第2の半導体チップのうち、最上段の第2の半導体チップの貫通電極を、所定の配線が形成された配線基板の電極に接続するものである。
(第1の実施の形態)
図1は第1の実施の形態の半導体装置の一構成例を示す断面図である。
(第2の実施の形態)
本実施形態は、第1の実施の形態の半導体装置における第2のサポート部材に電極ピッチの変換機能をもたせたものである。以下では、第2のサポート部材を第1の実施の形態と同様に、IFチップとし、その構成を説明する。
(第3の実施の形態)
本実施形態は、図6に示した半導体装置のサポートチップの厚さを大きくしたものである。以下に、本実施形態の半導体装置の構成を説明する。
(第4の実施の形態)
本実施形態は、図6に示した半導体装置のサポートチップに、貫通電極を有するサポート部材を適用した構成である。以下に、本実施形態の半導体装置の構成を説明する。
(第5の実施の形態)
本実施形態は、第1の実施の形態で説明した半導体装置に、さらに別の機能を有するチップを追加した構成である。以下に、本実施形態の半導体装置の構成を説明する。
10 半導体チップ
10A 機能拡張チップ
11 チップ積層体
12 バンプ電極
13 貫通電極
14 第1の封止樹脂層
15 ワイヤバンプ
20 配線基板
21 接続パッド
22 金属ボール
23 ランド
24 接着部材
25 第2の封止樹脂層
26 製品形成部
42 ワイヤ
50 サポートチップ
60 インターフェースチップ(IFチップ)
100 吸着ステージ
102 吸着孔
110、160 ボンディングツール
120 ステージ
121 塗布用シート
130、150 ディスペンサ
131 アンダーフィル材
170 マウントツール
180 ダイシングテープ
181 ダイシングブレード
Claims (13)
- 複数の半導体チップが積層され、該複数の半導体チップのそれぞれに設けられた貫通電極が該複数の半導体チップの積層順に電気的に接続されたチップ積層体と、
前記複数の半導体チップの積層方向の、前記チップ積層体の一方の端に設けられた半導体チップである第1の半導体チップに対向して配置され、該第1の半導体チップの貫通電極と電気的に接続された電極を有する第1のサポート部材と、
前記複数の半導体チップの積層方向の、前記チップ積層体の一方の端とは反対側の端に設けられた半導体チップである第2の半導体チップに対向して配置され、該第2の半導体チップに対向する面とは反対側の面に該第2の半導体チップの貫通電極と電気的に接続された外部電極を有する配線基板と、
を有する半導体装置。 - 前記複数の半導体チップ間、及び前記チップ積層体と前記第1のサポート部材との間に埋め込まれた樹脂層をさらに有する請求項1記載の半導体装置。
- 前記第1のサポート部材の厚みが前記第1の半導体チップの厚みよりも大きい構成である、請求項1または2記載の半導体装置。
- 前記第1のサポート部材の平面積が前記第1の半導体チップの平面積と同等である、請求項1から3のいずれか1項記載の半導体装置。
- 前記第1のサポート部材の材料が前記複数の半導体チップの材料と同等である、請求項1から4のいずれか1項記載の半導体装置。
- 前記チップ積層体と前記配線基板との間に配置され、前記第2の半導体チップの貫通電極と前記配線基板の外部電極とを電気的に接続する第2のサポート部材をさらに有する請求項1から5のいずれか1項記載の半導体装置。
- 前記第1のサポート部材は、貫通電極を使用しない回路機能を有する半導体チップである、請求項1から6のいずれか1項記載の半導体装置。
- 前記第1のサポート部材は、貫通電極を有する、回路動作しない半導体チップである、請求項1から6のいずれか1項記載の半導体装置。
- 前記第1のサポート部材は、前記チップ積層体の貫通電極と異なる位置に、該貫通電極と電気的に接続するように配置された貫通電極を有する半導体チップである、請求項1から6のいずれか1項記載の半導体装置。
- 前記第2のサポート部材は、一面に所定の回路が形成され、前記第2の半導体チップの貫通電極と電気的に接続された第1の電極と、該第1の電極と配線により接続された第2の電極とを有する半導体チップであり、前記第2の電極と前記配線基板の前記外部電極とがワイヤを介して電気的に接続された、請求項6記載の半導体装置。
- 前記第2のサポート部材は、前記チップ積層体の貫通電極と異なる位置に、該貫通電極と電気的に接続するように配置された貫通電極を有する半導体チップである、請求項6記載の半導体装置。
- 電極を備えた第1のサポート部材の該電極が設けられた面の上に貫通電極を備えた第1の半導体チップを載せ、該第1のサポート部材の電極と該第1の半導体チップの貫通電極とを接続し、
前記第1の半導体チップの上に、貫通電極を備えた第2の半導体チップを1つ以上積層して隣り合う半導体チップの貫通電極同士を接続し、
前記第1の半導体チップ及び1つ以上の前記第2の半導体チップを積層したチップ積層体の半導体チップ間、並びに該チップ積層体と前記第1のサポート部材との間に樹脂層を埋め込み、
前記チップ積層体の1つ以上の前記第2の半導体チップのうち、最上段の第2の半導体チップの貫通電極を、所定の配線が形成された配線基板の電極に接続する、半導体装置の製造方法。 - 前記第1のサポート部材の平面積が前記第1の半導体チップの平面積と同等である、請求項12記載の半導体装置の製造方法。
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