JP2010538959A - 透明セラミックスの製造方法 - Google Patents
透明セラミックスの製造方法 Download PDFInfo
- Publication number
- JP2010538959A JP2010538959A JP2010524877A JP2010524877A JP2010538959A JP 2010538959 A JP2010538959 A JP 2010538959A JP 2010524877 A JP2010524877 A JP 2010524877A JP 2010524877 A JP2010524877 A JP 2010524877A JP 2010538959 A JP2010538959 A JP 2010538959A
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- JP
- Japan
- Prior art keywords
- produce
- slurry
- tape
- preform
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000919 ceramic Substances 0.000 title claims abstract description 49
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 31
- 239000002002 slurry Substances 0.000 claims abstract description 153
- 239000000203 mixture Substances 0.000 claims abstract description 97
- 238000000034 method Methods 0.000 claims abstract description 85
- 238000005245 sintering Methods 0.000 claims abstract description 31
- 239000004014 plasticizer Substances 0.000 claims abstract description 27
- 239000011230 binding agent Substances 0.000 claims abstract description 24
- 239000002270 dispersing agent Substances 0.000 claims abstract description 24
- 238000010345 tape casting Methods 0.000 claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 16
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 claims abstract description 8
- 239000003960 organic solvent Substances 0.000 claims abstract description 7
- 239000002019 doping agent Substances 0.000 claims description 46
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 30
- 229910052779 Neodymium Inorganic materials 0.000 claims description 23
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 17
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 16
- IRIAEXORFWYRCZ-UHFFFAOYSA-N Butylbenzyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCC1=CC=CC=C1 IRIAEXORFWYRCZ-UHFFFAOYSA-N 0.000 claims description 16
- -1 acetyl trioctyl citrate Chemical compound 0.000 claims description 16
- 238000001035 drying Methods 0.000 claims description 16
- 239000002904 solvent Substances 0.000 claims description 16
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 claims description 15
- 239000008096 xylene Substances 0.000 claims description 15
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 12
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims description 12
- 241000273930 Brevoortia tyrannus Species 0.000 claims description 11
- 235000021323 fish oil Nutrition 0.000 claims description 11
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 8
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 7
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 claims description 7
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 7
- 150000002910 rare earth metals Chemical class 0.000 claims description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 6
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 claims description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 6
- 229920002873 Polyethylenimine Polymers 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 5
- 239000000395 magnesium oxide Substances 0.000 claims description 5
- KCXZNSGUUQJJTR-UHFFFAOYSA-N Di-n-hexyl phthalate Chemical compound CCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCC KCXZNSGUUQJJTR-UHFFFAOYSA-N 0.000 claims description 4
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Chemical compound CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 claims description 4
- ZFOZVQLOBQUTQQ-UHFFFAOYSA-N Tributyl citrate Chemical compound CCCCOC(=O)CC(O)(C(=O)OCCCC)CC(=O)OCCCC ZFOZVQLOBQUTQQ-UHFFFAOYSA-N 0.000 claims description 4
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 claims description 4
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims description 4
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 claims description 4
- FLKPEMZONWLCSK-UHFFFAOYSA-N diethyl phthalate Chemical compound CCOC(=O)C1=CC=CC=C1C(=O)OCC FLKPEMZONWLCSK-UHFFFAOYSA-N 0.000 claims description 4
- MGWAVDBGNNKXQV-UHFFFAOYSA-N diisobutyl phthalate Chemical compound CC(C)COC(=O)C1=CC=CC=C1C(=O)OCC(C)C MGWAVDBGNNKXQV-UHFFFAOYSA-N 0.000 claims description 4
- BDJRBEYXGGNYIS-UHFFFAOYSA-N nonanedioic acid Chemical compound OC(=O)CCCCCCCC(O)=O BDJRBEYXGGNYIS-UHFFFAOYSA-N 0.000 claims description 4
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 4
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 4
- WLJVNTCWHIRURA-UHFFFAOYSA-N pimelic acid Chemical compound OC(=O)CCCCCC(O)=O WLJVNTCWHIRURA-UHFFFAOYSA-N 0.000 claims description 4
- CXMXRPHRNRROMY-UHFFFAOYSA-N sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052596 spinel Inorganic materials 0.000 claims description 4
- 239000011029 spinel Substances 0.000 claims description 4
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 claims description 4
- TYFQFVWCELRYAO-UHFFFAOYSA-N suberic acid Chemical compound OC(=O)CCCCCCC(O)=O TYFQFVWCELRYAO-UHFFFAOYSA-N 0.000 claims description 4
- HDDLVZWGOPWKFW-UHFFFAOYSA-N trimethyl 2-hydroxypropane-1,2,3-tricarboxylate Chemical compound COC(=O)CC(O)(C(=O)OC)CC(=O)OC HDDLVZWGOPWKFW-UHFFFAOYSA-N 0.000 claims description 4
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- SNAAJJQQZSMGQD-UHFFFAOYSA-N aluminum magnesium Chemical compound [Mg].[Al] SNAAJJQQZSMGQD-UHFFFAOYSA-N 0.000 claims description 3
- 229910000420 cerium oxide Inorganic materials 0.000 claims description 3
- 239000008119 colloidal silica Substances 0.000 claims description 3
- JBSLOWBPDRZSMB-FPLPWBNLSA-N dibutyl (z)-but-2-enedioate Chemical compound CCCCOC(=O)\C=C/C(=O)OCCCC JBSLOWBPDRZSMB-FPLPWBNLSA-N 0.000 claims description 3
- 229910003437 indium oxide Inorganic materials 0.000 claims description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910003443 lutetium oxide Inorganic materials 0.000 claims description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims description 3
- MPARYNQUYZOBJM-UHFFFAOYSA-N oxo(oxolutetiooxy)lutetium Chemical compound O=[Lu]O[Lu]=O MPARYNQUYZOBJM-UHFFFAOYSA-N 0.000 claims description 3
- WKMKTIVRRLOHAJ-UHFFFAOYSA-N oxygen(2-);thallium(1+) Chemical compound [O-2].[Tl+].[Tl+] WKMKTIVRRLOHAJ-UHFFFAOYSA-N 0.000 claims description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 3
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 3
- 229920002689 polyvinyl acetate Polymers 0.000 claims description 3
- 239000011118 polyvinyl acetate Substances 0.000 claims description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 3
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 claims description 3
- 229910003438 thallium oxide Inorganic materials 0.000 claims description 3
- ZORQXIQZAOLNGE-UHFFFAOYSA-N 1,1-difluorocyclohexane Chemical compound FC1(F)CCCCC1 ZORQXIQZAOLNGE-UHFFFAOYSA-N 0.000 claims description 2
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 claims description 2
- WPMUZECMAFLDQO-UHFFFAOYSA-N 2-[2-(2-hexanoyloxyethoxy)ethoxy]ethyl hexanoate Chemical compound CCCCCC(=O)OCCOCCOCCOC(=O)CCCCC WPMUZECMAFLDQO-UHFFFAOYSA-N 0.000 claims description 2
- SSKNCQWPZQCABD-UHFFFAOYSA-N 2-[2-[2-(2-heptanoyloxyethoxy)ethoxy]ethoxy]ethyl heptanoate Chemical compound CCCCCCC(=O)OCCOCCOCCOCCOC(=O)CCCCCC SSKNCQWPZQCABD-UHFFFAOYSA-N 0.000 claims description 2
- KBIWNQVZKHSHTI-UHFFFAOYSA-N 4-n,4-n-dimethylbenzene-1,4-diamine;oxalic acid Chemical compound OC(=O)C(O)=O.CN(C)C1=CC=C(N)C=C1 KBIWNQVZKHSHTI-UHFFFAOYSA-N 0.000 claims description 2
- QZCLKYGREBVARF-UHFFFAOYSA-N Acetyl tributyl citrate Chemical compound CCCCOC(=O)CC(C(=O)OCCCC)(OC(C)=O)CC(=O)OCCCC QZCLKYGREBVARF-UHFFFAOYSA-N 0.000 claims description 2
- PYGXAGIECVVIOZ-UHFFFAOYSA-N Dibutyl decanedioate Chemical compound CCCCOC(=O)CCCCCCCCC(=O)OCCCC PYGXAGIECVVIOZ-UHFFFAOYSA-N 0.000 claims description 2
- ZVFDTKUVRCTHQE-UHFFFAOYSA-N Diisodecyl phthalate Chemical compound CC(C)CCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC(C)C ZVFDTKUVRCTHQE-UHFFFAOYSA-N 0.000 claims description 2
- UDSFAEKRVUSQDD-UHFFFAOYSA-N Dimethyl adipate Chemical compound COC(=O)CCCCC(=O)OC UDSFAEKRVUSQDD-UHFFFAOYSA-N 0.000 claims description 2
- 229920000305 Nylon 6,10 Polymers 0.000 claims description 2
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Natural products OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 2
- 239000002202 Polyethylene glycol Substances 0.000 claims description 2
- YSMRWXYRXBRSND-UHFFFAOYSA-N TOTP Chemical compound CC1=CC=CC=C1OP(=O)(OC=1C(=CC=CC=1)C)OC1=CC=CC=C1C YSMRWXYRXBRSND-UHFFFAOYSA-N 0.000 claims description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 2
- DOOTYTYQINUNNV-UHFFFAOYSA-N Triethyl citrate Chemical compound CCOC(=O)CC(O)(C(=O)OCC)CC(=O)OCC DOOTYTYQINUNNV-UHFFFAOYSA-N 0.000 claims description 2
- 235000011037 adipic acid Nutrition 0.000 claims description 2
- 229960000250 adipic acid Drugs 0.000 claims description 2
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 claims description 2
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 claims description 2
- 229960002255 azelaic acid Drugs 0.000 claims description 2
- SAOKZLXYCUGLFA-UHFFFAOYSA-N bis(2-ethylhexyl) adipate Chemical compound CCCCC(CC)COC(=O)CCCCC(=O)OCC(CC)CCCC SAOKZLXYCUGLFA-UHFFFAOYSA-N 0.000 claims description 2
- ZFMQKOWCDKKBIF-UHFFFAOYSA-N bis(3,5-difluorophenyl)phosphane Chemical compound FC1=CC(F)=CC(PC=2C=C(F)C=C(F)C=2)=C1 ZFMQKOWCDKKBIF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052810 boron oxide Inorganic materials 0.000 claims description 2
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 claims description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 2
- 239000000292 calcium oxide Substances 0.000 claims description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 2
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 2
- HBGGXOJOCNVPFY-UHFFFAOYSA-N diisononyl phthalate Chemical compound CC(C)CCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCC(C)C HBGGXOJOCNVPFY-UHFFFAOYSA-N 0.000 claims description 2
- HCPOCMMGKBZWSJ-UHFFFAOYSA-N ethyl 3-hydrazinyl-3-oxopropanoate Chemical compound CCOC(=O)CC(=O)NN HCPOCMMGKBZWSJ-UHFFFAOYSA-N 0.000 claims description 2
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims description 2
- 229910001947 lithium oxide Inorganic materials 0.000 claims description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Natural products C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 2
- UOBSVARXACCLLH-UHFFFAOYSA-N monomethyl adipate Chemical compound COC(=O)CCCCC(O)=O UOBSVARXACCLLH-UHFFFAOYSA-N 0.000 claims description 2
- DHRXPBUFQGUINE-UHFFFAOYSA-N n-(2-hydroxypropyl)benzenesulfonamide Chemical compound CC(O)CNS(=O)(=O)C1=CC=CC=C1 DHRXPBUFQGUINE-UHFFFAOYSA-N 0.000 claims description 2
- FGTVYMTUTYLLQR-UHFFFAOYSA-N n-ethyl-1-phenylmethanesulfonamide Chemical compound CCNS(=O)(=O)CC1=CC=CC=C1 FGTVYMTUTYLLQR-UHFFFAOYSA-N 0.000 claims description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 claims description 2
- JQCXWCOOWVGKMT-UHFFFAOYSA-N phthalic acid diheptyl ester Natural products CCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCC JQCXWCOOWVGKMT-UHFFFAOYSA-N 0.000 claims description 2
- 229920002239 polyacrylonitrile Polymers 0.000 claims description 2
- 229920001223 polyethylene glycol Polymers 0.000 claims description 2
- 229920001451 polypropylene glycol Polymers 0.000 claims description 2
- 239000004800 polyvinyl chloride Substances 0.000 claims description 2
- 239000001593 sorbitan monooleate Substances 0.000 claims description 2
- 229940035049 sorbitan monooleate Drugs 0.000 claims description 2
- 235000011069 sorbitan monooleate Nutrition 0.000 claims description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- STCOOQWBFONSKY-UHFFFAOYSA-N tributyl phosphate Chemical compound CCCCOP(=O)(OCCCC)OCCCC STCOOQWBFONSKY-UHFFFAOYSA-N 0.000 claims description 2
- WEAPVABOECTMGR-UHFFFAOYSA-N triethyl 2-acetyloxypropane-1,2,3-tricarboxylate Chemical compound CCOC(=O)CC(C(=O)OCC)(OC(C)=O)CC(=O)OCC WEAPVABOECTMGR-UHFFFAOYSA-N 0.000 claims description 2
- 239000001069 triethyl citrate Substances 0.000 claims description 2
- VMYFZRTXGLUXMZ-UHFFFAOYSA-N triethyl citrate Natural products CCOC(=O)C(O)(C(=O)OCC)C(=O)OCC VMYFZRTXGLUXMZ-UHFFFAOYSA-N 0.000 claims description 2
- 235000013769 triethyl citrate Nutrition 0.000 claims description 2
- AMMPRZCMKXDUNE-UHFFFAOYSA-N trihexyl 2-hydroxypropane-1,2,3-tricarboxylate Chemical compound CCCCCCOC(=O)CC(O)(C(=O)OCCCCCC)CC(=O)OCCCCCC AMMPRZCMKXDUNE-UHFFFAOYSA-N 0.000 claims description 2
- APVVRLGIFCYZHJ-UHFFFAOYSA-N trioctyl 2-hydroxypropane-1,2,3-tricarboxylate Chemical compound CCCCCCCCOC(=O)CC(O)(C(=O)OCCCCCCCC)CC(=O)OCCCCCCCC APVVRLGIFCYZHJ-UHFFFAOYSA-N 0.000 claims description 2
- IPRJXAGUEGOFGG-UHFFFAOYSA-N N-butylbenzenesulfonamide Chemical compound CCCCNS(=O)(=O)C1=CC=CC=C1 IPRJXAGUEGOFGG-UHFFFAOYSA-N 0.000 claims 2
- LZBCVRCTAYKYHR-UHFFFAOYSA-N acetic acid;chloroethene Chemical compound ClC=C.CC(O)=O LZBCVRCTAYKYHR-UHFFFAOYSA-N 0.000 claims 1
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
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- TUUQISRYLMFKOG-UHFFFAOYSA-N trihexyl 2-acetyloxypropane-1,2,3-tricarboxylate Chemical compound CCCCCCOC(=O)CC(C(=O)OCCCCCC)(OC(C)=O)CC(=O)OCCCCCC TUUQISRYLMFKOG-UHFFFAOYSA-N 0.000 claims 1
- 238000000227 grinding Methods 0.000 abstract description 18
- 229910019655 synthetic inorganic crystalline material Inorganic materials 0.000 description 96
- 239000000843 powder Substances 0.000 description 58
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- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 20
- 229910010293 ceramic material Inorganic materials 0.000 description 19
- 229910052760 oxygen Inorganic materials 0.000 description 19
- 229910052691 Erbium Inorganic materials 0.000 description 10
- 238000001816 cooling Methods 0.000 description 10
- 235000019441 ethanol Nutrition 0.000 description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 229910052727 yttrium Inorganic materials 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 6
- 230000002706 hydrostatic effect Effects 0.000 description 6
- 238000003825 pressing Methods 0.000 description 6
- 229920002799 BoPET Polymers 0.000 description 5
- 239000005041 Mylar™ Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000005416 organic matter Substances 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 229910052743 krypton Inorganic materials 0.000 description 4
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052754 neon Inorganic materials 0.000 description 4
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 4
- 229910052756 noble gas Inorganic materials 0.000 description 4
- 229920001515 polyalkylene glycol Polymers 0.000 description 4
- 229910052704 radon Inorganic materials 0.000 description 4
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Abstract
【解決手段】この方法は、セラミック酸化物、分散剤および有機溶媒の混合物を形成する工程と、混合物を粉砕して、第1のスラリーを生成する工程と、第1のスラリーと、有機結合剤および可塑剤とを混合して、処理されたスラリーを形成する工程と、処理されたスラリーを粉砕して、粉砕されたスラリーを生成する工程と、粉砕されたスラリーをテープキャスティングして、成形テープを生成する工程と、成形テープを乾燥して、乾燥テープを生成する工程と、乾燥テープの一部を積み重ねて、アセンブリを形成する工程と、アセンブリを圧縮して、プレフォームを生成する工程と、プレフォームを加熱して、緑色のプレフォームを生成する工程と、緑色のプレフォームを焼結して、透明イットリウムアルミニウムガーネットを生成する工程と、を必要とする。
【選択図】図1
Description
本出願は、2007年9月14日に出願された米国仮特許出願USSN60/993,744号の優先権を主張する。
本発明は透明セラミックスに関する。特に、本発明は、限定されないが、透明イットリウムアルミニウムガーネット(「YAG」)などの透明セラミックスの製造に関する。
本明細書で言及される場合、透明とは、約300ナノメートル〜約5000ナノメートルのスペクトル範囲の少なくとも一部にわたる可視光を含む放射線に対して約95%までの材料の理論的透過率を有する透過率を意味すると理解される。
(セラミック材料)
典型的に、限定されないが、利用され得る酸化物などのセラミック粉末は、約99.99%〜約99.9999%純度、好ましくは約99.995%純度〜約99.9999%純度、より好ましくは約99.999%純度〜約99.9999%純度、および約50ナノメートル〜約5000ナノメートル、好ましくは約100ナノメートル〜約1000ナノメートル、より好ましくは約200ナノメートル〜約ミクロンの400ナノメートルの粒子サイズを有する。
限定されないが、酸化メンハーデン魚油などの上記の分散剤またはそれらの混合物のうちの1つ以上は、限定されないが、水、変性エチルアルコールおよびキシレンなどの上記の溶媒またはそれらの混合物のうちの1つ以上の溶媒と混合されて、中に粉砕媒体を有するミルジャーに加えられる。有用な粉砕媒体としては、限定されないが、アルミナ、イットリア安定化ジルコニア、YAG、およびそれらの混合物などの、限定されないが、セラミック材料が挙げられる。
典型的に、上記のように生成した乾燥テープを、所望のサイズおよび形状のプレートなどのピースに切断する。ピースの様々な数、典型的に約2〜約200ピース、好ましくは約10ピース〜約100ピース、より好ましくは約30ピース〜約60ピースが積み重ねられて、プレフォームを生じるために圧縮されるアセンブリを生成する。そのピースは、任意の方向に互いに対して積み重ねられてもよい。好ましくは、そのピースは、例えば、0°、90°、180°および270°などの0°と90°との間で交互に変化する方向で積み重ねられる。同時成形ピースが積み重ねられた場合、そのピースは、好ましくは、互いに対して0°と180°の方向で積み重ねられる。そのピースは、好ましくは、間で交互に層を変化させながら、上面まで、または底面まで積み重ねられる。ドーパント勾配が、焼結された生成物において望まれる場合、異なるドーパント濃度を有するテープからピース断片を合わせることによって積み重ねられている間に、そのドーパント勾配が導入され得る。
250mlの高密度ポリエチレンミルジャーを、5mm直径のY2O3安定化ZrO2粉末媒体で33.3%容積容量まで充填する。酸化メンハーデン魚油(1.40g、グレードZ−3、Tape Casting Warehouse)、無水キシレン(17.30g、J.T.Baker)、変性エチルアルコール(17.30g、Pharmco)およびTEOS(0.35g、99.999+%金属成分、Alfa Aesar)をミルジャーに加える。
成形テープを2時間、空気中で室温にて乾燥させることを除いて、実施例1の手順に従う。
さらに粉砕する前に、シクロヘキサノン(4滴、Aldrich Chemical Company)を第1のスラリーに加えて粉砕されたスラリーを得ることを除いて、実施例1の手順に従う。
使用するイットリア粉末がNippon Yttria Company(NYC)(99.999%純度、5,000ナノメートル直径)であることを除いて、実施例1の手順に従う。
70gmの99.999%純度のYAGをイットリアおよびアルミナの混合物と置き換えることを除いて、実施例1の手順に従う。
5mm直径のアルミナ粉砕媒体(99.9%、Nikkato Corp.,Sakai,日本)を、イットリア安定化ジルコニア粉砕媒体と置き換え、ミルジャーをアルミナ粉砕媒体で33%容量まで充填することを除いて、実施例1の手順に従う。
ドクターブレードのギャップが0.2mmであることを除いて、実施例1の手順に従う。
ドクターブレードのギャップが0.5mmであることを除いて、実施例1の手順に従う。
緑色のプレフォームを、0.1℃/分で加熱し、15分間190℃で保持して、有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、0.1℃/分で加熱し、15分間275℃で保持して、有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、0.1℃/分で加熱し、15分間375℃で保持することを除いて実施例1の手順に従う。
緑色のプレフォームを、0.1℃/分で加熱し、15分間500℃で保持することを除いて実施例1の手順に従う。
緑色のプレフォームを、0.1℃/分で加熱し、45分間190℃で保持して、有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、0.1℃/分で加熱し、45分間275℃で保持して、有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、0.1℃/分で加熱し、45分間375℃で保持することを除いて実施例1の手順に従う。
緑色のプレフォームを、0.1℃/分で加熱し、45分間500℃で保持することを除いて実施例1の手順に従う。
緑色のプレフォームを、2.0℃/分で加熱し、15分間190℃で保持して有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、2.0℃/分で加熱し、15分間275℃で保持して有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、2.0℃/分で加熱し、15分間375℃で保持して有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、2.0℃/分で加熱し、15分間500℃で保持して有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、2.0℃/分で加熱し、45分間190℃で保持して有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、2.0℃/分で加熱し、45分間275℃で保持して有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、2.0℃/分で加熱し、45分間375℃で保持して有機物を燃焼することを除いて実施例1の手順に従う。
緑色のプレフォームを、2.0℃/分で加熱し、45分間500℃で保持して有機物を燃焼することを除いて実施例1の手順に従う。
75℃にて5MPaで一軸加圧を利用して、プレフォームを生成することのみを除いて実施例1の手順を利用する。
75℃にて20MPaで静水圧加圧を利用して、プレフォームを生成することのみを除いて実施例1の手順を利用する。
緑色のプレフォームを15分間1800℃で保持することを除いて実施例1の手順に従う。
緑色のプレフォームを60分間1800℃で保持することを除いて実施例9の手順に従う。
緑色のプレフォームを24時間1800℃で保持することを除いて実施例9の手順に従う。
緑色のプレフォームを48時間1800℃で保持することを除いて実施例9の手順に従う。
生成物の厚さにわたるドーパント勾配を、異なるドーパント濃度を有するテープからテープピースを積み重ねることによって生成することを除いて実施例1の手順に従う。
この実施例において、0.1mm厚のドープされていないYAGの8つの層を、堆積される0.1mm厚の0.25at%のNdでドープされたYAGの2つの層、0.1mm厚の0.5at%のNdでドープされたYAGの2つの層、0.1mm厚の0.75at%のNdでドープされたYAGの2つの層、0.1mm厚の1at%のNdでドープされたYAGの2つの層、0.1mm厚の0.75at%のNdでドープされたYAGの2つの層、0.1mm厚の0.5at%のNdでドープされたYAGの2つの層、0.1mm厚の0.25%のNdでドープされたYAGの2つの層、および0.1mm厚のYAGの8つの層と合わせる。ドープされていないYAGの層の各々は、実施例1に従って作製する。
生成物の厚さにわたるドーパント勾配を、異なるドーパント濃度を有するテープからテープピースを積み重ねることによって生成することを除いて実施例1の手順に従う。
純粋なYAGの層の間に挟まれる4at%のNd3+でドープされたYAGの0.4mm厚の層から形成される透明YAG生成物を生成する。そのYAG生成物は4mmの厚さを有する。この手順において、1.8mm厚の層のYAG、0.4mm厚の層の4at%のNd3+でドープされたYAG、および実施例1に従って生成される1.8mm厚の層のドープされていないYAGから形成される積層を、その積層内に合わせる。ドープされていないYAGの層を実施例1に従って作製する。Y2O3粉末のイットリウム含有量に基づいて4.0アトミック%のNdをErの代わりに置き換える(ここで、Ndは、Nd2O3(Aldrich、100nm、99.9%)の形態で提供される)ことを除いて、4at%のNd3+でドープされたYAGの層を、実施例12の手順に従って作製する。その堆積層を薄片にし、実施例10の手順に従って熱処理する。NdでドープされたYAG生成物の厚さにわたるライン走査を、エネルギー分散型x線検出器(EDS)によって行う。その結果を図4および表3に示す。図4の左のグラフは、Y、Al、OおよびNdについての走査の結果を示す。図4の右のグラフは、Ndについての走査を示す。
粉末をスラリーに加えるときに、Y2O3粉末のイットリウム含有量に基づいた0.5アトミック%のEr(Er(NO3)3・5H2O(Alfa Aesar、99.99%)の形態)を、ドーパントとして加えることを除いて実施例1の手順に従う。
実施例1の粉砕されたスラリーを、図5の装置の第1のリザーバーに入れる。ドーパントとして1at%のNdを含む実施例1の粉砕されたスラリーを、図5の装置の第2のリザーバーに入れる。実施例1の粉砕されたスラリーを、図5の装置の第3のリザーバーに入れる。スラリーを、20cm/分の速度にて実施例1で利用したキャリア上で0.35mmのドクターブレードのギャップで同時成形して、セグメント化された同時成形テープを生成する。セグメント化されたテープを25℃で乾燥して、乾燥テープを生成する。その乾燥テープを、25mm×25mmの寸法のピースに切断する。これらのピースのうちの50個を、テープのセグメントの各々が互いに正確な位置になる部分に積み重ねて、アセンブリを生成する。そのアセンブリを、5MPaおよび74℃で一軸加圧して、プレフォームを生成する。次いで、そのプレフォームを、20MPaおよび74℃で静水圧加圧する。次いで、得られたプレフォームを、実施例1の手順に従って、有機物を燃焼するために加熱し、10−3Torrの真空中で4時間、1700℃で燃焼する。得られた生成物を、8時間、200MPaのAr圧力下で1700℃にて熱間等静圧圧縮成形して、セグメント化された複合部分を生成する。
装置が4つの仕切板10を使用して5つのリザーバーを設けることを除いて、図5の装置を利用する。実施例1の粉砕されたスラリーを、第1および第5のリザーバーに入れる。ドーパントとして0.5%のErを含む実施例12の粉砕されたスラリーを、図5の装置内の第3のリザーバーに入れる。実施例12(0.25%のErを0.5%のErの代わりに置き換える)の粉砕されたスラリーを、図5の装置の第2および第4のリザーバーに入れる。そのスラリーを、20cm/分の速度にて実施例1で利用するキャリア上で0.35mmのドクターブレードのギャップで同時成形して、図6(a)に示すセグメント化された同時成形テープ40を生成する。そのセグメント化されたテープを25℃で乾燥して、セグメント42、44、46、48および50を有する乾燥テープを生成する。ここで、セグメント42および50はドープされていないYAGであり、セグメント46は0.5at%のErでドープされたYAGであり、セグメント44および48は、0.25at%のドープされたYAGである。
実施例1で生成される焼結されたYAGプレフォームを、4時間、200MPaのAr圧力下で1750℃にて熱間等静圧圧縮成形されることを除いて実施例1の手順に従う。
水性ベースのスラリーを生成することを除いて実施例1の手順に従う。
250mlの高密度ポリエチレンミルジャーを、5mm直径のアルミナ粉砕媒体で33.3%容量まで充填する。酸化メンハーデン魚油(1.40g、グレードZ−3、Tape Casting Warehouse)、無水キシレン(17.30g.J.T.Baker)変性エチルアルコール(17.30g、Pharmco)およびTEOS(0.35g、99.999+%金属成分、Alfa Aesar)をミルジャーに加える。Ce2O3粉末(Alfa Aesarから提供される99.9999%純度、5000ナノメートル直径)を、24時間、100℃で乾燥し、乾燥オーブンから熱い状態のままであるが、ミルジャーに加えて、混合物を生成する。粉末重量の合計は70.00gである。
Y2O3をCe2O3の代わりに置き換えることを除いて実施例16の手順に従う。次いで、緑色のプレフォームを、1900℃まで10℃/分で加熱しながら、10−3Torrの真空中で焼結し、6時間、1900℃に保持し、次いで、室温まで20℃/分で冷却する。
Sc2O3をCe2O3の代わりに置き換えることを除いて実施例16の手順に従う。次いで、緑色のプレフォームを、1800℃まで10℃/分で加熱しながら10−4Torrの真空中で焼結し、10時間、1800℃で保持し、次いで、室温まで20℃/分で冷却する。
Lu2O3をCe2O3の代わりに置き換えることを除いて実施例16の手順に従う。次いで、緑色のプレフォームを、1850℃まで10℃/分で加熱し、8時間、1850℃に保持しながら、10−3Torrの真空中で焼結し、次いで、室温まで20℃/分で冷却する。
250mlの高密度ポリエチレンミルジャーを、5mm直径のアルミナ粉砕媒体で33.3%容積容量まで充填する。酸化メンハーデン魚油(1.40g、グレードZ−3、Tape Casting Warehouse)、無水キシレン(17.30g.J.T.Baker)、変性エチルアルコール(17.30g、Pharmco)およびTEOS(0.35g、99.999+%金属成分、Alfa Aesar)をミルジャーに加える。MgO粉末(Sigma−Aldrichから提供される99.9999%純度、5000ナノメートル直径)およびAl2O3粉末(グレードAKP−50、99.999%純度、300ナノメートル直径、Sumitomo Chemical Company,Ltd.)を、24時間、100℃で乾燥し、乾燥オーブンから熱いままの状態でミルジャーに加えて、混合物を生成する。粉末は、1:1のモル比のAl2O3:MgOで利用する。粉末重量の合計は70.00gである。
0.3gのB2O3(99.98%、金属成分、Alfa Aesar)をTEOSの代わりに置き換えることを除いて実施例1の手順に従う。
Claims (19)
- 透明イットリウムアルミニウムガーネットの製造方法であって、
Y2O3、Al2O3、焼結助剤、分散剤および有機溶媒の混合物を形成する工程と、
前記混合物を粉砕して、第1のスラリーを生成する工程と、
前記第1のスラリーと、有機結合剤および可塑剤とを混合して、処理されたスラリーを形成する工程と、
前記処理されたスラリーを粉砕して、粉砕されたスラリーを生成する工程と、
前記粉砕されたスラリーをテープキャスティングして、成形テープを生成する工程と、
前記成形テープを乾燥して、乾燥テープを生成する工程と、
前記乾燥テープの一部を積み重ねて、アセンブリを形成する工程と、
前記アセンブリを圧縮して、プレフォームを生成する工程と、
前記プレフォームを加熱して、緑色のプレフォームを生成する工程と、
前記緑色のプレフォームを焼結して、透明イットリウムアルミニウムガーネットを生成する工程と、を含む方法。 - 前記焼結剤は、テトラエトキシシラン、コロイド状シリカ、酸化リチウム、酸化チタン、酸化ジルコニウム、酸化バリウム、酸化カルシウム、酸化マグネシウム、酸化ストロンチウム、酸化ホウ素、およびそれらの混合物からなる群より選択される、請求項1に記載の方法。
- 前記分散剤は、酸化メンハーデン魚油、コハク酸、エタン二酸、プロパン二酸、グルタル酸、ヘキサン二酸、ヘプタン二酸、オクタン二酸、ノナン二酸、デカン二酸、o−フタル酸、p−フタル酸、ソルビタンモノオレエート、およびそれらの混合物からなる群より選択される、請求項2に記載の方法。
- 前記有機結合剤は、ポリビニルブチラール、ポリビニルアルコール、ポリ塩化ビニル、ポリ酢酸ビニル、ポリアクリロニトリル、ポリエチレンイミン、ポリメタクリル酸メチル、塩化ビニル酢酸、およびそれらの混合物からなる群より選択される、請求項3に記載の方法。
- 前記可塑剤は、フタル酸ブチルベンジル、フタル酸ビス(2−エチルヘキシル)、フタル酸ジイソノニル、フタル酸ビス(n−ブチル)、フタル酸ブチルベンジル、フタル酸ジイソデシル、フタル酸ジ−n−オクチル、フタル酸ジイソオクチル、フタル酸ジエチル、フタル酸ジイソブチル、フタル酸ジ−n−ヘキシル、アジピン酸ビス(2−エチルヘキシル)、アジピン酸ジメチル、アジピン酸モノメチル、アジピン酸ジオクチル、セバシン酸ジブチル、マレイン酸ジブチル、ポリエチレングリコール、ポリプロピレングリコール、N−エチルトルエンスルホンアミド、N−(2−ヒドロキシプロピル)ベンゼンスルホンアミド、N−(n−ブチル)ベンゼンスルホンアミド、リン酸トリクレジル、リン酸トリブチル、トリエチレングリコールジヘキサノエート、テトラエチレングリコールジヘプタノエート、クエン酸トリエチル、クエン酸アセチルトリエチル、クエン酸トリブチル、クエン酸アセチルトリブチル、クエン酸トリオクチル、クエン酸アセチルトリオクチル、クエン酸トリヘキシル、クエン酸アセチルトリヘキシル、クエン酸ブチリルトリヘキシル、クエン酸トリメチル、アルキルスルホン酸フェニルエステル、およびそれらの混合物からなる群より選択される、請求項4に記載の方法。
- 前記有機溶媒は、変性エタノール、メタノール、イソプロピルアルコールおよびキシレン、シクロヘキサノン、アセトン、トルエン、メチルエチルケトン、およびそれらの混合物からなる群より選択される、請求項2に記載の方法。
- 前記圧縮は、約5MPa〜約30MPaの圧力で行われる、請求項2に記載の方法。
- 前記焼結は、約1600℃〜約1900℃で行われる、請求項2に記載の方法。
- 前記焼結助剤は、Y2O3およびAl2O3の全重量に基づいて約0.01wt%〜約5wt%である、請求項1に記載の方法。
- 前記混合物は、La3+、Ce3+、Pr3+、Nd3+、Pm3+、Sm3+、Eu3+、Gd3+、Tb3+、Dy3+、Ho3+、Er3+、Tm3+、Yb3+、Lu3+、およびそれらの混合物からなる群より選択される希土類ドーパントをさらに含む、請求項1に記載の方法。
- 前記混合物は、Nd3+、Er3+、およびそれらの混合物からなる群より選択される希土類ドーパントをさらに含む、請求項1に記載の方法。
- 前記焼結助剤はテトラエトキシシランであり、前記分散剤は酸化メンハーデン魚油であり、前記有機結合剤はポリビニルブチラールであり、前記可塑剤はフタル酸ブチルベンジルであり、前記有機溶媒は変性エタノールおよびキシレンを含み、前記焼結は真空下で行われる、請求項11に記載の方法。
- 透明セラミック酸化材料を形成する方法であって、
セラミック酸化物、分散剤および有機溶媒の混合物を形成する工程と、
前記混合物を粉砕して、第1のスラリーを生成する工程と、
前記第1のスラリーと、有機結合剤および可塑剤とを混合して、処理されたスラリーを形成する工程と、
前記処理されたスラリーを粉砕して、粉砕されたスラリーを生成する工程と、
前記粉砕されたスラリーをテープキャスティングして、成形テープを生成する工程と、
前記成形テープを乾燥して、乾燥テープを生成する工程と、
前記乾燥テープの一部を積み重ねて、アセンブリを形成する工程と、
前記アセンブリを圧縮して、プレフォームを生成する工程と、
前記プレフォームを加熱して、緑色のプレフォームを生成する工程と、
前記緑色のプレフォームを焼結して、透明セラミック酸化材料を生成する工程と、を含む方法。 - 前記セラミック酸化物は、Al2O3、酸化インジウム、酸化タリウム、ケイ素アルミニウム酸窒化物、イットリウムアルミニウムガーネット、酸化セリウム、酸化イットリウム、酸化スカンジウム、酸化ルテチウム、マグネシウムアルミニウムスピネル、酸化ジルコニウム、およびそれらの混合物からなる群より選択される、請求項13に記載の方法。
- 透明セラミックセグメント化テープを形成する方法であって、
異なる組成の複数の粉砕されたスラリーを形成する工程であって、前記粉砕されたスラリーのうちの少なくとも1つは、セラミック酸化物、分散剤および溶媒の混合物を形成することにより作製される工程と、
前記混合物を粉砕して、第1のスラリーを生成する工程と、
前記第1のスラリーと、結合剤および可塑剤とを混合して、処理されたスラリーを形成する工程と、
前記処理されたスラリーを粉砕して、粉砕されたスラリーを形成する工程と、
前記粉砕されたスラリーを、キャリア上で前記粉砕されたスラリーの各々を同時成形するのに適したドクターブレード装置内付近のリザーバーに堆積させて、セグメント間に接触面を有する複数のテープキャストのセグメントを形成して、セグメント化成形テープを生成する工程と、
前記成形テープを乾燥して、乾燥テープを生成する工程と、
前記乾燥テープの一部を積み重ねて、アセンブリを形成する工程と、
前記アセンブリを圧縮して、プレフォームを生成する工程と、
前記プレフォームを加熱して、緑色のプレフォームを生成する工程と、
前記緑色のプレフォームを焼結して、透明セラミックセグメント化テープを生成する工程と、を含む方法。 - 前記粉砕されたスラリーのうちの少なくとも1つは、Y2O3およびAl2O3の混合物を含む、請求項15に記載の方法。
- 前記粉砕されたスラリーのうちの少なくとも1つは、Y2O3、Al2O3およびドーパントの混合物を含む、請求項15に記載の方法。
- 生成物の厚さの一部にわたるドーパント勾配を有する透明セラミック生成物を形成する方法であって、
異なる組成の複数の粉砕されたスラリーを形成する工程であって、前記粉砕されたスラリーのうちの少なくとも1つは、セラミック酸化物、ドーパント、分散剤および溶媒の混合物を形成することにより作製される工程と、
前記混合物を粉砕して、複数の第1のスラリーを生成する工程と、
前記第1のスラリーのうちの少なくとも1つと、結合剤および可塑剤とを混合して、処理されたスラリーを形成する工程と、
前記処理されたスラリーを粉砕して、粉砕されたスラリーを形成する工程と、
前記粉砕されたスラリーをテープキャスティングして、異なる組成の複数の成形テープを生成する工程と、
前記成形テープを乾燥して、異なる組成の乾燥テープを生成する工程と、
前記乾燥テープの一部を積み重ねて、前記乾燥テープの複数のアセンブリの厚さを形成する工程と、
前記アセンブリを圧縮して、プレフォームを生成する工程と、
前記プレフォームを加熱して、緑色のプレフォームを生成する工程と、
前記緑色のプレフォームを焼結して、厚さおよび前記セラミック生成物の前記厚さの一部にわたってドーパント勾配を有する透明セラミック生成物を生成する工程と、を含む方法。 - 前記ドーパントは、Nd3+、Er3+、およびそれらの混合物からなる群より選択される希土類ドーパントである、請求項18に記載の方法。
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WO2009038674A3 (en) | 2009-06-18 |
CN101855187A (zh) | 2010-10-06 |
WO2009038674A2 (en) | 2009-03-26 |
US20090108507A1 (en) | 2009-04-30 |
JP4805410B2 (ja) | 2011-11-02 |
US7799267B2 (en) | 2010-09-21 |
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